CN207250475U - Wafer Cleaning frame - Google Patents
Wafer Cleaning frame Download PDFInfo
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- CN207250475U CN207250475U CN201721241832.8U CN201721241832U CN207250475U CN 207250475 U CN207250475 U CN 207250475U CN 201721241832 U CN201721241832 U CN 201721241832U CN 207250475 U CN207250475 U CN 207250475U
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- cleaning
- silicon chip
- basket
- frame
- cleaning basket
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Abstract
The utility model discloses a kind of Wafer Cleaning frame, it is related to silicon chip cleaning device technical field, including the cleaning basket that can be placed into ultrasonic cleaning pond, several silicon chip rest areas are set in the cleaning basket, the silicon chip rest area is up and down open-like shape, supporting table is equipped between adjacent silicon chip rest area, the convex eaves in cleaning basket both sides for holding silicon chip can be placed at supporting table, the cleaning basket for holding silicon chip is supported using supporting table, can be by cleaning basket support sky in cleaning basket, cleaning basket is placed in the silicon chip rest area of open-like shape, silicon chip in cleaning basket is set to be placed in the cleaning solution in ultrasonic cleaning pond, silicon chip can be cleaned using ultra-high frequency ultrasonic wave, service sink bottom ultrasonic wave is set preferably to be applied to silicon chip surface, improve the cleanliness factor of Wafer Cleaning, it ensure that Wafer Cleaning quality.
Description
Technical field
It the utility model is related to silicon chip cleaning device technical field, more particularly to a kind of Wafer Cleaning frame.
Background technology
With the development of large scale integrated circuit, the continuous improvement of integrated level, the continuous reduction of line width, to the quality of silicon chip
It is required that it is also higher and higher, it is particularly more and more tighter to the surface quality requirements of silicon chip.This is primarily due in silicon wafer polishing face
Grain and metal impurities stain the quality and yield rate that can seriously affect device.In current integrated circuit production, Wafer Cleaning
It is not thorough, may scraps whole silicon chips, or the device performance manufactured is inferior, stability and reliability are very poor.
At present, Wafer Cleaning uses physical cleaning method more.First, scrub or scouring：The particle that can remove silicon chip surface is dirty
Dye and most of films being sticked on silicon chip, but if misoperation can produce cut in silicon chip surface and influence silicon chip surface
Quality, and work efficiency is low, and labor intensity is larger.Second, high-pressure wash：It is not likely to produce and draws by jet-action cleaning silicon chip
Trace and damage, but high-pressure injection can produce electrostatic interaction.Third, using ultrasonic cleaning, ultrasonic wave energy is passed to solution, by cavitation erosion
The pollutant on silicon chip is washed in effect off.It is but relatively difficult, it is necessary to pass through if the particle on silicon chip less than 1 micron is removed
Improving ultrasonic frequency could remove, and existing cleaning equipment is unreasonable due to designing, and the cleaning basket for holding silicon chip is to place
On steel wire, if improve ultrasonic frequency, cleaning basket can vibrate aggravation, silicon chip can be caused to damage on the contrary, intelligently with compared with
Low frequency is cleaned.
Utility model content
The utility model is to provide a kind of Wafer Cleaning frame, it is intended to solves the above-mentioned ultrasonic cleaning frequency of raising in the prior art
Rate can cause silicon chip the technical problem of damage.
In order to solve the above technical problems, technical solution adopted in the utility model is：
A kind of Wafer Cleaning frame, including the cleaning basket that can be placed into ultrasonic cleaning pond, if being set in the cleaning basket
Dry silicon chip rest area, the silicon chip rest area is up and down open-like shape, supporting table is equipped between adjacent silicon chip rest area, for holding
The convex eaves in cleaning basket both sides of silicon chip can be placed in supporting table.
Preferably, the silicon chip rest area be disposed in parallel in cleaning basket inner space in, the supporting table for several,
And it is arranged on silicon chip rest area both sides.
Preferably, the cleaning basket is rectangular frame structure, and four sides for cleaning basket are including upper side frame and below
Frame, the upper side frame are fixedly linked with the corresponding four corners position of lower frame by column, the left and right ends of the supporting table with it is clear
The left and right sides upper side frame for washing basket is fixedly linked.
Preferably, horizontal be equipped with intersects connected cross reinforcing and longitudinal direction between the corresponding lower frame in the cleaning basket bottom
Reinforcing rib, cross reinforcing and the waling end are welded and fixed with surrounding lower frame respectively, and the supporting table corresponds to
It is arranged on above cross reinforcing.
Preferably, the supporting table includes horizontal bracket and lower support bar, and the bracket is rectangular for middle part hollow out
Shape, the bracket is two or more and transversely reinforcing rib length direction is arranged at intervals, on the left and right sides of the cleaning basket
Frame is connected by upper connecting rod with bracket short side；The lower support bar upper end is connected with the short side of bracket, lower end with it is horizontal
It is fixedly linked to reinforcing rib；Distance is less than cleaning basket width between adjacent bracket.
Preferably, end bracket is equipped with the inside of the front and rear sides upper side frame of the cleaning basket, the end bracket is middle part
The rectangle of hollow out, the end bracket short side width are the half of bracket short side.
Preferably, vertical stiffeners are equipped between the left and right sides upper side frame and lower frame of the cleaning basket.
Preferably, more than two handles are equipped with outside the front and rear sides of the cleaning basket.
Preferably, the handle is fixed on a mounting board, and the installing plate both sides are weldingly fixed in upright bar, the upright bar
Upper and lower ends are welded and fixed with upper side frame, lower frame respectively.
Preferably, be equipped with floor below the handle, the floor both ends are fixedly linked with column, the floor middle part and
Upright bar is welded and fixed.
It is using beneficial effect caused by above-mentioned technical proposal：Compared with prior art, the utility model passes through silicon
The supporting table of piece rest area both sides is supported the cleaning basket for holding silicon chip, can be by cleaning basket support sky in cleaning basket, cleaning
Basket is placed in the silicon chip rest area of open-like shape, silicon chip in cleaning basket is placed in the cleaning solution in ultrasonic cleaning pond, Neng Gouli
Silicon chip is cleaned with ultra-high frequency ultrasonic wave, service sink bottom ultrasonic wave is preferably applied to silicon chip surface, improves silicon
The cleanliness factor of piece cleaning, ensure that Wafer Cleaning quality.
Brief description of the drawings
Fig. 1 is a kind of structure diagram for Wafer Cleaning frame that the utility model embodiment provides；
Fig. 2 is the use state diagram of Wafer Cleaning frame in Fig. 1；
In figure：1- silicon chips rest area, 2- supporting tables, 3- cleaning baskets, 4- upper side frames, 5- lower frames, 6- columns, 7- laterally add
Strengthening tendons, 8- walings, 9- brackets, 10- lower support bars, 11- upper connecting rods, 12- end brackets, 13- vertical stiffeners,
14- handles, 15- installing plates, 16- upright bars, the horizontal risers of 17-.
Embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and specifically
Embodiment, is described in further detail the utility model.It should be appreciated that specific embodiment described herein only to
Explain the utility model, be not used to limit the utility model.
Please refer to Fig.1 and Fig. 2, a kind of Wafer Cleaning frame provided by the utility model, including can be placed into ultrasonic wave clear
Cleaning basket in wash pool, sets several silicon chip rest areas 1 in the cleaning basket, and the silicon chip rest area is open-like shape about 1, phase
Supporting table 2 is equipped between adjacent silicon chip rest area 1, the convex eaves in 3 both sides of cleaning basket for holding silicon chip can be placed at supporting table 2.
The utility model is supported the cleaning basket for holding silicon chip by the supporting table of silicon chip rest area both sides, can be by clearly
Washing basket is maked somebody a mere figurehead in cleaning basket, and cleaning basket is placed in the silicon chip rest area of lower open mouth, can utilize ultra-high frequency ultrasonic wave to silicon
Piece is cleaned, and service sink bottom ultrasonic wave is preferably applied to silicon chip surface, improves the cleanliness factor of Wafer Cleaning, is ensured
The cleaning quality of silicon chip, reduces rework rate, and then improves cleaning efficiency.
As shown in Figure 1, the silicon chip rest area 1 is disposed in parallel in the inner space of cleaning basket, if the supporting table 2 is
Dry and it is arranged on 1 both sides of silicon chip rest area.
In order to meet light-weight design requirement, while it is also convenient for making, the cleaning basket is rectangular frame structure, described
Four sides of cleaning basket include upper side frame 4 and lower frame 5, and the upper side frame 4 passes through column with the corresponding four corners position of lower frame 5
6 are fixedly linked, and the left and right ends of the supporting table 2 are fixedly linked with cleaning the left and right sides upper side frame 4 of basket.Wherein, upper side frame,
Lower frame and column select stainless steel materials in the tube or stainless steel bar to cut and be welded.
In order to improve the intensity of cleaning basket, horizontal be equipped with intersects what is be connected between the corresponding lower frame 5 in the cleaning basket bottom
Cross reinforcing 7 and waling 8,8 end of cross reinforcing 7 and waling are welded with surrounding lower frame 5 respectively
Fixation is connect, the supporting table 2 is correspondingly arranged at the top of cross reinforcing 7.Wherein, the height of column is more than the height of cleaning basket,
Cleaning basket is maked somebody a mere figurehead in supporting table, avoid cleaning basket bottom from directly being connect with lower section cross reinforcing and waling
Touch.The cleaning basket for holding silicon chip is placed in bottom wire mesh support by cleaning framework before relatively, can be using this structure
The vibration of cleaning basket is reduced during ultrasonic cleaning, and then cleaning motor spindle ultrasonic wave is preferably applied to silicon chip surface,
Improve the cleanliness factor and serviceability rate of Wafer Cleaning.
Wherein, the supporting table 2 includes horizontal bracket 9 and lower support bar 10, and the bracket 9 is the length of middle part hollow out
Square, the bracket 9 is two or more and transversely 7 length direction of reinforcing rib is arranged at intervals, the left and right two of the cleaning basket
Side upper side frame 4 is connected by upper connecting rod 11 with 9 short side of bracket；10 upper end of lower support bar and the short side phase of bracket 9
Even, lower end and cross reinforcing 7 are fixedly linked；Distance is less than cleaning 3 width of basket between adjacent bracket 9.Can using the structure
Mitigate weight, also reduce materials'use amount, handling cleaning basket is more convenient using the gap between adjacent bracket.
In addition, the inner side of front and rear sides upper side frame 4 of the cleaning basket is equipped with end bracket 12, during the end bracket 12 is
The rectangle of portion's hollow out, the 12 short side width of end bracket are the half of 9 short side of bracket, can be met before and after cleaning basket
The placement of the cleaning basket of both sides.
As further preferred solution, it is equipped between the left and right sides upper side frame 4 and lower frame 5 of the cleaning basket vertical
Reinforcing rib 13, can further improve the integral strength of cleaning basket.
In order to facilitate the handling of cleaning basket, more than two handles are equipped with outside the front and rear sides of the cleaning basket
14.Wherein, the handle 14 is fixed on installing plate 15, and 15 both sides of installing plate are weldingly fixed in upright bar 16, described vertical
16 upper and lower ends of bar are welded and fixed with upper side frame 4, lower frame 5 respectively.
In addition, the handle end is contacted with ultrasonic cleaning pond inner wall.Cleaning basket can be made certainly using this structure
More steadily it is placed in ultrasonic cleaning pond under the effect of body weight, avoids cleaning basket from shaking in cleaning process, at the same time
More easily tilted basket can be carried using handle.
In order to further reinforce cleaning basket, the lower section of handle 14 is equipped with floor 17, and 17 both ends of floor are solid with column 6
Fixed to be connected, the middle part of floor 17 is welded and fixed with upright bar 16.
Wherein, formed in Wafer Cleaning frame in addition to floor and installing plate by stainless steel tube welding production.
In conclusion the utility model has the advantages that simple in structure, easy to operate, Wafer Cleaning effect is good, will hold
The cleaning basket support sky of silicon chip is placed into the supporting table in cleaning basket, and cleaning basket is only through the convex eaves in both sides and is contacted with cleaning basket,
Reduce vibration of the silicon chip in cleaning basket, ensure that serviceability rate of the silicon chip in cleaning process.The ultrasound of original cleaning equipment
The dynamics of ripple is E=38, and ultrasonic wave dynamics can lift E=58 after transformation, by the resistance that steel wire is removed in cleaning basket bottom
Every ultrasonic intensity is substantially improved, therefore the cleaning performance of silicon chip is especially prominent.
Specific case used herein is set forth the principle and embodiment of the utility model, above example
Explanation be only intended to help to understand the method and its core concept of the utility model.It should be pointed out that for the art
For those of ordinary skill, on the premise of the utility model principle is not departed from, some change can also be carried out to the utility model
Into and modification, these improve and modification also fall into the protection domain of the utility model claims.
Claims (10)
- A kind of 1. Wafer Cleaning frame, it is characterised in that：Including the cleaning basket that can be placed into ultrasonic cleaning pond, the cleaning Several silicon chip rest areas are set in basket, the silicon chip rest area is up and down open-like shape, and supporting table is equipped between adjacent silicon chip rest area, The convex eaves in cleaning basket both sides for holding silicon chip can be placed at supporting table.
- 2. Wafer Cleaning frame according to claim 1, it is characterised in that：The silicon chip rest area is disposed in parallel in cleaning basket Inner space in, the supporting table is several and is arranged on silicon chip rest area both sides.
- 3. Wafer Cleaning frame according to claim 1, it is characterised in that：The cleaning basket is rectangular frame structure, institute Stating four sides of cleaning basket includes upper side frame and lower frame, and the upper side frame is consolidated with the corresponding four corners position of lower frame by column Fixed to be connected, the left and right ends of the supporting table are fixedly linked with cleaning the left and right sides upper side frame of basket.
- 4. Wafer Cleaning frame according to claim 3, it is characterised in that：The water between cleaning the corresponding lower frame in basket bottom Flat be equipped with intersects connected cross reinforcing and waling, and cross reinforcing and the waling end is respectively with four All lower frames are welded and fixed, and the supporting table is correspondingly arranged above cross reinforcing.
- 5. Wafer Cleaning frame according to claim 4, it is characterised in that：The supporting table includes horizontal bracket and lower branch Strut, the bracket are the rectangle of middle part hollow out, and the bracket is two or more and transversely reinforcing rib length direction It is arranged at intervals, the left and right sides upper side frame of the cleaning basket is connected by upper connecting rod with bracket short side；The lower support bar Upper end is connected with the short side of bracket, lower end and cross reinforcing are fixedly linked；It is wide to be less than cleaning basket for distance between adjacent bracket Degree.
- 6. Wafer Cleaning frame according to claim 5, it is characterised in that：On the inside of the front and rear sides upper side frame of the cleaning basket Equipped with end bracket, the end bracket is the rectangle of middle part hollow out, and the end bracket short side width is bracket short side Half.
- 7. Wafer Cleaning frame according to claim 3, it is characterised in that：The left and right sides upper side frame of the cleaning basket is with Vertical stiffeners are equipped between frame.
- 8. according to claim 3-7 any one of them Wafer Cleaning framves, it is characterised in that：Outside the front and rear sides of the cleaning basket Portion is equipped with more than two handles.
- 9. Wafer Cleaning frame according to claim 8, it is characterised in that：The handle is fixed on a mounting board, the peace Loading board both sides are weldingly fixed in upright bar, and the upright bar upper and lower ends are welded and fixed with upper side frame, lower frame respectively.
- 10. Wafer Cleaning frame according to claim 8, it is characterised in that：Floor, the floor are equipped with below the handle Both ends are fixedly linked with column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241832.8U CN207250475U (en) | 2017-09-26 | 2017-09-26 | Wafer Cleaning frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241832.8U CN207250475U (en) | 2017-09-26 | 2017-09-26 | Wafer Cleaning frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207250475U true CN207250475U (en) | 2018-04-17 |
Family
ID=61886912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721241832.8U Active CN207250475U (en) | 2017-09-26 | 2017-09-26 | Wafer Cleaning frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207250475U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109382386A (en) * | 2018-12-11 | 2019-02-26 | 广西玉柴机器股份有限公司 | A kind of rack applied to transit type cleaning machine cleaning shaft-cup |
-
2017
- 2017-09-26 CN CN201721241832.8U patent/CN207250475U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109382386A (en) * | 2018-12-11 | 2019-02-26 | 广西玉柴机器股份有限公司 | A kind of rack applied to transit type cleaning machine cleaning shaft-cup |
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