CN207079299U - A kind of silicon material heating crucible with buffer interlayer - Google Patents
A kind of silicon material heating crucible with buffer interlayer Download PDFInfo
- Publication number
- CN207079299U CN207079299U CN201720999664.2U CN201720999664U CN207079299U CN 207079299 U CN207079299 U CN 207079299U CN 201720999664 U CN201720999664 U CN 201720999664U CN 207079299 U CN207079299 U CN 207079299U
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- China
- Prior art keywords
- crucible
- protection
- quartz
- gear valve
- silicon material
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000002210 silicon-based material Substances 0.000 title claims abstract description 18
- 239000011229 interlayer Substances 0.000 title claims abstract description 17
- 238000010438 heat treatment Methods 0.000 title claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 62
- 239000010453 quartz Substances 0.000 claims abstract description 42
- 239000004576 sand Substances 0.000 claims abstract description 19
- 230000003139 buffering effect Effects 0.000 claims abstract description 16
- 238000010276 construction Methods 0.000 claims description 13
- 239000006004 Quartz sand Substances 0.000 claims description 4
- 230000011218 segmentation Effects 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 230000010412 perfusion Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of silicon material with buffer interlayer to heat crucible, belongs to monocrystalline silicon production technical field.It includes protecting crucible and quartz crucible, and quartz crucible is nested in protection crucible, and protection crucible is integrated, between quartz crucible and protection crucible at sidewall locations and bottom position is respectively provided with gap, filled with buffering sand in gap.Crucible is protected to be integrated in the utility model; it can prevent silicon vapor from entering in protection crucible; improve the service life of protection crucible; and; protect crucible and quartz crucible and non-direct contact; but the expansive force of quartz crucible can be absorbed filled with buffering sand, buffering sand in the gap of two crucibles, protection is played a part of to protection crucible.
Description
Technical field
Monocrystalline silicon production technical field is the utility model is related to, particularly relates to a kind of silicon material heating crucible with buffer interlayer.
Background technology
It is most of using the graphite for dividing valve particularly in the production of large-diameter monocrystalline silicon in the production of pulling of silicon single crystal
Crucible, be so just avoided that graphite crucible occur in production fracture and caused by cold stoking accident.
But graphite crucible is opened after valve there is also some problems, first, it, which is opened, has gap at valve, causes silicon vapor to enter crucible
It is interior, influence the life-span of graphite crucible；Second, each valve of graphite crucible has all no longer been complete circular configuration so that graphite crucible is producing
In be easily broken off.
Utility model content
In view of this, the utility model proposes a kind of silicon material with buffer interlayer to heat crucible, and it can effectively protect heating
Outer layer protection crucible in crucible, improve the service life of protection crucible.
Based on above-mentioned purpose, technical scheme provided by the utility model is：
A kind of silicon material heating crucible with buffer interlayer, including protection crucible and quartz crucible, quartz crucible are nested in protection crucible, protected
Shield crucible is integrated, between quartz crucible and protection crucible at sidewall locations and bottom position is respectively provided with gap, in gap
Filled with buffering sand.
Optionally, the supporting construction for being provided between crucible and quartz crucible and making quartz crucible be suspended in protection crucible, supporting construction are protected
Positioned at the crucible mouth opening position of protection crucible and quartz crucible.
Optionally, the crucible of quartz crucible along place be provided with it is at least two extending to outside crucible, for quartz crucible frame to be protected into crucible
Crucible mouth at first gear valve, the crucible mouth external diameter of quartz crucible expands to the first diameter by first gear valve, and first gear valve is tied for support
One of part of structure, there is the space for being used for the filling buffering sand into gap between two neighboring first gear valve.
Optionally, supporting construction also includes second gear valve at protection crucible crucible mouth, extending into protection crucible crucible, the
The intraoral footpath of crucible for protecting crucible is reduced into Second bobbin diameter by two gear valves, and the greater diameter than Second bobbin diameter.
Optionally, second gear valve is set directly at the crucible of protection crucible and is integrated along upper, and with protection crucible.
Optionally, second gear valve is arranged at the top of the circle wall of a centring ring, and centring ring is enclosed at the crucible mouth of protection crucible simultaneously
The crucible of protection crucible is hung over along upper by second gear valve.
Optionally, all first gear valves are circumferentially uniformly distributed, and second gear valve is identical with first gear valve number and position pair
Should.
Optionally, the size all same of all first gear valves, the size all same of all second gear valves, two neighboring first
The space kept off between valve is more than the size of second gear valve, and the first diameter is less than the intraoral footpath of crucible of protection crucible.
Optionally, it is quartz sand to buffer sand.
Optionally, centring ring is made up of the multiple arcs segmentation separated each other.
From narration above as can be seen that the beneficial effect of technical solutions of the utility model is：
1st, protection crucible of the present utility model is integrated, and different from of the prior art point of valve crucible, can prevent silicon
Steam enters in protection crucible, improves the service life of protection crucible.
2nd, crucible and quartz crucible and non-direct contact are protected in the utility model, but filled with buffering in the gap of two crucibles
Sand, buffering sand can absorb the expansive force of quartz crucible, play a part of protection to protection crucible.
Brief description of the drawings
In order to clearly describe this patent, one or more accompanying drawing is provided below, these accompanying drawings are intended to this patent
Background technology, technical principle and/or some specific embodiments make aid illustration.It should be noted that these accompanying drawings can
It can not also provide some to provide and have been described and belong to known in those of ordinary skill in the art often at this patent word segment
The detail of knowledge；Also, because one of ordinary skill in the art can combine the published word content of this patent completely
And/or accompanying drawing content, more accompanying drawings, therefore these accompanying drawings below are designed in the case where not paying any creative work
Can cover can not also cover all technical schemes that this patent word segment is described.In addition, these accompanying drawings is specific interior
Containing needs the word content with reference to this patent to be determined, when word content and some obvious knot in these accompanying drawings of this patent
, it is necessary to which to carry out comprehensive descision be this on earth with reference to the narration of the common knowledge and this patent other parts of this area when structure is not consistent
The word segment of patent, which exists to exist in clerical mistake, or accompanying drawing, draws mistake.Especially, the following drawings is the figure of exemplary in nature
Piece, it is not intended that imply the protection domain of this patent, one of ordinary skill in the art is by reference to the text disclosed in this patent
Word content and/or accompanying drawing content, more accompanying drawings can be designed in the case where not paying any creative work, these are new
Technical scheme representated by accompanying drawing is still within the protection domain of this patent.
Fig. 1 is a kind of structural representation of the utility model embodiment；
Fig. 2 is another structural representation of the utility model embodiment；
Fig. 3 is another structural representation of the utility model embodiment；
Fig. 4 is a kind of structural representation of centring ring in Fig. 3；
Fig. 5 is another structural representation of centring ring in Fig. 3；
Fig. 6 is the structural representation of first gear valve and second gear valve.
Embodiment
For the ease of understanding of the those skilled in the art to the art of this patent scheme, meanwhile, in order that the technology of this patent
Purpose, technical scheme and beneficial effect are clearer, and the protection domain of claims is fully supported, below with tool
The form of body case makes further, more detailed description to the technical scheme of this patent.
As shown in figure 1, a kind of silicon material heating crucible with buffer interlayer, including protection crucible 2 and quartz crucible 1, quartz crucible 1 are nested
In protection crucible 2, protection crucible 2 is integrated, between quartz crucible 1 and protection crucible 2 at sidewall locations and bottom position
Gap 3 is respectively provided with, buffering sand is filled with gap.
Buffering sand can absorb external active force during quartz crucible expansion, so as to play a part of protection to protection crucible.
Optionally, the supporting construction for being provided between crucible and quartz crucible and making quartz crucible be suspended in protection crucible, supporting construction are protected
Positioned at the crucible mouth opening position of protection crucible and quartz crucible.
Optionally, as shown in Fig. 2 the crucible of quartz crucible 1 along place provided with it is at least two extending to outside crucible, for by quartz crucible
The crucible mouth external diameter of quartz crucible 1 is expanded to the first diameter by first gear valve 11 of 1 frame at the crucible mouth of protection crucible 2, first gear valve 11,
First gear valve 11 is one of part of supporting construction, has between two neighboring first gear valve and is used to fill into gap 3
Buffer the space of sand.
Optionally, still see Fig. 2, supporting construction also include it is at the protection crucible mouth of crucible 2, extend into the protection crucible of crucible 2
The intraoral footpath of crucible for protecting crucible 2 is reduced into Second bobbin diameter by second gear valve 21, second gear valve 21, and the greater diameter than Second bobbin diameter,
Therefore, second gear valve 21 can be laminated on first gear valve 11.Obviously, the external footpath of the crucible of quartz crucible 1 is certainly less than Second bobbin diameter.
It will furthermore be evident that, even if being not provided with second gear valve 21 at the crucible mouth of protection crucible 2, first gear valve 11 can also
The crucible of protection crucible 2 is directly placed at along upper.Now, the first diameter is naturally larger than the intraoral footpath of crucible of protection crucible.
Optionally, second gear valve is set directly at the crucible of protection crucible and is integrated along upper, and with protection crucible.
Or as shown in figure 3, second gear valve can also be arranged at the top of the circle wall of a centring ring 4, centring ring 4 is enclosed on
At the crucible mouth for protecting crucible 2, and the crucible of protection crucible 2 is hung over along upper by second gear valve.In this embodiment, supporting construction is really by fixed
What position circle 4 and first gear valve were formed.
Fig. 4 and Fig. 5 is two kinds of structural representations of centring ring 4 in Fig. 3, it can be seen that second gear valve 41 can both protrude from
The circle top of centring ring 4, flush can also be pushed up with circle.
Optionally, all first gear valves are circumferentially uniformly distributed, and second gear valve is identical with first gear valve number and position pair
Should.
As shown in fig. 6, first gear valve 11 and second gear valve 21 share 4, the size all same of all first gear valves 11,
The size all same of all second gear valves 21, first gear valve 11 and second gear valve 21 are circumferentially uniformly distributed, and two neighboring
Space between one gear valve 11 is more than the size of second gear valve 21, and (therefore the space between two neighboring second gear valve 21 is also inevitable
More than the size of first gear valve 11), the first diameter is less than the intraoral footpath of crucible of protection crucible.
This structure is advantageous in that, can be suspended in quartz crucible in protection crucible by supporting construction, then by keeping off valve
Between space to quartz crucible and protection crucible gap in perfusion buffering sand, after the completion of perfusion, by rotating quartz crucible, can make
First gear valve and second gear valve stagger, so as to take out centring ring (assuming that second gear valve is located on centring ring), and make quartz crucible to
Protect in crucible and confirm.
In addition, centring ring can be made up of the multiple arcs segmentation separated each other.So, perfusion buffering sand after, pass through to
The mode of outer pull easily can remove centring ring.
In above-described embodiment, buffering sand can be quartz sand, and graphite nodule can also be mixed into quartz sand.
In a word, the utility model embodiment provides a variety of brand-new silicon material heating crucibles entirely different with prior art,
Wherein protection crucible is integrated, and different from of the prior art point of valve crucible, can prevent silicon vapor from entering in protection crucible, carry
The service life of height protection crucible.Also, crucible and quartz crucible and non-direct contact are protected, but filled with slow in the gap of two crucibles
Sand washing, buffering sand can absorb the expansive force of quartz crucible, play a part of protection to protection crucible.It can be seen that the utility model is pair
A kind of important improvement of prior art.
It is to be appreciated that to be intended merely to facilitate this area common for the above-mentioned narration for this patent embodiment
The exemplary description that technical staff understands this patent scheme and enumerated, does not imply that the protection domain of this patent is limited solely to
In this few example, those of ordinary skill in the art completely can on the premise of making and fully understanding to the art of this patent scheme,
In the form of not paying any creative work, by taking each example cited by this patent combination technique feature, replacing
Some technical characteristics, more technical characteristics etc. mode is added, obtain more embodiments, all these specific implementations
Mode is within the covering scope of patent claims book, and therefore, these new embodiments also should be in this patent
Protection domain within.
In addition, for the purpose for simplifying narration, this patent may also not enumerate some ordinary specific embodiments, this
A little schemes are that those of ordinary skill in the art can expect naturally after it understanding of the art of this patent scheme, it is clear that this
A little schemes should be also included within the protection domain of this patent.
For the purpose for simplifying narration, above-mentioned each embodiment may only up to for the extent of disclosure of ins and outs
The degree that can voluntarily make a decision to those skilled in the art, i.e. there is no disclosed ins and outs for above-mentioned embodiment,
Those of ordinary skill in the art completely can be in the case where not paying any creative work, in filling for the art of this patent scheme
Divide under prompting, completed by means of the disclosed document of textbook, reference book, paper, patent, audio-visual product etc., or, this
A little details are the contents that can voluntarily be maked decision according to actual conditions under being generally understood that of those of ordinary skill in the art.
It can be seen that even if these underground ins and outs, the open adequacy of the art of this patent scheme will not also be impacted.
In a word, it is any on the basis of explanation effect of the patent specification to claims protection domain is combined
Fall into the specific embodiment of patent claims book covering scope, within the protection domain of this patent..
Claims (10)
1. a kind of silicon material heating crucible with buffer interlayer, including protection crucible and quartz crucible, the quartz crucible are nested in the protection
In crucible, it is characterised in that the protection crucible is integrated, between the quartz crucible and the protection crucible at sidewall locations
Gap is respectively provided with bottom position, buffering sand is filled with the gap.
2. the silicon material heating crucible according to claim 1 with buffer interlayer, it is characterised in that the protection crucible and quartz crucible
Between be provided with the supporting construction for making the quartz crucible be suspended in the protection crucible, the supporting construction is positioned at the protection crucible and institute
State the crucible mouth opening position of quartz crucible.
3. the silicon material heating crucible according to claim 2 with buffer interlayer, it is characterised in that the crucible of the quartz crucible is at
Provided with it is at least two extending to outside crucible, for the first gear valve by the quartz crucible frame at the crucible mouth of the protection crucible, institute
State first gear valve and the crucible mouth external diameter of the quartz crucible is expanded into the first diameter, the first gear valve is the group of the supporting construction
Into one of part, there is the space for being used for the filling buffering sand into the gap between two neighboring first gear valve.
4. the silicon material heating crucible according to claim 3 with buffer interlayer, it is characterised in that the supporting construction also includes
At the protection crucible crucible mouth, the second gear valve that extends into protection crucible crucible, the second gear valve is by the protection crucible
The intraoral footpath of crucible is reduced into Second bobbin diameter, and described greater diameter than the Second bobbin diameter.
5. the silicon material heating crucible according to claim 4 with buffer interlayer, it is characterised in that the second gear valve is directly set
The crucible in the protection crucible is put along upper, and is integrated with the protection crucible.
6. the silicon material heating crucible according to claim 4 with buffer interlayer, it is characterised in that the second gear valve is arranged on
At the top of the circle wall of one centring ring, the centring ring is enclosed at the crucible mouth of the protection crucible and hangs over institute by the second gear valve
The crucible of protection crucible is stated along upper.
7. the silicon material heating crucible according to claim 4 with buffer interlayer, it is characterised in that all first gear valves are circumferentially
It is uniformly distributed, the second gear valve is identical with the first gear valve number and position correspondence.
8. the silicon material heating crucible according to claim 7 with buffer interlayer, it is characterised in that the size of all first gear valves
All same, the size all same of all second gear valves, the space between two neighboring first gear valve are more than the second gear valve
Size, first diameter are less than the intraoral footpath of crucible of the protection crucible.
9. the silicon material heating crucible according to claim 1 with buffer interlayer, it is characterised in that the buffering sand is quartz
Sand.
10. the silicon material heating crucible according to claim 6 with buffer interlayer, it is characterised in that the centring ring is by each other
The multiple arcs segmentation composition of separation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720999664.2U CN207079299U (en) | 2017-08-11 | 2017-08-11 | A kind of silicon material heating crucible with buffer interlayer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720999664.2U CN207079299U (en) | 2017-08-11 | 2017-08-11 | A kind of silicon material heating crucible with buffer interlayer |
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| Publication Number | Publication Date |
|---|---|
| CN207079299U true CN207079299U (en) | 2018-03-09 |
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| CN201720999664.2U Expired - Fee Related CN207079299U (en) | 2017-08-11 | 2017-08-11 | A kind of silicon material heating crucible with buffer interlayer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107299390A (en) * | 2017-08-11 | 2017-10-27 | 宁晋晶兴电子材料有限公司 | A kind of silicon material heating crucible with buffer interlayer |
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2017
- 2017-08-11 CN CN201720999664.2U patent/CN207079299U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107299390A (en) * | 2017-08-11 | 2017-10-27 | 宁晋晶兴电子材料有限公司 | A kind of silicon material heating crucible with buffer interlayer |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180309 |