CN207119236U - The purifying plant of special gas - Google Patents
The purifying plant of special gas Download PDFInfo
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- CN207119236U CN207119236U CN201720760866.1U CN201720760866U CN207119236U CN 207119236 U CN207119236 U CN 207119236U CN 201720760866 U CN201720760866 U CN 201720760866U CN 207119236 U CN207119236 U CN 207119236U
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- gas
- molecular sieve
- gas cylinder
- purifying plant
- stock bottle
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Abstract
It the utility model is related to a kind of purifying plant of special gas, the purifying plant includes passing sequentially through the connected stock bottle of gas pipeline, a molecular sieve column, a diaphragm type compressor, a condenser, a collection gas cylinder, the stock bottle, molecular sieve column, diaphragm type compressor, condenser, collection gas cylinder are connected with vacuum lead respectively, the molecular sieve column and diaphragm type compressor form a circulation by gas pipeline, and the stock bottle and collection gas cylinder are respectively placed in a cold-trap.The purifying plant of the utility model special gas uses diaphragm type compressor, in a short time so that gas circulates repeatedly in molecular sieve column, a rectifying is also at least done in condenser afterwards and evacuates purification, purification efficiency and effect is greatly strengthen, 6N special gas can be prepared.
Description
Technical field
It the utility model is related to a kind of manufacture field for preparing of special gas, more particularly to a kind of purification dress of special gas
Put.
Background technology
Field is purified in special gas, molecular sieve column purification technique comparative maturity, purifies out 4.5N-5N extraordinary gas
Body is easier, but it is also more difficult that unstrpped gas is processed into the high-purity special gases of 6N, particularly by special gas
Moisture impurity content is reduced to that 0.1ppm is very difficult, wherein it is important the reason for be the pressure and time of contact deficiency that purify, such as
Fruit takes the technique for being repeated several times and purifying, and can have repeatedly liquefaction and collect and the step of vaporization, causes that energy consumption is too high, operation is multiple
It is miscellaneous, production efficiency is relatively low.
Thus, it is necessary to a kind of purifying plant of new special gas is designed to solve above-mentioned technical problem.
Utility model content
The purpose of this utility model is to provide a kind of purifying plant of special gas simple to operate, production efficiency is high.
To realize object defined above, the utility model adopts the following technical scheme that：A kind of purifying plant of special gas, this is carried
Pure device includes passing sequentially through the connected stock bottle of gas pipeline, a molecular sieve column, a diaphragm type compressor, a condenser, one
Gas cylinder is collected, the stock bottle, molecular sieve column, diaphragm type compressor, condenser, collection gas cylinder are connected with vacuum lead respectively,
The molecular sieve column and diaphragm type compressor form a circulation by gas pipeline, and the stock bottle and collection gas cylinder are respectively placed in one
In cold-trap.
As further improvement of the utility model, the molecular sieve in the molecular sieve column is 3A, 4A, 5A, 13X molecular sieve
One of them or 3A, 4A, 5A, 13X different kinds of molecules sieve the molecular sieve mixed.
As further improvement of the utility model, the collection gas cylinder and stock bottle are low temperature resistant aluminum gas cylinder.
As further improvement of the utility model, the aluminum gas cylinder passes through polishing.
The purifying plant of the utility model special gas uses diaphragm type compressor, causes gas in molecular sieve in a short time
Circulation is multiple in post, also at least does a rectifying in condenser afterwards and evacuates purification, greatly strengthen purification efficiency and effect,
6N special gas can be prepared.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the embodiment of the purifying plant of the utility model special gas.
Embodiment
Technical scheme is clearly and completely described below in conjunction with the utility model embodiment, it is clear that described
Embodiment is only the utility model part of the embodiment, rather than whole embodiments.Based on the implementation in the utility model
Example, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, is belonged to
The scope of the utility model protection.
Referring to Fig. 1, a kind of purifying plant 100 of special gas, it includes passing sequentially through gas pipeline 180 is connected one
Stock bottle 110, a molecular sieve column 120, a diaphragm type compressor 130, a condenser 140, one collection gas cylinder 150, stock bottle 110,
Molecular sieve column 120, diaphragm type compressor 130, condenser 140, collection gas cylinder 150 are connected with vacuum lead 160 respectively, molecular sieve
Post 120 and diaphragm type compressor 130 form a circulation by gas pipeline 180, and stock bottle 110 and collection gas cylinder 150 are placed in cold-trap
In 170.In the present embodiment, cold-trap 170 is liquid nitrogen cold trap.
Molecular sieve in molecular sieve column 120 has uniform microcellular structure, and its hole diameter is uniform, these holes
The Molecular Adsorption smaller than its diameter there can be Preferential adsorption energy to the inside of vestibule, and to polar molecule and unsaturated molecule
Power, thus can polarity degree is different, degree of saturation is different, and the molecule that molecular size is different and boiling point is different separates, i.e.,
Have the function that " to sieve " molecule.
In the present embodiment, the molecular sieve in molecular sieve column 120 be one of 3A, 4A, 5A, 13X molecular sieve or 3A,
The molecular sieve that 4A, 5A, 13X different kinds of molecules sieve mix.
Above-mentioned purifying plant 100 is used to handle special gas, such as the gas such as arsine, phosphine, germane and hydrogen selenide, due to
Substantial amounts of liquid nitrogen is used, used collection gas cylinder and stock bottle are low temperature resistant aluminum gas cylinder.It is of the present utility model certain
In a little embodiments, used aluminum gas cylinder passes through polishing, and the aluminum gas cylinder by polishing is more beneficial for unstripped gas
Flowing.
A kind of purifying technique of special gas, processing step are as follows：
S1, gas cylinder and stock bottle will be collected it will be placed in cold-trap, and after connecting purifying plant, will vacuumize and put with 6N helium
The air changed in whole purifying plant；
S2, liquid nitrogen is added into the stock bottle equipped with unstripped gas so that raw material is sublimated, and removing impurity is vacuumized to stock bottle
Component, the unstripped gas are impure below 5N special gas；
S3, the fusing of stock bottle internal solid unstripped gas, after vaporizing and showing that pressure is 0.1-0.8MPa to meter in stock bottle, by raw material
Gas is filled with molecular sieve column, until the meter in molecular sieve column shows that pressure is 0.4-0.5MPa, closes the valve of disengaging molecular sieve column,
The valve for the diaphragm type compressor being connected with molecular sieve column is opened, starts diaphragm type compressor so that unstripped gas is constantly in molecular sieve column
Circulated between diaphragm type compressor；
S4, after circulation 1-10 minutes, diaphragm type compressor is closed, unstripped gas enters in the condenser added with liquid nitrogen, Zhi Daoleng
Meter shows that drop of pressure is 0MPa in condenser；
S5, raw material gas liquefaction, solidify and vacuumize rectifying at least once, then melt, vaporize, collecting to collection gas cylinder；
S6, continue S1-S5 until unstripped gas is fully cleaned up to 6N and is collected in collection gas cylinder in stock bottle.
In certain embodiments, stock bottle internal solid unstripped gas melts, vaporizes to meter in stock bottle and show that pressure is preferred in S3
After 0.55MPa, unstripped gas is filled with molecular sieve column, until the meter in molecular sieve column shows that pressure is preferably 0.45MPa.
In the present embodiment, it is low temperature resistant aluminum gas cylinder to collect gas cylinder and stock bottle；Aluminum gas cylinder passes through polishing；
Molecular sieve in molecular sieve column for one of 3A, 4A, 5A, 13X molecular sieve or the mixing of 3A, 4A, 5A, 13X different kinds of molecules sieve and
Into molecular sieve；Impurity composition includes H2、O2、H2O、N2、CH4、CO、CO2One or more of which；Cold-trap is liquid nitrogen cold trap.
The purifying plant of the utility model special gas uses diaphragm type compressor, causes gas in molecular sieve in a short time
Circulation is multiple in post, also at least does a rectifying in condenser afterwards and evacuates purification, greatly strengthen purification efficiency and effect,
6N special gas can be prepared.
Although being example purpose, preferred embodiment of the present utility model, the common skill of this area are had been disclosed for
Art personnel will realize the situation of the scope of the utility model and spirit disclosed in not departing from by appended claims
Under, various improvement, increase and substitution are possible.
Claims (3)
- A kind of 1. purifying plant of special gas, it is characterised in that：The purifying plant includes passing sequentially through what gas pipeline was connected One stock bottle, a molecular sieve column, a diaphragm type compressor, a condenser, one collect gas cylinder, the stock bottle, molecular sieve column, barrier film Compressor, condenser, collection gas cylinder are connected with vacuum lead respectively, and the molecular sieve column and diaphragm type compressor pass through flue Road forms a circulation, and the stock bottle and collection gas cylinder are respectively placed in a cold-trap.
- 2. the purifying plant of special gas according to claim 1, it is characterised in that：The collection gas cylinder and stock bottle are Low temperature resistant aluminum gas cylinder, the aluminum gas cylinder pass through polishing.
- 3. the purifying plant of special gas according to claim 1, it is characterised in that：The cold-trap is liquid nitrogen cold trap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720760866.1U CN207119236U (en) | 2017-06-27 | 2017-06-27 | The purifying plant of special gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720760866.1U CN207119236U (en) | 2017-06-27 | 2017-06-27 | The purifying plant of special gas |
Publications (1)
| Publication Number | Publication Date |
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| CN207119236U true CN207119236U (en) | 2018-03-20 |
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ID=61615744
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720760866.1U Active CN207119236U (en) | 2017-06-27 | 2017-06-27 | The purifying plant of special gas |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109126358A (en) * | 2017-06-27 | 2019-01-04 | 清远先导材料有限公司 | The purifying technique and purifying plant of special gas |
| CN113041641A (en) * | 2021-03-07 | 2021-06-29 | 无锡恒大电子科技有限公司 | Liquefied gas grading and purifying device |
-
2017
- 2017-06-27 CN CN201720760866.1U patent/CN207119236U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109126358A (en) * | 2017-06-27 | 2019-01-04 | 清远先导材料有限公司 | The purifying technique and purifying plant of special gas |
| CN109126358B (en) * | 2017-06-27 | 2024-02-20 | 昆明先导新材料科技有限责任公司 | Purification process and purification device for special gas |
| CN113041641A (en) * | 2021-03-07 | 2021-06-29 | 无锡恒大电子科技有限公司 | Liquefied gas grading and purifying device |
| CN113041641B (en) * | 2021-03-07 | 2022-02-22 | 无锡恒大电子科技有限公司 | Liquefied gas grading and purifying device |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210906 Address after: 511500 Heyun Town Industrial Zone, Qingxin District, Qingyuan City, Guangdong Province (beside Yuba highway) Patentee after: FIRST RARE MATERIALS Co.,Ltd. Address before: 511517 27-9B, Guangdong Qingyuan hi tech Industrial Park Patentee before: FIRST RARE MATERIALS Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220602 Address after: No. 1116-1, building 1, Dianzhong Business Plaza, Dianzhong new area, Kunming, Yunnan 650212 Patentee after: Kunming forerunner New Material Technology Co.,Ltd. Address before: 511500 Heyun Town Industrial Zone, Qingxin District, Qingyuan City, Guangdong Province (beside Yuba highway) Patentee before: FIRST RARE MATERIALS Co.,Ltd. |
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| TR01 | Transfer of patent right |