A kind of graphite boat stuck point and graphite boat for being easy to mark
Technical field
Manufacture of solar cells technical field is the utility model is related to, more particularly to a kind of graphite boat stuck point for being easy to mark
And graphite boat.
Background technology
At present, among existing solar silicon cell production PECVD, usually used is graphite boat cylinder stuck point,
For blocking the silicon chip among graphite boat piece, to have better energization when carrying out exoelectrical reaction, nitride deposition is set to exist
The surface of silicon chip, form certain thickness silicon nitride film.
In solar cell manufacturing process, when carrying out silicon chip surface plated film, uncoated silicon chip is inserted into PECVD vacuum
On the loader of filming equipment, usual loader is realized by graphite boat, will without plated film silicon chip insert graphite boat, so
Afterwards, the graphite boat for being loaded with silicon chip is placed in PECVD vacuum coating equipment cavitys, silicon chip plated using pecvd process
Film.After plated film terminates, graphite boat is taken out out of vacuum coating equipment cavity, then will pass through the silicon chip of plated film again from graphite boat
Unload and take off.
It will be apparent that on silicon chip plated film be produce solar silicon cell necessary process, and graphite boat as commonly use
Silicon chip carries fixture, can not be substituted under current process conditions.Graphite boat is carried by the stuck point being arranged on graphite boat
Silicon chip to be coated, and traditional cylindrical stuck point, (blocked using the stuck point print on the silicon cell surface after this stuck point plated film
Point print profile) completely all the same (it is just the same that stuck point print is formed i.e. on silicon cell), it is different after the completion of so resulting in PE techniques
Normal silicon cell can not track corresponding graphite boat (because the stuck point print on silicon cell surface is consistent), be not easy to investigation and
Anomaly analysis.
I.e. specifically in the prior art, cylindrical stuck point include cylinder installation portion 1 and along installation portion be in mirror image
Distribution and co-axially fixed stuck point unit;Each stuck point unit include successively the supporting part 2 being fixedly connected with installation portion 1 and
The circular surface portion 3 being fixedly linked with supporting part;In general, stuck point is all to utilize its circular surface portion 3 and the place of supporting part 2
Carrying working face carry silicon cell A.It will be apparent that referring to traditional cylindrical stuck point three-dimensional view (such as Fig. 1) and bow
View (such as Fig. 2), because the edge in circular surface portion 3 has blocked silicon cell A, blocked so causing silicon cell A surfaces
Region shape is completely the same (being semicircular arc, referring to Fig. 3), and then the stuck point impression shape of the silicon cell formed is same
(being the stuck point print of semicircular arc, referring to Fig. 4 and Fig. 5).
Because above-mentioned all silicon cell stuck points are consistent, so result on all silicon cells after the completion of PE techniques
Stuck point print is same, so abnormal silicon cell can not track corresponding graphite boat (because the stuck point on silicon cell surface prints
It is consistent), it is not easy to investigation and anomaly analysis.
To sum up, how to overcome above-mentioned technological deficiency of the prior art is that the technology that those skilled in the art are badly in need of solving is asked
Topic.
Utility model content
The purpose of this utility model is to provide a kind of graphite boat stuck point and graphite boat for being easy to mark, to solve above-mentioned ask
Topic.
In order to achieve the above object, the technical solution of the utility model is realized in:
The utility model additionally provides a kind of graphite boat stuck point for being easy to mark, including installation portion and along installation portion is in
Mirror image is distributed and co-axially fixed stuck point unit;Each stuck point unit includes the supporting part being fixedly connected with installation portion successively
With the surface element being fixedly linked with supporting part;
The surface element of each stuck point unit is provided with linear gap hollow out, and perpendicular to the radial direction of the surface element
There is reference line in direction;Angle be present between the linear gap hollow out and the reference line.
Correspondingly, the utility model additionally provides a kind of graphite boat, including some graphite flakes, and the every graphite flake is equal
Including several cell piece positions in storehouse, each cell piece position in storehouse periphery is provided with mounting hole;And it is provided with one in each mounting hole
The graphite boat stuck point for being easy to mark.
Preferably, can embodiment as one kind;The installation portion is cylinder, and the surface element is circular surface portion;
Each cell piece position in storehouse periphery is provided with three mounting holes;And the graphite boat stuck point for being easy to mark includes six types, point
Wei not the first graphite boat stuck point, the second graphite boat stuck point, the 3rd graphite boat stuck point, the 4th graphite boat stuck point, the 5th graphite boat card
Point, the 6th graphite boat stuck point;
And the first graphite boat stuck point, the second graphite boat stuck point, the 3rd graphite boat stuck point, the 4th graphite boat stuck point, the 5th stone
Black boat stuck point, the 6th graphite boat stuck point this six type the linear gap hollow out being easy in the graphite boat stuck point structure of mark with
It is different to there is angle between reference line.
Preferably, can embodiment as one kind;The linear gap hollow out of the first graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 0 °.
Preferably, can embodiment as one kind;The linear gap hollow out of the second graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 10 ° -30 °.
Preferably, can embodiment as one kind;The linear gap hollow out of the 3rd graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 50 ° -70 °.
Preferably, can embodiment as one kind;The linear gap hollow out of the 4th graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 90 °.
Preferably, can embodiment as one kind;The linear gap hollow out of the 5th graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 110 ° -130 °.
Preferably, can embodiment as one kind;The linear gap hollow out of the 6th graphite boat stuck point is right with it
The angle between reference line where answering in the circular surface portion is 150 ° -170 °.
Preferably, can embodiment as one kind;The diameter dimension in the circular surface portion is 7mm, the reference line
For along circular surface portion in the radial direction at the center in the circular surface portion 1.7mm horizontal line;And the line
The length dimension of shape gap hollow out is 1.5mm, width dimensions 1mm.
Compared with prior art, it is the advantages of the utility model embodiment:
A kind of graphite boat stuck point and graphite boat for being easy to mark provided by the utility model, the above-mentioned stone for being easy to mark of analysis
The primary structure of black boat stuck point is understood:
First aspect:The above-mentioned graphite boat stuck point for being easy to mark, this is easy to the graphite boat stuck point of mark, and it mainly includes peace
Dress portion and stuck point unit;Simultaneously linear gap hollow out is provided with the edge of the surface element of each stuck point unit;And hang down
Directly there is reference line in the radial direction of the surface element;Angle be present (on angle between linear gap hollow out and reference line
Type does not limit).
Shape is at a certain angle between above-mentioned linear gap hollow out requirement and reference line, because linear gap hollow out is hollow out
Structure, so the silicon cell surface region after coating process is implemented corresponding to the hollow out position of upper and lower two surface elements will
It will not be blocked, and then can forms a linear stuck point print on the surface of silicon cell.
Second aspect:The utility model additionally provides a kind of graphite boat, and it is using the above-mentioned stuck point suitable for graphite boat as base
Plinth designs corresponding graphite boat;The graphite boat is the stuck point carrier arrangement of graphite boat;Graphite boat of the present utility model, it includes more
It is individual be easy to mark graphite boat stuck point, while the graphite boat also to exist between linear gap hollow out and reference line angle type with
And number of types etc. has been done specific restriction and (can placed in a mounting hole site of a silicon cell of graphite boat some
The stuck point that angle is different between individual linear gap hollow out and reference line, several mounting hole site cans of such a silicon cell
Form the stuck point print of more types).Graphite boat is put into filming equipment and carries out plated film, after the completion of by graphite boat together with being positioned over
Silicon cell on graphite boat takes out from filming equipment;When graphite boat is removed, it is observed that on each silicon cell
Printed with several different types of stuck points, an only nothing for graphite boat according to corresponding to being assured that out the type that the stuck point prints
Two silicon cell, the problem of corresponding investigation thus can be carried out for silicon cell and optimization analysis provides help.
To sum up, a kind of graphite boat stuck point and graphite boat for being easy to mark provided by the utility model, can be silicon cell
Carry out the problem of corresponding investigation and optimization analysis provides help.
Brief description of the drawings
, below will be right in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
The required accompanying drawing used is briefly described in embodiment or description of the prior art, it should be apparent that, describe below
In accompanying drawing be some embodiments of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the dimensional structure diagram of cylindrical stuck point of the prior art;
Fig. 2 is the overlooking the structure diagram of Fig. 1 cylindrical stuck point of the prior art;
Before Fig. 3 is the coating process of the cylindrical stuck point and silicon cell of Fig. 1 three installation positions of the prior art
Loaded state schematic diagram;
Fig. 4 be Fig. 3 three installation positions of the prior art cylindrical stuck point coating process after caused by silicon cell
Front stuck point print effect diagram;
Fig. 5 is the partial enlargement effect diagram of Fig. 4 silicon cell;
Fig. 6 is a kind of stereochemical structure of the form for the graphite boat stuck point for being easy to mark that the utility model embodiment two provides
Schematic diagram;
Fig. 7 is the internal structure schematic diagram for the graphite boat that the utility model embodiment three provides;
Fig. 8 is the graphite boat stuck point for being easy to mark of six types of the graphite boat that the utility model embodiment three provides
Overlooking the structure diagram;
Fig. 9 is the graphite boat stuck point pair for being easy to mark of six types of the graphite boat that the utility model embodiment three provides
That answers leaves the schematic diagram of stuck point print.
Label:A- silicon cells;1- installation portions;2- supporting parts;3- circular surfaces portion;The linear gap hollow outs of 4-;6- graphite
Piece;7- cell piece positions in storehouse;8- mounting holes;M- reference lines;A1- the first graphite boat stuck points;A2- the second graphite boat stuck points;A3- the 3rd
Graphite boat stuck point;The graphite boat stuck points of A4- the 4th;The graphite boat stuck points of A5- the 5th;The graphite boat stuck points of A6- the 6th.
Embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is the utility model part of the embodiment, rather than whole embodiments.Based on the embodiment in the utility model, sheet
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
, it is necessary to which explanation, the orientation of some instructions or the word of position relationship, it is only in description of the present utility model
It is to be described for the ease of description the utility model with simplified, rather than indicates or imply that the device of meaning or element must be with spies
Fixed orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.
, it is necessary to which explanation, " connection " should be interpreted broadly in description of the present utility model, for example, it may be fixed
Connect or be detachably connected, or be integrally connected;Can be mechanical connection or electrical connection;Can be direct
It is connected, can also be indirectly connected by intermediary, can be the connection of two element internals.For the ordinary skill of this area
For personnel, concrete meaning of the above-mentioned term in the utility model can be understood with concrete condition.
The utility model is described in further detail below by specific examples of the implementation and with reference to accompanying drawing.
Embodiment one
The utility model embodiment one provides a kind of graphite boat stuck point for being easy to mark, including installation portion and along peace
Dress portion is distributed in mirror image and co-axially fixed stuck point unit;Each stuck point unit includes what is be fixedly connected with installation portion successively
Supporting part and the surface element being fixedly linked with supporting part;
The surface element of each stuck point unit is provided with linear gap hollow out, and perpendicular to the radial direction of the surface element
There is reference line in direction;Angle be present between the reference line in the linear gap hollow out (or strip slot hollow out).
Embodiment two
The utility model embodiment two provides a kind of graphite boat stuck point for being easy to mark, and it is in original cylinder card
The design of linear gap hollow out is made that on the basis of point, the linear gap hollow out is arranged on original cylindrical stuck point
On upper and lower two stuck point units (being specially two circular surface portions up and down of stuck point unit);The utility model embodiment two
In be easy to mark graphite boat stuck point, while its also have above-described embodiment one technical pattern relation;
Referring to Fig. 6, the utility model embodiment one provide it is a kind of be easy to mark graphite boat stuck point, including cylinder
Installation portion 1 (compared with the installation portion 1 in the accompanying drawing 1 in technology) and along installation portion in mirror image be distributed and co-axially fixed card
Dot element;The supporting part 2 that each stuck point unit includes being fixedly connected with installation portion successively is (compared with the accompanying drawing 1 in technology
In supporting part 2) and the circular surface portion 3 that is fixedly linked with supporting part;
And linear gap hollow out 4 is provided with (i.e. in original stuck point along the circular surface portion 3 of each stuck point unit
A linear gap hollow out 4 is machined on the basis of structure in its circular surface portion), and perpendicular to the circular surface portion 3
Radial direction have reference line M;Angle be present between the linear gap hollow out 4 and the reference line M.
Embodiment three
The utility model embodiment three relate to the apparatus carriers (i.e. graphite boat) of the above-mentioned graphite boat stuck point for being easy to mark:
Graphite boat in the utility model embodiment three, it includes multiple graphite boat stuck points for being easy to mark as in embodiment two, together
When the graphite boat also done specific limit to angle type and number of types etc. be present between linear gap hollow out and reference line
It is fixed.
As shown in fig. 7, correspondingly, the utility model additionally provides a kind of graphite boat, including some graphite flakes 6, every
The graphite flake 6 includes several cell piece positions in storehouse 7, and each periphery of cell piece position in storehouse 7 is provided with mounting hole 8;And each peace
Dress is provided with the graphite boat stuck point for being easy to mark described in one in hole 8.
In the present embodiment three, graphite boat is the carrier arrangement with the graphite boat stuck point for being easy to mark, for card
The firmly silicon chip among graphite boat piece (i.e. silicon cell), graphite boat are made up of some graphite flakes 6, and every graphite flake 6 includes
Several cell piece positions in storehouse 7, each periphery of cell piece position in storehouse 7 are provided with several mounting holes 8 (in general, typically three
Mounting hole 8, quantity of this utility model embodiment for mounting hole 8 is not limited), one is provided with each mounting hole 8
The individual graphite boat stuck point for being easy to mark.
When graphite boat is used for production, silicon cell is respectively placed in the two sides of cell piece position in storehouse 7, passes through stretching
Silicon cell is carried in the supporting part 2 of 6 two sides of graphite flake and circular surface portion 3, graphite boat is put into filming equipment is carried out
Plated film, after the completion of graphite boat is taken out together with the silicon cell being positioned on graphite boat from filming equipment.
In the concrete technical scheme of the utility model embodiment three, each periphery of cell piece position in storehouse 7 is provided with three peaces
Fill hole 8;And the graphite boat stuck point for being easy to mark includes six types, respectively the first graphite boat stuck point A1, the second graphite
Boat stuck point A2, the 3rd graphite boat stuck point A3, the 4th graphite boat stuck point A4, the 5th graphite boat stuck point A5, the 6th graphite boat stuck point A6.
It should be noted that in a specific embodiment:Each silicon cell position in storehouse periphery is provided with three mounting holes
(being generally that three mounting holes 8 are set around each cell piece position in storehouse 7);Meanwhile the graphite boat for being easy to mark
Stuck point include six types (i.e. this six kinds be easy to mark graphite boat stuck point structure in linear gap hollow outs 4 and reference line M it
Between angle to be present different), so, by a silicon cell can by the stuck point marking note of three mounting hole sites and
Into.In this embodiment, any silicon cell can form the numbering of three digits and senary (numbering quantity is 6x6x6=216
Kind).
Relevant mark mode explanation:Stuck point after improvement prints and represented numeral such as Fig. 9;Stuck point corresponding to three mounting hole sites
Respectively the first stuck point, the second stuck point and the 3rd stuck point;Such as:The numeral that first stuck point represents is a position, and the second stuck point represents
Numeral be ten, the numeral that the 3rd stuck point represents is hundred;Graphite boat is numbered one by one according to senary, stuck point installation
Position is corresponding with graphite boat numbering, at most can 215 boats of numbering (actually 216 boats numberings, one of boat and reference line weight
Conjunction can be according to invalidation), production requirement can be met completely;Such as:Some silicon cell numbering of graphite boat is 135,
Therein 1,3,5 respectively represent the graphite boat stuck point type that mark is easy in the corresponding installation three of three mounting hole sites corresponding to graphite boat
Numbering.
In the concrete technical scheme of the utility model embodiment three, referring to Fig. 8 and Fig. 9, (wherein, Fig. 8 distributions illustrate
First graphite boat stuck point A1, the second graphite boat stuck point A2, the 3rd graphite boat stuck point A3, the 4th graphite boat stuck point A4, the 5th graphite
Boat stuck point A5, the 6th graphite boat stuck point A6, the top view of the graphite boat stuck point for being easy to mark of this six type, can be from above-mentioned
The top view of six kinds of stuck points can be seen that above-mentioned six type be easy to mark graphite boat stuck point linear gap hollow out 4 with
Angle between its reference line M is really different, preferably six kinds in this embodiment, it is obvious that the utility model is not
It is confined to use six kinds);
In the linear 4 corresponding place of the gap hollow out circular surface portion 3 of the first graphite boat stuck point A1
Reference line M between angle be 0 °.
In the linear gap hollow out corresponding place circular surface portion 3 of the second graphite boat stuck point A2
Angle between reference line M is 10 ° -30 °.
In the linear gap hollow out corresponding place circular surface portion 3 of the 3rd graphite boat stuck point A3
Angle between reference line M is 50 ° -70 °.
In the linear gap hollow out corresponding place circular surface portion 3 of the 4th graphite boat stuck point A4
Angle between reference line M is 90 °.
In the linear gap hollow out corresponding place circular surface portion 3 of the 5th graphite boat stuck point A5
Angle between reference line M is 110 ° -130 °.
In the linear gap hollow out corresponding place circular surface portion 3 of the 6th graphite boat stuck point A6
Angle between reference line M is 150 ° -170 °.
In the concrete technical scheme of the utility model embodiment three, the diameter dimension in the circular surface portion 3 is
7MM, the reference line M are the 1.7MM at the center in the circular surface portion 3 in the radial direction along circular surface portion 3
Horizontal line;And the length dimension of the linear gap hollow out 4 is 1.5MM, width dimensions 1MM.
It will be apparent that the graphite boat stuck point for being easy to mark of above-mentioned six type has following technical characterstic:
First graphite boat stuck point A1:Without any variation;
Second graphite boat stuck point A2:The linear long 1.5MM of gap hollow out, wide 1MM, with reference line in 10 ° of -30 ° of angles (as schemed
Linear gap hollow out and reference line in 8 illustrative embodiments are specifically 20 ° in angle);
3rd graphite boat stuck point A3:The linear long 1.5MM of gap hollow out, wide 1MM, with reference line in 50 ° of -70 ° of angles (as schemed
Linear gap hollow out and reference line in 8 illustrative embodiments are specifically 60 ° in angle);
4th graphite boat stuck point A4:The linear long 1.5MM of gap hollow out, wide 1MM, it is in 90 ° of angles with reference line;
5th graphite boat stuck point A5:The linear long 1.5MM of gap hollow out, wide 1MM, with reference line in 110 ° of -130 ° of angles (such as
Linear gap hollow out and reference line in specific embodiment illustrated in Figure 8 are specifically 120 ° in angle);
6th graphite boat stuck point A6:The linear long 1.5MM of gap hollow out, wide 1MM, with reference line in 150 ° of -170 ° of angles (such as
Linear gap hollow out and reference line in specific embodiment illustrated in Figure 8 are specifically 160 ° in angle);
Wherein, Fig. 8 distribution illustrate the first graphite boat stuck point A1, the second graphite boat stuck point A2, the 3rd graphite boat stuck point A3,
4th graphite boat stuck point A4, the 5th graphite boat stuck point A5, the 6th graphite boat stuck point A6, the graphite for being easy to mark of this six type
The top view of boat stuck point;Referring also to Fig. 9, the Fig. 9 illustrate six types be easy to mark graphite boat, its formed six
Kind stuck point print of different shapes.
Correspondingly, the utility model additionally provides a kind of silicon cell labeling method;Including following operating procedure:
Step S100, the different types of graphite boat stuck point for being easy to mark of N2 kinds is designed, and the N2 kinds are different types of
It is different to there is angle between the linear gap hollow out and reference line be easy to corresponding to the graphite boat stuck point of mark;
Step S200, N1 quantity mounting holes are machined with the corresponding cell piece position in storehouse periphery of each silicon cell;
And the graphite boat stuck point for being easy to mark described in one is installed in each mounting hole;It should be noted that due to each graphite boat
Just there is the different types of graphite for being easy to mark of N2 kinds in one mounting hole site of silicon cell corresponding to any one graphite flake
The possibility of boat stuck point, then what the N1 quantity mounting hole sites corresponding to a silicon cell were formed after numbering in certain sequence
Different stuck point prints just have the possibility of N2 N1 powers numbering.
Step S300, silicon cell is respectively placed in the two of cell piece position in storehouse by graphite boat when carrying out coating process
Side, silicon cell is carried by the supporting part and circular surface portion that stretch out in two sides of graphite flake, graphite boat is put into plating
Film device carry out plated film, after the completion of graphite boat is taken out together with the silicon cell being positioned on graphite boat from filming equipment;
Step S400, when graphite boat is removed, it is observed that on each silicon cell and may at most have N2
N1 powers quantity stuck point print, by N1 quantity mounting hole successively according to individual position, ten, hundred, the progress of kilobit equal-order digits
Serial number, therefore also determined that N2 N1 powers numerical digit (illustrates in theory:If three mounting holes
Position, and each mounting hole site is corresponding with the graphite boat stuck point for being easy to mark of six types, can thus determine one six
Three digits that system represents), the unique silicon cell of graphite boat according to corresponding to being determined the numerical digit, this
Sample can with for silicon cell carry out it is corresponding the problem of investigation and optimization analysis provide help.
Finally it should be noted that:Various embodiments above is only to illustrate the technical solution of the utility model, rather than it is limited
System;Although the utility model is described in detail with reference to foregoing embodiments, one of ordinary skill in the art should
Understand:It can still modify to the technical scheme described in foregoing embodiments, either to which part or whole
Technical characteristic carries out equivalent substitution;And these modifications or replacement, the essence of appropriate technical solution is departed from this practicality newly
The scope of each embodiment technical scheme of type.