CN207192782U - A kind of 3-D abnormal microchannel processing unit (plant) - Google Patents
A kind of 3-D abnormal microchannel processing unit (plant) Download PDFInfo
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- CN207192782U CN207192782U CN201721147293.1U CN201721147293U CN207192782U CN 207192782 U CN207192782 U CN 207192782U CN 201721147293 U CN201721147293 U CN 201721147293U CN 207192782 U CN207192782 U CN 207192782U
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- microchannel
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Abstract
The utility model discloses a kind of 3-D abnormal microchannel processing unit (plant), using the controller of the pose of the reaction component of noble metal processing 3-D abnormal microchannel, the drive component for driving reaction component change pose, the detection components for detecting reaction component positional information and the control drive component adjustment reaction component of the positional information for being detected according to detection components, reaction component and detection components are installed on drive component, and controller is all connected with drive component and detection components.Processing unit (plant) provided by the utility model, utilize control of the controller to drive component, change the position of reaction component, the change of noble metal motion track in reaction component is realized, completes the processing of 3-D abnormal microchannel, simple in construction, low manufacture cost, it can be mass-produced, there is larger popularization space, it is possible to achieve the repetition etching of the 3-D abnormal microchannel of similar shape, improve the production efficiency of work piece.
Description
Technical field
Microchannel manufacture field is the utility model is related to, more particularly to a kind of 3-D abnormal microchannel processing unit (plant).
Background technology
Microchannel is widely used in the fields such as biology, medical treatment, chemistry and microfluid system, in cell culture, medicine
The application of screening, genetic test and chemical experiment etc. is increasingly ripe.
How the minimum 3-D abnormal microchannel of characteristic size is effectively accurately quickly processed, in microchannel
With very actual meaning, in the prior art, photoetching and metal Assisted Chemical Etching Process are the most important manufacture methods in microchannel.
So-called photoetching, that is, first have to cover thin film in substrate surface, one is equably then covered with photoresist spinner in film surface
Layer optical cement, floor layout case on mask is transferred to the technical process of optical cement layer by the principle of exposure image, such as the institute of accompanying drawing 1
Show.
During typical metal Assisted Chemical Etching Process, there is noble metal (such as Au, Pt, Ag or Au/Pd alloy) on surface
The silicon substrate of film or stratum granulosum is put into HF and oxidizing substance (such as H2O2) mixed solution in, the etching of silicon below noble metal
Speed is far longer than the etching speed for not covered silicon by noble metal, as a result as the progress of etching reaction, noble metal serve as a contrast along silicon
Bottom gradually sinks, and etches vertical poroid or column one-dimensional silicon nanostructure, as shown in Figure 2.
At present, the method that the manufacture of microchannel depends on photoetching in microfluid system, and the inherent limitations of this method
It is the two dimensional surface manufacture that can only carry out surface.Therefore when manufacturing 3-D abnormal microfluid system, it has to after Layered manufacturing
Stacked, be bonded and encapsulated, it is necessary to which multiple masks, what is used when adding the cost and complexity of manufacture, and being bonded is glutinous
Connect agent easily to leak into microchannel, influence its practical application, typical metal Assisted Chemical Etching Process rule can only be in gravity
Effect is lower to carry out static one-dimensional vertical etching.
Therefore, how effectively to simplify 3-D abnormal microchannel work flow, reduce processing cost, improve machining accuracy,
It is the current technical issues that need to address of those skilled in the art.
Utility model content
The purpose of this utility model is to provide a kind of 3-D abnormal microchannel processing unit (plant), for overcoming conventional lithography to manufacture
The disadvantage that 3-D abnormal microchannel is easily leaked into microchannel using binding agent, to reach quickly smart to 3-D abnormal microchannel
True processing.
To achieve the above object, the utility model provides following technical scheme：
A kind of 3-D abnormal microchannel processing unit (plant), the reaction of 3-D abnormal microchannel is processed using noble metal
Component, the drive component for driving the reaction component change pose, the inspection for detecting the reaction component positional information
Survey component and the positional information for being detected according to the detection components controls the drive component to adjust the reaction group
The controller of the pose of part, the reaction component and the detection components are installed on the drive component, the controller
It is all connected with the drive component and the detection components.
Preferably, in addition to base and support, the base are fixedly connected with the support, and the drive component is arranged on
On the support.
Preferably, the drive component includes six-freedom motion part, and the six degree of freedom can be driven to transport respectively
The turning part and rotatable parts that dynamic component overturns and rotated, the reaction component are arranged on the six-freedom motion part
On.
Preferably, the six-freedom motion part includes upper mounting plate, lower platform and installed in the upper mounting plate and institute
Six voice coil motors between lower platform are stated, the both ends of the voice coil motor are cut with scissors with the upper mounting plate and the lower platform respectively
Connect.
Preferably, the upset motor that turning part part includes upset platform and the upset platform can be driven to overturn, institute
State the upside that lower platform is arranged on the upset platform.
Preferably, the rotatable parts are rotary electric machine, and the rotary electric machine is arranged on the downside of the upset platform, and
And the rotary electric machine can drive the lower platform to rotate.
Preferably, the detection components include be arranged on the upper mounting plate on Position and attitude sensor, installed in the upset
First angle sensor on motor, the second angle sensor on the rotary electric machine and installed in each described
Displacement transducer on voice coil motor；The Position and attitude sensor, the first angle sensor, the second angle sensor with
And institute's displacement sensors are connected with the controller.
Preferably, the controller includes host computer and slave computer, and the host computer is to carry out man-machine interaction circle using MFC
The PC in face, the slave computer include industrial computer and motion control card.
3-D abnormal microchannel provided by the utility model processing unit (plant), processed using noble metal three-dimensional different
The reaction component of shape microchannel, for driving the reaction component to change the drive component of pose, for detecting the reaction group
The detection components of part positional information and the positional information for being detected according to the detection components control the drive component
The controller of the pose of the reaction component is adjusted, the reaction component and the detection components are installed in the drive component
On, the controller is all connected with the drive component and the detection components.The processing unit (plant), utilize the controller pair
The control of the drive component, and then by changing the position of the reaction component, realize noble metal in the reaction group
The change of motion track in part, the processing of 3-D abnormal microchannel is completed, can effectively solve photolithography method can only carry out two-dimentional put down
Face manufactures the inherent limitations that a dimension microchannel can only be etched with metal Assisted Chemical Etching Process method, and the device can directly process three-dimensional
Special-shaped microchannel, numerous and diverse Making programme and production cost of conventional lithography manufacture 3-D abnormal microchannel is reduced, overcomes tradition
The disadvantage that photolithographic fabrication 3-D abnormal microchannel is easily leaked into microchannel using binding agent, reach to 3-D abnormal microchannel
Quick accurate processing；Simple in construction, low manufacture cost, it can be achieved to produce in enormous quantities, there is larger popularization space, meanwhile, lead to
The repetition etching of 3-D abnormal microchannel of similar shape can be realized by crossing controller, improve the production efficiency of work piece.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is that a kind of processing unit (plant) structure of embodiment in 3-D abnormal microchannel provided by the utility model is shown
It is intended to；
Fig. 2 is the partial structural diagram of 3-D abnormal microchannel processing unit (plant) shown in Fig. 1；
Fig. 3 is structural representation when 3-D abnormal microchannel processing unit (plant) shown in Fig. 1 is in original state；
Fig. 4 (a) is that 3-D abnormal microchannel processing unit (plant) shown in Fig. 1 shows in the original state for etching vertical channel portion
It is intended to；
Fig. 4 (b) is that 3-D abnormal microchannel processing unit (plant) shown in Fig. 1 shows in the process status for etching vertical channel portion
It is intended to；
Fig. 5 (a) is state signal of the 3-D abnormal microchannel processing unit (plant) shown in Fig. 1 in etching spiral channel portion
Figure；
Fig. 5 (b) is local knot of the 3-D abnormal microchannel processing unit (plant) shown in Fig. 5 (a) in etching spiral channel portion
Structure schematic diagram；
Fig. 6 (a) is that negative direction of the 3-D abnormal microchannel processing unit (plant) shown in Fig. 1 along Z axis etches microchannel；
Fig. 6 (b) is local knot of the 3-D abnormal microchannel processing unit (plant) shown in Fig. 6 (a) in etching spiral channel portion
Structure schematic diagram；
Fig. 7 is that the effect for the spiral microchannel that the etching of 3-D abnormal microchannel processing unit (plant) shown in the utility model forms is shown
It is intended to；
Wherein：1- drive components, 11- six-freedom motions part, 111- upper mounting plates, 112- lower platforms, 113- voice coil loudspeaker voice coils electricity
Machine, 12- turning parts, 121- upset motors, 122- upsets platform, 13- rotatable parts, 2- reaction components, 21- noble metal grains
Son, 3- detection components, 31- first angles sensor, 32- second angles sensor, 33- Position and attitude sensors, 34- displacement sensings
Device, 4- controllers.
Embodiment
Core of the present utility model is to provide a kind of 3-D abnormal microchannel processing unit (plant), can directly process 3-D abnormal
Microchannel, reduce numerous and diverse Making programme and production cost of conventional lithography manufacture 3-D abnormal microchannel.
In order that those skilled in the art more fully understand the utility model, below in conjunction with the accompanying drawings and it is embodied
The utility model is described in further detail for mode.
Fig. 1 to Fig. 7 is refer to, Fig. 1 is that 3-D abnormal microchannel provided by the utility model processing unit (plant) is a kind of specific
The structural representation of embodiment；Fig. 2 is the partial structural diagram of 3-D abnormal microchannel processing unit (plant) shown in Fig. 1；Fig. 3 is
The processing unit (plant) of 3-D abnormal microchannel shown in Fig. 1 is in structural representation during original state；Fig. 4 (a) is three-dimensional different shown in Fig. 1
Shape microchannel processing unit (plant) is etching the original state schematic diagram of vertical channel portion；Fig. 4 (b) is 3-D abnormal shown in Fig. 1
Microchannel processing unit (plant) is etching the process status schematic diagram of vertical channel portion；Fig. 5 (a) is that 3-D abnormal shown in Fig. 1 is micro-
View of the passageway machining device in etching spiral channel portion；Fig. 5 (b) is 3-D abnormal microchannel shown in Fig. 5 (a)
Partial structural diagram of the processing unit (plant) in etching spiral channel portion；Fig. 6 (a) is that 3-D abnormal microchannel shown in Fig. 1 adds
Frock is put along the negative direction of Z axis and etches microchannel；Fig. 6 (b) is that 3-D abnormal microchannel processing unit (plant) shown in Fig. 6 (a) is being carved
Lose the partial structural diagram of spiral channel portion；Fig. 7 carves for 3-D abnormal microchannel processing unit (plant) shown in the utility model
Lose the effect diagram of the spiral microchannel formed.
In this embodiment, 3-D abnormal microchannel processing unit (plant) includes reaction component 2, drive component 1, detection components
3 and controller 4.
Wherein, reaction component 2 is used to process 3-D abnormal microchannel using noble metal 21, and silicon-based semiconductor material is put
Put in reaction component 2, specifically, silicon-based semiconductor is placed in equipped with hydrofluoric acid HF and oxidizing substance such as H2O2Mixing it is molten
Among the reaction component 2 of liquid, drive component 1 is used to drive reaction component 2 to change pose, and detection components 3 are used to detect reaction group
The positional information of part 2, controller 4 are used for the positional information of the reaction component 2 detected according to detection components 3, to control driving
Component 1 adjusts the pose of reaction component 2；Also, reaction component 2 and detection components 3 are installed on drive component 1, driving group
The movement of part 1 can drive reaction component 2 and detection components 3 to move, and controller 4 connects with drive component 1 and detection components 3
Connect, can be wired connection, or wireless connection.
The processing unit (plant), using control of the controller 4 to drive component 1, and then by changing the position of reaction component 2,
The change of the motion track in reaction component 2 of noble metal 21 is realized, the processing of 3-D abnormal microchannel is completed, can effectively solve
Certainly photolithography method, which can only carry out two dimensional surface manufacture and metal Assisted Chemical Etching Process method, can only etch the intrinsic limit of a dimension microchannel
System, the device can directly process 3-D abnormal microchannel, reduce numerous and diverse system of conventional lithography manufacture 3-D abnormal microchannel
Make flow and production cost, overcome conventional lithography manufacture 3-D abnormal microchannel easily to be leaked into using binding agent in microchannel
Disadvantage, reach and 3-D abnormal microchannel is quickly accurately processed.
On the basis of the respective embodiments described above, in addition to base and support, base are fixedly connected with support, drive component
1 is rack-mount, and support and base are played a supporting role, and support and base can be with the higher metal material processings of selection intensity
Form, the shape of base and support can be set as needed, be not further qualified herein.
On the basis of the respective embodiments described above, drive component 1 includes six-freedom motion part 11, and can band respectively
The turning part 12 and rotatable parts 13 that dynamic six-freedom motion part 11 overturns and rotated, reaction component 2 are arranged on six freely
Spend on moving component 11.
The device, by the use of noble metal 21 as catalyst, according to the knot of the 3-D abnormal microchannel of required shaping
Structure, such as default spiral microchannel, occur any change and then drive by the pose of instant adjusting apparatus in six degree of freedom
Corresponding change occurs for the pose of reaction component 2, so as to which under gravity, the control catalyst of noble metal 21 is with being added
The contact position and the direction of motion of workpiece, the lithography part in the environment of hydrofluoric acid and oxidant mixed solution, work piece
For silicon-based semiconductor material.
On the basis of the respective embodiments described above, as shown in Fig. 2 six-freedom motion part 11 include upper mounting plate 111, under
Platform 112 and six voice coil motors 113 between upper mounting plate 111 and lower platform 112, the both ends of voice coil motor 113
It is be hinged with upper mounting plate 111 and lower platform 112 respectively.Specifically, six voice coil motors 113 respectively by ball pivot or Hooke's hinge with it is upper
Platform 111 and lower platform 112 couple, and six voice coil motors 113 independently can extend and shorten under the control of driver, on
Platform 111 can carry out the self-movement of six-freedom degree with the elongation and shortening of six voice coil motors 113, on changing
The pose of platform 111 in space.
The selection of above-mentioned voice coil motor 113, it is in order to meet required precision, it is of course possible to meet microchannel machining accuracy
On the premise of, other extensible members can also be used.
On the basis of the respective embodiments described above, turning part 12 includes upset platform 122 and can drive upset platform 122
The upset motor 121 of upset, both are connected by shaft coupling, and lower platform 112 is arranged on the upside of upset platform 122.Further,
Rotatable parts 13 are rotary electric machine, and rotary electric machine is arranged on the downside of upset platform 122, specifically, rotary electric machine passes through shaft coupling
Device is connected with the lower platform 112 of six-freedom motion part 11, also, rotary electric machine can drive lower platform 112 to rotate.It is above-mentioned to turn over
Rotating motor 121 and rotary electric machine can use stepper motor, real by the upset and rotation to six-freedom motion part 11
Now the two-stage of reaction unit is rotated, added by the cooperative motion of two-stage rotation and six-freedom motion part 11 so as to change this
The pose of work apparatus platform in space, and by being electrically connected in controller 4.
On the basis of the respective embodiments described above, detection components 3 include the Position and attitude sensor being arranged on upper mounting plate 111
33rd, the first angle sensor 31 in upset motor 121, the second angle sensor 32 on rotary electric machine,
And the displacement transducer 34 on each voice coil motor 113, the number of displacement transducer 34 is six, for detecting voice coil loudspeaker voice coil
The stroke of motor 113；Position and attitude sensor 33, first angle sensor 31, second angle sensor 32 and displacement transducer
34 are connected with controller 4, and each sensor can feed back to all signals detected in controller 4.
On the basis of the respective embodiments described above, controller 4 includes host computer and slave computer, and host computer is to be entered using MFC
The PC of row human-computer interaction interface, slave computer include industrial computer and motion control card.
Specifically, controller 4 uses upper and lower machine structure as control system framework.Wherein, host computer uses conventional PC
Machine, the exploitation of human-computer interaction interface is carried out using MFC；Slave computer is then using the structure of industrial computer+motion control card to this
Device is directly controlled.
The special-shaped microchannel processing unit (plant) that the present embodiment is provided, reaction component 2 can in the presence of drive component 1
Arbitrary motion in the six degree of freedom of space, to reach the position and posture for meeting silicon-based semiconductor processing request, realize processing arbitrary shape
The 3-D abnormal microchannel of shape；Detection components 3 can be real-time to reach controller 4 with the position and posture signal of Real-time Feedback device
Position and posture error is corrected, realizes high-accuracy shaped three-dimensional micro-channel processing；It is three-dimensional different that the device can reduce conventional lithography manufacture
The numerous and diverse Making programme and high production cost of shape microchannel, conventional lithography manufacture 3-D abnormal microchannel is overcome to use viscous
The disadvantage that knot agent is easily leaked into microchannel；Also, the present apparatus is simple in construction, low manufacture cost, can be achieved to produce in enormous quantities,
There is larger popularization space；Meanwhile the repetition etching of the 3-D abnormal microchannel of similar shape can be realized by controller 4, carry
The high production efficiency of work piece.
3-D abnormal microchannel provided by the utility model processing unit (plant) is described in detail above.Herein should
Principle of the present utility model and embodiment are set forth with specific case, the explanation of above example is only intended to help
Assistant solves method and its core concept of the present utility model.It should be pointed out that for those skilled in the art,
On the premise of the utility model principle is not departed from, some improvement and modification, these improvement can also be carried out to the utility model
Also fallen into modification in the protection domain of the utility model claims.
Claims (8)
1. a kind of 3-D abnormal microchannel processing unit (plant), it is characterised in that processed using noble metal (21) three-dimensional different
The reaction component (2) of shape microchannel, for drive the reaction component (2) change pose drive component (1), for detecting
State the detection components (3) and the letter of the position for being detected according to the detection components (3) of reaction component (2) positional information
Breath controls the controller (4) of the pose of drive component (1) adjustment reaction component (2), the reaction component (2) and institute
State detection components (3) to be installed on the drive component (1), the controller (4) and the drive component (1) and described
Detection components (3) are all connected with.
2. 3-D abnormal microchannel according to claim 1 processing unit (plant), it is characterised in that also including base and support,
The base is fixedly connected with the support, and drive component (1) installation is on the bracket.
3. 3-D abnormal microchannel according to claim 1 processing unit (plant), it is characterised in that drive component (1) bag
Six-freedom motion part (11) is included, and the upset that the six-freedom motion part (11) can be driven to overturn and rotate respectively
Part (12) and rotatable parts (13), the reaction component (2) are arranged on the six-freedom motion part (11).
4. 3-D abnormal microchannel according to claim 3 processing unit (plant), it is characterised in that the six-freedom motion portion
Part (11) include upper mounting plate (111), lower platform (112) and installed in the upper mounting plate (111) and the lower platform (112) it
Between six voice coil motors (113), the both ends of the voice coil motor (113) respectively with the upper mounting plate (111) and described lower flat
Platform (112) is be hinged.
5. 3-D abnormal microchannel according to claim 4 processing unit (plant), it is characterised in that turning part part (12) wraps
Include upset platform (122) and the upset motor (121) of upset platform (122) upset can be driven, lower platform (112) peace
Mounted in the upside of the upset platform (122).
6. 3-D abnormal microchannel according to claim 5 processing unit (plant), it is characterised in that the rotatable parts (13) are
Rotary electric machine, the rotary electric machine is arranged on the downside of the upset platform (122), also, the rotary electric machine can drive institute
State lower platform (112) rotation.
7. 3-D abnormal microchannel according to claim 6 processing unit (plant), it is characterised in that detection components (3) bag
Include the Position and attitude sensor (33) on the upper mounting plate (111), the first angle in the upset motor (121)
Sensor (31), the second angle sensor (32) on the rotary electric machine and installed in each voice coil motor
(113) displacement transducer (34) on；It is the Position and attitude sensor (33), the first angle sensor (31), described second jiao
Degree sensor (32) and institute's displacement sensors (34) are connected with the controller (4).
8. the 3-D abnormal microchannel processing unit (plant) according to claim 1 to 7 any one, it is characterised in that the control
Device (4) processed includes host computer and slave computer, and the host computer is to utilize the PC of MFC progress human-computer interaction interfaces, the bottom
Machine includes industrial computer and motion control card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721147293.1U CN207192782U (en) | 2017-09-07 | 2017-09-07 | A kind of 3-D abnormal microchannel processing unit (plant) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721147293.1U CN207192782U (en) | 2017-09-07 | 2017-09-07 | A kind of 3-D abnormal microchannel processing unit (plant) |
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| Publication Number | Publication Date |
|---|---|
| CN207192782U true CN207192782U (en) | 2018-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721147293.1U Withdrawn - After Issue CN207192782U (en) | 2017-09-07 | 2017-09-07 | A kind of 3-D abnormal microchannel processing unit (plant) |
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| CN (1) | CN207192782U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107662903A (en) * | 2017-09-07 | 2018-02-06 | 广东工业大学 | A kind of 3-D abnormal microchannel processing unit (plant) and method |
-
2017
- 2017-09-07 CN CN201721147293.1U patent/CN207192782U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107662903A (en) * | 2017-09-07 | 2018-02-06 | 广东工业大学 | A kind of 3-D abnormal microchannel processing unit (plant) and method |
| CN107662903B (en) * | 2017-09-07 | 2019-08-09 | 广东工业大学 | A kind of 3-D abnormal microchannel processing unit (plant) and method |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180406 Effective date of abandoning: 20190809 |
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| AV01 | Patent right actively abandoned |