CN207235116U - MEMS microphone suction nozzle and MEMS microphone pick device - Google Patents
MEMS microphone suction nozzle and MEMS microphone pick device Download PDFInfo
- Publication number
- CN207235116U CN207235116U CN201721338759.6U CN201721338759U CN207235116U CN 207235116 U CN207235116 U CN 207235116U CN 201721338759 U CN201721338759 U CN 201721338759U CN 207235116 U CN207235116 U CN 207235116U
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- mems microphone
- suction nozzle
- adsorption plane
- notch
- stomata
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Abstract
The utility model discloses a kind of MEMS microphone suction nozzle and MEMS microphone pick device, wherein, MEMS microphone suction nozzle includes the connecting portion being connected with exterior negative pressure device, and for picking up the adsorption section of MEMS microphone；Adsorption section has an adsorption plane contacted with MEMS microphone, is offered on adsorption plane and keeps away a notch, and the stomata connected with negative pressure device.The MEMS microphone suction nozzle of the utility model due to keep away a notch setting so that MEMS microphone sound hole at air pressure there is no any change, ensure that MEMS microphone internal structure will not be damaged because of the change of air pressure.
Description
Technical field
MEMS microphone manufacturing field is the utility model is related to, more particularly to a kind of MEMS microphone suction nozzle and MEMS Mikes
Wind pick device.
Background technology
MEMS(Micro-Electro-Mechanical System；Micro Electro Mechanical System) microphone is to be based on MEMS skills
The microphone of art manufacture, briefly exactly a capacitor is integrated on micro- silicon wafer, can use Surface Mount technique system
Make, very high Reflow Soldering temperature can be born, be easily integrated with CMOS technology and other voicefrequency circuits, and make an uproar with improved
Sound eliminates performance and suppresses energy with good RF and EMI, has been embodied in numerous applications using the product of this technology all
In more advantages, the particularly application of middle and high end mobile phone.
Generally use suction nozzle picks up MEMS microphone in process of production, but due to being designed with sound in MEMS microphone
Hole, therefore the negative pressure that suction nozzle produces can damage MEMS microphone.
Utility model content
The main purpose of the utility model is to propose feeding circulating plate machine on a kind of film, it is intended to improves the work effect of feeding on film
Rate.
To achieve the above object, the utility model proposes a kind of MEMS microphone suction nozzle, the MEMS microphone suction nozzle
Including the connecting portion being connected with exterior negative pressure device, and for picking up the adsorption section of MEMS microphone；Wherein, the adsorption section
With an adsorption plane contacted with the MEMS microphone, offered on the adsorption plane and keep away a notch, and with institute
State the stomata of negative pressure device connection.
Preferably, the adsorption section is made using elastomeric material.
Preferably, the adsorption plane is rectangle, and the stomata is distributed with keeping away a notch along the length direction of the adsorption plane；
The stomata is located at the middle part of the adsorption plane width；A notch of keeping away is located at the adsorption plane width side
To middle part.
Preferably, the stomata is located at the 1/3 of adsorption plane length direction.
Preferably, the 1/4~1/2 of a diameter of adsorption plane width of the stomata.
Preferably, a notch of keeping away is set in strip, and from the middle part of the adsorption plane to away from the side of the stomata
To extension.
Preferably, the side kept away a notch and run through the adsorption plane.
Preferably, a notch of keeping away is close to the rounded setting in one end of the stomata.
Preferably, the length for keeping away a notch is the 1/3~1/2 of the adsorption plane length；The width for keeping away a notch
Spend for the 1/5~1/3 of the adsorption plane width.
The utility model it is further proposed that a kind of MEMS microphone pick device, including MEMS microphone suction nozzle is described
MEMS microphone suction nozzle includes the connecting portion being connected with exterior negative pressure device, and for picking up the adsorption section of MEMS microphone；
Wherein, the adsorption section has an adsorption plane contacted with the MEMS microphone, offers and keeps away on the adsorption plane
Position notch, and the stomata connected with the negative pressure device.
Connecting portion is connected the MEMS microphone suction nozzle of the utility model with exterior negative pressure device when in use, there is provided pickup
Negative pressure.The surface for controlling stomata to be directed at MEMS microphone when adsorption plane is contacted with MEMS microphone contacts, while keeps away a notch pair
Sound hole in quasi- MEMS microphone, MEMS microphone can be close to adsorption plane under the action of exterior negative pressure device provides negative pressure
On, simultaneously because the setting for keeping away a notch ensure that MEMS so that the air pressure at the sound hole of MEMS microphone does not have any change
Microphone internal structure will not be damaged because of the change of air pressure.
Brief description of the drawings
Fig. 1 is the structure diagram of one angle of the utility model MEMS microphone suction nozzle；
Fig. 2 is the structure diagram of another angle of the utility model MEMS microphone suction nozzle.
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe.Obviously, described embodiment is only the part of the embodiment of the utility model, rather than all
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
As shown in Fig. 1 to 2, the utility model proposes MEMS microphone suction nozzle be used in process of production pick up MEMS wheats
Gram wind.The MEMS microphone suction nozzle is integrally set in cylinder, includes adsorption section 100 and connecting portion 200 along the length direction of cylinder,
The adsorption section 100 contacts with MEMS microphone and adsorbs MEMS microphone, the exterior negative pressure of the connecting portion 200 and such as vacuum pump
Device connects.The adsorption section 100 has an adsorption plane 110 contacted with MEMS microphone, offers and keeps away on the adsorption plane 110
Position notch 112 and the stomata 111 connected with exterior negative pressure device.
Connecting portion 200 is connected with exterior negative pressure device when in use, there is provided the negative pressure of pickup.Adsorption plane 110 and MEMS wheats
Control stomata 111 to be directed at the surface contact of MEMS microphone during the contact of gram wind, while keep away a notch 112 and be aligned in MEMS microphone
Sound hole, exterior negative pressure device provide negative pressure under the action of MEMS microphone can be close on adsorption plane 110, simultaneously because
The setting of a notch 112 is kept away so that the air pressure at the sound hole of MEMS microphone does not have any change, ensure that in MEMS microphone
Portion's structure will not be damaged because of the change of air pressure.
In the above-described embodiments, MEMS microphone adsorbed portion 100 is scratched or damaged by pressure in order to prevent, and the adsorption section 100 is excellent
Choosing is made using flexible elastomeric material.The MEMS microphone suction nozzle can be that adsorption section 100 is made using elastomeric material,
Can also integrally all it be made using elastomeric material.
In the above-described embodiments, in order to which the MEMS microphone of compatible most shapes, the adsorption plane 110 are preferably rectangular
Set, which is distributed with keeping away a notch 112 along the length direction of adsorption plane 110.And the stomata 111 and keep away a notch
112 are respectively positioned on the middle part of 110 width of adsorption plane.The stomata 111 is located at the 1/3 of 110 length direction of adsorption plane, this keeps away position
Notch 112 is set in strip, and is extended from the middle part of 110 length direction of adsorption plane to away from the direction of stomata 111.This is kept away position and lacks
Mouthfuls 112 preferably run through the side of adsorption plane 110, are further ensured that and corresponding with sound hole when picking up MEMS microphone keep away a notch
112 air pressures are unchanged.In addition, this keeps away a notch 112 close to the rounded setting in one end of stomata 111, kept away with expanding as far as possible
The region that position notch 112 is covered, to cover the sound hole of MEMS microphone.
In the above-described embodiments, the diameter of the stomata 111 is preferably the 1/4~1/2 of 110 width of adsorption plane.This is kept away position and lacks
The length of mouth 112 is preferably the 1/3~1/2 of 110 length of adsorption plane；The width for keeping away a notch 112 is preferably that adsorption plane 110 is wide
The 1/5~1/3 of degree.So set and not only can guarantee that suction at stomata 111 and kept away the area that a notch 112 is covered, but also can protect
The structural strength of MEMS microphone suction nozzle entirety is demonstrate,proved.
The utility model is it is further proposed that a kind of MEMS microphone pick device, including MEMS microphone suction nozzle and negative pressure fill
Put, the concrete structure of the MEMS microphone suction nozzle is with reference to above-described embodiment, since this MEMS microphone pick device employs
State all technical solutions of all embodiments, therefore whole technology effects at least caused by the technical solution with above-described embodiment
Fruit, this is no longer going to repeat them.The negative pressure device, which includes such as vacuum pump, can produce the device of negative pressure, in pickup MEMS
Make to produce negative pressure at the stomata of MEMS microphone suction nozzle during microphone.In addition, the MEMS microphone pick device may also include energy
Enough make the devices such as manipulator, the track of the movement of MEMS microphone suction nozzle, facilitate the carrying of MEMS microphone.
It these are only the preferred embodiment of the utility model, not thereby limit the scope of protection of the utility model, it is every
Under the design of the utility model, the equivalent structure transformation made using the specification and accompanying drawing content of the utility model, or directly
Connect/be used in other related technical areas indirectly and be included in the scope of protection of the utility model.
Claims (10)
1. a kind of MEMS microphone suction nozzle, it is characterised in that the MEMS microphone suction nozzle includes being connected with exterior negative pressure device
Connecting portion, and for picking up the adsorption section of MEMS microphone；Wherein, the adsorption section has one and the MEMS microphone
The adsorption plane of contact, offers on the adsorption plane and keeps away a notch, and the stomata connected with the negative pressure device.
2. MEMS microphone suction nozzle as claimed in claim 1, it is characterised in that the adsorption section is made using elastomeric material.
3. MEMS microphone suction nozzle as claimed in claim 2, it is characterised in that the adsorption plane is rectangle, the stomata with
A notch is kept away to be distributed along the length direction of the adsorption plane；
The stomata is located at the middle part of the adsorption plane width；A notch of keeping away is located at the adsorption plane width
Middle part.
4. MEMS microphone suction nozzle as claimed in claim 3, it is characterised in that the stomata is located at adsorption plane length direction
At 1/3.
5. the MEMS microphone suction nozzle as described in claim 3 or 4, it is characterised in that a diameter of absorption of the stomata
The 1/4~1/2 of face width.
6. MEMS microphone suction nozzle as claimed in claim 3, it is characterised in that a notch of keeping away is set in strip, and by
The middle part of the adsorption plane extends to away from the direction of the stomata.
7. MEMS microphone suction nozzle as claimed in claim 6 a, it is characterised in that notch of keeping away is through the adsorption plane
Side.
8. MEMS microphone suction nozzle as claimed in claim 7 a, it is characterised in that notch of keeping away is close to the one of the stomata
Hold rounded setting.
9. the MEMS microphone suction nozzle as described in any one in claim 6 to 8 a, it is characterised in that notch of keeping away
Length is the 1/3~1/2 of the adsorption plane length；The width for keeping away a notch is the 1/5~1/3 of the adsorption plane width.
10. a kind of MEMS microphone pick device, it is characterised in that including the MEMS described in any one in claim 1 to 7
Microphone suction nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721338759.6U CN207235116U (en) | 2017-10-17 | 2017-10-17 | MEMS microphone suction nozzle and MEMS microphone pick device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721338759.6U CN207235116U (en) | 2017-10-17 | 2017-10-17 | MEMS microphone suction nozzle and MEMS microphone pick device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207235116U true CN207235116U (en) | 2018-04-13 |
Family
ID=61850680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721338759.6U Active CN207235116U (en) | 2017-10-17 | 2017-10-17 | MEMS microphone suction nozzle and MEMS microphone pick device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207235116U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111314838A (en) * | 2020-02-25 | 2020-06-19 | 中芯集成电路制造(绍兴)有限公司 | Detection method of MEMS microphone device |
-
2017
- 2017-10-17 CN CN201721338759.6U patent/CN207235116U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111314838A (en) * | 2020-02-25 | 2020-06-19 | 中芯集成电路制造(绍兴)有限公司 | Detection method of MEMS microphone device |
| CN111314838B (en) * | 2020-02-25 | 2021-08-27 | 绍兴中芯集成电路制造股份有限公司 | Detection method of MEMS microphone device |
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