CN207188322U - Multi-size glass substrate cleaning equipment - Google Patents
Multi-size glass substrate cleaning equipment Download PDFInfo
- Publication number
- CN207188322U CN207188322U CN201721159637.0U CN201721159637U CN207188322U CN 207188322 U CN207188322 U CN 207188322U CN 201721159637 U CN201721159637 U CN 201721159637U CN 207188322 U CN207188322 U CN 207188322U
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- China
- Prior art keywords
- roller
- limited wheel
- glass substrate
- frame
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 97
- 239000011521 glass Substances 0.000 title claims abstract description 94
- 239000000758 substrate Substances 0.000 title claims abstract description 92
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000007921 spray Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- Cleaning In General (AREA)
Abstract
The embodiment of the utility model discloses a multi-size glass substrate cleaning device, which comprises a frame; the conveying rollers are rotatably arranged on the rack side by side, and a gap is formed between at least one pair of adjacent conveying rollers; the limiting assembly comprises a first roller and a second roller which are oppositely arranged, and the first connecting rod and the second connecting rod can move along the axial direction of the conveying roller so that the glass substrate is positioned between the first roller and the conveying roller as well as between the second roller and the conveying roller; the driving device is used for driving the conveying roller and the first roller and the second roller to rotate; the cleaning assembly comprises an upper cleaning box positioned above the conveying roller and a lower cleaning box positioned below the conveying roller, and a plurality of spray heads are arranged on the upper cleaning box and the lower cleaning box. The embodiment of the utility model provides a simple structure, convenient to use not only can improve work efficiency, and reduction in production cost can also satisfy customer's multiple demand.
Description
Technical field
It the utility model is related to electronic technology field, more particularly to a kind of more size glass substrates cleaning equipments.
Background technology
Glass substrate be one of key foundation material of FPD industry, especially liquid crystal display primary structure into
Point, glass substrate needs to carry out plated film during liquid crystal display is processed into, and generally uses sputter coating,
Therefore to ensure coating effects, have to thoroughly clean glass substrate before plated film.
The equipment that the surface clean before processing procedure is done for glass substrate of industry production at present is mostly single-rack, and it can only
It is corresponding to clean single glass substrate size, i.e., multiple sizes can not be corresponded to, such as client or turn of the market demand, then must be entered
The certain improvement project of row, could correspond to particular glass substrate size, this just not only causes operating efficiency low, and can cause
Production cost is too high, it is impossible to meets a variety of demands of client.
Utility model content
The utility model embodiment provides a kind of more size glass substrates cleaning equipments, and its is simple in construction, easy to use, no
Operating efficiency can be only improved, reduces production cost, moreover it is possible to meet a variety of demands of client.
On the one hand, the utility model embodiment provides a kind of more size glass substrates cleaning equipments, more dimension glass
Substrate cleaning apparatus includes：
Frame；
Multiple transfer rollers, rotationally it is disposed side by side in the frame, and is set between at least one pair of adjacent transfer roller
There is gap；
Limit assembly, including the first roller and the second roller being oppositely arranged, first roller are fixed on one first company
On extension bar, second roller is fixed in one second connecting rod, and the both ends of the head rod are separately fixed at the machine
On two relative sides of frame, the both ends of second connecting rod are separately fixed at two relative sides of the frame
On, and the head rod and second connecting rod can move along the axial direction of the transfer roller, so that glass
Substrate is between first roller and the second roller and the transfer roller；
Drive device, for driving the rotation of the transfer roller and first roller and the second roller, so that glass
The tangential direction that substrate rotates along the transfer roller is moved, wherein the rotation direction of first roller and the second roller with
The rotation direction of the transfer roller is opposite；
Cleaning assembly, it is arranged in the frame, for cleaning the glass substrate.
Optionally, the limit assembly also includes the limit of first on the head rod by drive device driving
Position wheel and the second position-limited wheel in second connecting rod, first position-limited wheel and the second position-limited wheel are respectively positioned on any
In the gap, and the glass substrate is between first position-limited wheel and the second position-limited wheel, the first spacing rotation
The tangential direction that dynamic tangential direction and second position-limited wheel rotate is identical with the direction of motion of the glass substrate.
Optionally, first position-limited wheel and the second position-limited wheel be cross section radius be gradually reduced truncated cone-shaped limit
Position wheel.
Optionally, it is equipped with gap between each pair transfer roller.
Optionally, at least one first position-limited wheel and at least one second limit are equipped between each gap
Position wheel, the magnitude range in the gap is 5-20mm.
Optionally, the limit assembly includes three pairs of evenly spaced first rollers and the second roller being oppositely arranged.
Optionally, the first roller and the second roller that one pair of which is oppositely arranged are arranged on one end of the frame, another
It is arranged on the centre position of the frame to the first roller being oppositely arranged and the second roller, the first of last a pair of opposing
Roller and the second roller are arranged on the other end of the frame.
Optionally, the cleaning assembly is including the upper cleaning box above the transfer roller and positioned at the transfer roller
The lower cleaning box of lower section, the upper cleaning box and lower cleaning box are fixed in the frame by fix bar, and it is described on
Multiple shower nozzles are equipped with cleaning box and lower cleaning box.
Optionally, the quantity of the upper cleaning box is two, and is evenly distributed in the surface of the transfer roller；It is described
The quantity of lower cleaning box is two, and is evenly distributed in the underface of the transfer roller.
On the other hand, the utility model embodiment additionally provides a kind of more size glass substrates cleaning equipments, more sizes
Cleaning glass substrate equipment includes：
Frame；
Multiple transfer rollers, rotationally it is disposed side by side in the frame, between wherein at least a pair adjacent transfer rollers
Provided with gap；
Limit assembly, including the first roller and the second roller being oppositely arranged, first roller are fixed on one first company
On extension bar, second roller is fixed in one second connecting rod, and the both ends of the head rod are separately fixed at the machine
On two relative sides of frame, the both ends of second connecting rod are separately fixed at two relative sides of the frame
On, and the head rod and second connecting rod can move along the axial direction of the transfer roller, so that glass
Substrate is between first roller and the second roller and the transfer roller；
Drive device, for driving the rotation of the transfer roller and first roller and the second roller, so that glass
The tangential direction that substrate rotates along the transfer roller is moved, wherein the rotation direction of first roller and the second roller with
The rotation direction of the transfer roller is opposite；
Cleaning assembly, it is arranged in the frame, for cleaning the glass substrate；
Wherein, the limit assembly also includes spacing by first on the head rod of drive device driving
Wheel and the second position-limited wheel in second connecting rod, first position-limited wheel and the second position-limited wheel are respectively positioned on any institute
State in gap, and the glass substrate, between first position-limited wheel and the second position-limited wheel, first position-limited wheel rotates
Tangential direction and second position-limited wheel rotate tangential direction it is identical with the direction of motion of the glass substrate；
The cleaning assembly is including the upper cleaning box above the transfer roller and below the transfer roller
Lower cleaning box, the upper cleaning box and lower cleaning box are fixed in the frame by fix bar, and the upper cleaning box
Multiple shower nozzles are equipped with lower cleaning box.
The utility model embodiment is simple in construction, easy to use, can not only improve operating efficiency, reduces production cost,
The using experience degree of user can also be lifted.Especially described head rod and second connecting rod can be along the biographies
The axial direction of roller is sent to move so that the distance between head rod and the second connecting rod are adjustable, are enabled adaptation to
And clean various sizes of glass substrate.Meanwhile first the setting of position-limited wheel and the second position-limited wheel can also ensure that glass substrate
When being cleaned in transmission, certain direction can be kept to advance.
Brief description of the drawings
In order to illustrate more clearly of the utility model embodiment technical scheme, make required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are some embodiments of the utility model, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.
Fig. 1 is a kind of structure chart of more size glass substrates cleaning equipments of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that described embodiment is the utility model part of the embodiment, rather than whole implementation
Example.Based on the embodiment in the utility model, those of ordinary skill in the art are obtained under the premise of creative work is not made
The every other embodiment obtained, belong to the scope of the utility model protection.
It should be appreciated that ought be in this specification and in the appended claims in use, term " comprising " and "comprising" instruction
Described feature, entirety, step, operation, the presence of element and/or component, but it is not precluded from one or more of the other feature, whole
Body, step, operation, element, component and/or its presence or addition for gathering.
It is also understood that in this utility model term used in the description merely for the sake of description specific embodiment
Purpose and be not intended to limit the utility model.As used in the utility model specification and appended book
Like that, unless context clearly indicates other situations, otherwise " one " of singulative, "one" and "the" are intended to include plural number
Form.It will be further appreciated that the term "and/or" used in the utility model specification and appended book is
Refer to any combinations of one or more of the associated item listed and be possible to combine, and including these combinations.
As shown in figure 1, the utility model embodiment provides a kind of more size glass substrates cleaning equipments, the equipment includes machine
Frame 1, multiple transfer rollers 2, limit assembly 4, drive device 5 and cleaning assembly 6.
Wherein, the transfer roller 2 is rotationally disposed side by side in the frame 1, and at least one pair of adjacent transfer roller
Between be provided with gap 3.
The limit assembly 4 includes the first roller 41 and the second roller 42 being oppositely arranged, and first roller 41 is fixed
On a head rod 43, second roller 42 is fixed in one second connecting rod 44, and the two of the head rod 43
End is separately fixed on two relative sides of the frame 1, and the both ends of second connecting rod 44 are separately fixed at described
On two relative sides of frame 1, and the head rod 43 and second connecting rod 44 can be along the transmission
The axial direction motion of roller 2 so that glass substrate positioned at first roller 41 and second roller 42 and the transfer roller 2 it
Between.
The drive device 5 is used for the rotation for driving the transfer roller 2 and the roller 42 of first roller 41 and second,
So that the tangential direction that glass substrate rotates along the transfer roller 2 is moved, wherein the roller 42 of first roller 41 and second
Rotation direction it is opposite with the rotation direction of the transfer roller 2.
The cleaning assembly 6 is arranged in the frame 1, for cleaning the glass substrate.
Specifically, frame 1 can carry any structure of transfer roller 2 and above-mentioned miscellaneous part.The number of transfer roller 2
Amount can be two, three or more than three, and certainly, the quantity of transfer roller can reasonably be set according to actual conditions
Put.The setting in gap 3 is the following table of the glass substrate to be cleaned for the ease of that can be pointed in cleaning assembly on transfer roller
Face is cleaned accordingly.
Meanwhile first roller 41 and the second roller 42 be separately positioned on two relative sides of frame 1 so that
Glass substrate can receive the power being more uniformly distributed, and can coordinate the rotation of transfer roller, promote glass substrate to move jointly, so as to connect
By cleaning assembly to being cleaned while the upper and lower surface of glass substrate.
In addition, the first roller 41 is integrally fixed on head rod 43, the second roller 42 is integrally fixed at the second connecting rod
On 44, and the connecting rod 44 of head rod 43 and second can move along the axial direction of the transfer roller 2, thus can
The distance between connecting rod 44 of head rod 43 and second is enough adjusted, so as to correspondingly adjust the first roller 41 and the second roller
The distance between 42, you can adjusted with the size according to glass substrate between the connecting rod 44 of head rod 43 and second
Distance, to enable glass substrate in the presence of the first roller 41 and the second roller 42, more stably with transfer roller
Move and reach the purpose of cleaning in the direction of rotation.
Furthermore drive device 5 enables to transfer roller 2, the first roller 41 and the second roller 42 to be rotated accordingly.
It is easy to use therefore the structure of the utility model embodiment is simple, operating efficiency can not only be improved, reduction is produced into
This, additionally it is possible to lift the using experience degree of user.Especially described head rod and second connecting rod can be along institutes
State transfer roller axial direction motion so that the distance between head rod and the second connecting rod be it is adjustable, so as to
Adapt to and clean various sizes of glass substrate.
As optional embodiment, wherein the limit assembly 4 also includes being located at described first by what drive device 5 drove
The first position-limited wheel 45 in connecting rod 43 and the second position-limited wheel 46 in second connecting rod 44, described first is spacing
The position-limited wheel 46 of wheel 45 and second is respectively positioned in any gap 3, and the glass substrate is located at first position-limited wheel 45 and second
Between position-limited wheel 46, tangential direction and the tangential direction of second position-limited wheel 46 rotation that first position-limited wheel 45 rotates
It is identical with the direction of motion of the glass substrate.
Specifically, when the first position-limited wheel 45 and the second position-limited wheel 46 may insure that glass substrate is cleaned in transmission,
Certain direction can be kept to advance, that is, avoid the direction of transfer of glass substrate that deviation occurs, this is just more conducive to entirely transmit
The generation of journey, unnecessary trouble is reduced, improve the efficiency of cleaning.Certainly, the first position-limited wheel 45 and the second position-limited wheel 46
Directly can also movably it be fixed in frame 1 according to actual conditions, and the first position-limited wheel 45 and the second position-limited wheel 46
Distance between the two can also be adjusted accordingly according to glass substrate size, that is, ensure that the first position-limited wheel 45 is located at
The side of glass substrate, the second position-limited wheel 46 are located at the opposite side of glass substrate, to adjust various sizes of glass base in time
Direction of the plate in transmit process, so that glass substrate is preferably cleaned, reduce the damage of glass substrate.
As another optional embodiment, the position-limited wheel 46 of the first position-limited wheel 45 and second is the radius of cross section
The conical position-limited wheel being gradually reduced.Certainly, as long as the shape of the first position-limited wheel and the second position-limited wheel disclosure satisfy that spacing condition,
It can accordingly be selected according to actual conditions, be not limited solely to the shape of above-described embodiment statement.
As optional embodiment, gap 3 is equipped between each pair transfer roller 2.The setting in gap 3 enables to cleaning group
Part 6 realizes the cleaning to glass substrate lower surface.Gap 3 is equipped between each pair transfer roller 2 to cause the following table of glass substrate
Face can preferably be cleaned.
As another optional embodiment, at least one first position-limited wheel 45 and at least one are equipped between each gap
Individual second position-limited wheel 46.At least provided with a position-limited wheel between each gap, while at least provided with second position-limited wheel 46, energy
It is enough to carry out spacing, to prevent glass substrate deviation from moving originally position in transmit process preferably to glass substrate.
In addition, as another optional embodiment, the magnitude range in the gap 3 is 5-20mm.That is interval 3
Size minimum can be 5mm or 10mm or 15mm or 20mm, and certainly, the size in gap 3 is specifically can
With what is be defined according to actual conditions.
Meanwhile as optional embodiment, the limit assembly 4 includes three pairs of evenly spaced first rollings being oppositely arranged
The roller 42 of wheel 41 and second.Every a pair of the first roller 41 is corresponding with one second roller.Limit assembly on the first roller
The setting of setting and position relationship with the quantity of the second roller can balance glass substrate well in rotation process
The external force being subject to, so as to realize that glass substrate smoothly transmits.Certainly, limit assembly 4 can also can include 4 pairs of evenly spaced phases
To the first roller 41 and the second roller 42 of setting, also in the range of frame permission the interval of varying number can be set equal certainly
Even the first roller 41 being oppositely arranged and the second roller 42.Wherein evenly spaced the first roller 41 and second being oppositely arranged
The quantity of roller 42 is more, then can more promote glass substrate preferably to be transmitted.
As another optional embodiment, the first roller 41 and the second roller 42 that one pair of which is oppositely arranged are arranged on institute
One end of frame is stated, the first roller 41 and the second roller 42 that another pair is oppositely arranged are arranged on the centre position of the frame,
First roller 41 and the second roller 42 of last a pair of opposing are arranged on the other end of the frame.Wherein, each first
The setting of position relationship can advantageously promote the transmission of glass substrate between roller 41 and each second roller 42.
As optional embodiment, the cleaning assembly 6 include positioned at the top of the transfer roller 2 upper cleaning box 61 and
Lower cleaning box 62 positioned at the lower section of transfer roller 2, the upper cleaning box 61 and lower cleaning box 62 are solid by fix bar 63
It is scheduled in the frame, and multiple shower nozzles is equipped with the upper cleaning box 61 and lower cleaning box 62.Upper cleaning box and lower cleaning
The setting of box enables to the upper and lower surface of glass substrate preferably to be cleaned.The position of upper cleaning box and lower cleaning box
Putting relation and quantity can be configured according to actual conditions.
As another optional embodiment, the quantity of the upper cleaning box 61 is two, and is evenly distributed in the biography
Send the surface of roller 2.The quantity of wherein upper cleaning box 61 is two, and effectively the upper surface of glass substrate can be cleaned,
It is of course also possible to the quantity of upper cleaning box is reasonably set according to actual conditions.
As another optional embodiment, the quantity of the lower cleaning box 62 is two, and is evenly distributed in the biography
Send the underface of roller 2.The quantity for wherein descending cleaning box 62 is two, and effectively the lower surface of glass substrate can be cleaned,
It is of course also possible to the quantity of upper cleaning box is reasonably set according to actual conditions.
The specific work process of more size glass substrates cleaning equipments is as follows, and glass substrate is placed on into the frame 1
Transfer roller 2 on, while the upper surface of glass substrate is in contact with the first scroll wheel 41 and the second scroll wheel 42, opens and drives
Device 5 is moved to drive the respective rotation of the rotation of transfer roller 2, the first scroll wheel 41 and the second scroll wheel 42 etc., general feelings
Under condition, the rotating speed of transfer roller is identical with the rotating speed of the first scroll wheel and the second scroll wheel, so as to drive glass substrate from transfer roller
One end be smoothly transferred to the other end.In the transmit process of glass substrate, upper cleaning box and lower cleaning box are to glass base
Plate is cleaned, so that the upper and lower surface of glass substrate can be realized to the wet of glass substrate by effective cleaning
Wash.In addition, the first position-limited wheel 45 and the second position-limited wheel 46 also rotate in the presence of drive device 5, so as to glass substrate
Position effectively limited, it is ensured that cleaning process smoothly completes, reduce error, improve operating efficiency.
, can be according to the actual size of glass substrate in transfer roller 2 if the size of glass substrate changes
Axial direction moves the connecting rod 44 of head rod 43 or second, so as to control head rod 43 and second connecting rod 44 it
Between distance so that the first scroll wheel 41 and the second scroll wheel 42 are respectively positioned on the upper surface of glass substrate, so as to realize to more chis
The cleaning of very little glass substrate, improves cleaning efficiency, has saved production cost.
It is described above, only specific embodiment of the present utility model, but the scope of protection of the utility model is not limited to
In this, any one skilled in the art can readily occur in various in the technical scope that the utility model discloses
Equivalent modifications or substitutions, these modifications or substitutions should all cover within the scope of protection of the utility model.Therefore, this practicality
New protection domain should be defined by scope of the claims.
Claims (10)
- A kind of 1. more size glass substrates cleaning equipments, it is characterised in that including：Frame；Multiple transfer rollers, rotationally it is disposed side by side in the frame, is provided between wherein at least a pair adjacent transfer rollers Gap；Limit assembly, including the first roller and the second roller being oppositely arranged, first roller are fixed on a head rod On, second roller is fixed in one second connecting rod, and the both ends of the head rod are separately fixed at the frame On two relative sides, the both ends of second connecting rod are separately fixed on two relative sides of the frame, and The head rod and second connecting rod can move along the axial direction of the transfer roller, so that glass substrate position Between first roller and the second roller and the transfer roller；Drive device, for driving the rotation of the transfer roller and first roller and the second roller, so that glass substrate Along the transfer roller rotate tangential direction move, wherein the rotation direction of first roller and the second roller with it is described The rotation direction of transfer roller is opposite；Cleaning assembly, it is arranged in the frame, for cleaning the glass substrate.
- 2. more size glass substrates cleaning equipments as claimed in claim 1, it is characterised in that the limit assembly also include by The first position-limited wheel being located on the head rod of drive device driving and second in second connecting rod Position-limited wheel, first position-limited wheel and the second position-limited wheel are respectively positioned in any gap, and the glass substrate is positioned at described Between first position-limited wheel and the second position-limited wheel, tangential direction and second position-limited wheel that first position-limited wheel rotates rotate Tangential direction it is identical with the direction of motion of the glass substrate.
- 3. more size glass substrates cleaning equipments as claimed in claim 2, it is characterised in that first position-limited wheel and the Two position-limited wheels are the truncated cone-shaped position-limited wheel that the radius of cross section is gradually reduced.
- 4. more size glass substrates cleaning equipments as claimed in claim 2, it is characterised in that be equipped between each pair transfer roller Gap.
- 5. more size glass substrates cleaning equipments as claimed in claim 4, it is characterised in that be equipped between each gap to Few first position-limited wheel and at least one second position-limited wheel, the magnitude range in the gap is 5-20mm.
- 6. more size glass substrates cleaning equipments as claimed in claim 1, it is characterised in that the limit assembly includes three pairs Evenly spaced the first roller and the second roller being oppositely arranged.
- 7. more size glass substrates cleaning equipments as claimed in claim 6, it is characterised in that one pair of which be oppositely arranged the One roller and the second roller are arranged on one end of the frame, and the first roller and the second roller that another pair is oppositely arranged are arranged on The centre position of the frame, first roller and the second roller of last a pair of opposing are arranged on the another of the frame End.
- 8. more size glass substrates cleaning equipments as claimed in claim 1, it is characterised in that the cleaning assembly includes being located at Upper cleaning box above the transfer roller and the lower cleaning box below the transfer roller, the upper cleaning box and lower clear Wash box to be fixed in the frame by fix bar, and multiple shower nozzles are equipped with the upper cleaning box and lower cleaning box.
- 9. more size glass substrates cleaning equipments as claimed in claim 8, it is characterised in that the quantity of the upper cleaning box is Two, and it is evenly distributed in the surface of the transfer roller；The quantity of the lower cleaning box is two, and is evenly distributed in The underface of the transfer roller.
- A kind of 10. more size glass substrates cleaning equipments, it is characterised in that including：Frame；Multiple transfer rollers, rotationally it is disposed side by side in the frame, is provided between wherein at least a pair adjacent transfer rollers Gap；Limit assembly, including the first roller and the second roller being oppositely arranged, first roller are fixed on a head rod On, second roller is fixed in one second connecting rod, and the both ends of the head rod are separately fixed at the frame On two relative sides, the both ends of second connecting rod are separately fixed on two relative sides of the frame, and The head rod and second connecting rod can move along the axial direction of the transfer roller, so that glass substrate position Between first roller and the second roller and the transfer roller；Drive device, for driving the rotation of the transfer roller and first roller and the second roller, so that glass substrate Along the transfer roller rotate tangential direction move, wherein the rotation direction of first roller and the second roller with it is described The rotation direction of transfer roller is opposite；Cleaning assembly, it is arranged in the frame, for cleaning the glass substrate；Wherein, the limit assembly also include by the first position-limited wheel on the head rod of drive device driving with And the second position-limited wheel in second connecting rod, first position-limited wheel and the second position-limited wheel be respectively positioned on it is any it is described between In gap, and the glass substrate, between first position-limited wheel and the second position-limited wheel, what first position-limited wheel rotated cuts The tangential direction that line direction and second position-limited wheel rotate is identical with the direction of motion of the glass substrate；The cleaning assembly is lower clear including the upper cleaning box above the transfer roller and below the transfer roller Box is washed, the upper cleaning box and lower cleaning box are fixed in the frame by fix bar, and the upper cleaning box is with Multiple shower nozzles are equipped with cleaning box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721159637.0U CN207188322U (en) | 2017-09-11 | 2017-09-11 | Multi-size glass substrate cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721159637.0U CN207188322U (en) | 2017-09-11 | 2017-09-11 | Multi-size glass substrate cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207188322U true CN207188322U (en) | 2018-04-06 |
Family
ID=61788122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721159637.0U Withdrawn - After Issue CN207188322U (en) | 2017-09-11 | 2017-09-11 | Multi-size glass substrate cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207188322U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107497758A (en) * | 2017-09-11 | 2017-12-22 | 惠科股份有限公司 | Multi-size glass substrate cleaning equipment |
-
2017
- 2017-09-11 CN CN201721159637.0U patent/CN207188322U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107497758A (en) * | 2017-09-11 | 2017-12-22 | 惠科股份有限公司 | Multi-size glass substrate cleaning equipment |
| WO2019047420A1 (en) * | 2017-09-11 | 2019-03-14 | 惠科股份有限公司 | Device and system for cleaning multiple sized glass substrates |
| CN107497758B (en) * | 2017-09-11 | 2019-10-22 | 惠科股份有限公司 | Multi-size glass substrate cleaning equipment |
| US11344932B2 (en) | 2017-09-11 | 2022-05-31 | HKC Corporation Limited | Device and system for cleaning glass substrates with different dimensions |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180406 Effective date of abandoning: 20191022 |