CN207263772U - 一种具有柔性铰链结构的mems扭摆式加速度计 - Google Patents
一种具有柔性铰链结构的mems扭摆式加速度计 Download PDFInfo
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- CN207263772U CN207263772U CN201721116118.6U CN201721116118U CN207263772U CN 207263772 U CN207263772 U CN 207263772U CN 201721116118 U CN201721116118 U CN 201721116118U CN 207263772 U CN207263772 U CN 207263772U
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107356785A (zh) * | 2017-09-01 | 2017-11-17 | 北方电子研究院安徽有限公司 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
CN114578094A (zh) * | 2022-02-28 | 2022-06-03 | 湖南天羿领航科技有限公司 | 一种高过载扭摆式硅微加速度计及其制备方法 |
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2017
- 2017-09-01 CN CN201721116118.6U patent/CN207263772U/zh not_active Withdrawn - After Issue
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107356785A (zh) * | 2017-09-01 | 2017-11-17 | 北方电子研究院安徽有限公司 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
CN107356785B (zh) * | 2017-09-01 | 2023-10-13 | 安徽北方微电子研究院集团有限公司 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
CN114578094A (zh) * | 2022-02-28 | 2022-06-03 | 湖南天羿领航科技有限公司 | 一种高过载扭摆式硅微加速度计及其制备方法 |
CN114578094B (zh) * | 2022-02-28 | 2024-04-02 | 湖南天羿领航科技有限公司 | 一种高过载扭摆式硅微加速度计及其制备方法 |
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Effective date of registration: 20191125 Address after: 233040 Anhui province Bengbu City Choi Road No. 10 Co-patentee after: ANHUI BEIFANG XINDONG LIANKE MICROSYSTEM TECHNOLOGY CO.,LTD. Patentee after: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Address before: 233040 Anhui province Bengbu City Choi Road No. 10 Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Patentee after: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Patentee after: Anhui Xindong Lianke microsystem Co.,Ltd. Address before: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Patentee before: ANHUI BEIFANG XINDONG LIANKE MICROSYSTEM TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Patentee after: Anhui Xindong Lianke microsystem Co.,Ltd. Address before: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Patentee before: Anhui Xindong Lianke microsystem Co.,Ltd. |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180420 Effective date of abandoning: 20231013 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180420 Effective date of abandoning: 20231013 |