CN207143330U - A kind of new tetraethyl orthosilicate gas supply device - Google Patents
A kind of new tetraethyl orthosilicate gas supply device Download PDFInfo
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- CN207143330U CN207143330U CN201721157593.8U CN201721157593U CN207143330U CN 207143330 U CN207143330 U CN 207143330U CN 201721157593 U CN201721157593 U CN 201721157593U CN 207143330 U CN207143330 U CN 207143330U
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- tetraethyl orthosilicate
- supply device
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Abstract
The utility model provides a kind of new tetraethyl orthosilicate gas supply device, including incubator, Heating guard understructure, gas stores tank, intelligent controlling device, filler pipe, air guide heating-pipe structure and conduit control valve, described Heating guard understructure are arranged on the bottom of incubator；Described gas storage tank is arranged on the top of Heating guard understructure；Described intelligent controlling device is arranged on the upper left quarter of incubator.The setting of the utility model rubber washer, be advantageous to improve the protection effect for storing gas in tank in storage tank standing groove；The setting of handle, be advantageous to convenient gas of carrying and store tank so that be more convenient；The setting of standby airway tube, being advantageous to can be timely to supply tetraethyl orthosilicate gas in gas storage tank when main gas tube blocks；The setting of constant displacement pump and flow sensor, be advantageous to that tetraethyl orthosilicate gas can be transmitted in dosing gas body storage tank.
Description
Technical field
The utility model belongs to gas supply device technical field, more particularly to a kind of new tetraethyl orthosilicate gas supply
Device.
Background technology
During semiconductor silicon polished silicon processing and manufacturing, it is to need to expedite the emergence of in silicon polished wafer rear to have a procedure
Grow up to layer of silicon dioxide film.The method that expedites the emergence of of this silicon dioxide film has two kinds, and one kind is that silane oxidation expedites the emergence of method, another
Kind is most of tetraethyl orthosilicate heated oxide decomposition method manufactured unit and all used, by heating, by tetraethyl orthosilicate
Gas is transported in back of the body banking, to reach the purpose for making silicon polished wafer rear grow layer of silicon dioxide film.And it is at present
It is a kind of special stainless steel heating tank to grow the device that silicon dioxide film provides tetraethyl orthosilicate gas with back of the body banking equipment, is contained
The tank of tetraethyl orthosilicate is the jar special that manufacturer provides, and does not possess versatility, because back of the body banking unit type is different, and it is unfavorable
In replacing, and it is expensive.
But existing tetraethyl orthosilicate gas supply device also there is in-convenience in use, during air guide blockage can not and
When to supplying tetraethyl orthosilicate gas in filling gas containing tube tank and the problem of low intelligence degree.
Therefore, invent a kind of new tetraethyl orthosilicate gas supply device and seem very necessary.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of new tetraethyl orthosilicate gas supply device, with
Solve existing tetraethyl orthosilicate gas supply device also there is in-convenience in use, can not be in time to containing during air guide blockage
The problem of tetraethyl orthosilicate gas and low intelligence degree are supplied in gas containing tube tank.A kind of new tetraethyl orthosilicate gas supply
Device, including incubator, Heating guard understructure, gas storage tank, intelligent controlling device, filler pipe, air guide heating tube knot
Structure and conduit control valve, described Heating guard understructure are arranged on the bottom of incubator；Described gas storage tank installation
On the top of Heating guard understructure；Described intelligent controlling device is arranged on the upper left quarter of incubator；Described filler pipe
Installed in the upper right of gas storage tank；Described conduit control valve is arranged on filler pipe；Described air guide heating tube knot
Structure is arranged on the upper left-hand of gas storage tank；Described air guide heating-pipe structure includes air duct fitting, and main gas tube is standby
Airway tube, constant displacement pump, main control valve and standby control valve, described air duct fitting are arranged on the left and right ends of main gas tube；
Described constant displacement pump is arranged on the left side of main gas tube；Described standby airway tube one end and the exit of constant displacement pump connect, separately
One end is connected with the junction of main gas tube and air duct fitting；Described main control valve and standby control valve are separately mounted to lead
On airway tube and standby airway tube.
Preferably, described Heating guard understructure includes base body, metal pedestal, stores tank standing groove, rubber blanket
Circle and heating plate, described metal pedestal are arranged on the lower middle position of base body；Described storage tank standing groove is opened in
The top of base body；Described rubber washer is arranged on the inner side of storage tank standing groove；Described heating plate is arranged on storage
The centre position of tank standing groove.
Preferably, it is additionally provided with handle at left and right sides of the top of described gas storage tank.
Preferably, it is respectively arranged with heater strip on the outside of described main gas tube and standby airway tube.
Preferably, it is additionally provided with flow sensor in described main gas tube.
Preferably, described storage tank standing groove is provided with multiple.
Preferably, described rubber washer section is arranged to L-type.
Preferably, described intelligent controlling device includes control device shell, touch-screen, controller, audible-visual alarm lamp and
Power switch, described touch-screen, audible-visual alarm lamp and power switch are embedded in the preceding surface of control device shell respectively；It is described
Controller be arranged on control device shell inside.
Preferably, described controller is using the PLC of the series of mitsubishi FX2N -48, described flow sensor and touch-screen
The output end with controller is electrically connected with respectively；Described constant displacement pump, heating plate and audible-visual alarm lamp are defeated with controller respectively
Go out end to be electrically connected with.
Compared with prior art, the utility model has the advantages that：Because one kind of the present utility model is new just
Silester gas supply device is widely used in gas supply device technical field.Meanwhile the beneficial effects of the utility model
For：
1. in the utility model, described storage tank standing groove is provided with multiple, is advantageous to convenient while places multiple gas
Body stores tank.
2. in the utility model, the setting of described rubber washer, be advantageous to improve and gas storage tank is put in storage tank
Put the protection effect in groove.
3. in the utility model, the setting of described handle, be advantageous to convenient gas of carrying and store tank so that be more square
Just.
4. in the utility model, the setting of described standby airway tube, being advantageous to can be timely when main gas tube blocks
To gas storage tank in supply tetraethyl orthosilicate gas.
5. in the utility model, the setting of described constant displacement pump and flow sensor, being advantageous to being capable of dosing gas body receipts
The interior transmission tetraethyl orthosilicate gas of tank of receiving.
6. in the utility model, the setting of described intelligent controlling device, be advantageous to improve the intelligence degree of the equipment.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of Heating guard understructure of the present utility model.
Fig. 3 is the structural representation of intelligent controlling device of the present utility model.
Fig. 4 is the structural representation of air guide heating-pipe structure of the present utility model.
In figure：
1st, incubator；2nd, Heating guard understructure；21st, base body；22nd, metal pedestal；23rd, tank standing groove is stored；24、
Rubber washer；25th, heating plate；3rd, gas storage tank；31st, handle；4th, intelligent controlling device；41st, control device shell；42nd, touch
Touch screen；43rd, controller；44th, audible-visual alarm lamp；45th, power switch；5th, filler pipe；6th, air guide heating-pipe structure；61st, airway tube
Joint；62nd, main gas tube；621st, flow sensor；63rd, standby airway tube；64th, constant displacement pump；65th, main control valve；66th, standby control
Valve processed；7th, conduit control valve.
Embodiment
The utility model is described further below in conjunction with accompanying drawing：
Embodiment：
As shown in accompanying drawing 1 to accompanying drawing 4
The utility model provides a kind of new tetraethyl orthosilicate gas supply device, including incubator 1, Heating guard base
Structure 2, gas storage tank 3, intelligent controlling device 4, filler pipe 5, air guide heating-pipe structure 6 and conduit control valve 7, described adds
Thermal protection understructure 2 is arranged on the bottom of incubator 1；Described gas storage tank 3 is arranged on Heating guard understructure 2
Top；Described intelligent controlling device 4 is arranged on the upper left quarter of incubator 1；Described filler pipe 5 is arranged on gas storage tank 3
Upper right；Described conduit control valve 7 is arranged on filler pipe 5；Described air guide heating-pipe structure 6 is received installed in gas
Receive the upper left-hand of tank 3；Described air guide heating-pipe structure 6 includes air duct fitting 61, main gas tube 62, standby airway tube
63, constant displacement pump 64, main control valve 65 and standby control valve 66, described air duct fitting 61 are arranged on the left and right of main gas tube 62
Both ends；Described constant displacement pump 64 is arranged on the left side of main gas tube 62；Described one end of standby airway tube 63 and constant displacement pump 64
Exit is connected, and the other end is connected with main gas tube 62 with the junction of air duct fitting 61；Described main control valve 65 and standby
It is separately mounted to control valve 66 in main gas tube 62 and standby airway tube 63.
In above-described embodiment, specifically, described Heating guard understructure 2 includes base body 21, metal pedestal 22, receive
Receive tank standing groove 23, rubber washer 24 and heating plate 25, described metal pedestal 22 is arranged on the bottom interposition of base body 21
Put；Described storage tank standing groove 23 is opened in the top of base body 21；Described rubber washer 24 is arranged on storage tank and put
Put the inner side of groove 23；Described heating plate 25 is arranged on the centre position of storage tank standing groove 23.
In above-described embodiment, specifically, being additionally provided with handle 31 at left and right sides of the top of described gas storage tank 3.
In above-described embodiment, add specifically, described main gas tube 62 and the outside of standby airway tube 63 are respectively arranged with
Heated filament.
In above-described embodiment, specifically, being additionally provided with flow sensor 621 in described main gas tube 62.
In above-described embodiment, specifically, described storage tank standing groove 23 be provided with it is multiple.
In above-described embodiment, specifically, the described section of rubber washer 24 is arranged to L-type.
In above-described embodiment, specifically, described intelligent controlling device 4 includes control device shell 41, touch-screen 42, control
Device 43 processed, audible-visual alarm lamp 44 and power switch 45, described touch-screen 42, audible-visual alarm lamp 44 and power switch 45 are inlayed respectively
Embedded in the preceding surface of control device shell 41；Described controller 43 is arranged on the inside of control device shell 41.
In above-described embodiment, specifically, PLC of the described controller 43 using the series of mitsubishi FX2N -48, described flow
The output end of sensor 621 and touch-screen 42 respectively with controller 43 is electrically connected with；Described constant displacement pump 64, the harmony of heating plate 25
Light alarm lamp 44 is electrically connected with the output end of controller 43 respectively.
Operation principle
The utility model in the course of the work, can adjust gas storage tank 3 in storage tank standing groove 23 according to use demand
Interior quantity, then gas is stored using main gas tube 62 tetraethyl orthosilicate gas is provided in tank 3, and utilize flow sensor
Flow velocity of 621 detection gas in main gas tube 62, the standby control in standby airway tube 63 is opened when main gas tube 62 blocks
Valve 66 processed, tetraethyl orthosilicate gas is provided to gas storage tank 3 using standby airway tube 63.
Using technical scheme described in the utility model, or those skilled in the art is in technical solutions of the utility model
Under inspiration, similar technical scheme is designed, and reaches above-mentioned technique effect, is to fall into protection model of the present utility model
Enclose.
Claims (9)
- A kind of 1. new tetraethyl orthosilicate gas supply device, it is characterised in that the new tetraethyl orthosilicate gas supply device, Including incubator (1), Heating guard understructure (2), gas storage tank (3), intelligent controlling device (4), filler pipe (5), lead Gas heating-pipe structure (6) and conduit control valve (7), described Heating guard understructure (2) are arranged under incubator (1) Portion；Described gas storage tank (3) is arranged on the top of Heating guard understructure (2)；Described intelligent controlling device (4) peace Upper left quarter mounted in incubator (1)；Described filler pipe (5) is arranged on the upper right of gas storage tank (3)；Described water pipe Control valve (7) is arranged on filler pipe (5)；The top that described air guide heating-pipe structure (6) is arranged on gas storage tank (3) is left Side；Described air guide heating-pipe structure (6) includes air duct fitting (61), main gas tube (62), standby airway tube (63), quantifies Pump (64), main control valve (65) and standby control valve (66), described air duct fitting (61) are arranged on main gas tube (62) Left and right ends；Described constant displacement pump (64) is arranged on the left side of main gas tube (62)；Described standby airway tube (63) one end with The exit connection of constant displacement pump (64), the other end are connected with main gas tube (62) with the junction of air duct fitting (61)；It is described Main control valve (65) and standby control valve (66) be separately mounted in main gas tube (62) and standby airway tube (63).
- 2. new tetraethyl orthosilicate gas supply device as claimed in claim 1, it is characterised in that described Heating guard bottom Holder structure (2) includes base body (21), metal pedestal (22), storage tank standing groove (23), rubber washer (24) and heating plate (25), described metal pedestal (22) is arranged on the lower middle position of base body (21)；Described storage tank standing groove (23) It is opened in the top of base body (21)；Described rubber washer (24) is arranged on the inner side of storage tank standing groove (23)；It is described Heating plate (25) be arranged on storage tank standing groove (23) centre position.
- 3. new tetraethyl orthosilicate gas supply device as claimed in claim 1, it is characterised in that described gas storage tank (3) handle (31) is additionally provided with left and right sides of top.
- 4. new tetraethyl orthosilicate gas supply device as claimed in claim 1, it is characterised in that described main gas tube (62) and on the outside of standby airway tube (63) it is respectively arranged with heater strip.
- 5. new tetraethyl orthosilicate gas supply device as claimed in claim 1, it is characterised in that described main gas tube (62) flow sensor (621) is additionally provided with.
- 6. new tetraethyl orthosilicate gas supply device as claimed in claim 2, it is characterised in that described storage tank is placed Groove (23) is provided with multiple.
- 7. new tetraethyl orthosilicate gas supply device as claimed in claim 2, it is characterised in that described rubber washer (24) section is arranged to L-type.
- 8. new tetraethyl orthosilicate gas supply device as claimed in claim 1, it is characterised in that described intelligent control dress Putting (4) includes control device shell (41), touch-screen (42), controller (43), audible-visual alarm lamp (44) and power switch (45), Described touch-screen (42), audible-visual alarm lamp (44) and power switch (45) are embedded in the preceding table of control device shell (41) respectively Face；Described controller (43) is arranged on the inside of control device shell (41).
- 9. new tetraethyl orthosilicate gas supply device as claimed in claim 8, it is characterised in that described controller (43) Using the PLC of the series of mitsubishi FX2N -48.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721157593.8U CN207143330U (en) | 2017-09-11 | 2017-09-11 | A kind of new tetraethyl orthosilicate gas supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721157593.8U CN207143330U (en) | 2017-09-11 | 2017-09-11 | A kind of new tetraethyl orthosilicate gas supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207143330U true CN207143330U (en) | 2018-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721157593.8U Active CN207143330U (en) | 2017-09-11 | 2017-09-11 | A kind of new tetraethyl orthosilicate gas supply device |
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|---|---|
| CN (1) | CN207143330U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110683741A (en) * | 2019-11-01 | 2020-01-14 | 温州杭钢水务有限公司 | Sludge drying system for sewage treatment |
-
2017
- 2017-09-11 CN CN201721157593.8U patent/CN207143330U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110683741A (en) * | 2019-11-01 | 2020-01-14 | 温州杭钢水务有限公司 | Sludge drying system for sewage treatment |
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