CN115682934A - Microscopic vision detection device and calibration method for assembling cross-scale micro-nano device - Google Patents
Microscopic vision detection device and calibration method for assembling cross-scale micro-nano device Download PDFInfo
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Abstract
The invention provides a microscopic vision detection device and a calibration method for assembling a trans-scale micro-nano device, which comprise a first microscopic vision system and a second microscopic vision system, wherein the first microscopic vision system and the second microscopic vision system are used for detecting the front and side features of the micro-nano device; the third microscopic vision system is used for detecting the top characteristics of the micro-nano part; the fourth microscopic vision system is used for detecting the bottom characteristics of the micro-nano device and also comprises a calibration method of a microscopic vision detection device assembled by utilizing the trans-scale micro-nano device; the cross-field depth detection is realized by calibrating an image offset matrix of the microscopic vision system and an image Jacobian matrix controlled by the position motion of a part; deducing a relation matrix, and combining a relation matrix calibration method to realize the detection of the angular deviation of the part around the Z axis; the invention is suitable for microscopic visual detection of trans-scale micro-nano device assembly, can detect from multiple angles, and simultaneously detects the rotation angle deviation of parts through relationship derivation.
Description
Technical Field
The invention relates to the technical field of micro-part assembly, in particular to a microscopic visual detection device and a calibration method for cross-scale micro-nano device assembly.
Background
The microscopic vision system of the existing micro-assembly system is mostly composed of multi-path microscopic vision, the multi-path microscopic vision presents a specific layout in space, and the observation of the relative state of parts in the assembly process is realized from different directions; and (3) detecting the position and attitude deviation of the image space of the part by microscopic vision, and realizing the position and attitude detection of the part space based on the information fusion of the multipath microscopic vision by calibrating the multipath microscopic vision relation matrix and combining the calibration of the image space to a Cartesian space relation matrix, thereby realizing the assembly control of the part.
The automated research institute of the Chinese academy of sciences proposes a micro-part space pose detection and alignment method (Juan, xuande, zhang, etc.) based on three-way orthogonal microscopic vision, and a micro-part automatic alignment device and method based on multi-way microscopic vision, and the patent number CN103273310B realizes the detection and pose alignment of the space poses of two parts by calibrating an image Jacobian matrix controlled by three-way microscopic vision servo motion. Harbin university of Physician (Qujiwang, zhang Dapeng, etc.. Microsphere tube precision assembly based on microscopic vision [ J ] high technology communication, 2019,9, 914-924), aiming at the precision assembly task of microspheres and microtubes, a 4-way microscopic vision detection system is constructed, wherein two ways of low-magnification microscopic vision are used for rough positioning at the horizontal orthogonal position, two ways of high-magnification microscopic vision all form a specific angle with the horizontal plane, and the two ways of high-magnification microscopic vision are orthogonally arranged, so that the precise positioning of microspheres and microtubes is realized. The attitude adjustment and the position coarse positioning of the microtube are realized by calibrating a relation matrix from two horizontal microscopic visual image spaces to a Cartesian space; by calibrating a relation matrix from the oblique two-path microscopic visual image space to a Cartesian space, the position of the microtube is accurately aligned.
The current microscopic vision detection system is composed of multiple paths of microscopic vision, and the microscopic vision adopts a layout mode of a space specific angle. The micro-vision detection system has a large space occupation ratio, is not applicable to a micro-assembly system comprising a 6DOF mechanical arm, can only detect the upper surface and the side surface of a part by the existing micro-vision detection system, cannot detect the bottom characteristic of the part, and limits the application range of the micro-assembly system; meanwhile, based on a system calibration technology established by the existing microscopic visual detection system, the conversion from part image space pose deviation detected in different directions to Cartesian space pose deviation is realized, but for the problem of cross-field depth detection in cross-scale micro-nano device assembly, the calibration of an image offset matrix in the microscopic visual focusing process is not considered, so that the cross-field depth detection precision is not high, and the existing calibration method cannot realize the calibration of a relation matrix between top vision and bottom vision of the cross-scale micro-nano device assembly system and cannot realize the detection of the Z-direction angle deviation of the part.
Disclosure of Invention
The invention aims to provide a microscopic vision detection device and a calibration method for cross-scale micro-nano device assembly, which solve the problems of multi-angle detection of micro parts during cross-scale wiener assembly and detection of Z-direction angle deviation of parts in a cross-scale micro-nano device assembly system.
The embodiment of the invention is realized by the following technical scheme: a microscopic vision detection device for cross-scale micro-nano device assembly comprises an operation table and a mechanical arm, wherein the operation table is connected to a horizontal plane and used for assembling micro-nano devices, the mechanical arm is connected with a mechanical arm tail end adapter plate, the mechanical arm tail end adapter plate is connected with a part A holder, the part A holder holds a part A, the operation table is connected with a part B holder, the part B holder holds a part B and comprises a first microscopic vision system and a second microscopic vision system, the first microscopic vision system, the second microscopic vision system and the mechanical arm are all arranged by taking the operation table as a center, optical axes of the first microscopic vision system and the second microscopic vision system are parallel to the horizontal plane, and the first microscopic vision system and the second microscopic vision system form an included angle of approximately 90 degrees on the spatial layout; detecting the front and side features of the micro-nano device; the mechanical arm is arranged right opposite to the second micro-vision system;
the third microscopic vision system is connected with the adapter plate at the tail end of the mechanical arm; detecting the top characteristics of the micro-nano part;
and the optical axis of the fourth microscopic vision system is vertical to the horizontal plane and is used for detecting the bottom characteristics of the micro-nano device.
A calibration method of a microscopic visual detection device assembled by using a trans-scale micro-nano device is characterized by comprising the following steps:
step S1: establishing a coordinate system of a cross-scale micro-nano device assembly system, including a first microscopic vision system coordinate system P w1 (ii) a Second microscopic visual system coordinate system Pw2 (ii) a Third microscopic Vision System coordinate System P w3 (ii) a Fourth microscopic visual coordinate system P w4 (ii) a Operating table coordinate system P w5 (ii) a Arm end coordinate system P w6 (ii) a Mechanical arm base coordinate system P w (ii) a Cartesian space coordinate system P wo And all the coordinate systems are established according with the right-hand rule; converting the image space variation into Cartesian space motion variation through the calibration relation, and realizing detection;
step S2: image shift matrix J for a first micro vision system by active motion of the first and second micro vision systems, respectively B1 Image shift matrix J with second microscopic vision system B2 Calibrating;
and step S3: calibrating the position motion control image jacobian matrix of the first microscopic vision system and the second microscopic vision system for the part A and the part B in the mechanical arm base coordinate system P w Lower X, Y, Z axis position deviation d X 、d Y 、d Z Calculating (1);
step S4; calibrating the image jacobian matrix of the angular motion control of the first microscopic vision system and the second microscopic vision system, and calculating the angular deviation around the X axis and the Y axis of the part A and the part B;
step S5: calibrating a relation matrix of the third microscopic vision system and the fourth microscopic vision system for the delta gamma of the rotation angle deviation of the part A and the part B Z And (4) calculating.
Further, J is calculated according to the following formula B1 And J B2 ：
Calculating to obtain J by using a linear least square method B1 The image shift matrix J of the second micro-vision system, as shown in equation (2) B2 By the reaction of with J B1 The same calibration method can be obtained
J B1 ＝UL T (LL T ) -1 (2)
Wherein n is the number of times the first microscopic vision system moves along the focusing axis; Δ l i (i =1, 2.. N) is a first micro-vision system motion variation; (Δ u) i ，Δv i ) Is the image coordinate variation of the calibration object.
Further, d is calculated according to the following formula X 、d Y 、d Z ：
Wherein X is the mechanical arm along the base coordinate system P w Formed by n movementsC is the image position variation matrix of the calibration object formed by n movements, and the image jacobian matrix J can be obtained by using the least square method V As shown in formula (4)
J V ＝CX T (XX T ) -1 (4)
Through J V Calculating to obtain the space position deviation (d) of the part A and the part B X ，d Y ，d Z ) As shown in the formula (5),
wherein
And
image offset matrices respectively representing the first and second microscopic visions calibrated in step 1, wherein
Respectively focusing the motion variable quantity of the part A and the part B along the focusing axis for the first micro-vision system,
for the second micro-vision system to focus the motion variation of part A and part B along the focusing axis, respectively, (Δ u) 1 ，Δv 1 ) And (Δ u) 2 ，Δv 2 ) The position deviation of the images of the part A and the part B in the first microscopic vision system and the second microscopic vision system respectively.
A calibration method of a microscopic visual detection device assembled by using a trans-scale micro-nano device calculates delta alpha according to the following formula X 、Δβ Y ：
Wherein χ is the coordinate system P of the calibration object along the base of the robot w1 θ is the n-degree angle variation matrix of the calibration object in the image space. By using the least square method, the image Jacobian matrix J in the formula (6) can be obtained R As shown in the formula (7)
J R ＝χθ T (θθ T ) -1 (7)
Through J R Calculating to obtain the space angle deviation delta alpha of the part A and the part B X 、Δβ Y As shown in the formula (8),
wherein Δ θ x 、Δθ y The image angle deviation of the part A and the part B in the first microscopic vision system and the second microscopic vision system is respectively.
Further, Δ γ is calculated according to the following formula Z ：
Wherein R is p As a third microscopic vision system coordinate system P w3 And end of arm tool coordinate system P w6 A rotation relationship matrix of (a); (Δ x) w3 ，Δy w3 ，Δz w3 ) Part A and part B in a third microscopic vision system coordinate system P w3 (Δ x) of (A) w6 ，Δy w6 ，Δz w6 ) Is (Δ x) w3 ，Δy w3 ，Δz w3 ) Conversion to robotic end of arm tool coordinate system Pw6 A positional deviation of (a);
wherein N is a control mechanical armAt the end of the robot arm tool coordinate system P w6 The number of movements in the XY plane (n.gtoreq.3), (Δ x) w6i ，Δy w6i 0) are robot arm movement variations (i =1, 2.. N) and (Δ u @) w3i ，Δv w3i ) Is the image coordinate variation, k, of the calibration object in the third microscopic vision system w3 Is the image scale factor of the third microscopic vision system;
R p ＝MN T (NN T ) -1 /k w3 (11)
wherein R is p Is calculated by using a linear least square method;
wherein (Δ x) w6 ，Δy w6 ，Δz w6 ) For part A and part B in the tool coordinate system P at the end of the robot arm w6 (Δ x) of (A) w ，Δy w ，Δz w ) Is (Δ x) w6 ，Δy w6 ，Δz w6 ) Is converted into a basic coordinate system P w The position deviation of (a), beta,
delta can be directly read by a demonstrator of the mechanical arm without calibration again;
wherein (Δ x) w4 ，Δy w4 ，Δz w4 ) Part A and part B in a fourth microscopic vision system coordinate system P w4 A positional deviation of (a);
wherein n is the mechanical arm in the mechanical arm base coordinate system P w XY plane movement number (n.gtoreq.3), (Δ x) w4i ，Δy w4i 0) (i =1, 2.. N) is the amount of change in the robot arm movement; (Δ u) w4i ，Δv w4i ) The coordinate variation of the image of the calibration object in the fourth microscopic vision system is obtained;
R o ＝KL T (LL T ) -1 /k w4 (15)
wherein R is o Calculating by using a linear least square method;
wherein R is m Is a third microscopic vision system coordinate system P w3 And a fourth microscopic vision system coordinate system P w4 The rotation matrix of (a);
γ ZB4 ＝R m γ ZB3 (17)
wherein gamma is ZB4 For part B in a third microscopic vision system coordinate system P w3 Attitude gamma about the Z axis ZB3 Transformed in the fourth microscopic vision system coordinate system P w4 A posture about the Z-axis;
Δγ z ＝Δγ ZA4 -Δγ ZB4 (18)
wherein Δ γ ZA4 For part A in the fourth microscopic vision system coordinate system P w4 Attitude detection about the Z-axis.
The technical scheme of the invention at least has the following advantages and beneficial effects: the relative pose states of the parts in the assembly process are detected from four different angles by a structural mode of three-way fixed microscopic vision and one-way follow-up microscopic vision. One path of follow-up microscopic vision is mounted at the tail end of the 6DOF tandem mechanical arm, so that the detection of the top characteristics of the part is realized; three paths of fixed microscopic vision are orthogonally arranged on a horizontal plane, so that the feature detection of the side surface and the front surface of the part is realized, and the optical axis of the other path of microscopic vision is vertical to the horizontal plane, so that the feature detection of the part from the bottom of the part is realized; meanwhile, the conversion of the detection deviation of the pose of the part image into the Cartesian space pose deviation is realized through a calibration method, and the detection of the position deviation of X, Y and Z axes of the part under the condition of cross-field depth detection is realized through calibrating an image offset matrix of a microscopic vision system and an image jacobian matrix controlled by the position motion of the part; secondly, detecting the angular deviation of the part around the X axis and the Y axis through calibrating an image Jacobian matrix controlled by angular motion; and then, by deducing a relation matrix of the top vision and the bottom vision and combining the calibration of key parameters in the relation matrix, the detection of the angular deviation of the part around the Z axis is realized, the detection of the 6DOF space pose of the part in the assembling process of various cross-scale micro-nano devices is finally realized, and the detection precision is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a cross-scale micro-nano device assembling system of a micro-vision detection device for cross-scale micro-nano device assembly according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a cross-scale micro-nano device assembly system coordinate system of a calibration method of a micro-vision detection device assembled by using a cross-scale micro-nano device according to an embodiment of the present invention;
fig. 3 is a small sphere image detection result of the microscopic visual detection device assembled by the trans-scale micro-nano device according to the embodiment of the invention; wherein (a) is a pellet image detection result of the first microscopic vision system; (b) Is a schematic diagram of a detection result of the bead image of the second microscopic vision system;
fig. 4 is a metal rod image detection result of the microscopic visual detection device for assembling the trans-scale micro-nano device according to the embodiment of the invention; wherein (a) is a metal rod image detection result of the first microscopic vision system; (b) A schematic diagram of the metal rod image detection result of the second micro-vision system;
fig. 5 is a small sphere image detection result after the movement of a small sphere of a third microscopic vision system of the microscopic vision detection apparatus for cross-scale micro-nano device assembly provided by the embodiment of the present invention; wherein (a) is a small ball image detection result after the first movement of the small ball of the third microscopic vision system; (b) Detecting the result of the small ball image of the third microscopic vision system after the small ball moves for the second time; (c) The result of the detection of the small ball image after the third movement of the small ball of the third microscopic vision system is obtained; (d) A schematic diagram of a detection result of a small ball image after a small ball of a third microscopic vision system moves for the fourth time;
fig. 6 is a small ball image detection result after a small ball of a fourth microscopic vision system of the microscopic vision detection apparatus for cross-scale micro-nano device assembly according to the embodiment of the present invention moves for the first time; wherein (a) is a small ball image detection result after the first movement of a small ball of the fourth microscopic vision system; (b) The result of the detection of the small ball image after the second movement of the small ball of the fourth microscopic vision system is obtained; (c) The result of the detection of the small ball image after the third movement of the small ball of the fourth microscopic vision system is obtained; (d) A schematic diagram of a detection result of a small ball image after a small ball of a fourth microscopic vision system moves for the fourth time;
an icon: 1-a first microscopic vision system, 2-a second microscopic vision system, 3-a third microscopic vision system, 4-a fourth microscopic vision system, 5-an operation table, 6-a mechanical arm, 7-a part A, 8-a part B, 9-a mechanical arm tail end adapter plate, 10-a part A holder, 11-a part B holder, 21-a first microscopic vision system coordinate system P w1 22-second microscopic visual system coordinate system P w2 23-third microscopic Vision System coordinate System P w3 24-fourth microscopic visual coordinate System P w4 25-Table coordinate System P w5 26-robot arm end coordinate System P w6 27-basic coordinate system of the robot arm P w 28-Cartesian space coordinate System P wo 。
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
Examples
The embodiment provides a microscopic vision detection device for cross-scale micro-nano device assembly, as shown in fig. 1, the device comprises an operation platform 5 connected to a horizontal plane and used for assembling a micro-nano device, and a mechanical arm 6 used for moving the micro-nano device, wherein the mechanical arm is connected with a mechanical arm tail adapter plate 9, the mechanical arm tail adapter plate 9 is connected with a part a clamp 10, the part a clamp 10 clamps a part A7, the operation platform 5 is connected with a part B clamp 11, the part B clamp 11 clamps a part B8, the device comprises a first microscopic vision system 1 and a second microscopic vision system 2, the first microscopic vision system 1, the second microscopic vision system 2 and the mechanical arm 6 are all arranged by taking the operation platform 5 as a center, optical axes of the first microscopic vision system 1 and the second microscopic vision system 2 are all parallel to the horizontal plane, and form an included angle of approximately 90 degrees on a spatial layout; detecting the front and side features of the micro-nano device; the mechanical arm 6 is arranged right opposite to the second micro-vision system 2; the third microscopic vision system 3 is connected 9 with the adapter plate at the tail end of the mechanical arm; detecting the top characteristics of the micro-nano part; a fourth microscopic vision system 4, wherein an optical axis of the fourth microscopic vision system 4 is vertical to the horizontal plane and is used for detecting bottom characteristics of the micro-nano device;
it is worth mentioning that one path of follow-up microscopic vision is mounted at the tail end of the 6DOF tandem mechanical arm, so that the detection of the top features of the parts is realized; three paths of fixed microscopic vision are orthogonally arranged on a horizontal plane, so that the feature detection of the side surface and the front surface of the part is realized, and the optical axis of the other path of microscopic vision is vertical to the horizontal plane, so that the feature detection of the part from the bottom of the part is realized; the relative pose states of the parts in the assembly process are detected from four different angles by a structural mode of three-way fixed microscopic vision and one-way follow-up microscopic vision.
The coordinate system establishment of the trans-scale micro-nano device assembly system comprises a first microscopic vision system coordinate system P as shown in figure 2 w1 21; second microscopic Vision System coordinate System P w2 22; third microscopic Vision System coordinate System P w3 23; fourth microscopic visual coordinate System P w4 24; operating table coordinate system P w5 25; arm end coordinate system P w6 26; mechanical arm base coordinate system P w 27; cartesian space coordinate system P wo 28. All coordinate systems are established according to the right-hand rule. Cartesian space coordinate system P wo The XY plane of 28 remains parallel to the horizontal plane. Mechanical arm base coordinate system P w 27 the center of the robot chassis is the origin of coordinates, which is related to the Cartesian space coordinate system P wo 28 remain parallel in both XY directions. Arm end coordinate system P w6 26 the center of the end of the arm is used as the origin of coordinates, and the end of the arm coordinate system P w6 26 and a robot arm base coordinate system P w The relation 27 is determined by the factory setting of the robot arm manufacturer and can be read in real time by the robot arm demonstrator. Along with the change of the pose of the mechanical arm, the tail end coordinate system P of the mechanical arm w6 26 and robot arm base coordinate system P w 27 assume a particular angle. Operating table coordinate system P w5 25 with the center of the bottom of the table as the origin of coordinates, which are related to the Cartesian space coordinate System P wo 28 remain parallel and co-directional in the XY direction. The first microscopic vision system 1 and the second microscopic vision system 2 are both arranged on a horizontal plane, and are arranged orthogonally to each other. First microscopic visual system coordinate system P w1 21 the intersection point of the optical axis of the micro-vision lens and the CCD target surface is used as the origin of coordinates which is in a Cartesian space coordinate system P wo 28 remain parallel and co-directional in both XY directions. Second microscopic visual system coordinate system P w2 22 the intersection point of the optical axis of the micro-vision lens and the CCD target surface is used as the origin of coordinates which is in a Cartesian space coordinate system P wo 28 remain parallel and co-directional in both XY directions. The third microscopic vision system 3 is arranged at the tail end of the mechanical arm 6, and the coordinate system P of the third microscopic vision system w3 23 the intersection point of the optical axis of the microscopic vision lens and the CCD target surface is used as the origin of coordinates and the terminal coordinate system P of the mechanical arm w6 26 remain parallel in the Z-axis direction. The fourth microscopic vision system 4 is mounted on a horizontal plane. Fourth microscopic visual coordinate System P w4 24 the intersection point of the optical axis of the microscopic vision lens and the CCD target surface is used as the origin of coordinates and the terminal coordinate system P of the mechanical arm w6 26 remain parallel in the Z-axis direction. And converting the image space variation into Cartesian space motion variation through the calibration relation, so as to realize detection.
Realizing that the part A7 and the part B8 are in a mechanical arm base coordinate system P by calibrating the image Jacobian matrix of the position motion control of the first microscopic vision system 1 and the second microscopic vision system 2 w Position deviation d of X, Y and Z axes at 27 deg.C X 、d Y 、d Z Calculating; the angular deviation delta alpha of the part A7 and the part B8 around the X axis and the Y axis is realized by calibrating the image Jacobian matrix controlled by the angular motion of the first microscopic vision system 1 and the second microscopic vision system 2 X 、Δβ Y Calculating (1); the rotation angle deviation Delta gamma of the part A7 and the part B8 is realized through the third microscopic vision system 3 and the fourth microscopic vision system 4 Z The calculation of (2). The calibration method of the trans-scale micro-nano device assembly system comprises the following steps:
step S1: realizing the image offset matrix J of the first micro-vision system 1 by the active motion of the first micro-vision system 1 and the second micro-vision system 2 respectively B1 Image shift matrix J with second microscopic vision system B2 And (4) calibrating. The image shift matrix describes the amount of image point shift caused by the linear movement of the micro-vision system along the focal axis. The calibration object is fixed in the visual field of the first microscopic vision system 1, and the first microscopic vision system 1 moves for n times (n is more than or equal to 3) along the focusing axis to obtain n +1 known positions. The first micro-vision system 1 moves by an amount of change (i =1, 2.. N)The coordinate variation of the image of the calibration object is obtained by image processing technology and is marked as (delta u) i ，Δv i ) Then the relationship shown in equation (1) exists.
Calculating to obtain J by using a linear least square method B1 As shown in equation (2). Image shift matrix J of the second micro vision system 2 B2 By the reaction of with J B1 The same calibration method can be obtained.
J B1 ＝UL T (LL T ) -1 (2)
Step 2: calibrating the image Jacobian matrix of the position motion control of the first microscopic vision system 1 and the second microscopic vision system 2 to realize that the part A7 and the part B8 are in the base coordinate system P of the mechanical arm w Position deviation d of X, Y, Z axis at 27 deg.C X 、d Y 、d Z The calculation of (2). Firstly, calibrating an image Jacobian matrix J from the translational motion variation of the mechanical arm 6 to the translational motion variation of an image space V : installing a calibration object at the tail end of the mechanical arm 6, and enabling the mechanical arm 6 to be along a mechanical arm base coordinate system P w 27 move n times (n is more than or equal to 3), and respectively record the motion amount (delta x) of the mechanical arm 6 i ，Δy i ，Δz i ) (i =1, 2.. N), the first micro-vision system 1 and the second micro-vision system 2 vary the movement amount along the focusing axis after each movement of the mechanical arm 6 to achieve the focusing of the calibration object
And with
And the coordinate variation (Δ u) of the calibration object in the first micro-vision system 1 1i ，Δv 1i ) And the amount of coordinate change (Δ u) in the second micro-vision system 2 2i ，Δv 2i ). The variation of the image spatial motion with respect to the variation of the cartesian spatial motion is shown in equation (3).
Wherein X is the mechanical arm 6 along the base coordinate system P w The motion variation matrix formed by n movements of 27, and C is the image position variation matrix of the calibration object formed by n movements.
And with
The image offset matrices of the first and second microscopic visions respectively marked in step 1 are represented. By using least square method, the Jacobian matrix J of the image can be obtained V As shown in equation (4).
J V ＝CX T (XX T ) -1 (4)
Then, through J V Calculating to obtain the spatial position deviation (d) of the part A7 and the part B8 X ，d Y ，d Z ) As shown in formula (5), wherein
For the first micro vision system 1 to focus the motion variations of the part A7 and the part B8 along the focusing axis respectively,
to focus the motion variations of part A7 and part B8 along the focusing axis respectively for the second micro vision system 2, (Δ u) 1 ，Δv 1 ) And (Δ u) 2 ，Δv 2 ) The position deviation of the images of the part A7 and the part B8 in the first micro-vision system 1 and in the second micro-vision system 2, respectively.
And step S3: calibrating a first microscopic vision system1 and a second microscopic vision system 2 to realize the angular deviation delta alpha of the part A and the part B around the X axis and the Y axis X 、Δβ Y The calculation of (2). Firstly, calibrating an image Jacobian matrix J from the angle variation of the mechanical arm 6 to the image space angle variation R : the mechanical arm 6 drives the calibration objects to respectively wind around a mechanical arm base coordinate system P w1 21 the X axis and the Y axis move for n times (n is more than or equal to 3), and the angle variation quantity of the mechanical arm around the X axis and the Y axis of the base coordinate system is respectively recorded as delta alpha i And Δ β i (i =1,2,. N), and the angular variation Δ θ of the calibration object in the first microscopic vision system 1 xi The angle change amount delta theta of the second microscopic vision system 2 yi . The robot arm 6 follows the base coordinate system P w1 The spatial motion variation of 21 is related to the image spatial motion variation as shown in equation (6).
Wherein χ is the coordinate system P of the calibration object along the base of the robot w1 21, and θ is an n-degree angle variation matrix of the calibration object in the image space. By using the least square method, the image Jacobian matrix J in the formula (6) can be obtained R As shown in equation (7).
J R ＝χθ T (θθ T ) -1 (7)
Then through J R Calculating to obtain the space angle deviation delta alpha of the part A and the part B X 、Δβ Y As shown in equation (8), where Δ θ x 、Δθ y The image angle deviation of the part A7 and the part B8 in the first micro-vision system 1 and the second micro-vision system 2 is respectively.
And step S4: calibrating the third microscopic vision system 3 and the fourth microscopic vision system4, the deviation delta gamma of the rotation angles of the part A7 and the part B8 is realized Z And (4) calculating.
Step S4-1: deriving a third microscopic System coordinate System P w3 23 and robot end tool coordinate system P w6 26 matrix R of rotation relationships p . If the mechanical installation angle error is not considered, the third microscopic vision system coordinate system P w3 23 clockwise rotates around Z axis by alpha and can be matched with a tool coordinate system P at the tail end of the robot arm w6 26 are parallel, part A7 and part B8 are in a third microscopic vision system coordinate system P w3 Position deviation (Δ x) of 23 w3 ，Δy w3 ，Δz w3 ) Conversion to the robot end tool coordinate system P w6 26 position deviation (Δ x) w6 ，Δy w6 ，Δz w6 ) As shown in equation (9).
Clearly displaying the calibration object in the focal plane of the third micro-vision system 3, and controlling the mechanical arm to be in the tool coordinate system P at the tail end of the mechanical arm w6 26, moving for n times (n is more than or equal to 3) in the XY plane, and respectively recording the motion variation (delta x) of the mechanical arm w6i ，Δy w6i 0) (i =1,2.. N) and the amount of change in image coordinates (Δ u) of the calibration object at the third micro-vision system 3 w3i ，Δv w3i ). Then there is a relationship as shown in equation (10) where k w3 Is the image scale factor of the third microscopic vision system 3.
Calculating to obtain R by using linear least square method p As shown in equation (11).
R p ＝MN T (NN T ) -1 /k w3 (11)
Step S4-2: deriving a robot arm end-of-arm tool coordinate system P w6 26 and a robot base coordinate system P w 27 ofAnd rotating the relation matrix. Part A7 and part B8 in the end of the arm tool coordinate system P w6 26 position deviation (Δ x) w6 ，Δy w6 ，Δz w6 ) Is converted to be in the base coordinate system P w 27 position deviation (Δ x) w ，Δy w ，Δz w ) As shown in equation (12). At the present state, the tool coordinate system P at the end of the robot arm w6 26 first winding P w6 26 is rotated clockwise by an angle beta about the X-axis and then around P w6 26 clockwise angle of rotation of the Y-axis
Last around P w6 26 clockwise rotation angle delta of Z axis with respect to the robot arm base coordinate system P w 27 are parallel.
Due to the tool coordinate system P at the end of the robot arm w6 26 and a robot base coordinate system P w The relationship of 27 is set by the robot arm at the time of shipment. The beta is expressed by the beta-beta ratio,
delta can be directly read out through a demonstrator of the mechanical arm, and is not required to be calibrated again.
Step S4-3: deriving a fourth microscopic Vision System coordinate System P w4 24 and a robot base coordinate system P w 27 matrix R of rotation relationships o . Because the fourth microscopic vision system and the mechanical arm are both arranged on the base platform, if the error of the mechanical installation angle is not considered, the coordinate system P of the fourth microscopic vision system w4 24 clockwise about the Z-axis and a robot base coordinate system P w 27 are parallel. Part A7 and part B8 in a fourth microscopic Vision System coordinate System P w4 Position deviation (Δ x) of 24 w4 ，Δy w4 ，Δz w4 ) Conversion to the base coordinate System P of the robot arm w The positional deviation of 27 is shown in equation (13).
The calibration object is clearly displayed in the focal plane of the fourth micro-vision system 4, and then the mechanical arm is controlled in the mechanical arm base coordinate system P w 27 move n times (n is more than or equal to 3) in the XY plane, and respectively record the motion variation (delta x) of the mechanical arm w4i ，Δy w4i 0) (i =1,2.. N) and the amount of change in image coordinates (Δ u) of the calibration object at the fourth micro-vision system 4 w4i ，Δv w4i ). Then there is a relationship as shown in equation (14) where k w4 Is the image scale factor of the fourth micro vision system 4.
Calculating to obtain R by using linear least square method o As shown in equation (15).
R o ＝KL T (LL T ) -1 /k w4 (15)
By deriving formula (9), formula (12), and formula (13), the third microscopic vision system coordinate system P can be obtained w3 23 and fourth microscopic Vision System coordinate System P w4 Rotation matrix R of 24 m . Part A7 and part B8 in a third microscopic vision system coordinate system P w3 23 to a fourth microscopic vision system coordinate system P w4 The positional deviation of 24 is shown in equation (16).
Step S4-4: realization of a robot arm end-of-arm tool coordinate System P by motion control w6 26 and a robot base coordinate system P w 27 at P w 27 XY plane parallel, regardless of mechanical mounting errors, parts A7 and P at the end of the robot arm w The XY planes of 27 are parallel. Because the operating platform is also arranged on the base platform, if the error of the mechanical installation angle is not considered, the parts B8 and P on the operating platform w The XY planes of 27 are parallel.The part B is in the third microscopic vision system coordinate system P w3 23, into a fourth microscopic visual system coordinate system P w4 24 about the Z-axis, as shown in equation (17).
γ ZB4 ＝R m γ ZB3 (17)
Part A7 in the fourth microscopic visual system coordinate system P w4 When the posture of 24 about the Z axis is detected, the rotational posture calculation formula of the part A7 and the part B8 is shown in formula (14).
Δγ z ＝Δγ ZA4 -Δγ ZB4 (18)
The specific implementation mode is as follows:
step S1: realizing the image offset matrix J of the first micro vision system 1 by the active movement of the first micro vision system 1 and the second micro vision system 2 respectively B1 Image shift matrix J with the second micro-vision system 2 B2 And (4) calibrating.
1) And the step calibration block is used for calibration, and is in a step shape and provided with five steps. The step calibration block is placed in the image visual field of the first microscopic vision system 1, so that the first step is imaged clearly, the current image position coordinate of the first step is recorded, and the image position coordinate (u) of the central point of the step calibration block is obtained by calculating the geometric priori knowledge and the image proportion coefficient of the step calibration object 0 ,v 0 )。
2) The first micro-vision system 1 moves along the focusing axis of the camera to clearly present the second step in the visual field of the first micro-vision system, and the movement l of the first micro-vision system 1 is recorded 1 And recording the image position coordinates of the second step after the movement. Calculating the image position coordinate (u) of the central point of the step calibration block by the geometric priori knowledge and the image proportion coefficient of the step calibration object 1 ,v 1 ) Obtaining the image position deviation (delta u) of the central point of the step calibration object 1 ,Δv 1 )。
3) Repeating the action process of the step 2), and sequentially focusing the third step, the fourth step and the fifth step to obtain four groups of first microscopic vision systems1 amount of exercise l i (i =1,2,3,4) and the coordinate difference (Δ u) of the center point image position before and after the movement of the step marker i ,Δv i )。
4) Substituting the data into equation (2) to obtain an image offset matrix J B1 。
The image offset matrix J of the second microscopic vision system 2 is obtained by adopting the calibration of the process B2 。
Step S2: calibrating the position motion of the first microscopic vision system 1 and the second microscopic vision system 2 to control the jacobian matrix of the image, and realizing the X-axis, Y-axis and Z-axis position deviation d of the sleeve part and the golden cavity part X 、d Y 、d Z And (4) calculating.
1) The small ball is placed in the image visual fields of the first microscopic visual system 1 and the second microscopic visual system 2, and the small ball is clearly imaged by adjusting the space positions of the first microscopic visual system 1 and the second microscopic visual system 2. Recording the position coordinates (u) of the circle center image of the small ball in the first microscopic vision system 1 1o ,v 1o ) And the position coordinates (u) of the circle center image of the second micro vision system 2 2o ,v 2o ) As shown in fig. 3.
2) The ABB mechanical arm drives the small ball to move in the space, the movement numerical value is random, and the movement numerical value (delta x) of the mechanical arm is recorded 1 ,Δy 1 ,Δz 1 ). After the movement, the first microscopic vision system 1 and the second microscopic vision system 2 focus the small balls respectively, and firstly, the movement variation of the first microscopic vision system 1 and the second microscopic vision system 2 is recorded
And with
Then recording the coordinates (u) of the center of the image circle of the small ball in the first microscopic vision system 1 and the second microscopic vision system 2 11 ,v 11 ) And (u) 21 ,v 21 ) Obtaining the image position deviation (delta u) 11 ,Δv 11 ) And (Δ u) 21 ,Δv 21 )。
3) Repeating the step 2) five times to obtain five groups respectivelyNumerical value of robot arm movement (Δ x) i ,Δy i ,Δz i ) (i =1, 2.., 5), the amount of change in the motion of the first and second micro vision systems 1,2
And
and the image position deviation (delta u) of the center of the small ball before and after the movement 1i ,Δv 1i ) And (Δ u) 2i ,Δv 2i )。
4) Substituting the data into the formula (4) to obtain an image Jacobian matrix J V 。
5) Respectively calculating the image position deviation (delta u) of the sleeve and the golden chamber in the first microscopic vision system 1 and the second microscopic vision system 2 by an image feature extraction algorithm 1 ，Δv 1 ) And (Δ u) 2 ，Δv 2 ) Substituting the data into equation (5) to calculate d X 、d Y 、d Z 。
And step S3: calibrating the angular motion of the first microscopic vision system 1 and the second microscopic vision system 2 to control the image Jacobian matrix, and realizing the angular deviation delta alpha of the sleeve and the golden cavity around the X axis and the Y axis X 、Δβ Y And (4) calculating.
1) Controlling the position and posture adjustment of the metal rod to enable the metal rod to be clearly imaged in the first microscopic vision system 1 and the second microscopic vision system 2, and recording the characteristic angle alpha of the metal rod in the first microscopic vision system 1 1o The characteristic angle of the image at the second microscopic vision system 2 is beta 1o As shown in fig. 4.
2) The ABB mechanical arm drives the metal rod to surround the base coordinate system P of the mechanical arm w 27, the X axis and the Y axis rotate respectively, the motion angle value is random, and the rotation angle value is recorded as delta α1 ,△ β1 ) And recording the image characteristic angle deviation of the metal rod between the first microscopic vision system 1 and the second microscopic vision system 2 as (delta theta) x1 ，△θ y1 )。
3) Repeating the step 2) five times to respectively obtain five groups of rotary motionsValue of platform motion (Δ) αi ,△ βi ) (i =1,2.. 5) and corresponding angular deviation of image features (Δ θ) before and after movement of the metal rod xi ，△θ yi )。
4) Substituting the data into the above formula (7) to obtain an image rotation calibration matrix J R 。
S4, calibrating a relation matrix R of the third microscopic vision system 3 and the fourth microscopic vision system 4 m Realize the rotation angle deviation delta gamma of the sleeve part and the gold cavity part Z And (4) calculating.
1) The small ball is clearly displayed in the focal plane of the third micro-vision system 3, and then the mechanical arm is controlled to be positioned in a tool coordinate system P at the tail end of the mechanical arm w6 26, moving 5 times in the XY plane, and respectively recording the motion variation (delta x) of the mechanical arm w6i ,Δy w6i 0) (i =1,2.. 5) and the amount of change in image coordinates (Δ u) of the calibration object at the third microscopic vision system 3 w3i ，Δv w3i ) As shown in fig. 5. Substituting the data into the formula (11) to calculate R p 。
2) Reading out the beta through a mechanical arm demonstrator,
δ, then R is calculated by the formula (12) v 。
3) Clearly displaying the calibration object in the focal plane of the fourth micro-vision system 4, and controlling the mechanical arm in the mechanical arm base coordinate system P w 27 in XY plane for 5 times, respectively recording the motion variation (Deltax) of the mechanical arm w4i ，Δy w4i 0) (i =1,2,. 5) and the amount of change in image coordinates (Δ u) of the calibration object at the fourth microscopic vision system 4 w4i ，Δv w4i ) As shown in fig. 6. Ro is calculated by the formula (15).
4) R is obtained by calculation of the formula (16) m 。
5) Controlling the posture adjustment of the mechanical arm to ensure that the tool coordinate system P at the tail end of the mechanical arm w6 26 and a robot base coordinate system P w1 21 remain parallel in the horizontal plane, the attitude of the sleeve at the end of the robot arm also remains parallel to the horizontal plane. Attitude of golden chamber on operation deskThe horizontal planes remain parallel. The gold cavity is in the third microscopic vision system coordinate system P w3 Attitude γ of 23 about Z-axis ZB3 Converted into the fourth microscopic vision system coordinate system P by the formula (17) w4 Attitude γ of 24 about Z-axis ZB4 . The sleeve is in the fourth microscopic vision system coordinate system P w4 Attitude about the Z-axis of 24 is detected as Δ γ ZA4 And the rotating posture deviation of the sleeve and the gold cavity is obtained by substituting the rotating posture deviation into the formula (18).
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a microscopic visual inspection device of device assembly is received a little to scale, is including connecting operation panel (5) that are used for assembling the device and arm (6) that are used for removing the device are received a little to the assembly of device are received a little on the horizontal plane, arm (6) are connected with the terminal keysets (9) of arm, the terminal keysets (9) of arm are connected with part A holder (10), part A holder (10) centre gripping has part A (7), operation panel (5) are connected with part B holder (11), part B holder (11) centre gripping has part B (8), its characterized in that includes:
the first microscopic vision system (1) and the second microscopic vision system (2), the first microscopic vision system (1), the second microscopic vision system (2) and the mechanical arm (6) are all arranged by taking the operating table (5) as a center, the optical axes of the first microscopic vision system (1) and the second microscopic vision system (2) are all parallel to the horizontal plane, and the first microscopic vision system and the second microscopic vision system form an included angle of approximately 90 degrees on the spatial layout; detecting the front and side features of the micro-nano device; the mechanical arm (6) is arranged right opposite to the second microscopic vision system (2);
the third microscopic vision system (3), the third microscopic vision system (3) is connected with the adapter plate (9) at the tail end of the mechanical arm; detecting the top characteristics of the micro-nano part;
and the optical axis of the fourth microscopic vision system (4) is vertical to the horizontal plane and is used for detecting the bottom characteristics of the micro-nano device.
2. A calibration method of a microscopic visual detection device assembled by using a trans-scale micro-nano device is characterized by comprising the following steps:
step S1: establishing a coordinate system of a cross-scale micro-nano device assembly system, including a first microscopic vision system coordinate system P w1 (21) (ii) a Second microscopic visual system coordinate system Pw2 (22) (ii) a Third microscopic Vision System coordinate System P w3 (21) (ii) a Fourth microscopic visual coordinate System P w4 (24) (ii) a Operating table coordinate system P w5 (25) (ii) a Mechanical arm end coordinate system P w6 (26) (ii) a Mechanical arm base coordinate system P w (27) (ii) a Cartesian space coordinate system P wo (28) And all the coordinate systems are established according with the right-hand rule; converting the image space variation into Cartesian space motion variation through the calibration relation, and realizing detection;
step S2: using the image shift matrix J of the first micro-vision system (1) by the active movement of the first micro-vision system (1) and the second micro-vision system (2), respectively B1 Image shift matrix J with the second micro-vision system 2 B2 Calibrating;
and step S3: calibrating the position motion controlled image jacobian matrix of the first micro-vision system (1) and the second micro-vision system (2) for the part A (7) and the part B (8) in the coordinate system P of the mechanical arm base (6) w (27) Lower X, Y, Z axis position deviation d X 、d Y 、d Z Calculating (1);
step S4; calibrating the image jacobian matrix of the angular motion control of the first (1) and second (2) micro-vision systems for the angular deviations Deltaalpha around the X-axis and around the Y-axis of the part A (7) and the part B (8) X 、Δβ Y Calculating (1);
step S5: calibrating a relation matrix of the third microscopic vision system (3) and the fourth microscopic vision system (4) for the delta gamma of the rotation angle deviation of the part A (7) and the part B (8) Z And (4) calculating.
3. The method for calibrating a micro-vision inspection apparatus assembled using trans-scale micro-nano devices as claimed in claim 2, wherein J is calculated according to the following formula B1 And J B2 ：
Calculating to obtain J by using a linear least square method B1 The image shift matrix J of the second micro vision system (2) is shown in equation (2) B2 By the reaction of with J B1 The same calibration method can be obtained
J B1 ＝UL T (LL T ) -1 (2)
Wherein n is the number of times the first micro-vision system (1) moves along the focal axis; Δ l i (i =1, 2.. N) is a first micro-vision system motion variation; (Δ u) i ，Δv i ) Is the image coordinate variation of the calibration object.
4. The calibration method of the micro visual inspection device assembled by the trans-scale micro-nano devices according to claim 3, characterized in that d is calculated according to the following formula X 、d Y 、d Z ：
Wherein X is the mechanical arm along the base coordinate system P w (27) C is a matrix of variation in image position of the calibration object formed by the n movements, and the image jacobian matrix J can be obtained by using the least square method V As shown in formula (4)
J V ＝CX T (XX T ) -1 (4)
Through J V Calculating outObtaining the spatial position deviation (d) of the part A and the part B X ，d Y ，d Z ) As shown in the formula (5),
wherein
And
respectively representing the image offset matrixes of the first microscopic vision (1) and the second microscopic vision (2) calibrated in the step 1, wherein
The motion variation of the part A and the part B is focused by a first micro-vision system (1) along a focusing axis respectively,
for the second micro-vision system (2) to focus the variation of the movement of the part A and the part B, respectively, along the focusing axis, (Deltau) 1 ，Δv 1 ) And (Δ u) 2 ，Δv 2 ) The position deviation of the images of the part A (7) and the part B (8) in the first microscopic vision system (1) and the second microscopic vision system (2) respectively.
5. The calibration method of the micro visual inspection device assembled by the trans-scale micro-nano devices according to claim 4, characterized in that the Δ α is calculated according to the following formula X 、Δβ Y ：
Wherein χ is the coordinate system P of the calibration object along the base of the robot w1 (21) Angle change matrix of theta is calibrationAnd (3) an n-degree angle variation matrix of the object in the image space. By using the least square method, the image Jacobian matrix J in the formula (6) can be obtained R As shown in the formula (7)
J R ＝χθ T (θθ T ) -1 (7)
Through J R Calculating to obtain the space angle deviation delta alpha of the part A (7) and the part B (8) X 、Δβ Y As shown in the formula (8),
where Δ θ x 、Δθ y The image angle deviation of the part A (7) and the part B (8) in the first microscopic vision system (1) and the second microscopic vision system (2) respectively.
6. The method for calibrating a micro-vision inspection apparatus using trans-scale micro-nano device assembly according to claim 5, wherein Δ γ is calculated according to the following formula Z ：
Wherein R is p Is a third microscopic vision system coordinate system P w3 (23) And end of arm tool coordinate system P w6 (26) A rotation relationship matrix of (a); (Δ x) w3 ，Δy w3 ，Δz w3 ) The part A (7) and the part B (8) are in a coordinate system P of the third microscopic vision system (3) w3 (23) (Δ x) of (A) w6 ，Δy w6 ，Δz w6 ) Is (Δ x) w3 ，Δy w3 ，Δz w3 ) Conversion to the end of arm tool coordinate system Pw6 (26) A positional deviation of (a);
wherein N is a tool coordinate system P for controlling the mechanical arm at the tail end of the mechanical arm w6 (26) The number of movements in the XY plane (n.gtoreq.3), (Δ x) w6i ，Δy w6i 0) are robot arm movement variations (i =1, 2.. N) and (Δ u @) w3i ，Δv w3i ) Is the image coordinate variation, k, of the calibration object in the third micro-vision system (3) w3 Is the image scale factor of the third microscopic vision system (3);
R p ＝MN T (NN T ) -1 /k w3 (11)
wherein R is p Is obtained by calculation by utilizing a linear least square method;
wherein (Δ x) w6 ，Δy w6 ，Δz w6 ) For part A (7) and part B (8) in the end of the arm tool coordinate system P w6 (26) (Δ x) of (c) w ，Δy w ，Δz w ) Is (Δ x) w6 ，Δy w6 ，Δz w6 ) Is converted into a basic coordinate system P w (27) The position deviation of (a), beta,
delta can be directly read by a demonstrator of the mechanical arm without calibration again;
wherein (Δ x) w4 ，Δy w4 ，Δz w4 ) Part A and part B are in a fourth microscopic vision system coordinate system P w4 (24) A positional deviation of (a);
wherein n is the mechanical arm in the mechanical arm base coordinate system P w (27) The number of movements in the XY plane (n.gtoreq.3), (Δ x) w4i ，Δy w4i 0) (i =1, 2.. N) is the amount of change in the robot arm movement; (Δ u) w4i ，Δv w4i ) The coordinate variation of the image of the calibration object in the fourth micro-vision system (4);
R o ＝KL T (LL T ) -1 /k w4 (15)
wherein R is o The calculation is carried out by utilizing a linear least square method;
wherein R is m As a third microscopic vision system coordinate system P w3 (23) And a fourth microscopic vision system coordinate system P w4 (24) The rotation matrix of (a);
γ ZB4 ＝R m γ ZB3 (17)
wherein gamma is ZB4 For part B (8) in a third microscopic vision system coordinate system P w3 (23) Attitude gamma about the Z axis ZB3 Transformed in the fourth microscopic visual system coordinate system P w4 (24) A posture about the Z-axis;
Δγ z ＝Δγ ZA4 -Δγ ZB4 (18)
wherein Δ γ ZA4 For part A (7) in a fourth microscopic vision system coordinate system P w4 (24) Attitude detection about the Z-axis.
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