CN207217469U - A kind of mass spectrometric sample introduction interface arrangement of process - Google Patents

A kind of mass spectrometric sample introduction interface arrangement of process Download PDF

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Publication number
CN207217469U
CN207217469U CN201721143091.XU CN201721143091U CN207217469U CN 207217469 U CN207217469 U CN 207217469U CN 201721143091 U CN201721143091 U CN 201721143091U CN 207217469 U CN207217469 U CN 207217469U
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microwell plate
subchannel
passage
sample introduction
interface arrangement
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CN201721143091.XU
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黄泽建
江游
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Shanghai Limu Scientific Instrument Co.,Ltd.
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National Institute of Metrology
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Abstract

The utility model provides a kind of mass spectrometric sample introduction interface arrangement of process, including:Threeway conduit and microwell plate;By being provided with microwell plate corresponding to the either interface in threeway conduit in passage, the centre of microwell plate is provided with micropore, when gas is by the passage, need to passed through through the micropore in microwell plate centre;Wherein, the passage is connected to process mass spectrograph, remaining two passages of threeway deferent are respectively connecting to gaseous sample and sampling pump, the air pressure in remaining two passages of threeway deferent is reduced using sampling pump, gas is controlled to enter process mass spectrograph by micropore again, compared to capillary of the prior art, micropore can greatly reduce the sample injection time of gaseous sample in mass spectral analysis, so as to improve the mass spectrometric operating efficiency of process.

Description

A kind of mass spectrometric sample introduction interface arrangement of process
Technical field
Analytical technique of mass spectrum field is the utility model is related to, more particularly, to a kind of mass spectrometric sample introduction interface of process Device.
Background technology
Mass spectrometry is carried out by the ratio between the quality m and electric charge z of determination sample ion (abbreviation mass-to-charge ratio, m/z) A kind of analysis method of analysis.Analyzed gaseous sample first has to ionize, then using different ions in magnetic field or electric field The difference of middle movement locus, ion is separated by mass-to-charge ratio and obtains mass spectrogram, and then obtain the analysis result of sample.Mass spectrograph It is the principle deflected according to charged particle in electromagnetic field, is divided by the mass discrepancy of material atom, molecule or molecular fragment From the instrument with detection material composition, typically by detecting system, vacuum system, electricity system and the part group of data handling system four Into.Wherein, detecting system is made up of sampling system, ion gun, mass analyzer and ion detector.Sample is generally by sample introduction system System imported into ion gun, is ionized to ion in an ion source, ion beam is separated according to mass-to-charge ratio size by mass analyzer, quilt Ion detector receives and records and obtain mass spectrogram.Vacuum system provides and maintained the vacuum needed for mass spectrograph normal work Degree, usually 10-2Pa~10-5Pa。
Process mass spectrograph, also referred to as process mass spectrometer or in-line analyzer, are mounted to scene, to the gas in production procedure Body carries out a kind of mass spectrograph of qualitative and quantitative analysis.Therefore, an important requirement mass spectrometric to process is that analyze speed is fast, Need to analyze a gas flow path within the time of only several seconds or ten several seconds under certain situation.At present, process mass spectrograph Sampling system generally use capillary gaseous sample is injected into the mass spectrometric ion gun of process.
Because the vacuum needed for process mass spectrograph normal work is usually 10-2Pa~10-5Pa, the gas in production procedure The air pressure of body is all significantly larger than the air pressure in ion gun, so as to which sampling system must use the pipeline with larger vapour lock, such as uses The capillary that length is longer and internal diameter is very thin, gas enter the mass spectrometric ion gun of process by way of slowly spreading, because And gaseous sample is difficult to enter ion gun in a short time;The sample injection time of gaseous sample is long, have impact on process mass spectrograph Operating efficiency, it is impossible to ensure to be completed in a relatively short time mass spectral analysis to gaseous sample.
Utility model content
In order to overcome above mentioned problem or solve the above problems at least in part, the utility model provides a kind of process mass spectrum The sample introduction interface arrangement of instrument.
According to one side of the present utility model, there is provided a kind of mass spectrometric sample introduction interface arrangement of process, including:Three admittances Pipe and microwell plate;Microwell plate is provided with passage corresponding to the either interface of threeway conduit, the plane and passage where microwell plate The angle of cross section is less than 90 °, and the inwall of microwell plate and passage is brought into close contact, and the centre of microwell plate is provided with micropore.
Wherein, the aperture of micropore is 2~100 μm.
Wherein, passage includes the first subchannel and the second subchannel, and the cross-sectional area of the first subchannel is more than the second son The cross-sectional area of passage, there is transition face between the first subchannel and the second subchannel, microwell plate is brought into close contact with transition face.
Wherein, the cross section of the first subchannel is disc.
Wherein, sample introduction interface arrangement also includes microwell plate fixing nut, and microwell plate fixing nut is provided with external screw thread, the first son The inwall of passage is provided with internal thread, the external screw thread that microwell plate fixing nut is provided with and the internal thread that the inwall of the first subchannel is provided with Match, the transition face between the first subchannel and the second subchannel is plane, and transition face is parallel to the cross section of passage, micropore Plate fixing nut to the direction of microwell plate by rotating to press microwell plate;The centre of microwell plate fixing nut is provided with logical Hole, the direction of through hole form gas passage perpendicular to the cross section of microwell plate fixing nut, through hole with micropore.
Wherein, each interface of threeway conduit includes nut, cutting ferrule and the mouth of pipe;The cross section of the mouth of pipe is anchor ring, the mouth of pipe Provided with the external screw thread to match with nut, nut is screwed on the mouth of pipe;Cutting ferrule is located on the inside of nut and the mouth of pipe, and the outer wall of cutting ferrule is Circular conical surface, outer wall and the mouth of pipe of cutting ferrule are brought into close contact.
The mass spectrometric sample introduction interface arrangement of a kind of process provided by the utility model, including:Threeway conduit and microwell plate;It is logical Cross and be provided with microwell plate corresponding to the either interface in threeway conduit in passage, the centre of microwell plate is provided with micropore, and gas leads to When crossing the passage, it need to pass through through the micropore in microwell plate centre;Wherein, the passage is connected to process mass spectrograph, threeway deferent Remaining two passages are respectively connecting to gaseous sample and sampling pump, and remaining two passages of threeway deferent are reduced using sampling pump In air pressure, then control gas to enter process mass spectrograph by micropore, compared to capillary of the prior art, micropore can be big The big sample injection time for reducing gaseous sample in mass spectral analysis, so as to improve the mass spectrometric operating efficiency of process.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the utility model or technical scheme of the prior art The required accompanying drawing used is briefly described in technology description, it should be apparent that, drawings in the following description are this practicalities Some new embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the front view according to the mass spectrometric sample introduction interface arrangement of process of the utility model embodiment;
Fig. 2 is the top view according to the mass spectrometric sample introduction interface arrangement of process of the utility model embodiment;
Fig. 3 is to be cutd open according to the B-B in Fig. 2 of the mass spectrometric sample introduction interface arrangement of process of the utility model embodiment Face figure.
Embodiment
To make the purpose of this utility model, technical scheme and advantage clearer, implement below in conjunction with the utility model Accompanying drawing in example, the technical scheme in the utility model is clearly and completely described, it is clear that described embodiment is The utility model part of the embodiment, rather than whole embodiments.It is common based on the embodiment in the utility model, this area The every other embodiment that technical staff is obtained under the premise of creative work is not made, belong to the utility model protection Scope.
In one embodiment of the present utility model, with reference to figure 1, Fig. 2 and Fig. 3, there is provided a kind of mass spectrometric sample introduction of process Interface arrangement, including:Threeway conduit 1 and microwell plate 2;Microwell plate 2 is provided with passage 3 corresponding to the either interface of threeway conduit 1, Plane and the angle of the cross section of passage 3 where microwell plate 2 are less than 90 °, and the inwall of microwell plate 2 and passage 3 is brought into close contact, The centre of microwell plate 2 is provided with micropore 21.
Specifically, Fig. 1 and Fig. 2 are respectively the front view and top view of the mass spectrometric sample introduction interface arrangement of process, Fig. 3 is figure Along B-B profile in 2, the mass spectrometric sample introduction interface arrangement of process in the present embodiment includes threeway conduit 1 and microwell plate 2; Wherein, microwell plate 2 is provided with passage 3 corresponding to the either interface of threeway conduit 1, the passage 3 for being provided with microwell plate was connected to Journey mass spectrograph, other remaining two passages of threeway deferent are respectively connecting to gaseous sample and sampling pump;It is flat where microwell plate 2 The angle of the cross section of face and passage 3 is less than 90 °, and there is a micropore 21 in the centre of microwell plate 2, and microwell plate 2 and passage 3 is interior Wall is brought into close contact, so that unique gas passage when the gas that micropore 21 turns into the both sides of microwell plate 2 mutually circulates.
The air pressure of gaseous sample in process mass spectrograph is first adjusted to appropriate by process mass spectrograph before mass spectral analysis Value;Process mass spectrograph has a vacuum system, and the vacuum in process mass spectrograph is usually 10-2Pa~10-5Pa, gaseous sample are usual It is the atmosphere gas (0.1MPa) under atmospheric environment, but it could also be possible that hyperbar gas (such as 1.6MPa), it is also possible to low gas Calm the anger body (such as 1mbar), but be all often much higher than the mass spectrometric operating air pressure of process, thus it requires gaseous sample need to delay very much In slow entrance process mass spectrograph, to realize that from hyperbar be to use length ratio directly to hypobaric transformation, existing way Longer and internal diameter very little capillary, this capillary can control the diffusion velocity of gaseous sample, but be gas the shortcomings that bring The sample injection time of body sample is long.
It is logical using two that gaseous sample and sampling pump are respectively connecting in sampling pump reduction threeway conduit in the present embodiment Gas pressure intensity (such as being reduced to 100Pa) in road, the first order air pressure decay in implementation process mass spectrograph sampling conduit, then Realize that second level air pressure is decayed by micropore again, in this case, capillary pipe length is far below using depth, aperture is compared with capillary Manage small micropore, you can realize second level air pressure decay, decay by this two stage atmospheric pressure, process mass spectrum can be greatly improved The sample rate of instrument, so as to improve the mass spectrometric operating efficiency of process.
Sample introduction interface arrangement in the present embodiment includes:Threeway conduit and microwell plate;By being connect in any of threeway conduit Microwell plate is provided with passage corresponding to mouthful, the centre of microwell plate is provided with micropore, need to be through microwell plate when gas is by the passage The micropore in centre passes through;Wherein, the passage is connected to process mass spectrograph, and remaining two passages of threeway deferent connect respectively To gaseous sample and sampling pump, the air pressure in remaining two passages of threeway deferent is reduced using sampling pump, then pass through micropore control Gas processed enters process mass spectrograph, compared to capillary of the prior art, using two stage atmospheric pressure decay and the use of micropore The sample injection time of gaseous sample in mass spectral analysis can be greatly reduced, so as to improve the mass spectrometric operating efficiency of process.
Based on above example, the aperture of micropore is 2~100 μm, air pressure and sampling of the specific size according to sample gas The end vacuum of pump and adjust.
Based on above-described embodiment, with reference to figure 3, passage 3 includes the first subchannel 31 and the second subchannel 32, the first subchannel 31 cross-sectional area is more than the cross-sectional area of the second subchannel 32, has between the first subchannel 31 and the second subchannel 32 Face 33 is crossed, microwell plate 2 is brought into close contact with transition face 33.
The present embodiment passes through the transition be close to microwell plate between two subchannels of varying cross-section area in passage On face, it is ensured that the air-tightness between microwell plate and vias inner walls.
Based on above example, with reference to figure 3, the cross section of the first subchannel 31 is disc;Sample introduction interface arrangement also includes Microwell plate fixing nut 4, microwell plate fixing nut 4 are provided with external screw thread, and the inwall of the first subchannel 31 is provided with internal thread, microwell plate The internal thread that the inwall of the external screw thread that fixing nut 4 is provided with and the first subchannel 31 is provided with matches, the first subchannel 31 and Transition face 33 between two subchannels 32 is plane, and for transition face 33 parallel to the cross section of passage 3, microwell plate fixing nut 4 is logical The direction to microwell plate 2 is crossed to rotate to press microwell plate 2;The centre of microwell plate fixing nut 4 is provided with through hole 41, through hole 41 Direction perpendicular to the cross section of microwell plate fixing nut 4, through hole 41 forms gas passage with micropore 21.
Specifically, the cross section of the first subchannel 31 is disc, the inwall of the first subchannel 31 is provided with internal thread;Sample introduction connects Mouthful device also includes microwell plate fixing nut 4, and the inwall of the external screw thread of microwell plate fixing nut 4 and the first subchannel 31 is provided with Screw thread matches, and microwell plate fixing nut 4 presses microwell plate 2 by being threaded into the first subchannel 31;Microwell plate 2 and micro- The surface requirements of orifice plate fixing nut 5 are smooth, and the transition face 33 between the first subchannel 31 and the second subchannel 32 requires For smooth plane, to ensure the air-tightness between microwell plate and the inwall of passage 3, in addition, microwell plate 4 is preferred flexible and is easy to The material (such as platinum piece) of deformation, further to improve its air-tightness;There is through hole in the centre of microwell plate fixing nut 4 41, the direction of through hole 41 ensures that through hole 41 forms gas passage with micropore 21 perpendicular to the cross section of microwell plate fixing nut 4.
The present embodiment presses microwell plate by using microwell plate fixing nut two of the varying cross-section area in passage On transition face between individual subchannel, the air-tightness between microwell plate and vias inner walls is further ensured.
Based on above example, with reference to figure 3, each interface of threeway conduit includes nut 51, cutting ferrule 52 and the mouth of pipe 53;Pipe The cross section of mouth 53 is anchor ring, and the mouth of pipe 53 is provided with the external screw thread to match with nut 51, and nut 53 is screwed on the mouth of pipe 51;Card Set 52 is positioned at the inner side of nut 51 and the mouth of pipe 53, and the outer wall of cutting ferrule 52 is circular conical surface, and outer wall and the mouth of pipe 53 of cutting ferrule 52 closely paste Close.
Specifically, each interface of threeway conduit includes nut 51, cutting ferrule 52 and the mouth of pipe 53;The mouth of pipe 53 is provided with and nut 51 The external screw thread to match, by rotating nuts 51 to compress cutting ferrule 52, so that cutting ferrule 52 and the interface of other equipment keep close Contact condition, ensure each air-tightness connect when being connected with other equipment of threeway conduit.
What is finally illustrated is:Above example is only to illustrate the technical solution of the utility model, rather than its limitations;To the greatest extent The utility model is described in detail with reference to the foregoing embodiments for pipe, it will be understood by those within the art that:Its The technical scheme described in foregoing embodiments can still be modified, or which part technical characteristic is equal Replace;And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the utility model technical side The spirit and scope of case.

Claims (6)

  1. A kind of 1. mass spectrometric sample introduction interface arrangement of process, it is characterised in that including:Threeway conduit and microwell plate;The threeway Microwell plate is provided with passage corresponding to the either interface of conduit, the plane where the microwell plate and the cross section of the passage Angle is less than 90 °, and the inwall of the microwell plate and the passage is brought into close contact, and the centre of the microwell plate is provided with micro- Hole.
  2. 2. sample introduction interface arrangement according to claim 1, it is characterised in that the aperture of the micropore is 2~100 μm.
  3. 3. sample introduction interface arrangement according to claim 1, it is characterised in that the passage includes the first subchannel and second Subchannel, the cross-sectional area of first subchannel are more than the cross-sectional area of second subchannel, and first son is logical There is transition face between road and second subchannel, the microwell plate is brought into close contact with the transition face.
  4. 4. sample introduction interface arrangement according to claim 3, it is characterised in that the cross section of first subchannel is circle Face.
  5. 5. sample introduction interface arrangement according to claim 4, it is characterised in that the sample introduction interface arrangement also includes microwell plate Fixing nut, the microwell plate fixing nut are provided with external screw thread, and the inwall of first subchannel is provided with internal thread, the micropore The internal thread that the inwall of the external screw thread that plate fixing nut is provided with and first subchannel is provided with matches, first subchannel Transition face between second subchannel is plane, and the transition face is parallel to the cross section of the passage, the micropore Plate fixing nut to the direction of the microwell plate by rotating to press the microwell plate;The center of the microwell plate fixing nut Position is provided with through hole, the direction of the through hole perpendicular to the cross section of the microwell plate fixing nut, the through hole with it is described micro- Hole forms gas passage.
  6. 6. sample introduction interface arrangement according to claim 1, it is characterised in that each interface of the threeway conduit includes spiral shell Female, cutting ferrule and the mouth of pipe;The cross section of the mouth of pipe is anchor ring, and the mouth of pipe is provided with the external screw thread to match with the nut, The nut is screwed on the mouth of pipe;The cutting ferrule is located on the inside of the nut and the mouth of pipe, and the outer wall of the cutting ferrule is Circular conical surface, the outer wall of the cutting ferrule are brought into close contact with the mouth of pipe.
CN201721143091.XU 2017-09-07 2017-09-07 A kind of mass spectrometric sample introduction interface arrangement of process Active CN207217469U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721143091.XU CN207217469U (en) 2017-09-07 2017-09-07 A kind of mass spectrometric sample introduction interface arrangement of process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721143091.XU CN207217469U (en) 2017-09-07 2017-09-07 A kind of mass spectrometric sample introduction interface arrangement of process

Publications (1)

Publication Number Publication Date
CN207217469U true CN207217469U (en) 2018-04-10

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Effective date of registration: 20220420

Address after: Room 208, building 1, No. 438, xinlai Road, Jiading District, Shanghai 201800

Patentee after: Shanghai Limu Scientific Instrument Co.,Ltd.

Address before: 100029 No. 18 East North Third Ring Road, Chaoyang District, Beijing

Patentee before: NATIONAL INSTITUTE OF METROLOGY