CN207176061U - A kind of physical vapour deposition (PVD) Ta C coatings and the workpiece provided with the coating - Google Patents
A kind of physical vapour deposition (PVD) Ta C coatings and the workpiece provided with the coating Download PDFInfo
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- CN207176061U CN207176061U CN201720421761.3U CN201720421761U CN207176061U CN 207176061 U CN207176061 U CN 207176061U CN 201720421761 U CN201720421761 U CN 201720421761U CN 207176061 U CN207176061 U CN 207176061U
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Abstract
Physical vapour deposition (PVD) hard coat is the utility model is related to, specifically discloses a kind of Ta C hard multi-layer coatings.The utility model uses Ti targets and graphite target, and coating is prepared by the following method：Step 1：Plasma cleaning；Step 2：Depositing Ti prime coat；Step 3：Prepare Ti and carbon combination layer；Step 4：Deposit the unformed non-hydrogen amorphous layer of tetrahedron.Physical vapour deposition (PVD) Ta C coatings of the present utility model are combined technique preparation, film forming even compact using ion sputtering and glow discharge technique.Ta C coating hardness of the present utility model has that hardness is higher, self lubricity is more preferable and the more low advantage of coefficient of friction close to diamond hardness.Ta C coatings of the present utility model are applied to soft metal process tool and plastic forming die, can substantially reduce abrasion, suppress adhesion, improve cutter and die life.
Description
Technical field
It the utility model is related to metal tools, plastic mould field of surface modification, and in particular to a kind of physical vapour deposition (PVD)
Ta-C coatings.
Background technology
With the high speed development of advanced manufacturing technology, to cutter, mould and component of machine in precision, service life and work(
Can on propose higher requirement, particularly their surface quality determine the qualification rate of product to be processed, production efficiency, with
And performance of plant equipment parts etc..Largely it was verified that vapour deposition hard coat is that one kind can effectively improve and improve
The method of material surface performance.Gas phase deposition technology nearly ten years, especially physical vapour deposition (PVD) (Physical Vapor
Deportation, abbreviation PVD) technology achieves the development advanced by leaps and bounds, TiN, TiCN prepared by all kinds of PVD techniques,
The coatings such as TiAlN, DLC greatly improve all kinds of performances of material surface, such as wear-resisting, antifriction, anticorrosive, shock resistance
With antioxygenic property etc..Hard coat technology with making all kinds of cutters, mould and mechanical wearing piece in terms of performance and benefit
Bigger advantage is played, there is huge application potential.
Utility model content
The purpose of this utility model is to prepare a kind of Ta-C (tetrahedral amorphous carbon, tetrahedron are non-
Brilliant carbon, or tetrahedron are unformed non-hydrogen amorphous) laminated coating.
The utility model combination glow discharge and ion sputtering, Ta-C coatings are prepared using physical vapour deposition (PVD).
A kind of Ta-C coatings of the utility model offer, combination layer of the Ta-C coatings including Ti prime coats, Ti and carbon,
The unformed non-hydrogen amorphous layer of tetrahedron, the Ti prime coats, the unformed hydrogen-free of Ti and carbon combination layer and tetrahedron are non-
Brilliant carbon-coating is successively set on matrix.
Preferably, the Ta-C coating layer thicknesses be 2.5-3 μm, wherein, Ti prime coats thickness be 0.1-0.15 μm, Ti and
The combination bulk layer thickness of carbon is 0.1-0.15 μm, and the unformed non-hydrogen amorphous thickness degree of tetrahedron is 2.2-2.7 μm.
The utility model also provides a kind of workpiece, and above-mentioned Ta-C coatings are coated with the workpiece.
The beneficial effects of the utility model are：
The utility model provides a kind of physical vapour deposition (PVD) Ta-C coatings, and coating hardness of the present utility model is reachable
HV5000, close to the hardness of diamond.Ta-C coatings of the present utility model are applied to soft metal process tool and plastic rubber shaping
Mould, abrasion can be substantially reduced, suppresses adhesion, improve cutter and die life.
Brief description of the drawings
Fig. 1 is Ta-C coatings of the present utility model and its prepares schematic diagram；
Fig. 2 is the structural representation of the equipment furnace chamber for preparing physical vapour deposition (PVD) Ta-C coatings of the utility model embodiment
Figure；
Fig. 3 is the photo before the ball valve coating of the utility model embodiment 2；
Fig. 4 is the photo of the ball valve complete machine after the Ta-C coatings of the utility model embodiment 2；
Fig. 5 is that the ball valve complete machine after the Ta-C coatings of the utility model embodiment 2 carries out opening and closing hot endurancing
Photo；
Fig. 6 is the photo of the Ta-C coated carbides milling cutters of the utility model embodiment 3.
Embodiment
The utility model provides a kind of physical vapour deposition (PVD) Ta-C coatings, and there is provided the workpiece of the Ta-C coatings.
Physical vapour deposition (PVD) (Physical Vapor Deposition, PVD) is that physics side is used under a kind of vacuum condition
Method, solid or fluent material surface are gasificated into gaseous atom, molecule or partial ionization into ion, had in body surface deposition
The technology of certain specific function film.The technique has pollution-free, and consumptive material is few, the advantages that film forming even compact.Utilize the technique
Ta-C (tetrahedral amorphous carbon) coating of preparation is applied to component of machine, plastic mould and soft metal process tool, can be with
Significantly improve its service life and processing characteristics.
Refer to Fig. 1, Ta-C coatings of the present utility model, including the combination layer of Ti prime coats, Ti and carbon and four sides
The unformed non-hydrogen amorphous layer of body, and the Ti prime coats, the unformed hydrogen-free of Ti and carbon combination layer and tetrahedron are non-
Brilliant carbon-coating is successively set on matrix.And preferably, the Ta-C coating layer thicknesses are 2.5-3 μm, wherein, Ti bottoming thickness
Spend for 0.1-0.15 μm, the combination bulk layer thickness of Ti and carbon is 0.1-0.15 μm, the unformed non-hydrogen amorphous thickness degree of tetrahedron
For 2.2-2.7 μm.Fig. 1 is simultaneously visible, carbon, titanium, argon ion be present simultaneously in the prepared atmosphere of the coating.
Ta-C coatings prepared by the utility model are mainly used in component of machine, plastic mould and soft metal processing knife
Tool, for lifting the hardness of matrix surface, coating hardness reaches HV5000.Because Ta-C coating hardness is too high, coating and matrix
Hardness mismatches, and it is poor to easily cause basal body binding force, therefore, the utility model pass through introduced between coating and matrix it is transitional
Coating (the combination layer of Ti prime coats, Ti and carbon), has relaxed between Ta-C coatings and matrix because of the difference of physical property, has also alleviated
Stress concentration between coating and matrix.In addition, for metal cutting process cutlery, in metal cutting process
Influenceed by alternate load, easily produce fatigue stress.If only preparing individual layer Ta-C coatings in tool surface, face coat easily by
Fatigue load and the influence generation fatigue crack for handing over stress.With continuing for cutting process, crackle is readily along cutter table
Face extends, and eventually flakes off.Laminated coating of the present utility model can not only increase crack propagation distance, can also be to crackle
Good inhibition is played in extension.
Fig. 2 is referred to, a kind of example for the equipment that Ta-C coatings are used is prepared for the utility model, wherein, C is to prepare
Graphite target needed for physical vapour deposition (PVD) Ta-C coatings, there is provided coating prepares required carbon；Ti is to prepare physical vapour deposition (PVD)
Ti targets needed for Ta-C coatings, there is provided coating prepares required Ti.
Herein, the scope represented by " numerical value to another numerical value ", is that one kind avoids enumerating in the description
The summary representation of all numerical value in the scope.Therefore, the record of a certain special value scope, covers the number range
Interior any number and the relatively fractional value scope defined by any number in the number range, as bright in the description
Text writes out any number and is somebody's turn to do as compared with fractional value scope.
With reference to specific embodiment, the utility model is expanded on further.It should be understood that these embodiments are merely to illustrate
The utility model, rather than limit the scope of protection of the utility model.Those skilled in the art are according to this in actual applications
The modifications and adaptations that utility model is made, still fall within the scope of protection of the utility model.
Embodiment one：
The present embodiment is to prepare Ta-C hard coats in cemented carbide substrate surfaces.
Preparation method is as follows：
Pre-treatment：To hard alloy test piece carry out alcohol washes remove surface greasy dirt and impurity, then to alcohol washes after
Test piece carry out 45min ultrasonic wave cleaning；
Plasma cleaning is carried out to substrate material surface：Matrix material is heated to 75 DEG C in vacuum drying oven intracavitary, vacuum drying oven
It is passed through argon gas in chamber, argon flow amount 50sccm, substrate bias 500V, scavenging period 40min, vacuum is 1.1 ×
10-4Pa, argon ion bombardment frequency are 15Hz；Matrix surface impurity is further cleaned using glow discharge technique so that coating with
Matrix is more easy to combine；
Depositing Ti prime coat：Continue to be passed through argon gas (Ar) to vacuum drying oven intracavitary, argon gas (Ar) flow is 65sccm, vacuum
Cavity temperature is 87 DEG C, and vacuum is 9.5 × 10-5Pa, Ti targets is powered and deposited, Ti target currents are 240mA, and voltage is
370V, sedimentation time 5min, obtain Ti prime coats, and thickness is 0.12 μm；
Prepare Ti and carbon combination layer：Continue to be passed through argon gas (Ar), argon gas (Ar) flow is 56sccm, vacuum drying oven intracavitary temperature
Spend for 84 DEG C, vacuum is 9.2 × 10-5Pa, make Ti targets and graphite target while be powered, Ti target currents are 230mA, and voltage is
360V, graphite target current are 240mA, voltage 390V, sedimentation time 4min, obtain the combination layer of Ti and carbon, and thickness is
0.11μm；
Deposit the unformed non-hydrogen amorphous layer of tetrahedron：Argon gas (Ar) is kept to be passed through, argon gas (Ar) flow is 75sccm, very
Empty furnace chamber temperature is 89 DEG C, and vacuum is 9.5 × 10-5Pa, stop Ti targets and be powered, keep graphite target to be powered, graphite target current
For 240mA, voltage 390V, sedimentation time 1.8h, the unformed non-hydrogen amorphous layer of tetrahedron is obtained, thickness is 2.6 μm.
Hard alloy test piece after coating is tested, 2.83 μm of the thickness of Ta-C coatings, micro-hardness HV5200.
Compare with DLC coatings (diamond-like coating) (HV3200), Ta-C coating hardness, which has, significantly to be improved.
For coating, if out-of-flatness on surface microscopic, easily produce product and cut knurl.Coating surface of the present utility model
It is fine and close smooth, it is possible to reduce product cuts the generation of knurl, and then reduces machined surface roughness, improves workpiece surface quality.And
Coating surface densification is smooth, no significant defect, and then the coating as aluminium alloy process tool can enable aluminum alloy to process
Middle chip removal is smooth, and film/film-substrate binding strength is high, is not easy to peel off in process.
Embodiment 2：
The technical solution of the utility model is applied to ball valve product.
A model DN125 of Nantong company production high-temp and-pressure ball valve, its design parameter require as follows：
(1) spheroid, valve seat be pressure-resistant and seal test pressure：8.09MPa；
(2) medium temperature：475℃；
(3) Applicable media：Superheated steam；
(4) spheroid, valve base sealing are secondary requires：Ensure that the spheroid hardness after surface treatment reaches HRC60-65, seat hardness
Up to more than HRC50-55, and ensure that spheroid and sealing surface of seat difference of hardness are HRC6-10.
The machine life requirement of the ball valve：High temperature and high pressure steam system valve opens and closes hot endurancing 2000 times.
Using with 1 identical preparation method of embodiment Ta-C coatings are prepared on the ball valve surface.
Afterwards, the ball valve (such as Fig. 4) to the ball valve (such as Fig. 3) without Ta-C coatings and after Ta-C coatings is carried out whole
Machine opens and closes hot durability field test test such as Fig. 5.Test result confirms, if without coating, the complete machine of ball valve opens and closes
Hot endurancing can only achieve 5 times；After Ta-C coatings, the one side thickness of coating is 2.5-3.0 μm, wherein Ti bottoming
Thickness degree is 0.1-0.15 μm, and the combination bulk layer thickness of Ti and carbon is 0.1-0.15 μm, the unformed non-hydrogen amorphous layer of tetrahedron
Thickness is 2.2-2.7 μm, and the complete machine of ball valve, which opens and closes hot endurancing, can reach 2500 times, and having fully met machine life will
Ask.
Embodiment 3：
The technical solution of the utility model is applied to the cutter of aluminium alloy processing.
The plasticity of aluminium alloy is low, and fusing point is also low, and its viscous knife problem is serious when processing aluminium alloy, chip removal poor-performing, surface
Roughness is also higher, and often needs to obtain the aluminum alloy part of minute surface in producing, and diamond cutter can only be used for this,
But cost is very high.
The Ta-C coatings of the utility model research can be prepared in carbide tool surface, have wear-resisting, aluminum-resistant alloy
The features such as adhesion, minute surface Milling Process can be carried out at high speed to aluminium alloy.
The method that Ta-C coatings are prepared on hard alloy cutter is essentially identical with embodiment, and difference is as follows：
The preparation four steps sedimentation time of the cutter of the processing aluminium alloy is 1.6h, and it is non-to obtain the unformed hydrogen-free of tetrahedron
Brilliant carbon-coating, thickness are 2.3 μm, 2.53 μm of the gross thickness of Ta-C coatings.
It is the machined parameters that the above-mentioned hard alloy cutter for being coated with Ta-C coatings is used for aluminium alloy below：
(1) it is annealed condition, Brinell hardness HB80 or so to be processed aluminium alloy；
(2) hard alloy cutter of selection is external diameter 10mm, and surface carries Ta-C coatings (as shown in Fig. 6)；
(3) cutting speed：2500m/min；The amount of feeding：0.02-0.1mm/r；Cutting depth：0.02-0.3mm；
(4) coolant：Kerosene.
Confirm, be processed using hard alloy cutter of the surface with Ta-C coatings, aluminium alloy adds by cutting test
The chip removal of work process is smooth, any viscous knife phenomenon does not occur, and aluminum alloy surface is bright after processing, surface roughness Ra 0.05 with
Under.
Ta-C coatings prepared by the utility model have advantages below：
Firstth, hardness is high, coating surface densification is smooth, no significant defect, self lubricity are more preferable and coefficient of friction is lower；
When Ta-C coatings prepared by the utility model are used for process tool, in process, the outermost tetrahedral amorphous carbon of coating
Layer has processing self-lubricating property.By experimental verification, Ta-C coatings milling cutter processing 2A50 aluminium alloys, compare with DLC coatings, obtain
Aluminium alloy finished surface more smooth finish, coefficient of friction as little as 0.01；
Secondth, the hot durability of complete machine keying of ball valve can be greatly improved located at ball valve surface by applying, and then be greatly improved
The machine life of ball valve；
3rd, the surface of the hard alloy cutter located at processing aluminium alloy is applied, can solve the problem that in aluminium alloy process
Viscous knife problem.
Under the teaching of the utility model and above-described embodiment, those skilled in the art are easy to it is envisioned that this practicality is new
Type is cited or each raw material enumerated or its equivalent alterations, each processing method or its equivalent alterations can realize that this practicality is new
Type, and the parameter bound value of each raw material and processing method, interval value can realize the utility model, not arrange one by one herein
For embodiment.
Claims (3)
1. a kind of physical vapour deposition (PVD) Ta-C coatings, it is characterised in that the Ta-C coatings include the knot of Ti prime coats, Ti and carbon
The unformed non-hydrogen amorphous layer of fit layer, tetrahedron, the combination layer and tetrahedron of the Ti prime coats, Ti and carbon are unformed
Non-hydrogen amorphous layer is successively set on matrix.
2. physical vapour deposition (PVD) Ta-C coatings as claimed in claim 1, it is characterised in that the Ta-C coating layer thicknesses are 2.5-
3 μm, wherein, Ti prime coats thickness is 0.1-0.15 μm, and the combination bulk layer thickness of Ti and carbon is 0.1-0.15 μm, and tetrahedron is without fixed
The non-hydrogen amorphous thickness degree of type is 2.2-2.7 μm.
3. a kind of workpiece, it is characterised in that the physical vapour deposition (PVD) Ta-C described in claim 1 or 2 is coated with the workpiece
Coating.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106893987A (en) * | 2017-04-20 | 2017-06-27 | 上海应用技术大学 | The preparation method and Ta C coatings of a kind of physical vapour deposition (PVD) Ta C coatings |
| CN117285362A (en) * | 2023-11-23 | 2023-12-26 | 中国航发北京航空材料研究院 | SiC/SiC composite material high temperature resistant and oxidation resistant interface layer and preparation method thereof |
-
2017
- 2017-04-20 CN CN201720421761.3U patent/CN207176061U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106893987A (en) * | 2017-04-20 | 2017-06-27 | 上海应用技术大学 | The preparation method and Ta C coatings of a kind of physical vapour deposition (PVD) Ta C coatings |
| CN106893987B (en) * | 2017-04-20 | 2023-09-05 | 上海应用技术大学 | Preparation method of physical vapor deposition Ta-C coating and Ta-C coating |
| CN117285362A (en) * | 2023-11-23 | 2023-12-26 | 中国航发北京航空材料研究院 | SiC/SiC composite material high temperature resistant and oxidation resistant interface layer and preparation method thereof |
| CN117285362B (en) * | 2023-11-23 | 2024-02-02 | 中国航发北京航空材料研究院 | SiC/SiC composite material high temperature resistant and oxidation resistant interface layer and preparation method thereof |
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