CN207183209U - Faraday shield and reaction chamber - Google Patents
Faraday shield and reaction chamber Download PDFInfo
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- CN207183209U CN207183209U CN201720920790.4U CN201720920790U CN207183209U CN 207183209 U CN207183209 U CN 207183209U CN 201720920790 U CN201720920790 U CN 201720920790U CN 207183209 U CN207183209 U CN 207183209U
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Abstract
The utility model provides a kind of Faraday shield and reaction chamber, it includes conductive ferrule, formed with cracking on the conductive ferrule, this cracks cracks including the first son, the circumferencial direction setting that first son cracks along conductive ferrule, and angle is formed between the axis of conductive ferrule, to the coupling efficiency by increasing electric field component of the electromagnetic field on the circumferencial direction of conductive ferrule, to increase total coupling efficiency of the electromagnetic field.Faraday shield provided by the utility model, it can improve magnetic coupling efficiency, so as to reduce the radio-frequency power for needing to load to radio-frequency coil.
Description
Technical field
Technical field of manufacturing semiconductors is the utility model is related to, in particular it relates to a kind of Faraday shield and reaction chamber
Room.
Background technology
Using inductively coupled plasma (Inductive Coupled Plasma Emission
Spectrometer, hereinafter referred to as ICP) during device enters the manufacturing process of line integrated circuit and MEMS, it is caused
Contain substantial amounts of electronics, ion, the atom of excitation state, molecule and free radical isoreactivity particle, these active grains in plasma
Son and substrate interaction make material surface that various physical and chemical reactions occur, so that material surface performance is changed.
Fig. 1 is the sectional view of existing ICP devices.Referring to Fig. 1, ICP devices include reaction chamber 1, in the reaction chamber
Medium cylinder 3 is provided with the side wall 2 of room 1.Wrapping around for medium cylinder 3 is provided with radio-frequency coil 4, it passes through upper adaptation 5
Electrically connected with upper radio-frequency power supply 6, upper radio-frequency power supply 6 is used to load radio-frequency power to radio-frequency coil 4, as caused by radio-frequency coil 4
Electromagnetic field can be fed into reaction chamber 1 by medium cylinder 3, and plasma is formed with the process gas in provocative reaction chamber 1
Body.Also, pedestal 9 is additionally provided with reaction chamber 1, it is electrically connected by lower adaptation 7 and lower radio-frequency power supply 8, lower radio frequency
Power supply 8 is used to load radio frequency back bias voltage to pedestal 9, to attract plasma etching substrate surface.In addition, in medium cylinder 3
Side ring is provided around Faraday shield 10, for protecting medium cylinder 3 not by plasma etching, while avoids from substrate surface
The residue sputtered out is attached on the inwall of medium cylinder 3, so as to improve the energy coupling efficiency of medium cylinder 3, is reduced
Particle contamination in reaction chamber 1.
Fig. 2 is the structure chart of existing Faraday shield.Referring to Fig. 2, Faraday shield 10 is ring body, and at this
Formed with cracking 101 along its axial direction in ring body, this cracks 101 between upper and lower two end faces of ring body that ring body is completely disconnected
Open, i.e. ring body is discrete in its circumferential direction, so as to avoid Faraday shield 10 from producing eddy-current loss and heating.
In the structure of above-mentioned Faraday shield 10, due to cracking 101 along the axially arranged of ring body, as shown in figure 3, this
Magnetic-field component A of the electromagnetic field in the axial direction of ring body enable only as caused by radio-frequency coil 4 through cracking 101, and is somebody's turn to do
Electric field component B of the electromagnetic field on the circumferencial direction of ring body is difficult through cracking 101, so as to cause magnetic coupling less efficient.
And relatively low magnetic coupling efficiency generally requires to load higher radio-frequency power to radio-frequency coil 4, it could realize that plasma opens
Brightness, certain processing speed is maintained, and use the independent starter of Top electrode, when substrate dielectric layer is low-k material, to reduce
Damage to the substrate dielectric layer.But Faraday shield 10 can be made because of whirlpool by loading higher radio-frequency power to radio-frequency coil 4
Flow loss and Ions Bombardment and cause temperature too high, so as to increase the risk of the particle contamination of reaction chamber 1.
Utility model content
The utility model is intended at least solve one of technical problem present in prior art, it is proposed that a kind of faraday screen
Shield and reaction chamber, it can improve total coupling efficiency of electromagnetic field, need what is loaded to radio-frequency coil so as to reduce
Radio-frequency power.
To realize that the purpose of this utility model provides a kind of Faraday shield, including conductive ferrule, in the conduction
Formed with cracking in ring body, described crack is cracked including the first son, and first son cracks along the circumference side of the conductive ferrule
To setting, and angle is formed between the axis of the conductive ferrule, to by increasing electromagnetic field in the conductive ferrule
The coupling efficiency of electric field component on circumferencial direction, to increase total coupling efficiency of the electromagnetic field.
Preferably, first son angle formed between the axis of the conductive ferrule that cracks is 45 °.
Preferably, described crack also includes cracking along the second axially arranged son of the conductive ferrule.
Preferably, second son cracks to crack with first son and intersected.
Preferably, second son cracks for one or more, and multiple second sons crack and opened along first son
The bearing of trend of seam is spaced apart.
Preferably, first son cracks is fully disconnected the conducting ring between two end faces of the conductive ferrule
Body；
Second son cracks the conductive ferrule described in breaking part between two end faces of the conductive ferrule.
Preferably, first son cracks the conducting ring described in breaking part between two end faces of the conductive ferrule
Body；
Second son cracks is fully disconnected the conductive ferrule between two end faces of the conductive ferrule.
Preferably, first son angle formed between the axis of the conductive ferrule that cracks is 90 °.
Preferably, first son cracks for one or more, and multiple first sons crack along the conductive ferrule
Axially spaced-apart distribution.
Preferably, division has multiple first areas and multiple second areas on the circumferencial direction of the conductive ferrule, and
Multiple first areas and the alternate setting of multiple second areas；
First son is provided with each first area to crack, and first son cracks at least two,
And it is distributed along the axially spaced-apart of the conductive ferrule；
Second son is provided with each second area to crack, and second son cracks at least two,
And along the multiple circumferentially spaced of the conductive ferrule.
Preferably, multiple first areas and multiple second areas relative to the conductive ferrule even circumferential
Distribution；
At least two first sons crack to be uniformly distributed relative to the first area；At least two second sons are opened
Seam is symmetrical relative to the second area.
Preferably, width of the first area on the circumferencial direction of the conductive ferrule is 50~200mm.
Preferably, it is described to crack for one or more, and multiple described crack along between the circumferencial direction of the conductive ferrule
Every and be uniformly distributed.
Preferably, on the conductive ferrule, and stop part is provided with described crack, the stop part makes described
Crack and form tortuous passageway between the external annulus and internal ring wall of the conductive ferrule.
Preferably, the stop part is two, and respectively the first stop part and the second stop part, the two is separately positioned on institute
State conductive ferrule in the first end face and second end face for cracking place, wherein,
First stop part extends from the first end face towards the second end face, and between the second end face
With the first gap；
Second stop part extends from the second end face towards the first end face, and between the first end face
With the second gap；
Radially there is third space in the conductive ferrule between first stop part and the second stop part；
First gap, the second gap and third space form the tortuous passageway.
Preferably, dielectric material is filled with described crack.
Preferably, the span of the width to crack is in 2~10mm.
As another technical scheme, the utility model also provides a kind of reaction chamber, including medium cylinder, Faraday shield
Part and radio-frequency coil, the radio-frequency coil are circumferentially positioned at the outside of the medium cylinder；The Faraday shield is around setting
In the inner side of the medium cylinder, the Faraday shield uses above-mentioned Faraday shield provided by the utility model.
Preferably, the radio-frequency coil is the cylinder solid formula spiral winding in banding；The cylinder solid formula helix
The width of any one circle subcoil of circle in its axial direction is more than cross section for any of circular cylinder solid formula spiral winding
The diameter of one circle subcoil.
Preferably, the axial spacing between two circle subcoils of the arbitrary neighborhood of the cylinder solid formula spiral winding is 6-
10mm。
Preferably, the reaction chamber is pre-cleaning cavity.
The utility model has the advantages that：
Faraday shield provided by the utility model, it includes conductive ferrule, and formed with opening on the conductive ferrule
Seam, this cracks cracks including the first son, first son crack along conductive ferrule circumferencial direction setting, and with the axle of conductive ferrule
Angle is formed between line, to the coupling efficiency by increasing electric field component of the electromagnetic field on the circumferencial direction of conductive ferrule,
To increase total coupling efficiency of the electromagnetic field, so as to reduce the radio-frequency power for needing to load to radio-frequency coil, i.e. even if plus
Relatively low radio-frequency power is carried, can also realize plasma starter, maintains certain processing speed, and it is independent using Top electrode
Starter, when substrate dielectric layer is low-k material, to reduce the damage to the substrate dielectric layer.In addition, the radio frequency that loading is relatively low
Power can also avoid the temperature of Faraday shield too high, so as to reduce the risk of reaction chamber particle contamination.
Reaction chamber provided by the utility model, its by using above-mentioned Faraday shield provided by the utility model,
The radio-frequency power for needing to load to radio-frequency coil can be reduced, even if so as to load relatively low radio-frequency power, can also be realized
Gas ions starter, maintains certain processing speed, and uses the independent starter of Top electrode, using in substrate dielectric layer as low-k materials
During material, the damage to the substrate dielectric layer is reduced.In addition, Faraday shield can also be avoided by loading relatively low radio-frequency power
Temperature is too high, so as to reduce the risk of reaction chamber particle contamination.
Brief description of the drawings
Fig. 1 is the sectional view of existing ICP devices；
Fig. 2 is the structure chart of existing Faraday shield；
Fig. 3 is the local structural graph of existing Faraday shield；
Fig. 4 A are the structure chart for the Faraday shield that the utility model first embodiment provides；
Fig. 4 B are a kind of local structural graph for the Faraday shield that the utility model first embodiment provides；
Fig. 4 C are another local structural graph for the Faraday shield that the utility model first embodiment provides；
Fig. 4 D are another local structural graph for the Faraday shield that the utility model first embodiment provides；
Fig. 4 E are another local structural graph for the Faraday shield that the utility model first embodiment provides；
Fig. 5 is the local structural graph for the Faraday shield that the utility model second embodiment provides；
Fig. 6 is the side view for the Faraday shield that the utility model 3rd embodiment provides；
Fig. 7 A are the longitudinal section view for the Faraday shield that the utility model fourth embodiment provides；
Fig. 7 B are the enlarged drawing in I regions in Fig. 7 A；
Fig. 8 is the sectional view for the reaction chamber that the utility model embodiment provides；
Fig. 9 is a kind of structure chart for radio-frequency coil that the utility model embodiment uses；
Figure 10 is the structure chart for another radio-frequency coil that the utility model embodiment uses.
Embodiment
To make those skilled in the art more fully understand the technical solution of the utility model, come below in conjunction with the accompanying drawings to this
The Faraday shield and reaction chamber that utility model provides are described in detail.
The Faraday shield provided also referring to Fig. 4 A and Fig. 4 B, the utility model first embodiment, it includes leading
Electric ring body 11, formed with cracking on the conductive ferrule 11, this cracks cracks 111 including the first son, and first son cracks 111 edges
The circumferencial direction of conductive ferrule is set, and angle a is formed between the axis of conductive ferrule 11.By being looped around the conductive ferrule 11
Electromagnetic field caused by the radio-frequency coil 13 of surrounding can be divided into magnetic-field component A and conductive ferrule in the axial direction of conductive ferrule 11
Electric field component B on 11 circumferencial direction.111 are cracked by using above-mentioned first son, the magnetic field in the axial direction of conductive ferrule 11
Subcomponent of the component A on the incline direction that first son cracks 111 can be cracked 111 feed-in reaction chambers by the first son
It is interior, while subcomponents of the electric field component B on the circumferencial direction of conductive ferrule 11 on the incline direction that first son cracks 111
It can be cracked by the first son in 111 feed-in reaction chambers.
Poynting vector (Poynting vector) refers to the Poynting vector in electromagnetic field, represents in the unit interval
By the energy of vertical unit area, unit for watt/(rice).Assuming that the electric-field intensity of certain is E in space, magnetic field intensity is
H, then energy-flux density of electromagnetic field is S=E × H at this, and direction is determined by E and H by right-hand screw rule.The energy of electromagnetic field at this
The size of current density is | S |=| E | | H | sin θ, wherein, θ is E and H angle.
Based on above-mentioned principle, if as cracked in the prior art along the axially arranged of conductive ferrule 11, E ≈ 0, so S ≈
0.Assuming that above-mentioned first son cracks, the angle a formed between 111 and the axis of conductive ferrule 11 is 45 °, then θ=45 °, in substitution
Stating formula is：| S |=| E | cos45 ° × | H | sin45 ° × sin45 °.It follows that cracked by above-mentioned first son 111 energy
Current density, which is more than, to be passed through in the prior art along the axially arranged energy-flux density cracked of conductive ferrule 11, so as to add electromagnetism
Total coupling efficiency of field, so as to reduce the radio-frequency power for needing to load to radio-frequency coil 13, i.e. penetrated even if loading is relatively low
Frequency power, can also realize plasma starter, maintain certain processing speed, and use the independent starter of Top electrode, with
When substrate dielectric layer is low-k materials, the damage to the substrate dielectric layer is reduced.May be used also in addition, loading relatively low radio-frequency power
To avoid the temperature of Faraday shield too high, so as to reduce the risk of reaction chamber particle contamination.
Preferably, the crack angle a that is formed between 111 and the axis of conductive ferrule 11 of first son is 45 °, and this can make
By the first son crack 111 length it is maximum, so as to which energy-flux density is maximum, and then farthest add total coupling of electromagnetic field
Close efficiency.
It should be noted that in the present embodiment, the first son cracks 111 linearly, but the utility model not office
It is limited to this, in actual applications, it 111 can also be in polyline shaped or arc shaped etc. that the first son, which cracks, as long as can increase electricity
The coupling efficiency of magnetic-field component of the magnetic field on the circumferencial direction of conductive ferrule 11, to reach the total coupling effect for increasing the electromagnetic field
The purpose of rate.
As a preferred scheme of the present embodiment, as shown in Figure 4 C, it is above-mentioned crack cracked in above-mentioned first son 111 base
On plinth, also it is additionally arranged the second son and cracks 112, second son cracks 112 along the axially arranged of conductive ferrule 11, and is opened with the first son
Seam 111 intersects, and forms angle b.112 are cracked by the second son, can further increase above-mentioned magnetic-field component A coupling effect
Rate.
In the present embodiment, the first son cracks 111 is fully disconnected conductive ferrule between two end faces of conductive ferrule 11
11, to avoid producing eddy-current loss and heating in conductive ferrule 11.Moreover, the second son cracks 112 the two of conductive ferrule 11
Breaking part conductive ferrule 11 between individual end face, i.e. the second son crack 112 not by conductive ferrule 11 at two of conductive ferrule 11
It is fully disconnected between end face, so as to keep the monolithic construction of conductive ferrule 11.
In order on the premise of magnetic coupling efficiency is not influenceed, be avoided as much as being located at zero on the inside of Faraday shield
Cracking, place is corroded part (such as medium cylinder), and the span of the width h to crack is in 2~10mm, preferably in 5-8mm.Open
The width h of seam be above-mentioned first son crack 111 and second son crack 112 width, and the first son crack 111 and second son
Cracking 112 width can be with identical, or can also be different.
As shown in Figure 4 D, in order to avoid the part (such as medium cylinder) on the inside of Faraday shield is rotten at place of cracking
Erosion, can also filled media material 12, the dielectric material 12 be, for example, ceramics in cracking.Electromagnetic field can pass through the medium material
Expect in 12 feed-in reaction chambers.
It should be noted that in the present embodiment, the second son cracks 112 for one, but the utility model does not limit to
In this, in actual applications, as shown in Figure 4 E, it 112 can also be multiple that above-mentioned second son, which cracks, and multiple second sons crack
112 are spaced apart along crack 111 bearing of trend (incline direction) of the first son.
It should also be noted that, in the present embodiment, the second son, which cracks, 112 to crack with the first son and 111 intersects, but
It is that the utility model is not limited thereto, in actual applications, the second son cracks 112, and cracked with the first son 111 can also be mutual
Separation.
It should also be noted that, in actual applications, above-mentioned crack can be one or more, and multiple crack along conduction
The circumferencial direction interval of ring body 11 and it is uniformly distributed, to ensure process uniformity.It is readily appreciated that, the quantity cracked is more, electromagnetism
Total coupling efficiency of field is bigger.
Referring to Fig. 5, the Faraday shield that the utility model second embodiment provides, it includes conductive ferrule 21,
Formed with cracking on the conductive ferrule 21, first son set including two circumferencial directions along conductive ferrule 21 that cracks cracks
212, and two the first sons crack and 212 are distributed along the axially spaced-apart of conducting loop-shaped 21, also, the first son cracks 212 and conducting ring
The angle formed between the axis of body 21 is 90 °, so that the electric field component B on the circumferencial direction of conductive ferrule 21 can pass through
First son cracks in 212 feed-in reaction chambers.
Moreover, above-mentioned crack also includes cracking 211 along the second axially arranged son of conductive ferrule 21, second son cracks
211 crack with the first son 212 intersects.Because the second son cracks 211 along the axially arranged of conductive ferrule 21, it will can lead
In magnetic-field component A feed-in reaction chambers in the axial direction of electric ring body 11.
From the foregoing, it will be observed that by above-mentioned first son crack 212 and second son crack 211, can be respectively by above-mentioned electric field component B
In magnetic-field component A feed-in reaction chambers, this can only add the electromagnetic field compared with feed-in magnetic-field component A with prior art
Total coupling efficiency, so as to reduce the radio-frequency power for needing to load to radio-frequency coil, i.e. even if the radio frequency work(that loading is relatively low
Rate, plasma starter can be also realized, maintain certain processing speed, and use the independent starter of Top electrode, with substrate
When dielectric layer is low-k materials, the damage to the substrate dielectric layer is reduced.In addition, loading relatively low radio-frequency power can also keep away
Exempt from that the temperature of Faraday shield is too high, so as to reduce the risk of reaction chamber particle contamination.
In the present embodiment, the second son cracks 211 is fully disconnected conductive ferrule between two end faces of conductive ferrule 21,
To avoid producing eddy-current loss and heating in conductive ferrule 11.Moreover, each first son cracks 212 the two of conductive ferrule 21
Breaking part conductive ferrule 21 between individual end face, i.e. the first son cracks 212 incomplete between two end faces of conductive ferrule 21
Conductive ferrule 21 is disconnected, so as to keep the monolithic construction of conductive ferrule 11.
In the present embodiment, the first son cracks 212 for two, and still, the utility model is not limited thereto, and actually should
In, the first son crack 212 can also be one, or three more than, and multiple first sons crack 212 with conductive ferrule 21
Axis between the angle that is formed can be with identical, or can also be different.
Referring to Fig. 6, the Faraday shield that the utility model 3rd embodiment provides, it includes conductive ferrule 41, and
Division has multiple first areas 411 and multiple second areas 412, and multiple first areas on the circumferencial direction of conductive ferrule 41
411 and the 412 alternate setting of multiple second areas.Also, it is provided with the first son in each first area 411 to crack 42, and
It 42 is at least two that one son, which cracks, and is spaced apart along the axial direction (that is, the Y-direction shown in Fig. 6) of conductive ferrule 41；Each
It 43 is at least two to be provided with the second son in second area 412 to crack that the 43, and second son cracks, and along the circumference of conductive ferrule 41
Direction (that is, the X-direction shown in Fig. 6) is spaced apart.This can be equally realized above-mentioned electric field component B and magnetic-field component respectively
In A feed-in reaction chambers, so as to add total coupling efficiency of the electromagnetic field, and then needs can be reduced and loaded to radio-frequency coil
Radio-frequency power.
In order to ensure process uniformity, it is preferred that multiple first areas 411 and multiple second areas 412 are relative to conduction
The even circumferential distribution of ring body 41.Also, at least two first sons crack 42 to be uniformly distributed relative to first area 411；At least
Two the second sons crack 43 symmetrical relative to second area 412.
Preferably, width of the first area 411 on the circumferencial direction of conductive ferrule 41 is 50~200mm, with maximum limit
Degree ground reduces vortex.
The Faraday shield provided also referring to Fig. 7 A and Fig. 7 B, the utility model fourth embodiment, it is above-mentioned
Improved on the basis of first~3rd embodiment.Specifically, on conductive ferrule 31, and stop is provided with cracking
Portion, the stop part makes to crack forms tortuous passageway 34 between the external annulus and internal ring wall of conductive ferrule 31.The tortuous passageway can
On the premise of magnetic coupling efficiency is not influenceed, further to avoid part (such as the medium on the inside of the Faraday shield
Cylinder) cracking, place is corroded.
In the present embodiment, above-mentioned stop part is two, respectively the first stop part 32 and the second stop part 33, the two point
Be not arranged on conductive ferrule 31 in the first end face 331 and second end face 312 at place of cracking, the end of first end face 331 and second
Face 312 is that conductive ferrule 31 is cracked and disconnected and two sections relative to each other.Wherein, the first stop part 32 is from first end
Face 311 extends towards second end face 312, and has the first gap 321 between second end face 312.First stop part 32 prolongs
Stretch the circumference that direction is preferably conductive ferrule 31.Second stop part 33 extends from second end face 312 towards first end face 331, and
There is the second gap 331 between first end face 331.In conductive ferrule 31 between first stop part 32 and the second stop part 33
Radially there is third space 341.First gap 321, the second gap 331 and third space 341 form above-mentioned tortuous passageway 34.
In actual applications, above-mentioned stop part can also use other arbitrary structures, as long as can be in conductive ferrule 31
Radially form mazy tortuous passageway, you can avoid the part on the inside of Faraday shield from being corroded at place of cracking.
In summary, the Faraday shield that the above-mentioned each embodiment of the utility model provides, it includes conductive ferrule, and
Formed with cracking on the conductive ferrule, this cracks cracks including the first son, and first son cracks along the circumference side of conductive ferrule
To setting, and angle is formed between the axis of conductive ferrule, to by increasing circumferencial direction of the electromagnetic field in conductive ferrule
On magnetic-field component coupling efficiency, to increase total coupling efficiency of the electromagnetic field, needed so as to reduce to radio-frequency coil
The radio-frequency power of loading, i.e. even if the radio-frequency power that loading is relatively low, can also realize plasma starter, maintain certain place
Speed is managed, and uses the independent starter of Top electrode, when substrate dielectric layer is low-k material, to reduce to the substrate dielectric layer
Damage.In addition, loading relatively low radio-frequency power the temperature of Faraday shield can also be avoided too high, so as to reduce reaction
The risk of chamber particle contamination.
As another technical scheme, as shown in figure 8, the utility model embodiment also provides a kind of reaction chamber 201,
Medium cylinder 203 is provided with the side wall 202 of the reaction chamber 201.Wrapping around for medium cylinder 203 is provided with radio-frequency coil
204, it is electrically connected by upper adaptation 205 with upper radio-frequency power supply 206, and upper radio-frequency power supply 206 is used to load to radio-frequency coil 204
Radio-frequency power, electromagnetic field can be fed into reaction chamber 201 by medium cylinder 203 as caused by radio-frequency coil 204, to excite
Process gas in reaction chamber 201 forms plasma.Also, pedestal 209 is additionally provided with reaction chamber 201, it is logical
To cross down adaptation 207 and lower radio-frequency power supply 208 electrically connects, lower radio-frequency power supply 208 is used to load radio frequency back bias voltage to pedestal 209,
To attract plasma etching substrate surface.In addition, being surrounded with Faraday shield 210 in the inner side of medium cylinder 203, use
In protecting medium cylinder 203 not by plasma etching, while the residue for avoiding sputtering out from substrate surface is attached to medium
On the inwall of cylinder 203, so as to improve the energy coupling efficiency of medium cylinder 203, the particle reduced in reaction chamber 201 is dirty
Dye.The Faraday shield 210 can be grounded, or can also electric potential floating.
The Faraday shield that above-mentioned Faraday shield 201 is provided using the above-mentioned each embodiment of the utility model.
As shown in figure 9, in the present embodiment, radio-frequency coil 204 is cylinder solid formula spiral winding, and the cylinder solid formula
The cross section of spiral winding is circle.But the utility model is not limited thereto, other shape of cross sections can also be used
Cylinder solid formula spiral winding, it is preferred that as shown in Figure 10, radio-frequency coil 204 ' is using the cylinder solid formula spiral in banding
Coil.The cylinder solid formula spiral winding of so-called banding, refer to the coil that banding wire body spiral winding is formed.Also, cylinder is stood
The width W of any one circle subcoil of body formula spiral winding in its axial direction is more than cross section for circular cylinder solid formula coil
The diameter of any one circle subcoil of (that is, the loop construction shown in Fig. 9), so as to so that the cylinder solid formula spiral of banding
The cross-sectional area of coil is more than cross-sectional area of the cross section for circular cylinder solid formula spiral winding.
The size of parasitic capacitance between cylinder solid formula spiral winding and Faraday shield and the cylinder solid formula spiral shell
The cross-sectional area of spin line circle is directly proportional.Moreover, the parasitic capacitance is smaller, then capacitive coupling is weaker, so as to the reaction chamber being fed into
Electric-field intensity in room is weaker；Conversely, parasitic capacitance is bigger, then capacitive coupling is stronger, so as in the reaction chamber that is fed into
Electric-field intensity is stronger, so that electric-field intensity realizes plasma electric field starter enough.Based on the theory, by by radio-frequency coil
204 ' using the cylinder solid formula spiral winding in banding, and makes the cross-sectional area of the cylinder solid formula spiral winding of banding big
Cross-sectional area in cross section for circular cylinder solid formula spiral winding, can increase above-mentioned parasitic capacitance, so as to increase
Strong capacitive coupling, and then the electric-field intensity in the reaction chamber being fed into can be strengthened.
Preferably, the axial spacing d between two circle subcoils of the arbitrary neighborhood of the cylinder solid formula spiral winding of banding
For 6-10mm, this can prevent spark phenomenon occur because potential difference be present between two adjacent circle subcoils.
In actual applications, the thickness of the cylinder solid formula spiral winding of banding in the radial direction thereof is 2-4mm.Moreover, band
Height of the height h of the cylinder solid formula spiral winding of shape no more than medium cylinder 203, i.e. the cylinder solid formula spiral of banding
The upper end of coil is less than the upper end of medium cylinder 203, the lower end of the cylinder solid formula spiral winding of banding, higher than medium cylinder 203
Lower end.
In actual applications, above-mentioned reaction chamber 201 can be pre-cleaning cavity.In this case, to above-mentioned radio frequency
The frequency for the radio-frequency power that coil 204 loads can be 2MHz, 13.56MHz or 60MHz etc..Or arteries and veins can also be loaded
Rush the radio-frequency power formed.The frequency of the radio-frequency power loaded to said base 209 can be 400KHz, 2MHz, 13.56MHz
Or 60MHz etc..Or can also load pulses formed radio-frequency power.Or it can not also add to said base 209
The radio-frequency power of load.
The reaction chamber that the utility model embodiment provides, it is provided by using the above-mentioned each embodiment of the utility model
Above-mentioned Faraday shield, the radio-frequency power for needing to load to radio-frequency coil can be reduced, even if relatively low being penetrated so as to load
Frequency power, can also realize plasma starter, maintain certain processing speed, and use the independent starter of Top electrode, with
When substrate dielectric layer is low-k materials, the damage to the substrate dielectric layer is reduced.May be used also in addition, loading relatively low radio-frequency power
To avoid the temperature of Faraday shield too high, so as to reduce the risk of reaction chamber particle contamination.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and used exemplary
Embodiment, but the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case of the spirit and essence of utility model, various changes and modifications can be made therein, and these variations and modifications are also considered as this reality
With new protection domain.
Claims (21)
1. a kind of Faraday shield, including conductive ferrule, formed with cracking on the conductive ferrule, it is characterised in that institute
State to crack and cracked including the first son, first son crack along the conductive ferrule circumferencial direction setting, and with the conduction
Angle is formed between the axis of ring body, to by increasing electric field component of the electromagnetic field on the circumferencial direction of the conductive ferrule
Coupling efficiency, to increase total coupling efficiency of the electromagnetic field.
2. Faraday shield according to claim 1, it is characterised in that first son cracks and the conductive ferrule
Axis between the angle that is formed be 45 °.
3. Faraday shield according to claim 1, it is characterised in that described crack also is included along the conductive ferrule
The second axially arranged son crack.
4. Faraday shield according to claim 3, it is characterised in that second son cracks to be opened with first son
Seam intersects.
5. Faraday shield according to claim 4, it is characterised in that second son cracks for one or more,
And multiple second sons bearing of trend to be cracked along first son that cracks is spaced apart.
6. Faraday shield according to claim 3, it is characterised in that first son cracks in the conductive ferrule
Two end faces between be fully disconnected the conductive ferrule；
Second son cracks the conductive ferrule described in breaking part between two end faces of the conductive ferrule.
7. Faraday shield according to claim 3, it is characterised in that first son cracks in the conductive ferrule
Two end faces between conductive ferrule described in breaking part；
Second son cracks is fully disconnected the conductive ferrule between two end faces of the conductive ferrule.
8. Faraday shield according to claim 3, it is characterised in that first son cracks and the conductive ferrule
Axis between the angle that is formed be 90 °.
9. Faraday shield according to claim 8, it is characterised in that first son cracks for one or more,
And multiple first sons crack and are distributed along the axially spaced-apart of the conductive ferrule.
10. Faraday shield according to claim 3, it is characterised in that on the circumferencial direction of the conductive ferrule
Division has a multiple first areas and multiple second areas, and multiple first areas and multiple second areas are alternate sets
Put；
First son is provided with each first area to crack, and first son cracks at least two, and edge
The axially spaced-apart distribution of the conductive ferrule；
Second son is provided with each second area to crack, and second son cracks at least two, and edge
The conductive ferrule it is multiple circumferentially spaced.
11. Faraday shield according to claim 10, it is characterised in that multiple first areas and multiple described
Second area is distributed relative to the even circumferential of the conductive ferrule；
At least two first sons crack to be uniformly distributed relative to the first area；At least two second sons crack phase
It is symmetrical for the second area.
12. Faraday shield according to claim 10, it is characterised in that the first area is in the conductive ferrule
Circumferencial direction on width be 50~200mm.
13. Faraday shield according to claim 1, it is characterised in that described to crack for one or more and multiple
It is described to crack along the circumferencial direction interval of the conductive ferrule and be uniformly distributed.
14. Faraday shield according to claim 1, it is characterised in that on the conductive ferrule, and positioned at described
Stop part is provided with cracking, the stop part makes described crack be formed between the external annulus and internal ring wall of the conductive ferrule
Tortuous passageway.
15. Faraday shield according to claim 14, it is characterised in that the stop part is two, respectively the
One stop part and the second stop part, the two is separately positioned on the first end face and second at the place of cracking of the conductive ferrule
On end face, wherein,
First stop part extends from the first end face towards the second end face, and has between the second end face
First gap；
Second stop part extends from the second end face towards the first end face, and has between the first end face
Second gap；
Radially there is third space in the conductive ferrule between first stop part and the second stop part；
First gap, the second gap and third space form the tortuous passageway.
16. Faraday shield according to claim 1, it is characterised in that dielectric material is filled with described crack.
17. Faraday shield according to claim 1, it is characterised in that the span of the width to crack is 2
~10mm.
18. a kind of reaction chamber, including medium cylinder, Faraday shield and radio-frequency coil, the radio-frequency coil are circumferentially positioned at
The outside of the medium cylinder；The Faraday shield is circumferentially positioned at the inner side of the medium cylinder, it is characterised in that the method
Shielding part is drawn using the Faraday shield described in claim 1-17 any one.
19. reaction chamber according to claim 18, it is characterised in that the radio-frequency coil is the cylinder solid in banding
Formula spiral winding；The width of any one circle subcoil of the cylinder solid formula spiral winding in its axial direction is more than cross section
The diameter of any one circle subcoil of circular cylinder solid formula spiral winding.
20. reaction chamber according to claim 19, it is characterised in that any phase of the cylinder solid formula spiral winding
Axial spacing between two adjacent circle subcoils is 6-10mm.
21. reaction chamber according to claim 18, it is characterised in that the reaction chamber is pre-cleaning cavity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720920790.4U CN207183209U (en) | 2017-07-27 | 2017-07-27 | Faraday shield and reaction chamber |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720920790.4U CN207183209U (en) | 2017-07-27 | 2017-07-27 | Faraday shield and reaction chamber |
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| Publication Number | Publication Date |
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| CN207183209U true CN207183209U (en) | 2018-04-03 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107301943A (en) * | 2017-07-27 | 2017-10-27 | 北京北方华创微电子装备有限公司 | Faraday shield and reaction chamber |
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2017
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107301943A (en) * | 2017-07-27 | 2017-10-27 | 北京北方华创微电子装备有限公司 | Faraday shield and reaction chamber |
| WO2019019780A1 (en) * | 2017-07-27 | 2019-01-31 | 北京北方华创微电子装备有限公司 | Faraday shield and reaction chamber |
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