CN207139438U - It is capable of the ion beam polisher of long time continuous working - Google Patents
It is capable of the ion beam polisher of long time continuous working Download PDFInfo
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- CN207139438U CN207139438U CN201721169096.XU CN201721169096U CN207139438U CN 207139438 U CN207139438 U CN 207139438U CN 201721169096 U CN201721169096 U CN 201721169096U CN 207139438 U CN207139438 U CN 207139438U
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- flase floor
- mounting blocks
- ion beam
- flase
- long time
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Abstract
The utility model discloses the ion beam polisher for being capable of long time continuous working, including discharge cavity, positive plate, flase floor, mounting blocks are set on outermost layer flase floor, tungsten filament is set on mounting blocks, the free end of the tungsten filament is extend out on the outside of mounting blocks, ceramic joining block is set between adjacent two pieces of flase floors, and the opposite sides of ceramic joining block is fixedly connected with two pieces of flase floors respectively, and the through hole on flase floor is distributed in flase floor center；Mounting blocks are provided with two, and two mounting blocks are symmetrically distributed in the both sides at flase floor center, and a tungsten filament is all connected with each mounting blocks, and the free end of two tungsten filaments is mutually wound；Mounting blocks set groove towards the side of flase floor center, and the aperture of the groove increases from opening end to inner linear.The utility model realizes the normal work duration for improving ion beam polisher, the purpose for reducing cleaning frequency to solve the problems, such as that ion beam polisher can not keep long-time normal work in the prior art.
Description
Technical field
It the utility model is related to ion beam polishing field, and in particular to be capable of the ion beam polishing of long time continuous working
Machine.
Background technology
So-called ion beam polishing, it is exactly that inert gas, such as argon, nitrogen are placed in confined space, uses high-frequency electromagnetic oscillation
Or the methods of electric discharge heats to cathode current, being allowed to ionization turns into cation, then with 5,000 to 100,000 volts of high voltages to these just from
Son accelerates, and them is had certain energy.Using electronic lens focusing, they are focused into a pencil, it is close to form high-energy
Ion stream is spent, bombardment under control of the computer is placed on workpiece surface of the vacuum chamber by fine grinding, from its surface workpiece material
One one, atom atomically sputters away.Realize in this way and depth is carried out to workpiece surface from 100 angstroms to 10 microns
Precision Machining.Existing small ion beam polishing machine, flase floor mostly is set in the port of export of discharge cavity, set outside flase floor
Tungsten filament is arranged in discharge cavity as negative electrode, anode, realizes the ionization through flase floor, the life of ion beam is realized by flase floor
Into.However, in the prior art, because tungsten filament can not be separately provided, be required for setting mounting blocks outside flase floor to fix tungsten filament,
One end of tungsten filament is vacantly outside mounting blocks, and in the course of the work, due to tungsten filament extreme temperatures, tungsten filament can gradually be in molten
State, or even the tenesmus of meeting end are ridden against on flase floor, while a large amount of cations can be produced in tungsten filament ionization process, these ion meetings
Flase floor, mounting blocks surface are attached to, time slightly length will be paved with flase floor and mounting blocks surface, form conductor, and with being hooked
Tungsten filament on flase floor forms a complete loop, causes tungsten filament to be short-circuited, can not normally ionize out cation, cause from
Beamlet polishing machine can not keep normal work in a long time and be cleared up, it is necessary to be spaced the working time.
Utility model content
The purpose of this utility model is to provide the ion beam polisher for being capable of long time continuous working, to solve existing skill
The problem of art intermediate ion beam polishing machine can not keep long-time normal work, when realizing the normal work for improving ion beam polisher
Purpose that is long, reducing cleaning frequency.
The utility model is achieved through the following technical solutions：
Be capable of the ion beam polisher of long time continuous working, including discharge cavity, the positive plate in discharge cavity and
If being arranged on the dried layer flase floor of the discharge cavity port of export, mounting blocks are set on outermost layer flase floor, tungsten is set on the mounting blocks
Silk, the free end of the tungsten filament are extend out on the outside of mounting blocks, and ceramic joining block, the ceramics are set between adjacent two pieces of flase floors
The opposite sides of contiguous block is fixedly connected with two pieces of flase floors respectively, and the through hole on flase floor is distributed in flase floor center；
The mounting blocks are provided with two, and two mounting blocks are symmetrically distributed in the both sides at flase floor center, are all connected with each mounting blocks
A piece tungsten filament, the free end of two tungsten filaments is stretched out towards flase floor center, and the free end of two tungsten filaments is mutually wound；
The mounting blocks set groove towards the side of flase floor center, and the aperture of the groove is from opening end to inner linear
Increase.
The problem of can not keeping long-time normal work for ion beam polisher in the prior art, the utility model proposes
It is capable of the ion beam polisher of long time continuous working, positive plate is set in discharge cavity, tungsten filament is arranged on mounting blocks as negative electrode
On, the connected mode between negative electrode and anode is not belonging to the scope of protection of the utility model, and any existing electric connection mode is
Can.If the port of export of discharge cavity sets dried layer flase floor, it is easy to ion to pass through, mounting blocks are arranged on outermost flase floor.
The utility model is connected two pieces of adjacent flase floors by ceramic joining block first, has been abandoned in conventional art using metals such as bolts
The mode that part is attached, greatly reduces the electrical conductivity of flase floor, therefore reduces by flase floor that tungsten filament is short-circuit
Possibility.Secondly, two mounting blocks for being symmetrical with flase floor center are provided with the utility model so that two installations
Block is distributed in the through hole both sides on flase floor, a tungsten filament is set on each mounting blocks, the free end of two tungsten filaments is to lattice
Screen center is stretched out and mutually wound so that two tungsten filaments are connected integral, only need to enter any section and anode during use
Row electrical connection, does not interfere with the electrolysis of tungsten filament, on the contrary because two tungsten filaments are mutually wound, and two tungsten filaments are connected to
On two mounting blocks, therefore two tungsten filaments can be leaned on each other for support and carried, by traditional one side bearing displacement bilateral carrying, with this pole
The big stability for improving tungsten filament, even if tungsten filament is under the condition of high temperature for a long time, also it is very difficult to drop down onto grid down simultaneously
On plate, therefore the problem of tungsten filament is easily short-circuited in the prior art is overcome from root.Again, the utility model is in mounting blocks
Side the groove that caves inward is set, the opening direction of groove is towards flase floor center, therefore tungsten filament ionization forms
After cation is attached to flase floor and mounting blocks surface, due to the presence of groove, cation is very inconvenient to be entered in groove so that
Traditional short-circuit loop for being forced to be formed is cut off in groove.Also, the aperture of the groove increases from opening end to inner linear
Greatly, it is that groove is in outer small interior big structure so that cation is difficult to enter inside grooves from opening end, and even if into groove
Inside, also it is difficult to inside grooves being paved with into cations quantity therein, therefore is just difficult to form path in inside grooves, because
This is very difficult to the inner surface for being paved with whole groove, further ensures that the cation connected in flakes is cut off in groove, even if
Tenesmus rides against grid plate surface jointly for the free end of two tungsten filaments, can not also form in a short time existing from short circuit to tungsten filament
As, therefore the normal work duration of ion beam polisher is greatly improved, greatly reduce cleaning frequency so that ion beam
The service efficiency of polishing machine is obviously improved.
Preferably, the ceramic joining block is the loop configuration consistent with flase floor outer rim shape.It is ceramic connecting piece
For end to end loop configuration, it is ensured that all directions of flase floor are all attached with fixed, while cause flase floor each side
Upward stress is uniformly distributed with carrying, improves the service life of flase floor.
Preferably, the flase floor is rounded, and the through hole on flase floor is distributed in flase floor center.On flase floor
Through hole be used to allowing ion by, therefore concentrated on the center of the flase floor of circle, the concentration ratio of ion beam can be improved,
Improve the effect of ion beam bombardment polishing.
Preferably, the positive plate is electrically connected to outside discharge cavity by wire.It is easy to be attached composition electricity with negative electrode
From loop.
Preferably, blowing mouth is set on the discharge cavity.It is easy to continuously feed into discharge cavity by blowing mouth
Inert gas, so as to coordinate the longer running hours length of the utility model, carry out continuous continual polishing operation.
Preferably, the longitudinal section of the groove is in isosceles triangle, and the drift angle of the isosceles triangle is located at groove
Opening end.So that into the cation in groove, under inertia and Action of Gravity Field, it is also difficult to be attached to inside grooves top surface position
Put, be mostly deposited on the hypotenuse of bottom portion of groove isosceles triangle, so as to further improve anti-short circuit capability of the present utility model.
The utility model compared with prior art, has the following advantages and advantages：
1st, the utility model is capable of the ion beam polisher of long time continuous working, and adjacent two are connected by ceramic joining block
Block flase floor, the mode being attached in conventional art using metalworks such as bolts is abandoned, has greatly reduced flase floor
Electrical conductivity, thus reduce by flase floor by tungsten filament short circuit possibility.
2nd, the utility model is capable of the ion beam polisher of long time continuous working, is provided with two and is symmetrical with flase floor
The mounting blocks of heart position so that two mounting blocks are distributed in the through hole both sides on flase floor, and one is set on each mounting blocks
Tungsten filament, the free end of two tungsten filaments are stretched out to flase floor center and mutually wound so that and two tungsten filament series connection are integral,
Therefore two tungsten filaments can be leaned on each other for support and carried, and by traditional one side bearing displacement bilateral carrying, tungsten is greatly improved with this
The stability of silk, even if tungsten filament is under the condition of high temperature for a long time, also it is very difficult to drop down onto on flase floor down simultaneously, therefore from root
The problem of tungsten filament is easily short-circuited in the prior art is overcome on source.
3rd, the utility model is capable of the ion beam polisher of long time continuous working, in mounting blocks towards flase floor centre bit
After the side put sets groove, the cation that tungsten filament ionization forms to be attached to flase floor and mounting blocks surface, due to depositing for groove
It is very difficult to enter in groove in, cation so that the short-circuit loop of conducting is cut off in groove.
3rd, the utility model is capable of the ion beam polisher of long time continuous working, and the aperture of groove is from opening end to inside
Linear increase so that cation is difficult to enter inside grooves from opening end, and even if into inside grooves, the quantity of cation
It is difficult to inside grooves being paved with, therefore is just difficult to form path in inside grooves, therefore is very difficult to be paved with the interior of whole groove
Surface, further ensure that the cation connected in flakes is cut off in groove.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding the utility model embodiment, forms the one of the application
Part, the restriction to the utility model embodiment is not formed.In the accompanying drawings：
Fig. 1 is the structural representation of the utility model specific embodiment；
Fig. 2 is the structural representation of flase floor in the utility model specific embodiment.
Mark and corresponding parts title in accompanying drawing：
1- discharge cavities, 2- positive plates, 3- flase floors, 31- through holes, 4- mounting blocks, 5- tungsten filaments, 6- grooves, 7- ceramic joinings
Block, 8- blowing mouths.
Embodiment
For the purpose of this utility model, technical scheme and advantage is more clearly understood, with reference to embodiment and accompanying drawing,
The utility model is described in further detail, and exemplary embodiment of the present utility model and its explanation are only used for explaining this
Utility model, it is not intended as to restriction of the present utility model.
Embodiment 1：
The ion beam polisher for being capable of long time continuous working as shown in Figures 1 and 2, including discharge cavity 1, positioned at electric discharge
If positive plate 2 in chamber 1 and the dried layer flase floor 3 for being arranged on the port of export of discharge cavity 1, installation is set on outermost layer flase floor 3
Block 4, tungsten filament 5 is set on the mounting blocks 4, and the free end of the tungsten filament 5 extend out to the outside of mounting blocks 4, it is characterised in that adjacent
Ceramic joining block 7 is set between two pieces of flase floors 3, and the opposite sides of the ceramic joining block 7 is fixed with two pieces of flase floors 3 respectively
Connect, the through hole 31 on flase floor 3 is distributed in the center of flase floor 3；The mounting blocks 4 are provided with two, two mounting blocks 4
The both sides at the center of flase floor 3 are symmetrically distributed in, a tungsten filament 5 is all connected with each mounting blocks 4, the free end of two tungsten filaments 5 is equal
Stretched out towards the center of flase floor 3, and the free end of two tungsten filaments 5 is mutually wound；The mounting blocks 4 are towards in flase floor 3
The side of heart position sets groove 6, and the aperture of the groove 6 increases from opening end to inner linear.The ceramic joining block 7
For the loop configuration consistent with the outer rim shape of flase floor 3.The flase floor 3 is rounded, and the through hole 31 on flase floor 3 is distributed in lattice
The center of screen 3.The positive plate 2 is electrically connected to outside discharge cavity 1 by wire.Blowing mouth is set on the discharge cavity 1
8.The longitudinal section of the groove 6 is in isosceles triangle, and the drift angle of the isosceles triangle is located at the opening end of groove 6.This reality
Apply example and two pieces of adjacent flase floors 3 are connected by ceramic joining block 7, abandoned in conventional art and connected using metalworks such as bolts
The mode connect, greatly reduces the electrical conductivity of flase floor 3, therefore reduces the possibility of the short circuit of tungsten filament 5 by flase floor 3
Property.Secondly, two mounting blocks 4 for being symmetrical with the center of flase floor 3 are provided with so that two mounting blocks 4 are distributed in flase floor 3
On the both sides of through hole 31, a tungsten filament 5 is set on each mounting blocks 4, the free end of two tungsten filaments 5 is to the center of flase floor 3
Position, which is stretched out, simultaneously mutually to be wound so that two tungsten filaments 5 are connected integral, only need any section and anode being electrically connected during use
, the electrolysis of tungsten filament 5 is not interfered with, on the contrary because two tungsten filaments 5 are mutually wound, and two tungsten filaments 5 are connected to two
On mounting blocks 4, therefore two tungsten filaments 5 can be leaned on each other for support and carried, very big with this by traditional one side bearing displacement bilateral carrying
The stability for improving tungsten filament 5, even if the long-time of tungsten filament 5 is under the condition of high temperature, be also very difficult to drop down onto grid down simultaneously
On plate 3, therefore the problem of tungsten filament 5 is easily short-circuited in the prior art is overcome from root.Set in the side of mounting blocks 4 to
The groove 6 of sunken inside, the opening direction of groove 6 is towards the center of flase floor 3, therefore the cation that the ionization of tungsten filament 5 forms is attached
After flase floor 3 and the surface of mounting blocks 4, due to the presence of groove 6, cation is very inconvenient to be entered in groove 6 so that tradition
The short-circuit loop to be formed that is forced cut off at groove 6.Also, the aperture of the groove 6 increases from opening end to inner linear,
It is that groove 6 is in outer small interior big structure so that cation is difficult to enter inside groove 6 from opening end, and even if into groove 6
Inside, also it is difficult to be paved with inside groove 6 into cations quantity therein, therefore is just difficult to be internally formed path in groove 6,
Therefore it is very difficult to be paved with the inner surface of whole groove 6, further ensures that the cation connected in flakes is cut off at groove 6,
Even if tenesmus rides against the surface of flase floor 3 jointly for the free end of two tungsten filaments 5, can not also form in a short time to tungsten filament 5
From short circuit phenomenon, therefore the normal work duration of ion beam polisher is greatly improved, greatly reduce cleaning frequency, make
The service efficiency for obtaining ion beam polisher is obviously improved.Through experiment, the present embodiment within continuous work ten hours all
Be not in the short circuit phenomenon of tungsten filament 5, compared to side of the conventional art after continuous work two hours with regard to needing once to be cleared up
Formula, have and be obviously improved.
Above-described embodiment, the purpose of this utility model, technical scheme and beneficial effect are entered
One step describes in detail, should be understood that and the foregoing is only specific embodiment of the present utility model, is not used to limit
Determine the scope of protection of the utility model, it is all within the spirit and principles of the utility model, any modification for being made, equally replace
Change, improve, should be included within the scope of protection of the utility model.
Claims (6)
1. it is capable of the ion beam polisher of long time continuous working, including discharge cavity (1), the positive plate in discharge cavity (1)
(2) and discharge cavity (1) is arranged on if the dried layer flase floor (3) of the port of export, outermost layer flase floor set mounting blocks on (3)
(4) tungsten filament (5), is set on the mounting blocks (4), and the free end of the tungsten filament (5) is extend out on the outside of mounting blocks (4), its feature
Be, ceramic joining block (7) be set between adjacent two pieces of flase floors (3), the opposite sides of the ceramic joining block (7) respectively with
Two pieces of flase floors (3) are fixedly connected, and the through hole (31) on flase floor (3) is distributed in flase floor (3) center；The mounting blocks
(4) two are provided with, two mounting blocks (4) are symmetrically distributed in the both sides at flase floor (3) center, connect on each mounting blocks (4)
Connecing a tungsten filament (5), the free end of two tungsten filaments (5) is stretched out towards flase floor (3) center, and two tungsten filaments (5)
Free end is mutually wound；The mounting blocks (4) set groove (6), and the groove towards the side of flase floor (3) center
(6) aperture increases from opening end to inner linear.
2. the ion beam polisher according to claim 1 for being capable of long time continuous working, it is characterised in that the ceramics
Contiguous block (7) is the loop configuration consistent with flase floor (3) outer rim shape.
3. the ion beam polisher according to claim 1 for being capable of long time continuous working, it is characterised in that the grid
Plate (3) is rounded, and the through hole (31) on flase floor (3) is distributed in flase floor (3) center.
4. the ion beam polisher according to claim 1 for being capable of long time continuous working, it is characterised in that the anode
Plate (2) is electrically connected to discharge cavity (1) outside by wire.
5. the ion beam polisher according to claim 1 for being capable of long time continuous working, it is characterised in that the electric discharge
Blowing mouth (8) is set on chamber (1).
6. the ion beam polisher according to claim 1 for being capable of long time continuous working, it is characterised in that the groove
(6) longitudinal section is in isosceles triangle, and the drift angle of the isosceles triangle is located at the opening end of groove (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721169096.XU CN207139438U (en) | 2017-09-13 | 2017-09-13 | It is capable of the ion beam polisher of long time continuous working |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721169096.XU CN207139438U (en) | 2017-09-13 | 2017-09-13 | It is capable of the ion beam polisher of long time continuous working |
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| Publication Number | Publication Date |
|---|---|
| CN207139438U true CN207139438U (en) | 2018-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201721169096.XU Active CN207139438U (en) | 2017-09-13 | 2017-09-13 | It is capable of the ion beam polisher of long time continuous working |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107457617A (en) * | 2017-09-13 | 2017-12-12 | 成都睿坤科技有限公司 | Ion beam polishing equipment with long continuous operation ability |
-
2017
- 2017-09-13 CN CN201721169096.XU patent/CN207139438U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107457617A (en) * | 2017-09-13 | 2017-12-12 | 成都睿坤科技有限公司 | Ion beam polishing equipment with long continuous operation ability |
| CN107457617B (en) * | 2017-09-13 | 2019-03-26 | 成都睿坤科技有限公司 | Ion beam polishing equipment with long continuous operation ability |
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