CN207091505U - Low heat-emissive vacuum coating equipment - Google Patents
Low heat-emissive vacuum coating equipment Download PDFInfo
- Publication number
- CN207091505U CN207091505U CN201720873664.8U CN201720873664U CN207091505U CN 207091505 U CN207091505 U CN 207091505U CN 201720873664 U CN201720873664 U CN 201720873664U CN 207091505 U CN207091505 U CN 207091505U
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- CN
- China
- Prior art keywords
- shutter
- plated film
- emissive
- vacuum coating
- coating equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model discloses a kind of low heat-emissive vacuum coating equipment, it includes plated film case etc., heater is located on the top inwall of plated film case, connected between plated film case and the side of main valve by shutter, the bottom of main valve is connected with condenser pump, connected between cylinder and substrate by connecting rod, water-cooled baffle is located on the side of shutter, exhaust outlet is located on the bottom of shutter, vavuum pump is connected with sucker, side cover is located on the opposite side of main valve, and the bottom connection of pipeline and condenser pump, pipeline is located on framework.The utility model effectively shields the heat radiation to condenser pump by setting water-cooled baffle, it is ensured that the normal operation of condenser pump, guarantee vacuumize efficiency.
Description
Technical field
Field of vacuum coating is the utility model is related to, more particularly to a kind of low heat-emissive vacuum coating equipment.
Background technology
The principle of vacuum coating equipment is its surface component is evaporated with atomic group or ionic species Coating Materials heating
Out, and the material surface for needing plated film is deposited in, film is formed by film forming procedure.Worked in vacuum coating equipment plated film case
Shi Wendu rises to about 400 DEG C, and nearly 300 DEG C of substrate temperature, so high temperature radiates to condenser pump 80K blades, causes cold
Increase thermic load after solidifying pump temperature is too high, so as to cause it can not normal work.Traditional general solution method is that installation is super cold
Trap shields heat radiation, but super cold-trap can increase conductance loss, and loss up to 40%, influence vacuumizes efficiency, especially,
If misoperation, cooling water valve is not opened such as, temperature is extremely low when condensing pump work, and water cooling in super cold-trap can be caused to freeze
And spalling copper pipe.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of low heat-emissive vacuum coating equipment, and it is by setting water
Cold apron, effectively shield the heat radiation to condenser pump, it is ensured that the normal operation of condenser pump, guarantee vacuumize efficiency, operation peace
Overall height is imitated, and can reduce heat radiation, extends condenser pump service life.
The utility model is that solve above-mentioned technical problem by following technical proposals：A kind of low heat-emissive vacuum coating
Machine, it is characterised in that it includes plated film case, substrate, heater, water-cooled baffle, main valve, condenser pump, exhaust outlet, shutter, gas
Cylinder, connecting rod, vavuum pump, sucker, side cover, pipeline, framework, heater are located on the top inwall of plated film case, plated film case and main valve
Side between connected by shutter, the bottom of main valve is connected with condenser pump, is connected between cylinder and substrate by connecting rod,
Water-cooled baffle is located on the side of shutter, and exhaust outlet is located on the bottom of shutter, and vavuum pump is connected with sucker, and side cover is located at
On the opposite side of main valve, the bottom connection of pipeline and condenser pump, pipeline is located on framework.
Preferably, the plated film case is provided with a display screen.
Preferably, the bottom of the framework is provided with multiple rollers.
Preferably, the water-cooled baffle uses multiple copper pipes or copper coin being arranged side by side.
Positive effect of the present utility model is：The utility model is effectively shielded pair by setting water-cooled baffle
The heat radiation of condenser pump, it is ensured that the normal operation of condenser pump, guarantee vacuumize efficiency, and safe operation is efficient, can reduce hot spoke
Penetrate, extend condenser pump service life.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
The utility model preferred embodiment is provided below in conjunction with the accompanying drawings, to describe the technical solution of the utility model in detail.
As shown in figure 1, the utility model low heat-emissive vacuum coating equipment includes plated film case 1, substrate 2, heater 3, water cooling
Baffle plate 4, main valve 5, condenser pump 6, exhaust outlet 7, shutter 8, cylinder 9, connecting rod 10, vavuum pump 12, sucker 14, side cover 15, pipeline
16th, framework 17, heater 3 are located on the top inwall of plated film case 1, pass through shutter 8 between the side of plated film case 1 and main valve 5
Connection, the bottom of main valve 5 are connected with condenser pump 6, connected between cylinder 9 and substrate 2 by connecting rod 10, and water-cooled baffle 4 is located at
On the side of shutter 8, exhaust outlet 7 is located on the bottom of shutter 8, and vavuum pump 12 is connected with sucker 14, and side cover 15 is positioned at master
On the opposite side of valve 5, pipeline 16 is connected with the bottom of condenser pump 6, and pipeline 16 is located on framework 17.
Plated film case 1 is provided with a display screen 11, so facilitates the information such as displays temperature, convenient operation and control.
The bottom of framework is provided with multiple rollers 13, is so moved easily.
Water-cooled baffle 4 uses multiple copper pipes or copper coin being arranged side by side, and can so block the evaporation of Coating Materials.
Each between copper pipe or each copper coin at intervals of 60 to 100mm, preferably 80mm, so reduce heat radiation.
The angle of inclination of each copper pipe or each copper coin is 20 to 40 degree, preferably 30 degree, so reduces heat radiation, strengthens
Practicality.
The material of water-cooled baffle 4 is copper, and the blade of such shutter 8 tilts down the evaporation that can block Coating Materials.
Operation principle of the present utility model is as follows：Water-cooled baffle is arranged on the side of shutter, hot spoke can be reduced
Penetrate, and water-cooled baffle is influenceed by heat radiation in itself, the situation of copper pipe spalling will not be caused, and conductance loss is smaller, can be with
Reach less than 10%.Plated film is carried out to product in plated film case.Heater carries out heating radiation.Cylinder drivening rod is so as to driving base
Plate is moved.Vavuum pump and sucker make low heat-emissive vacuum coating equipment keep vacuum state.When side cover is opened, production can be taken out
Product etc..Condenser pump can be cooled down product.Pipeline can discharge corresponding product.Framework is used for supporting pipeline etc..
In summary, the utility model effectively shields the heat radiation to condenser pump, it is ensured that cold by setting water-cooled baffle
The normal operation of solidifying pump, guarantee vacuumize efficiency, and safe operation is efficient, can reduce heat radiation, extend condenser pump service life.
Particular embodiments described above, to the technical problem, technical scheme and beneficial effect of solution of the present utility model
It is further described, should be understood that and the foregoing is only specific embodiment of the utility model, not
It is all within the spirit and principles of the utility model for limiting the utility model, any modification for being made, equivalent substitution, change
Enter, should be included within the scope of protection of the utility model..
Claims (4)
1. a kind of low heat-emissive vacuum coating equipment, it is characterised in that it includes plated film case, substrate, heater, water-cooled baffle, master
Valve, condenser pump, exhaust outlet, shutter, cylinder, connecting rod, vavuum pump, sucker, side cover, pipeline, framework, heater are located at plated film case
Top inwall on, connected between plated film case and the side of main valve by shutter, the bottom of main valve is connected with condenser pump, gas
Being connected between cylinder and substrate by connecting rod, water-cooled baffle is located on the side of shutter, and exhaust outlet is located on the bottom of shutter,
Vavuum pump is connected with sucker, and side cover is located on the opposite side of main valve, and the bottom connection of pipeline and condenser pump, pipeline is located at framework
On.
2. low heat-emissive vacuum coating equipment as claimed in claim 1, it is characterised in that the plated film case is provided with a display
Screen.
3. low heat-emissive vacuum coating equipment as claimed in claim 1, it is characterised in that the bottom of the framework is provided with multiple rollings
Wheel.
4. low heat-emissive vacuum coating equipment as claimed in claim 1, it is characterised in that the water-cooled baffle using it is multiple side by side
The copper pipe or copper coin of setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720873664.8U CN207091505U (en) | 2017-07-19 | 2017-07-19 | Low heat-emissive vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720873664.8U CN207091505U (en) | 2017-07-19 | 2017-07-19 | Low heat-emissive vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207091505U true CN207091505U (en) | 2018-03-13 |
Family
ID=61545614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720873664.8U Expired - Fee Related CN207091505U (en) | 2017-07-19 | 2017-07-19 | Low heat-emissive vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207091505U (en) |
-
2017
- 2017-07-19 CN CN201720873664.8U patent/CN207091505U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180313 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |