CN207074962U - A kind of radio-frequency power supply main controller - Google Patents
A kind of radio-frequency power supply main controller Download PDFInfo
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- CN207074962U CN207074962U CN201721105879.1U CN201721105879U CN207074962U CN 207074962 U CN207074962 U CN 207074962U CN 201721105879 U CN201721105879 U CN 201721105879U CN 207074962 U CN207074962 U CN 207074962U
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Abstract
The utility model discloses a kind of radio-frequency power supply main controller, including governor circuit, governor circuit is connected with DC modules, drive module, power detection interface, regulation and control interface and external communication interface, it is connected with power amplifier module and power detection module between drive module and power detection interface in turn, signal processing circuit is connected between governor circuit and DC modules;The power setting instruction that governor circuit is come according to regulation and control interface input is judged; output pwm signal carries out voltage adjustment to DC modules; and it is connected signal processing circuit with governor circuit in DC modules; ensure the precision and stability of signal output; input power signal to power detection interface simultaneously and carry out closed power tracking; the temperature detection signal that come in can be also inputted according to drive module and starts related protection operation, and most these presentation of information are on display at last, convenient observation regulation and control.
Description
Technical field
Radio frequency discharge field is the utility model is related to, particularly a kind of radio-frequency power supply main controller.
Background technology
Radio-frequency power supply mainly includes signal generating circuit, signal drive circuit, power amplification circuit and impedance matching circuit
Deng, wherein power amplification circuit is the core of whole radio-frequency power supply, and it tends to be interfered, under radio frequency conditions, circuit
Kelvin effect, electromagnetic radiation effect be present, and there is the parameter of stray capacitance and stray inductance influence circuit, cause to export
The precision and stability of power reduce, and so as to influence the performance of whole equipment, influence the master of radio circuit power output at present
Reason is wanted to be that regulation for whole radio-frequency power system and protection can not be accomplished to control well.
The content of the invention
For overcome the deficiencies in the prior art, the utility model provides a kind of radio-frequency power supply master control that can easily be accommodated and protect
Device.
Technical scheme is used by the utility model solves its technical problem:
A kind of radio-frequency power supply main controller, including governor circuit, the governor circuit are connected with DC modules, drive module, work(
Rate detection interface, regulate and control interface and external communication interface, be sequentially connected between drive module and the power detection interface active
Rate amplification module and power detection module, signal processing circuit is connected between the governor circuit and the DC modules, it is above-mentioned
Circuit provides working power by power supply circuit.
The signal processing circuit includes operational amplifier U3A, operational amplifier U3B, operational amplifier U9A, resistance
R49, resistance R50, resistance R78, electric capacity C30, electric capacity C31, electric capacity C32, electric capacity C33, electric capacity C58 and electric capacity C59;The resistance
R49 mono- terminates 7 pins of the operational amplifier U3B, and the other end divides two-way, connects the DC modules by resistance R27 all the way
Power sensor J1 2 pins, another way are grounded by electric capacity C27;6 pins and 7 pins of the operational amplifier U3B are connected
Connect, 5 pins of the operational amplifier U3B are followed by 21 of main control chip U1 in the governor circuit by resistance R52 and R54 and drawn
Pin;The electric capacity C30 mono- terminates the node between the operational amplifier U3B and the resistance R52, and other end ground connection is described
Electric capacity C32 mono- terminates the node between the resistance R52 and the resistance R54, other end ground connection;The resistance R50 mono- is terminated
1 pin of the operational amplifier U3A, the other end divide two-way, connect the power sensor of the DC modules by resistance R5 all the way
J1 9 pins, another way are grounded by electric capacity C28;1 pin and 2 pins of the operational amplifier U3A is connected;The fortune
3 pins for calculating amplifier U3A connect 22 pins of main control chip U1 in the governor circuit, the electric capacity by resistance R53 and R55
C31 mono- terminates the node between the operational amplifier U3A and the resistance R53, other end ground connection, described electric capacity C33 one end
Connect the node between the resistance R55 and the resistance R53, other end ground connection;4 pins of the operational amplifier U3A are divided to two
Road, it is grounded all the way by electric capacity C29, another way connects -15V power supplys by resistance R51;8 pins of the operational amplifier U3A point
Two-way, it is grounded all the way by electric capacity C49, another way connects 15V power supplys by resistance R71;The resistance R78 mono- terminates the computing
Amplifier U9A 1 pin, the other end divide two-way, and meet the power sensor J1 of the DC modules by resistance R4 all the way 7 are drawn
Pin, another way are grounded by electric capacity C55;1 pin and 2 pins of the operational amplifier U9A is connected;The operational amplifier
U9A 3 pins connect 23 pins of main control chip U1 in the governor circuit by resistance R81 and R82, and the C58 mono- terminates institute
The node between operational amplifier U9A and the resistance R81, other end ground connection are stated, the electric capacity C59 mono- terminates the resistance
Node between R81 and the resistance R82, other end ground connection;4 pins of the operational amplifier U9A divide two-way, pass through all the way
Electric capacity C56 is grounded, and another way connects -15V power supplys by resistance R79;8 pins of the operational amplifier U9A divide two-way, a-road-through
Electric capacity C57 ground connection is crossed, another way connects 15V power supplys by resistance R80.
The model PIC16F877A of main control chip in the governor circuit.
The beneficial effects of the utility model are:The power setting that the utility model can come according to regulation and control interface input instructs
Judged, output pwm signal to DC modules carries out voltage adjustment, and signal transacting electricity is connected with governor circuit in DC modules
Road, it is ensured that the precision and stability of signal output, while power signal of coming in the input of power detection interface carries out closed loop work(
Rate is tracked, and the temperature detection signal come in can be also inputted according to drive module and starts related protection operation, and most these are believed at last
Breath is shown on display, convenient observation regulation and control.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is structured flowchart of the present utility model;
Fig. 2 is circuit theory diagrams Part I of the present utility model;
Fig. 3 is circuit theory diagrams Part II of the present utility model;
Fig. 4 is circuit theory diagrams Part III of the present utility model;
Fig. 5 is circuit theory diagrams Part IV of the present utility model;
Fig. 6 is circuit theory diagrams Part V of the present utility model;
Fig. 7 is circuit theory diagrams Part VI of the present utility model;
Fig. 8 is circuit theory diagrams Part VII of the present utility model.
Embodiment
Referring to figs. 1 to Fig. 8, a kind of radio-frequency power supply main controller, including governor circuit, the governor circuit are connected with DC moulds
Block, drive module, power detection interface, regulation and control interface and external communication interface, the drive module and power detection interface it
Between be connected with power amplifier module and power detection module in turn, be connected with signal between the governor circuit and the DC modules
Process circuit, foregoing circuit provide working power by power supply circuit, the model of main control chip in the governor circuit
PIC16F877A, the external communication interface can external connection PLC ports, Control plates, 232 or 485 communication interfaces etc., can
The signal that the governor circuit exports is transported to outside.
In the present embodiment, the DC modules output DC voltage source signal, the drive module export DC modules
Faint sinusoidal signal carries out pre-amplification processing (amplifying power is 10 times), and signal is transported into the power amplifier module,
Pre-amplified signal drives the RF power amplification pipe in the power amplifier module to complete direct current signal and is converted to radiofrequency signal, and institute
Corresponding RF power level can be exported according to different DC voltage values by stating power amplifier module, finally to the power amplification
The high-power RF signal of module output carries out harmonic filtration (second harmonic component is controlled in -45dB);The power detection mould
RF high power sinusoidal signal is converted to the DC component signal of forward and reverse and defeated by the power detection interface by block
It is sent to the governor circuit and completes powerinjected method;The regulation and control interface one terminates the governor circuit, another to be terminated with button control
Making sheet and display screen, can carry out power setting by key control panel, and the setting value that the governor circuit is come according to input is entered
Row judges that output pwm signal to DC modules carries out magnitude of voltage adjustment, and can be transported to the power that power detection module exports
On display screen, convenient observation regulation and control.
The pwm signal can first pass through signal processing circuit, the signal processing circuit bag before DC modules are transported to
Include operational amplifier U3A, operational amplifier U3B, operational amplifier U9A, resistance R49, resistance R50, resistance R78, electric capacity C30,
Electric capacity C31, electric capacity C32, electric capacity C33, electric capacity C58 and electric capacity C59;The resistance R49 mono- terminates the operational amplifier U3B's
7 pins, the other end divide two-way, connect the power sensor J1 of the DC modules 2 pins by resistance R27 all the way, and another way is led to
Cross electric capacity C27 ground connection;6 pins and 7 pins of the operational amplifier U3B are connected, 5 pins of the operational amplifier U3B
21 pins of main control chip U1 in the governor circuit are followed by by resistance R52 and R54;The electric capacity C30 mono- terminates the fortune
Calculate the amplifier U3B and resistance R52 between node, the other end ground connection, the electric capacity C32 mono- terminate the resistance R52 with
Node between the resistance R54, other end ground connection;The resistance R50 mono- terminates 1 pin of the operational amplifier U3A, separately
Two-way is divided in one end, connects the power sensor J1 of the DC modules 9 pins by resistance R5 all the way, and another way passes through electric capacity C28
Ground connection;1 pin and 2 pins of the operational amplifier U3A is connected;3 pins of the operational amplifier U3A pass through resistance
R53 and R55 connects 22 pins of main control chip U1 in the governor circuit, and the electric capacity C31 mono- terminates the operational amplifier U3A
With the node between the resistance R53, other end ground connection, the electric capacity C33 mono- terminates the resistance R55 and the resistance R53
Between node, the other end ground connection;4 pins of the operational amplifier U3A divide two-way, are grounded all the way by electric capacity C29, another
Road connects -15V power supplys by resistance R51;8 pins of the operational amplifier U3A divide two-way, are grounded all the way by electric capacity C49, separately
15V power supplys are connect by resistance R71 all the way;The resistance R78 mono- terminates 1 pin of the operational amplifier U9A, and the other end is divided to two
Road, connects the power sensor J1 of the DC modules 7 pins by resistance R4 all the way, and another way is grounded by electric capacity C55;It is described
Operational amplifier U9A 1 pin and 2 pins is connected;3 pins of the operational amplifier U9A are connect by resistance R81 and R82
Main control chip U1 23 pins in the governor circuit, the C58 mono- terminate the operational amplifier U9A and the resistance R81
Between node, other end ground connection, the electric capacity C59 mono- terminates the node between the resistance R81 and the resistance R82, separately
One end is grounded;4 pins of the operational amplifier U9A divide two-way, are grounded all the way by electric capacity C56, and another way passes through resistance R79
Connect -15V power supplys;8 pins of the operational amplifier U9A divide two-way, are grounded all the way by electric capacity C57, another way passes through resistance
R80 connects 15V power supplys;The signal processing circuit is first filtered processing to pwm signal, defeated after being handled by operational amplifier
Go out d. c. voltage signal and give DC modules, it is ensured that the precision and stability of signal output, be provided with temperature in the drive module
Sensor, governor circuit can be fed back information to the temperature inside real-time detection circuit, if there is temperature higher than setting
Standard value, i.e., it can automatically close and be output to the pwm signal of DC modules and the sinusoidal signal of drive module, and show on a display screen
Go out RF OFF corresponding state, circuit is protected;The governor circuit is also associated with the interface that radiates, and can be radiated by connecting
Device radiates to whole radio-frequency power supply, extends the life-span of radio-frequency power supply.
The power setting instruction that the utility model can come according to regulation and control interface input is judged that output pwm signal arrives
DC modules carry out voltage adjustment, and are connected signal processing circuit with governor circuit in DC modules, it is ensured that the precision of signal output
And stability, while power signal of coming in the input of power detection interface carries out closed power tracking, can also be according to drive module
The temperature detection signal that input is come in starts related protection operation, and most these presentation of information are convenient to see on display at last
Survey regulation and control.
Embodiment above can not limit the protection domain of the invention, and the personnel of professional skill field are not departing from
In the case of the invention general idea, the impartial modification and change done, the scope that the invention is covered is still fallen within
Within.
Claims (3)
1. a kind of radio-frequency power supply main controller, including governor circuit, it is characterised in that the governor circuit is connected with DC modules, driving
Module, power detection interface, regulate and control interface and external communication interface, connect successively between drive module and the power detection interface
Power amplifier module and power detection module are connected to, signal transacting electricity is connected between the governor circuit and the DC modules
Road, foregoing circuit provide working power by power supply circuit.
2. radio-frequency power supply main controller according to claim 1, it is characterised in that the signal processing circuit is put including computing
Big device U3A, operational amplifier U3B, operational amplifier U9A, resistance R49, resistance R50, resistance R78, electric capacity C30, electric capacity C31,
Electric capacity C32, electric capacity C33, electric capacity C58 and electric capacity C59;The resistance R49 mono- terminates 7 pins of the operational amplifier U3B, separately
Two-way is divided in one end, connects the power sensor J1 of the DC modules 2 pins by resistance R27 all the way, and another way passes through electric capacity C27
Ground connection;6 pins and 7 pins of the operational amplifier U3B are connected, and 5 pins of the operational amplifier U3B pass through resistance
R52 and R54 is followed by 21 pins of main control chip U1 in the governor circuit;The electric capacity C30 mono- terminates the operational amplifier
Node between U3B and the resistance R52, other end ground connection, the electric capacity C32 mono- terminate the resistance R52 and the resistance
Node between R54, other end ground connection;The resistance R50 mono- terminates 1 pin of the operational amplifier U3A, and the other end is divided to two
Road, connects the power sensor J1 of the DC modules 9 pins by resistance R5 all the way, and another way is grounded by electric capacity C28;It is described
Operational amplifier U3A 1 pin and 2 pins is connected;3 pins of the operational amplifier U3A are connect by resistance R53 and R55
Main control chip U1 22 pins in the governor circuit, the electric capacity C31 mono- terminate the operational amplifier U3A and the resistance
Node between R53, other end ground connection, the electric capacity C33 mono- terminate the node between the resistance R55 and the resistance R53,
The other end is grounded;4 pins of the operational amplifier U3A divide two-way, are grounded all the way by electric capacity C29, another way passes through resistance
R51 connects -15V power supplys;8 pins of the operational amplifier U3A divide two-way, are grounded all the way by electric capacity C49, another way passes through electricity
Resistance R71 connects 15V power supplys;The resistance R78 mono- terminates 1 pin of the operational amplifier U9A, and the other end divides two-way, a-road-through
7 pins that resistance R4 meets the power sensor J1 of the DC modules are crossed, another way is grounded by electric capacity C55;The operation amplifier
Device U9A 1 pin and 2 pins is connected;3 pins of the operational amplifier U9A connect the master control by resistance R81 and R82
Main control chip U1 23 pins in circuit, the C58 mono- terminate the section between the operational amplifier U9A and the resistance R81
Point, other end ground connection, the electric capacity C59 mono- terminate the node between the resistance R81 and the resistance R82, other end ground connection;
4 pins of the operational amplifier U9A divide two-way, are grounded all the way by electric capacity C56, and another way connects -15V electricity by resistance R79
Source;8 pins of the operational amplifier U9A divide two-way, are grounded all the way by electric capacity C57, and another way meets 15V by resistance R80
Power supply.
3. radio-frequency power supply main controller according to claim 1, it is characterised in that the type of main control chip in the governor circuit
Number it is PIC16F877A.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721105879.1U CN207074962U (en) | 2017-08-31 | 2017-08-31 | A kind of radio-frequency power supply main controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721105879.1U CN207074962U (en) | 2017-08-31 | 2017-08-31 | A kind of radio-frequency power supply main controller |
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Publication Number | Publication Date |
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CN207074962U true CN207074962U (en) | 2018-03-06 |
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ID=61521207
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CN201721105879.1U Expired - Fee Related CN207074962U (en) | 2017-08-31 | 2017-08-31 | A kind of radio-frequency power supply main controller |
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CN (1) | CN207074962U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113824436A (en) * | 2021-09-09 | 2021-12-21 | 湖南瑞菱科技有限公司 | Adjustable pulse frequency controller |
CN116566219A (en) * | 2023-07-10 | 2023-08-08 | 深圳市嘉力电气技术有限公司 | Frequency control method of variable frequency power supply |
-
2017
- 2017-08-31 CN CN201721105879.1U patent/CN207074962U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113824436A (en) * | 2021-09-09 | 2021-12-21 | 湖南瑞菱科技有限公司 | Adjustable pulse frequency controller |
CN116566219A (en) * | 2023-07-10 | 2023-08-08 | 深圳市嘉力电气技术有限公司 | Frequency control method of variable frequency power supply |
CN116566219B (en) * | 2023-07-10 | 2023-10-31 | 深圳市嘉力电气技术有限公司 | Frequency control method of variable frequency power supply |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180306 Termination date: 20210831 |
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CF01 | Termination of patent right due to non-payment of annual fee |