CN207249511U - A kind of precision temperature control equipment for being equipped with electromagnetic heating - Google Patents
A kind of precision temperature control equipment for being equipped with electromagnetic heating Download PDFInfo
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- CN207249511U CN207249511U CN201721345447.8U CN201721345447U CN207249511U CN 207249511 U CN207249511 U CN 207249511U CN 201721345447 U CN201721345447 U CN 201721345447U CN 207249511 U CN207249511 U CN 207249511U
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- Prior art keywords
- electromagnetic heating
- rack
- temperature control
- reserve tank
- control equipment
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Abstract
The utility model discloses a kind of precision temperature control equipment for being equipped with electromagnetic heating, aim to provide it is a kind of can accurate control temperature electromagnetic heating control device, its key points of the technical solution are that, including rack, the bottom of the frame is equipped with compressor, the condenser and evaporator being fixed on frame inner wall are connected on the compressor, it is also associated with exchanging the liquid reserve tank of liquid on the evaporator for storing, the liquid reserve tank is equipped with heating unit, the heating unit includes the electromagnetic heating controller being fixed on frame inner wall, it is used to export the intrusive mood pump for exchanging liquid and the electromagnetic heater being electrically connected with electromagnetic heating controller positioned at liquid reserve tank bottom on liquid reserve tank.
Description
Technical field
Microelectronic industry Temperature-controlled appliance field is the utility model is related to, more particularly to a kind of essence for being equipped with electromagnetic heating
Close Temperature-controlled appliance.
Background technology
Modern super hot investment casting, processing and apparatus measures have enter into nanometer, the sub-nanometer even technical merit of micromicron.
As the raising of science and technology, environmental factor are also more and more significant to the influence of these high, precision and frontier instrument and equipments.According to phase
Statistics is closed, in accurate and Ultra-precision Turning, nearly 40%~70% mismachining tolerance derives from the thermal deformation of lathe, it is clear that with temperature
The environmental parameter spent for representative, which has become, restricts an important factor for nanotechnolgy further develops.
Litho machine is extremely harsh to operating environment requirements as high integration, high-accuracy manufacturing equipment, therefore there is an urgent need to
A kind of high precision temperature control equipment.
At present, the Chinese patent of Publication No. CN101609262B discloses a kind of temperature control of projection lens of lithography machine
Device, it includes, at least a water jacket, which includes water jacket body and double helix is wrapped in the water pipe of the external wall of the water jacket；For
Sense an at least temperature sensor for the temperature of the projection objective of the litho machine；Flow distributing and collecting plate by the flow distributing and collecting pipe to this
The water pipe of water jacket body provides recirculated water and receives the recirculation water in the water pipe of the water jacket body, is provided with and is used on the flow distributing and collecting pipe
Control the regulating valve of the circulating water flow in the water pipe；The temperature of water control unit control loop water is circulated, and passes through the transmission
Pipe provides recirculated water to the flow distributing and collecting plate；Projection objective temperature control unit be used to receiving the temperature sensor senses should
The temperature of projection objective, the projection objective temperature control unit adjust the circulation water control unit according to the projection objective temperature value
The temperature of the recirculated water of offer and the opening journey of the regulating valve.
Although the temperature control equipment of the temperature control equipment projection lens of lithography machine of this projection lens of lithography machine can
Ensure the uniformity and stability of the projection objective bulk temperature by temperature sensor, but it is for recirculated water by carrying out
Temperature control, can not effectively carry out cold and hot control, so as to influence the control of bulk temperature, being not suitable for high-accuracy temperature control needs
Ask.
Utility model content
The purpose of this utility model is to provide a kind of precision temperature control equipment for being equipped with electromagnetic heating, it, which has, realizes heat
The advantages of exchanging the high-accuracy temperature control of liquid, constant temperature heat exchange fluid can be effectively provided.
The above-mentioned technical purpose of the utility model technical scheme is that：
A kind of precision temperature control equipment for being equipped with electromagnetic heating, including rack, the bottom of the frame are equipped with compressor, institute
The condenser and evaporator for being connected to and being fixed on frame inner wall on compressor are stated, is also associated with being used on the evaporator
Storage exchanges the liquid reserve tank of liquid, and the liquid reserve tank is equipped with heating unit, and the heating unit includes being fixed on frame inner wall
Electromagnetic heating controller, on liquid reserve tank be used for export exchange liquid intrusive mood pump and add positioned at liquid reserve tank bottom and electromagnetism
The electromagnetic heater that heat controller is electrically connected.
By using above-mentioned technical proposal, existing temperature control equipment is generally by compressor refrigerant and target liq heat
Temperature control is realized in exchange, or is powered up heated filament in water tank and realized temperature adjustment, is not suitable for high-accuracy temperature control needs, electric heating
Silk has the influence of the factors such as its limitation such as service life and thermal transition efficiency, and since the control of compressor cold medium flux has hysteresis
Property, reduce cold medium flux again when detecting that heat exchange fluid temperature is too low, be also only the circulation fluid temperature after control test point,
With time delay.And when being put using electromagnetic heating temperature control equipment, due to the electromagnetic heater that liquid reserve tank bottom is equipped with again
It can be made up again under the action of electromagnetic heating controller with quick response, the temperature in real-time accurate control liquid reserve tank, and it is electric
Magnetic heating has the characteristics of adjusting is electrodeless adjustable, and response is rapid, and thermal transition is efficient in itself, and feasible system built-in algorithm is pre-
Sentence electromagnetic heating output energy, be easy to implement temperature and be precisely controlled, while thermal transition is efficient, relatively commonly uses Resistant heating at present
Energy saving, it is good to heat property easy to control, and control input curtage precision is high, and controls sensitive.It is simple in structure at overall aspect,
Occupied space is smaller.
Further set：The electromagnetic heater include be fixedly connected with frame inner wall thermal insulation protection base, be located at
Sensing heating plate on thermal insulation protection base and the electromagnetic heating coil on sensing heating plate.
By using above-mentioned technical proposal, electromagnetic heater is located at liquid reserve tank bottom-heated, and layout is simple, occupied space
It is small, and heating position will not be contacted by people, no burn hazard, and induction coil top arrangement liquid reserve tank, thermal insulation protection is arranged at lower part
Bottom plate, prevents electromagnetism from spreading.
Further set：The strip radiating groove for heat dissipation is additionally provided with the rack.
By using above-mentioned technical proposal, situations such as internal device temperature is excessive is effectively reduced, it is effective by radiating groove
Distribute heat.
Further set：The frame top is equipped with the water inlet for being used for being passed through liquid reserve tank, and the frame side wall is equipped with
The apopore connected with intrusive mood pump.
By using above-mentioned technical proposal, water inlet and apopore can be directly connected to factory service water, so as to effectively save
About water resource.
Further set：The bottom of the frame is additionally provided with the universal wheel that top is fixedly connected with rack.
By using above-mentioned technical proposal, operating personnel are facilitated to transport whole equipment.
Further set：The bottom of the frame surrounding is additionally provided with support device, and the support device includes contacting with bottom surface
Support base, the screw rod being threadedly coupled on support base with bottom of the frame and the stop nut being equipped with positioned at screw rod.
By using above-mentioned technical proposal, it is necessary to when transporting, whole equipment is appeared on the stage, while will entirely be supported by screw rod
Device knob so that universal wheel can be contradicted on bottom surface, so as to facilitate operating personnel to promote whole rack, without using
When, rack is lifted, support device is put down and tightens stop nut at the same time, so that support base is contacted with ground so that whole rack
Placement that can be relatively stable is on the ground.
In conclusion the utility model has the advantages that：Overall structure is simple, and control accuracy is high, instead of existing
Resistant heating, energy saving and reliability is high, fast response time, and no hysteresis, temperature is precisely controlled.
Brief description of the drawings
Fig. 1 is equipped with the precision temperature control equipment overall structure schematic diagram of electromagnetic heating；
The precision temperature control equipment that Fig. 2 is equipped with electromagnetic heating is used to show that liquid reserve tank and electromagnetic heater structure are shown
It is intended to；
The precision temperature control equipment that Fig. 3 is equipped with electromagnetic heating is used to show that electromagnetic heater overall structure is illustrated
Figure；
Fig. 4 is equipped with the precision temperature control equipment flowsheet schematic diagram of electromagnetic heating.
In figure, 1, rack；2nd, compressor；3rd, condenser；4th, evaporator；5th, liquid reserve tank；6th, heating unit；61st, electromagnetism adds
Heat controller；62nd, intrusive mood pumps；63rd, electromagnetic heater；631st, thermal insulation protection base；632nd, sensing heating plate；633rd, electromagnetism
Heating coil；7th, radiating groove；8th, water inlet；9th, apopore；10th, universal wheel；11st, support device；111st, support base；112nd, spiral shell
Bar；113rd, stop nut.
Embodiment
The utility model is described in further detail below in conjunction with attached drawing.
Embodiment 1：A kind of precision temperature control equipment for being equipped with electromagnetic heating, as shown in Figure 1, Figure 2 and Figure 3, including machine
Frame 1,1 outer wall of rack are equipped with the strip radiating groove 7 for radiating, and 1 bottom of rack is equipped with compressor 2, distinguishes on compressor 2
The condenser 3 and evaporator 4 being fixed on 1 inner wall of rack are connected with, is also associated with exchanging the storage of liquid on evaporator 4 for storing
Liquid case 5, liquid reserve tank 5 are equipped with heating unit 6, and heating unit 6 includes the electromagnetic heating controller being fixed on 1 inner wall of rack
61, the water inlet 8 connect with liquid reserve tank 5 is equipped with the top of rack 1, is used to export invading for exchange liquid in liquid reserve tank 5 on liquid reserve tank 5
Enter formula pump 62, and 1 side wall of rack is equipped with the apopore 9 connected with intrusive mood pump 62, is equipped with 5 bottom of liquid reserve tank and adds with electromagnetism
The electromagnetic heater 63 that heat controller 61 is electrically connected.
Electromagnetic heater 63 include be fixedly connected with 1 inner wall of rack thermal insulation protection base 631, positioned at thermal insulation protection bottom
Sensing heating plate 632 on seat 631 and the electromagnetic heating coil 633 on sensing heating plate 632, on sensing heating plate 632
Portion is closely connected with 5 bottom of liquid reserve tank, and corresponding 5 bottom temp of liquid reserve tank accordingly raises when 632 temperature of sensing heating plate raises,
And then realize the inner heat exchange fluid temperature rise of liquid reserve tank 5,633 lower disposed thermal insulation protection base 631 of electromagnetic heating coil, is played
Heat-insulated and protective action.1 bottom of rack is additionally provided with the universal wheel 10 that top is fixedly connected with rack 1, while in 1 bottom four of rack
It is additionally provided with support device 11 week, truncated cone-shaped support base 111 that support device 11 includes contacting with bottom surface, on support base 111
The screw rod 112 being connected with 1 bottom thread of rack and the stop nut 113 being equipped with positioned at screw rod 112.
Its main operational principle is as follows：As shown in figure 4, during work compressor 2 by condenser 3 and factory service hydrothermal exchange,
Heat is taken away.The refrigerant of compressor 2 is evaporated in evaporator 4, takes away heat exchange fluid heat, is heat exchange heat drop temperature.
When heat exchange fluid needs cooling, compressor 2 is cooled down heat exchange fluid in evaporator 4 by refrigerant evaporation, cooling
Heat exchange fluid afterwards enters liquid reserve tank 5, and electromagnetic heating controller 61 in internal temperature sensor monitors liquid reserve tank 5 by handing over
The temperature of liquid is changed, if temperature is too low, signal is passed into electromagnetic heating control device, electromagnetic heater 63 is opened, heating
Heat exchange fluid in liquid reserve tank 5.Since the control of 2 cold medium flux of compressor has hysteresis quality, when detecting heat exchange fluid temperature mistake
Cold medium flux is reduced when low again, is also only the circulation fluid temperature after control test point, there is time delay.And electromagnetic heating
Device 63 can be made up with quick response, the temperature in real-time accurate control liquid reserve tank 5.
Compressor 2 is then not turned on when needing and improving heat exchange fluid temperature, liquid is exchanged and is risen by the heating of electromagnetic heater 63
Temperature.Electromagnetic heating has the characteristics of adjusting is electrodeless adjustable, and response is rapid, and thermal transition is efficient, and feasible system built-in algorithm
Electromagnetic heating output energy is prejudged, temperature is easy to implement and is precisely controlled.
And whole equipment is promoted when the universal wheel 10 that 1 bottom of rack is equipped with can help operating personnel to transport, and be equipped with
Support device 11 can effectively prevent the sliding of equipment at work, and when needing sliding, whole equipment is lifted, is operated
Support base 111 is upwards collected through by the screw rod 112 of support device 11, so that universal wheel 10 contradicts ground, and when needing fixed,
Equally whole rack 1 is lifted, screw rod 112 is rotated and corresponding position is fixed by stop nut 113 so that support base 111
Contradict on the ground, so as to effectively be supported.
The above embodiments are only explanation to the utility model, it is not the limitation to the utility model, ability
Field technique personnel as needed can make the present embodiment the modification of no creative contribution after this specification is read, but
As long as all protected in the right of the utility model be subject to Patent Law.
Claims (6)
1. a kind of precision temperature control equipment for being equipped with electromagnetic heating, including rack（1）, it is characterised in that：The rack（1）Bottom
Portion is equipped with compressor（2）, the compressor（2）On be connected to and be fixed on rack（1）Condenser on inner wall（3）And evaporation
Device（4）, the evaporator（4）On be also associated with for store exchange liquid liquid reserve tank（5）, the liquid reserve tank（5）It is equipped with and adds
Thermal（6）, the heating unit（6）Including being fixed on rack（1）Electromagnetic heating controller on inner wall（61）, positioned at liquid storage
Case（5）It is upper to be used to export the intrusive mood pump for exchanging liquid（62）And positioned at liquid reserve tank（5）Bottom and electromagnetic heating controller（61）Electricity
The electromagnetic heater of connection（63）.
A kind of 2. precision temperature control equipment for being equipped with electromagnetic heating according to claim 1, it is characterised in that：The electricity
Magnetic heating unit（63）Including with rack（1）The thermal insulation protection base that inner wall is fixedly connected（631）, positioned at thermal insulation protection base
（631）On sensing heating plate（632）And positioned at sensing heating plate（632）On electromagnetic heating coil（633）.
A kind of 3. precision temperature control equipment for being equipped with electromagnetic heating according to claim 2, it is characterised in that：The machine
Frame（1）On be additionally provided with strip radiating groove for heat dissipation（7）.
A kind of 4. precision temperature control equipment for being equipped with electromagnetic heating according to claim 3, it is characterised in that：The machine
Frame（1）Top, which is equipped with, to be used to be passed through liquid reserve tank（5）Water inlet（8）, the rack（1）Side wall is equipped with to be pumped with intrusive mood（62）
The apopore of connection（9）.
A kind of 5. precision temperature control equipment for being equipped with electromagnetic heating according to claim 4, it is characterised in that：The machine
Frame（1）Bottom is additionally provided with top and rack（1）The universal wheel being fixedly connected（10）.
A kind of 6. precision temperature control equipment for being equipped with electromagnetic heating according to claim 5, it is characterised in that：The machine
Frame（1）Bottom surrounding is additionally provided with support device（11）, the support device（11）Including the support base contacted with bottom surface（111）、
Positioned at support base（111）Upper and rack（1）The screw rod of bottom thread connection（112）And positioned at screw rod（112）What is be equipped with is spacing
Nut（113）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721345447.8U CN207249511U (en) | 2017-10-19 | 2017-10-19 | A kind of precision temperature control equipment for being equipped with electromagnetic heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721345447.8U CN207249511U (en) | 2017-10-19 | 2017-10-19 | A kind of precision temperature control equipment for being equipped with electromagnetic heating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207249511U true CN207249511U (en) | 2018-04-17 |
Family
ID=61882731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721345447.8U Expired - Fee Related CN207249511U (en) | 2017-10-19 | 2017-10-19 | A kind of precision temperature control equipment for being equipped with electromagnetic heating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207249511U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107656557A (en) * | 2017-10-19 | 2018-02-02 | 无锡沄沨科技有限公司 | A kind of precision temperature control equipment for being equipped with Electromagnetic Heating |
-
2017
- 2017-10-19 CN CN201721345447.8U patent/CN207249511U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107656557A (en) * | 2017-10-19 | 2018-02-02 | 无锡沄沨科技有限公司 | A kind of precision temperature control equipment for being equipped with Electromagnetic Heating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 Termination date: 20211019 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |