CN107356785A - 一种具有柔性铰链结构的mems扭摆式加速度计 - Google Patents
一种具有柔性铰链结构的mems扭摆式加速度计 Download PDFInfo
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- CN107356785A CN107356785A CN201710780370.5A CN201710780370A CN107356785A CN 107356785 A CN107356785 A CN 107356785A CN 201710780370 A CN201710780370 A CN 201710780370A CN 107356785 A CN107356785 A CN 107356785A
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- flexible hinge
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- bottom electrode
- shaped flexible
- mems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
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CN201710780370.5A CN107356785B (zh) | 2017-09-01 | 2017-09-01 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
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CN201710780370.5A CN107356785B (zh) | 2017-09-01 | 2017-09-01 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
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CN107356785A true CN107356785A (zh) | 2017-11-17 |
CN107356785B CN107356785B (zh) | 2023-10-13 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109001490A (zh) * | 2018-06-22 | 2018-12-14 | 中国人民解放军国防科技大学 | 一种高灵敏度扭摆式硅微加速度计及其制备方法 |
CN109444465A (zh) * | 2018-12-29 | 2019-03-08 | 深迪半导体(上海)有限公司 | 一种加速度计 |
CN109856423A (zh) * | 2019-02-28 | 2019-06-07 | 武汉理工大学 | 基于柔性铰链的三维fbg加速度计及其制造工艺 |
CN112834783A (zh) * | 2020-12-31 | 2021-05-25 | 中国电子科技集团公司第十三研究所 | 微机械检测结构及mems惯性测量器件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0691542A1 (en) * | 1994-06-29 | 1996-01-10 | Texas Instruments Incorporated | Improved accelerometers |
CN105137120A (zh) * | 2015-09-01 | 2015-12-09 | 中国人民解放军国防科学技术大学 | 一种v形梁扭摆式单轴微机械加速度计及其制备方法 |
CN207263772U (zh) * | 2017-09-01 | 2018-04-20 | 北方电子研究院安徽有限公司 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
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2017
- 2017-09-01 CN CN201710780370.5A patent/CN107356785B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0691542A1 (en) * | 1994-06-29 | 1996-01-10 | Texas Instruments Incorporated | Improved accelerometers |
CN105137120A (zh) * | 2015-09-01 | 2015-12-09 | 中国人民解放军国防科学技术大学 | 一种v形梁扭摆式单轴微机械加速度计及其制备方法 |
CN207263772U (zh) * | 2017-09-01 | 2018-04-20 | 北方电子研究院安徽有限公司 | 一种具有柔性铰链结构的mems扭摆式加速度计 |
Non-Patent Citations (1)
Title |
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李源;陈李;田颖;赵斌;王亚运;: "一种具有应力隔离结构的扭摆式电容加速度计" * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109001490A (zh) * | 2018-06-22 | 2018-12-14 | 中国人民解放军国防科技大学 | 一种高灵敏度扭摆式硅微加速度计及其制备方法 |
CN109001490B (zh) * | 2018-06-22 | 2021-02-26 | 中国人民解放军国防科技大学 | 一种高灵敏度扭摆式硅微加速度计及其制备方法 |
CN109444465A (zh) * | 2018-12-29 | 2019-03-08 | 深迪半导体(上海)有限公司 | 一种加速度计 |
CN109856423A (zh) * | 2019-02-28 | 2019-06-07 | 武汉理工大学 | 基于柔性铰链的三维fbg加速度计及其制造工艺 |
CN109856423B (zh) * | 2019-02-28 | 2021-06-04 | 武汉理工大学 | 基于柔性铰链的三维fbg加速度计及其制造工艺 |
CN112834783A (zh) * | 2020-12-31 | 2021-05-25 | 中国电子科技集团公司第十三研究所 | 微机械检测结构及mems惯性测量器件 |
CN112834783B (zh) * | 2020-12-31 | 2022-09-13 | 中国电子科技集团公司第十三研究所 | 微机械检测结构及mems惯性测量器件 |
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CN107356785B (zh) | 2023-10-13 |
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Address after: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Applicant after: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Applicant after: Anhui Xindong Lianke microsystem Co.,Ltd. Address before: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Applicant before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Applicant before: ANHUI BEIFANG XINDONG LIANKE MICROSYSTEM TECHNOLOGY Co.,Ltd. |
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Address after: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Applicant after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Applicant after: Anhui Xindong Lianke microsystem Co.,Ltd. Address before: 233040 No.10 Caiyuan Road, Bengbu City, Anhui Province Applicant before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. Applicant before: Anhui Xindong Lianke microsystem Co.,Ltd. |
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