CN207262047U - A kind of spy's gas pipeline - Google Patents
A kind of spy's gas pipeline Download PDFInfo
- Publication number
- CN207262047U CN207262047U CN201721172883.XU CN201721172883U CN207262047U CN 207262047 U CN207262047 U CN 207262047U CN 201721172883 U CN201721172883 U CN 201721172883U CN 207262047 U CN207262047 U CN 207262047U
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- China
- Prior art keywords
- concentration
- gas
- special gas
- control
- special
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
A kind of special gas pipeline is the utility model is related to, including multiple special gas trap door rods, valve lever are arranged in connection control cabinet；Delivery pipe extends out of valve control box to outside, and the end of delivery pipe is connected with gas consumption terminal；Gas leak detection device and gas leakage concentration monitoring device are provided with the connection control cabinet, goes back packet control apparatus and exhaust apparatus, control device exhaust apparatus work according to the feedback control of gas leak detection device inspection and concentration monitoring device；Above-mentioned technical proposal can realize the function of the special gas of automatic detection.
Description
Technical field
The utility model belongs to gas delivery art, is related to a kind of special letter shoot line.
Background technology
For special gas in electronics and semiconductor applications extensive use, it can be during electronic product machining, for example, wafer adds
Play the role of special chemical technology during work；Such as etching or formation corrosion protecting coating, it is present integrated circuit neck
Domain, indispensable production and processing raw material；However, it is many spy gas, highly corrosive, high inflammability, it is highly toxic the features such as, need
Stringent management and control are carried out to the storage of special gas and conveying.General spy's gas can be stored in the Bottle ＆ Can of high pressure, if special
Gas, during use, due to reasons such as line bursts, leaks, consequence will be hardly imaginable；Therefore the utility model
Aim to provide a kind of special gas transmission control box, certain safety measure can be taken when special gas leaks.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of special gas pipeline, including multiple special gas valves
Bar, valve lever are arranged in connection control cabinet；Delivery pipe extends out of valve control box to outside, the end of delivery pipe and gas consumption
Terminal connects；Be provided with gas leak detection device and gas leakage concentration monitoring device in the connection control cabinet, go back packet control apparatus and
Exhaust apparatus, the control device are vented dress according to the feedback control of gas leak detection device inspection and concentration monitoring device
Put work.
Preferably, the gas leak detection device includes the pressure gauge being arranged on the valve lever, when the pressure of pressure gauge
Fluctuation more than setting threshold value when, it is to control device feedback pressure fluctuation signal.
Preferably, the control device receives and detects special gas by concentration monitoring device after the Pressure Fluctuation Signal
Concentration.
Preferably, the control device includes programmable logic controller (PLC).
Preferably, the concentration monitoring device includes multiple concentration monitor sensors, and each concentration sensor corresponds to detection
Different types of spy's gas.
Preferably, each concentration monitor sensor is read one by one during control device detection spy's gas concentration to detect
Concentration data.
Preferably, controller control institute when the concentration that any concentration detection sensor detects is more than the threshold value of setting
State exhaust apparatus work.
The utility model is relative to the progress of the prior art, and control cabinet can detect the concentration of special gas, and in the presence of
When the concentration detected reaches set threshold value, control device can control exhaust apparatus to be exhausted, with the dense of low stunt
Degree；Control device is wanted at the same time, is also connected with pressure-detecting device, when the fluctuation of pressure-detecting device exceedes threshold value, just opens
Dynamic spy's gas detection device can reduce the possibility of missing inspection or flase drop.
Brief description of the drawings
Fig. 1 is the utility model spy's gas pipeline schematic diagram.
Fig. 2 is the control device module diagram in the utility model spy's gas control cabinet.
Embodiment
Below in conjunction with attached drawing, to the technical solution of the utility model, specifically full and accurate explanation is done, it is necessary to which explanation is
Embodiment, is only that the utility model preferred embodiment is to help, skilled artisan understands that practical new
The technical solution of type；The technical solution of the utility model is not to be construed as the limitation to scope of protection of the utility model, this practicality
New protection domain should be subject to claims.
A kind of spy's gas pipeline 100 shown in Fig. 1, including multiple special gas trap door rods 11 are refer to, the valve lever 11 is direct
With special source of the gas（Non- schematic diagram in figure）Connection, general spy's source of the gas is the cylinder bottle being arranged in special special gas room.Valve lever 11 is set
Put in connection control cabinet 1, be provided with forcing press 12 and control valve 13 on valve rod 11, the gas in valve rod 11 is along in figure
The direction circulation of arrow F instructions；The valve lever 11 is arranged on 1 inside control cabinet, and the outside of control cabinet 1 is provided with delivery pipe 2,
Delivery pipe 2 extends out of valve control box 1 to outside, and the gas of output in the valve rod 11 is transported to gas consumption end by delivery pipe 2
On end 3, the end of delivery pipe 2 is connected with gas consumption terminal 3, and the gas consumption terminal 3 is electronic product or semiconductor crystal wafer processingization
/ physical technology processing equipment, such as dry etching flow processing equipment (DETPC)；
Control device 1 is provided with the control cabinet, control device 1 connects exhaust apparatus 43, and the exhaust apparatus 43 is set
One jiao in control cabinet 1 is put, and is directly connected to outside atmosphere, exhaust apparatus 43 is used to reduce special in the valve control box 1
The concentration of gas.
Preferably, the control device 42 includes programmable logic controller (PLC) or other embedded programmable devices, such as
Siemens Industry Control PLC.
Fig. 2 is refer to, gas leak detection device 41 and gas leakage concentration monitoring device 44 are provided with the connection control cabinet 1,
The gas leak detection device 41 is used to detect whether the special gas is revealed, and the gas leak detection device 41 includes being arranged on institute
The pressure gauge 12 on valve lever is stated, when the pressure oscillation of pressure gauge 12 exceedes the threshold value of setting, it feeds back to control device 42
Pressure Fluctuation Signal.When the fluctuation signal is more than the threshold value of setting, control device 42 detects spy by concentration monitoring device 41
The concentration of gas.When the concentration for the special gas that the detection device detects is more than threshold value, the control device 42 starts the exhaust
Device 43, exhaust apparatus 43 are extracted in control cabinet 1 air out to reduce the concentration of special gas,
Preferably, the control device can receive a variety of concentration monitor data, the corresponding concentration detection apparatus 44
Including multiple concentration monitor sensors, each concentration sensor corresponds to the different types of special gas of detection.Control device 42 detects spy
The concentration data that each concentration monitor sensor detects is read during gas concentration one by one, and judges its concentration numbers detected
According to whether being more than specific threshold value.
The utility model is relative to the progress of the prior art, and control cabinet can detect the concentration of special gas, and in the presence of
When the concentration detected reaches set threshold value, control device can control exhaust apparatus to be exhausted, with the dense of low stunt
Degree；Control device is wanted at the same time, is also connected with pressure-detecting device, when the fluctuation of pressure-detecting device exceedes threshold value, just opens
Dynamic spy's gas detection device can reduce the possibility of missing inspection or flase drop.
Claims (7)
1. a kind of spy's gas pipeline, it is characterised in that including multiple special gas trap door rods, valve lever is arranged on connection control cabinet
It is interior；Delivery pipe extends out of valve control box to outside, and the end of delivery pipe is connected with gas consumption terminal；In the connection control cabinet
Be provided with gas leak detection device and gas leakage concentration monitoring device, go back packet control apparatus and exhaust apparatus, the control device according to
Exhaust apparatus work described in the feedback control of the gas leak detection device inspection and concentration monitoring device.
2. a kind of special gas pipeline as claimed in claim 1, the gas leak detection device include being arranged on the valve lever
Pressure gauge, when the pressure oscillation of pressure gauge exceedes the threshold value of setting, it is to control device feedback pressure fluctuation signal.
3. a kind of special gas pipeline as claimed in claim 2, the control device lead to after receiving the Pressure Fluctuation Signal
The concentration of the special gas of over-richness monitoring device detection.
4. a kind of special gas pipeline as claimed in claim 3, the control device include programmable logic controller (PLC).
5. a kind of special gas pipeline as claimed in claim 3, the concentration monitoring device include multiple concentration monitor sensors,
Each concentration sensor corresponds to the different types of special gas of detection.
6. a kind of special gas pipeline as claimed in claim 5, the control device reads each one by one when detecting special gas concentration
The concentration data that the concentration monitor sensor detects.
7. a kind of special gas pipeline as claimed in claim 6, the concentration that any concentration detection sensor detects are more than
Controller controls the exhaust apparatus work during threshold value of setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721172883.XU CN207262047U (en) | 2017-09-14 | 2017-09-14 | A kind of spy's gas pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721172883.XU CN207262047U (en) | 2017-09-14 | 2017-09-14 | A kind of spy's gas pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207262047U true CN207262047U (en) | 2018-04-20 |
Family
ID=61920735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721172883.XU Active CN207262047U (en) | 2017-09-14 | 2017-09-14 | A kind of spy's gas pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207262047U (en) |
-
2017
- 2017-09-14 CN CN201721172883.XU patent/CN207262047U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A special gas transmission line Effective date of registration: 20220211 Granted publication date: 20180420 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi Binhu branch Pledgor: WUXI EVERGRAND ELECTRONIC SCIENTIFIC TECHNOLOGY CO.,LTD. Registration number: Y2022320010065 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230522 Granted publication date: 20180420 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi Binhu branch Pledgor: WUXI EVERGRAND ELECTRONIC SCIENTIFIC TECHNOLOGY CO.,LTD. Registration number: Y2022320010065 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |