CN207159098U - Upper electrode meltallizing servicing unit - Google Patents
Upper electrode meltallizing servicing unit Download PDFInfo
- Publication number
- CN207159098U CN207159098U CN201721001646.7U CN201721001646U CN207159098U CN 207159098 U CN207159098 U CN 207159098U CN 201721001646 U CN201721001646 U CN 201721001646U CN 207159098 U CN207159098 U CN 207159098U
- Authority
- CN
- China
- Prior art keywords
- meltallizing
- shield
- upper electrode
- hole
- servicing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of upper electrode meltallizing servicing unit, including the shield for being used to be covered in upper electrode surface during meltallizing, the position that the shield corresponds to fumarole on upper electrode is equipped with cylindrical meltallizing hole, the aperture in the meltallizing hole is more than the aperture of fumarole, the upper and lower surface of shield is run through in the meltallizing hole, and meltallizing hole both ends end is respectively provided with chamfering.Using above structure, add to form insulating barrier on original anodized coating surface by shield, improve the insulating properties at fragile position, so as to the stable form for making fumarole keep permanent, the jet uniformity during dry etching is improved, improves product yield, and mother metal is not also lost, the Reusability of mother metal is ensure that, extends the service life of upper electrode.
Description
Technical field
The utility model belongs to upper electrode meltallizing technical field, and in particular to a kind of upper electrode meltallizing servicing unit.
Background technology
Upper electrode is mainly used in glass panel production process, makes the dry etching work during formation minor loop of glass panel surface
The part of journey.There are thousands of individual gas jet holes along its thickness direction thereon, during dry etching, can mutually be tied with plasma electrode
Close, it uniformly, is the expendable core component for determining LCD dry etching engineering production efficiencys plasma gas is sprayed in cabin.
Traditional upper electrode has simply carried out anodic oxidation-single mode to gas jet hole and surface and carried out absolutely
Edge, more fragile around fumarole, conventionally, the insulating properties around fumarole is weaker, is powered and used in the later stage
Slight crack easily occurs for Cheng Zhong, anodic oxide coating, so that aluminum mother plate is exposed, the situation of mother metal burning occurs, and shortens top electricity
The service life of pole, production cost is added, and mother metal burning can bring a large amount of dust, also have larger shadow to dry etching process
Ring, reduce production efficiency.
Utility model content
To solve above technical problem, the utility model provides a kind of upper electrode meltallizing servicing unit, is ensureing to spray
Under the premise of stomata meltallizing uniformity, the insulating properties of upper electrode are improved, so as to extend the service life of upper electrode, there is provided dry
Carve the production efficiency of process.
To achieve the above object, technical solutions of the utility model are as follows：
A kind of upper electrode meltallizing servicing unit, phase key are：Including being used to be covered in upper electrode during meltallizing
The shield on surface, the position that the shield corresponds to fumarole on upper electrode are equipped with cylindrical meltallizing hole, the meltallizing hole
Aperture be more than fumarole aperture, the meltallizing hole run through shield upper and lower surface, meltallizing hole both ends end is respectively provided with chamfering.
Using above scheme, during meltallizing, the region that meltallizing is not needed on upper electrode can be blocked by shield, it is ensured that shape
Into the coating of appropriate area size, and the uniform coating thickness for using the shield of said structure to be formed is mellow and full, is greatly improved
The insulating properties of jet bore ends, so as to improve the follow-up service life of upper electrode.
As preferred：Also including big for the correction block being covered on shield, the thickness of the correction block during meltallizing
In the thickness of shield, the correction block is provided with mounting hole in the position in corresponding meltallizing hole, and the aperture of the mounting hole is more than meltallizing
The aperture in hole.Using above structure, correction block can be thermally shielded to meltallizing flame, stop high temperature to shield or upper electrode
Continuous action, while correct block and can push down shield by own wt, suppress shield temperature distortion, coating is formed so as to ensure
Uniformity.
As preferred：The shield is fixed on the surface of upper electrode by alignment pin during meltallizing.Tied more than
Structure, facilitate the dismounting of shield, and the relative position of shield and upper electrode can be carried out spacing, it is ensured that meltallizing hole and fumarole
Coaxially align, further improve meltallizing quality.
As preferred：The alignment pin is four, and the corner for corresponding to shield respectively is set, and the shield corner is provided with determining
The pin-and-hole that position pin is engaged.It is spacing to shield progress from corner using above structure, the offset of shield can be further reduced,
Ensure that the relative position of shield and shield is fixed.
As preferred：The alignment pin lower end has external thread section, and upper end is in round-like structure.Using above structure, make
Alignment pin lower end is convenient to be fixed with upper electrode, while alignment pin upper end is in round table-like, facilitates shield to penetrate, and improves work effect
Rate, while will not also scratch surface and the operating personnel of shield, it is ensured that the safety coefficient of workpiece and personnel.
As preferred：The shield, correction block and alignment pin use stainless steel.Using above structure, it is ensured that dress
Put with resistance to elevated temperatures, may be reused, while also there is good resistant to chemical etching and electrochemical corrosion performance, it is ensured that
Device will not be corroded by high temperature meltallizing material and meltallizing atmosphere, while it also avoid iron rust pollution upper electrode, so as to have
Effect ensures meltallizing quality.
Compared with prior art, the beneficial effects of the utility model are：
Using upper electrode meltallizing servicing unit provided by the utility model, by shield in original anodized coating
Surface adds to form insulating barrier, improves the insulating properties at fragile position, so as to the stable form for making fumarole keep permanent, carries
The high jet uniformity during dry etching, improve product yield, and mother metal be not also lost, it is ensured that mother metal it is anti-
Multiple usability, extend the service life of upper electrode.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the mounting structure schematic diagram of embodiment illustrated in fig. 1；
Fig. 3 is partial enlarged drawing at d in Fig. 2；
Fig. 4 is the top view of Fig. 2 illustrated embodiment；
Fig. 5 meltallizing structural representations of the present utility model；
Meltallizing partial schematic diagram at c in Fig. 6 bitmaps 5；
Fig. 7 is that shield is thermally deformed structural representation；
Fig. 8 is meltallizing partial schematic diagram at a in Fig. 7；
Fig. 9 is the non-chamfering structure schematic diagram in meltallizing hole；
Figure 10 is meltallizing partial schematic diagram at b in Fig. 9.
Embodiment
The utility model is described in further detail with accompanying drawing with reference to embodiments.
Referring to figs. 1 to the upper electrode meltallizing servicing unit shown in Fig. 6, wherein Fig. 2 positions mounting structure of the present utility model
Schematic diagram, in order to preferably run through its mounting structure, cutting processing is carried out by one jiao of installation, is mainly included plate-like
The shield 1 and correction block 2 of structure, and the thickness for correcting block 2 is more than the thickness of shield 1, while the weight for correcting block 2 is much larger than and hidden
The weight of plate 1.
The shape of shield 1 and correction block 2 is with reference to treating that the upper electrode E of meltallizing is designed, such as institute's pin in the present embodiment
Treat meltallizing upper electrode E positions and hold platy structure, many fumarole E0 are distributed with rectangular array thereon, then shield 1
This shape with upper electrode E of shape is adapted, and its size is consistent substantially, i.e., meltallizing when shield 1 be covered in upper electrode E
Above, it is possible to achieve all standing, but the thickness ratio upper electrode E of shield 1 is thin, the weight of relatively reduced shield 1.
Shield 1 is provided with through the meltallizing hole 10 of its thickness direction upper and lower surface, the set location in meltallizing hole 10 and hole
Footpath size is also to be designed according to upper electrode E, need to only meet following regulation, when the face of shield 1 is placed on upper electrode E
When upper, meltallizing hole 10 and fumarole E0 can realize one-to-ones corresponding, and the fumarole E0 of meltallizing hole more than 10 axis is consistent, both it together
Axle is set；
And the aperture in meltallizing hole 10 be more than fumarole E0 aperture, its specifically differ then as needed depending on, if
Need larger meltallizing coating area, then can be on the contrary then carve relative decrease with respect to hole diameter enlargement, but minimum can not be less than fumarole
E0 aperture, so designed by shield 1, the region that upper electrode E does not need meltallizing can be covered in meltallizing, colleague can be more
Good control column meltallizing coating F area size.
In order that the column meltallizing coating formed is smooth mellow and full, the upper and lower ends in meltallizing hole 10 are respectively provided with the utility model
Chamfering 100, with reference to figure 3, Fig. 5 and Fig. 6, chamfering 100 makes the upper and lower ends in meltallizing hole 10 horn-like in smoothly transitting；
With reference to figure 9 and Figure 10, the ＇ of meltallizing hole 10 end is no to pass through chamfered, circle of position cylindricality, then meltallizing process
Middle part high temperature melting is penetrated after material encounters the ＇ of meltallizing hole 10 inwall and rebounded, and is occurred near the ＇ bottom sidewalls of meltallizing hole 10
Accumulation, shape as shown in Figure 10 being formed, burr occurs near the ＇ of meltallizing hole 10 close to shield 1 in meltallizing coating F ＇ ＇,
Meltallizing coating F ＇ ＇ show surrounding higher than middle feature, can not meet the requirement of upper electrode E surfaces meltallizing coating completely.
And it is on the contrary when the upper and lower ends in meltallizing hole 10 have chamfering 100, as shown in Figure 5 and Figure 6, high temperature meltallizing material is
Make after colliding, because there is the presence of chamfering 100, micro extension can be carried out to circumferential, so as to can ensure that meltallizing coating F
Surface flush, be in the form of a column structure substantially, and smooth mellow and full.
Because shield 1 be commonly designed it is relatively thin, in the presence of meltallizing thermal-flame, easily occur expanded by heating become
Shape, make it that its upper and lower surface is uneven with reference to figure 7 and Fig. 8, after the temperature distortion of shield 1, go out between shield 1 and upper electrode E
Existing space, while the ＇ of meltallizing hole 10 aperture may also no longer uniformly, so as to have a strong impact on meltallizing effect, as shown in figure 8, meltallizing
Material goes out to expand outwardly in shield 1 and upper electrode E space, forms similar round table-like meltallizing coating F ＇, it is impossible to meet both
Fixed coating area requirement and thickness, so as to be difficult to the demand for reaching meltallizing, after coming into operation, or even can reduce upper electrode
E service life or its jet uniformity
Therefore to prevent shield 1 from above-mentioned such case occur, in the utility model, add the structure of correction block 2, correction
The shape that the shape of block 2 then corresponds to shield 1 is designed, and the also rectangular platy structure of block 2, its size ratio are corrected in the present embodiment
Shield 1 is smaller, then when the correction face of block 2 is placed on shield 1, it can be seen that the outer rim of shield 1, which has, protrudes from correction block 2
Part, shield 1 can be pushed down to ensure to correct block 2, the weight of correction block 2 is greater than shield 1, and thicker than the thickness of shield 1, relies on
Big thickness can effectively stop the high temperature of meltallizing flame during meltallizing, so as to play certain heat-blocking action, reduce shield 1 by
Heat affecting；
After correction block 2 pushes down shield 1, and meltallizing process is not influenceed, correction block 2 is provided with mounting hole 20, mounting hole 20
Corresponding meltallizing hole 10 is configured, and its aperture is slightly larger than the aperture in meltallizing hole 10, and a mounting hole 20 corresponds to three in the present embodiment
Individual meltallizing hole 10 is designed, i.e. has three meltallizing holes 10 under a mounting hole 20, so relative can reduce difficulty of processing, have simultaneously
Beneficial to porous while meltallizing.
Referring to figs. 1 to Fig. 6, in use, shield 1 is fixed to upper electrode E surface by alignment pin 3, alignment pin 3 is overall
Structure is in the form of a column, its one end is machined with external thread section 30, and the other end is in then round-like structure, and upper electrode E corner is equipped with
Counterbore E1, internal thread is provided with it, then alignment pin 3 can be inserted very easily in counterbore E1, and shield 1 is in corresponding counterbore E1 position
Put and be equipped with pin-and-hole 11, then after alignment pin 3 fixes, the upper end of the through hole face alignment pin 3 of shield 1 is put into, you can be fast
Speed realizes that the upper electrode E of shield more than 1 relative position is fixed, and the fumarole E0 of meltallizing hole more than 10 axis aligns, and in meltallizing
During be not easy to shift, so as to which meltallizing quality be effectively ensured；
Then correction block 2 is placed into the upper surface of shield 1, and by measuring the outer rim prominent length of shield 1, to ensure to rectify
The position of positive block 2 and shield 1 aligns, i.e., mounting hole 20 aligns with meltallizing hole 10, does not influence meltallizing quality.
Shield 1, correction block 2 and alignment pin 3 are process using stainless steel in the present embodiment, because meltallizing process
In, temperature is higher, and stainless steel material has resistant to elevated temperatures feature, it can be ensured that shield 1 and correction block 2 and alignment pin 3
Normal use and repeated multiple times use, practicality and economy are very high, while stainless steel material also has good chemically-resistant rotten
Erosion and electrochemical corrosion performance so that shield 1, correction block 2 and alignment pin 3 will not be by high temperature meltallizing material and meltallizing atmosphere
Corrosion, pollution upper electrode E is also avoided that, influences meltallizing quality
Finally it should be noted that foregoing description is only preferred embodiment of the present utility model, the common skill of this area
Art personnel on the premise of without prejudice to the utility model aims and claim, can make under enlightenment of the present utility model
Expression, such conversion are each fallen within the scope of protection of the utility model as multiple types.
Claims (6)
- A kind of 1. upper electrode meltallizing servicing unit, it is characterised in that：Including being used to be covered in upper electrode (E) during meltallizing The shield (1) on surface, the position that the shield (1) corresponds to fumarole (E0) on upper electrode (E) are equipped with cylindrical meltallizing Hole (10), the aperture of the meltallizing hole (10) are more than the aperture of fumarole (E0), and the meltallizing hole (10) is upper through shield (1) Lower surface, meltallizing hole (10) both ends end are respectively provided with chamfering (100).
- 2. upper electrode meltallizing servicing unit according to claim 1, it is characterised in that：Also include being used for during meltallizing The correction block (2) being covered on shield (1), the thickness of the correction block (2) are more than the thickness of shield (1), the correction block (2) Mounting hole (20) is provided with the position of corresponding meltallizing hole (10), the aperture of the mounting hole (20) is more than the hole of meltallizing hole (10) Footpath.
- 3. upper electrode meltallizing servicing unit according to claim 1 or 2, it is characterised in that：The screening during meltallizing Plate (1) is fixed on upper electrode (E) surface by alignment pin (3).
- 4. upper electrode meltallizing servicing unit according to claim 3, it is characterised in that：The alignment pin (3) is four, The corner for corresponding to shield (1) respectively is set, and shield (1) corner is provided with the pin-and-hole (11) being engaged with alignment pin (3).
- 5. upper electrode meltallizing servicing unit according to claim 4, it is characterised in that：Alignment pin (3) the lower end tool There is external thread section (30), upper end is in round-like structure.
- 6. upper electrode meltallizing servicing unit according to claim 5, it is characterised in that：The shield (1), correction block (2) and alignment pin (3) uses stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721001646.7U CN207159098U (en) | 2017-08-10 | 2017-08-10 | Upper electrode meltallizing servicing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721001646.7U CN207159098U (en) | 2017-08-10 | 2017-08-10 | Upper electrode meltallizing servicing unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207159098U true CN207159098U (en) | 2018-03-30 |
Family
ID=61715962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721001646.7U Active CN207159098U (en) | 2017-08-10 | 2017-08-10 | Upper electrode meltallizing servicing unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207159098U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111243933A (en) * | 2020-02-18 | 2020-06-05 | 信利(仁寿)高端显示科技有限公司 | Upper electrode of dry etching equipment and dry etching equipment |
| CN112133622A (en) * | 2020-09-22 | 2020-12-25 | 重庆臻宝实业有限公司 | Upper electrode pore repairing process |
| WO2023130536A1 (en) * | 2022-01-06 | 2023-07-13 | 重庆臻宝实业有限公司 | Lower electrode structure capable of effectively preventing arcing and mounting method therefor |
-
2017
- 2017-08-10 CN CN201721001646.7U patent/CN207159098U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111243933A (en) * | 2020-02-18 | 2020-06-05 | 信利(仁寿)高端显示科技有限公司 | Upper electrode of dry etching equipment and dry etching equipment |
| CN112133622A (en) * | 2020-09-22 | 2020-12-25 | 重庆臻宝实业有限公司 | Upper electrode pore repairing process |
| CN112133622B (en) * | 2020-09-22 | 2023-09-05 | 重庆臻宝科技股份有限公司 | Repair process for upper electrode air hole |
| WO2023130536A1 (en) * | 2022-01-06 | 2023-07-13 | 重庆臻宝实业有限公司 | Lower electrode structure capable of effectively preventing arcing and mounting method therefor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207159098U (en) | Upper electrode meltallizing servicing unit | |
| CN106498335B (en) | A kind of preparation process of hot-end component burner inner liner high temperature coating | |
| CN106222582A (en) | A kind of method improving bearing steel surface corrosion resistance | |
| CN111118302B (en) | Crystallizer for metal electroslag remelting, electroslag remelting device and electroslag remelting method | |
| CN112831648A (en) | Method for eliminating single-side wave defect of oriented silicon steel | |
| CN107419213B (en) | Surface anticorrosion method for metal matrix | |
| CN103352098A (en) | Desulfuration spray gun | |
| CN109277453A (en) | It is a kind of for producing the punching tool and its surface treatment method of automobile connecting bar | |
| CN103146907A (en) | Cold-rolled high-temperature furnace roller covered with oxide ceramic coating | |
| CN102658365A (en) | Cutting method of dead head of high manganese steel casting | |
| CN109365976A (en) | A kind of production method and mold of Resistance Welding receiving electrode | |
| CN106191751B (en) | The method and made tooling of carbon-carbon composite tooling surface antioxidant coating | |
| CN216656384U (en) | Chamfering tool for orifices of enamel pipes | |
| CN102259172B (en) | Method for texturing surface of strip-casting crystallization roller | |
| CN111020451A (en) | Treatment method for galling surface of automobile stamping die | |
| CN109290390A (en) | A kind of gas-fired kitchen gas transmission pipe manufacturing method | |
| CN209040898U (en) | A kind of gas turbine fixed blade ring | |
| CN203171113U (en) | Split type lower preheating block of machine clearing nozzle and machine clearing nozzle | |
| CN104744973A (en) | High radiant ceramic coating for heating furnace tube as well as preparation method and using method thereof | |
| CN207159097U (en) | Upper electrode meltallizing chassis | |
| CN207567101U (en) | A kind of 3D glass furnace pool walls cooling duct and its cooling system | |
| CN104446486A (en) | Thermal shock resistant ceramic tube mold and preparation method thereof | |
| CN207229902U (en) | A kind of valve sealing ring block for PECVD device | |
| CN112045171B (en) | Process method for solving fluorescent cracks of cast titanium alloy | |
| CN103834892B (en) | The large-scale rotary flat chassis of even especially big thrust |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |