CN207067198U - A kind of probe fetching tool - Google Patents
A kind of probe fetching tool Download PDFInfo
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- CN207067198U CN207067198U CN201720325554.8U CN201720325554U CN207067198U CN 207067198 U CN207067198 U CN 207067198U CN 201720325554 U CN201720325554 U CN 201720325554U CN 207067198 U CN207067198 U CN 207067198U
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- 239000000523 sample Substances 0.000 title claims abstract description 54
- 239000000463 material Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
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Abstract
The utility model provides a kind of probe fetching tool, including：Vacuum extractor；First panel, the first blind hole and the second blind hole are which is provided with, the bottom of the first blind hole connects with the bottom of the second blind hole, and the openend of the first blind hole is arranged at the first front, and the openend of the second blind hole is located at first side；Second panel with the second predetermined thickness, the 3rd blind hole and the 4th blind hole are which is provided with, the bottom of the 3rd blind hole connects with the bottom of the 4th blind hole, and the openend of the 3rd blind hole is arranged at the second front, and the openend of the 4th blind hole is located at second side；First vacuum hose, one end connect second blind hole other end connection vacuum extractor, which is provided with the first flow-limiting valve；Second vacuum hose, one end connect the 4th blind hole other end connection vacuum extractor, which is provided with the second flow-limiting valve.The beneficial effects of the utility model：Simplify the process of pin of picking and placeing, pick and place that pin is more accurate, improve the availability of probe, reduce cost.
Description
Technical field
It the utility model is related to technical field of semiconductors, more particularly to a kind of probe fetching tool.
Background technology
, it is necessary to carry out procedural test and terminal to the parameters of chip in the production of semiconductor chip and development process
Test, the test aligning equipment completed needed for test is mainly probe station, it is necessary to will during semiconductor chip production testing
Probe is accurately aimed at test zone and is sampled test to chip parameter randomly select discontinuous test point on a small quantity.
At present, the board of all probe types picks and places probe and is required for carrying out manually on the market, and operator is different, everyone
Gimmick, feel it is also different, and probe drop or needle point damage cause probe utilization rate it is very low.Most thin probe
Needle point there was only 8-10nm, it is necessary to take pin with tweezers and be reversely put into box for needle or pin change probe whole process be all manually operated, therefore to behaviour
The requirement of author is very high.
Utility model content
For problems of the prior art, the utility model provides one kind and quick and precisely the utility model can used
Following technical scheme：
A kind of probe fetching tool, including：
Vacuum extractor；
First panel, the first panel have one first predetermined thickness, the first panel be provided with the first blind hole and
Second blind hole, the bottom of first blind hole connect with the bottom of second blind hole, define the first panel and described the
Two panels face opposite after folding is the first front, and it is the first side to define the first panel and the face of the non-hinge of second panel
Face, the openend of first blind hole are arranged at first front, and the openend of second blind hole is arranged at described first
Side；
The second panel, the second panel have one second predetermined thickness, and it is blind that the second panel is provided with the 3rd
Hole and the 4th blind hole, the bottom of the 3rd blind hole connect with the bottom of the 4th blind hole, define the second panel and institute
Face opposite after first panel folds is stated as the second front, the second panel is defined and the face of the non-hinge of the first panel is
Second side, the openend of the 3rd blind hole are arranged at second front, and the openend of the 4th blind hole is arranged at institute
State second side；
First vacuum hose, one end of first vacuum hose connect the openend of second blind hole, and the other end connects
The vacuum extractor is connect, first vacuum hose is provided with the first flow-limiting valve；
Second vacuum hose, one end of second vacuum hose connect the openend of the 4th blind hole, and the other end connects
The vacuum extractor is connect, second vacuum hose is provided with the second flow-limiting valve.
Preferably, the probe fetching tool also includes
Triple valve, first vacuum hose and second vacuum hose by the triple valve connect described in vacuumize
Device, the triple valve are arranged at the vacuum extractor and first flow-limiting valve and the vacuum extractor and described
Between two flow-limiting valves.
Preferably, the junction of second blind hole and first vacuum hose is provided with the first tubulose pin, and described the
Four blind holes and the junction of second vacuum hose are provided with the second tubulose pin.
Preferably, the material of the first tubulose pin and the second tubulose pin is stainless steel.
Preferably, the length of the first panel is more than the length of the probe, and the length of the second panel is more than institute
State the length of probe.
Preferably, the first panel is identical with the second panel shape and is rectangle.
Preferably, first blind hole in the first panel and the 3rd blind hole in the second panel are symmetrical
Set, second blind hole in the first panel is symmetrical arranged with the 4th blind hole in the second panel.
Preferably, the first vacuum layer, first vacuum layer and first blind hole are provided with inside the first panel
Bottom and the connection of the bottom of second blind hole；The second vacuum layer, second vacuum layer are provided with inside the second panel
Connected with the bottom of the 3rd blind hole and the bottom of the 4th blind hole.
Preferably, be additionally provided with first handle in the first side of the first panel, the second panel it is described
Second handle is additionally provided with second side.
Preferably, the material of the first panel and the second panel is metal material.
Preferably, the diameter of first blind hole and the 3rd blind hole is respectively 0.5mm.
The beneficial effects of the utility model：Without using tweezers, simplify the process for picking and placeing pin, avoid because of different operators
Difference cause unnecessary waste, make to pick and place that pin is more accurate, and manual operation is easier, improve effective use of probe
Rate, reduce cost.
Brief description of the drawings
Fig. 1 is in a kind of preferred embodiment of the present utility model, and probe fetching tool uses one of schematic diagram；
Fig. 2 is in a kind of preferred embodiment of the present utility model, and probe fetching tool uses the two of schematic diagram；
Fig. 3 is in a kind of preferred embodiment of the present utility model, and probe fetching tool uses the three of schematic diagram；
Fig. 4 is in a kind of preferred embodiment of the present utility model, and probe fetching tool uses the four of schematic diagram；
Fig. 5 is in a kind of preferred embodiment of the present utility model, and probe fetching tool uses the five of schematic diagram.
Embodiment
It should be noted that in the case where not conflicting, following technical proposals, can be mutually combined between technical characteristic.
Specific embodiment of the present utility model is further described below in conjunction with the accompanying drawings：
As Figure 1-5, a kind of probe fetching tool, including：
Vacuum extractor 16；
First panel 1, above-mentioned first panel 1 have one first predetermined thickness, and above-mentioned first panel 1 is provided with the first blind hole
4 and second blind hole, the bottom of above-mentioned first blind hole 4 connected with the bottom of above-mentioned second blind hole, define above-mentioned first panel 1 and
Two panels 2 face opposite after folding is the first front 6, defines above-mentioned first panel 1 and the face of above-mentioned 2 non-hinge of second panel is
First side, the openend of above-mentioned first blind hole 4 are arranged at above-mentioned first front 6, and the openend of above-mentioned second blind hole is arranged at
Above-mentioned first side；
Above-mentioned second panel 2, above-mentioned second panel 2 have one second predetermined thickness, and above-mentioned second panel 2 is provided with the 3rd
The blind hole of blind hole 5 and the 4th, the bottom of above-mentioned 3rd blind hole 5 connect with the bottom of above-mentioned 4th blind hole, define above-mentioned second panel 2
Opposite face is the second front 7 after being folded with above-mentioned first panel 1, defines above-mentioned second panel 2 and above-mentioned 1 non-hinge of first panel
The face of chain is second side, and the openend of above-mentioned 3rd blind hole 5 is arranged at above-mentioned second front 7, the opening of above-mentioned 4th blind hole
End is arranged at above-mentioned second side；
First vacuum hose 8, one end of above-mentioned first vacuum hose 8 connect the openend of above-mentioned second blind hole, the other end
Above-mentioned vacuum extractor 16 is connected, above-mentioned first vacuum hose 8 is provided with the first flow-limiting valve 10；
Second vacuum hose 9, one end of above-mentioned second vacuum hose 9 connect the openend of above-mentioned 4th blind hole, the other end
Above-mentioned vacuum extractor 16 is connected, above-mentioned second vacuum hose 9 is provided with the second flow-limiting valve 11.
In one embodiment, first panel 1 and second panel 2 form a metal holder after being hinged, and the metal holder has
Folded state and two kinds of non-folded state, second panel 2 and second panel 2 are hinged by hinge means such as hinges and can be more
The positioning of individual angle, such as the first plane and the second plane can in angle 0 °, 30 °, 45 °, 90 °, 120 °, 180 ° angularly position；
Above-mentioned first panel 1 is identical with the above-mentioned shape of second panel 2 and is rectangular metal foil, first panel 1
With two parallel long sides short side parallel with two, one of long side is used to be hinged with second panel 2, and other three
Face corresponding to individual side is defined as above-mentioned first side, and a first handle is set in above-mentioned first side corresponding to two short sides
18,18 person easy to operation of first handle operation, it can also select to be not provided with first handle 18, above-mentioned second blind hole and above-mentioned first
The junction of vacuum hose 8 is provided with the first tubulose pin of stainless steel；
Likewise, second panel 2 has two parallel long sides short side parallel with two, one of long side be used for
First panel 1 is hinged, and face corresponding to other three sides is defined as above-mentioned second side, above-mentioned the corresponding to two short sides
One second handle 19 is set on two side faces, 19 person easy to operation of second handle operation, can also select to be not provided with second handle
19, the junction of above-mentioned 4th blind hole and above-mentioned second vacuum hose 9 is provided with the second tubulose pin of stainless steel；
Above-mentioned first vacuum hose and above-mentioned second vacuum hose connect above-mentioned vacuum extractor by above-mentioned triple valve 17
16, above-mentioned triple valve 17 is arranged at above-mentioned vacuum extractor 16 and above-mentioned first flow-limiting valve 10 and the He of above-mentioned vacuum extractor 16
Between above-mentioned second flow-limiting valve 11；
During concrete operations, as shown in Fig. 2 first panel 1 and second panel 2 are non-folded state, by the of first panel 1
One front 6 is close to probe 3, and after the openend of the first through hole on the first front 6 touches probe 3, vacuum extractor 16 is opened
Beginning work and the first flow-limiting valve 10 is opened, then probe 3 is adsorbed on the first front 6, and will simultaneously probe 3 be accompanied by closing metal holder
Metal holder is moved near board internal probe box 15；
As in Figure 3-5, the first plane is arranged at top, and the second plane is arranged at lower section, and vacuum extractor 16 continues work
Make, open the first flow-limiting valve 10, close the second flow-limiting valve 11, afterwards turning over metal holder makes the second plane be arranged at top, the
One plane is arranged at lower section, and vacuum extractor 16 works on, and opens the second flow-limiting valve 11, closes the first flow-limiting valve 10, then
The top that metal holder and mobile metal holder make probe 3 be arranged at board internal probe box 15 is opened, wherein, set on probe box 15
There are the transverse concave groove 13 for housing probe 3 and the longitudinal fluting 14 for the accommodating location division 12 for being arranged at the front end of probe 3,
Transverse concave groove 13 is connected with longitudinal fluting 14, and the location division 12 of probe 3 and the front of probe 3 is placed into transverse concave groove 13 and longitudinal direction
Groove 14, the second flow-limiting valve 11 is closed, close vacuum extractor 16, intact probe 3 picks and places.Whole process is without using tweezers, letter
Change the process of pin of picking and placeing, avoid unnecessary waste caused by the difference of different operators, it is more accurate to make to pick and place pin, artificially
Operation is easier, improves the availability of probe 3, reduces cost.
In preferred embodiments of the present invention, the above-mentioned fetching tool of probe 3 also includes
Triple valve 17, above-mentioned first vacuum hose and above-mentioned second vacuum hose connect above-mentioned take out by above-mentioned triple valve 17
Vacuum plant 16, above-mentioned triple valve 17 are arranged at above-mentioned vacuum extractor 16 and above-mentioned first flow-limiting valve 10 and above-mentioned vacuumized
Between device 16 and above-mentioned second flow-limiting valve 11.
In preferred embodiments of the present invention, the long edge lengths of above-mentioned first panel 1 are preferably greater than the length of probe 3, above-mentioned
The long edge lengths of second panel 2 are preferably greater than the length of probe 3.
In preferred embodiments of the present invention, in above-mentioned first blind hole 4 and above-mentioned second panel 2 in above-mentioned first panel 1
Above-mentioned 3rd blind hole 5 be symmetrical arranged, above-mentioned second blind hole in above-mentioned first panel 1 with it is above-mentioned in above-mentioned second panel 2
4th blind hole is symmetrical arranged.
In preferred embodiments of the present invention, the above-mentioned inside of first panel 1 is provided with the first vacuum layer 18, above-mentioned first vacuum layer
18 connect with the bottom of above-mentioned first blind hole 4 and the bottom of above-mentioned second blind hole；It is true that the above-mentioned inside of second panel 2 is provided with second
Dead level 19, above-mentioned second vacuum layer 19 connect with the bottom of above-mentioned 3rd blind hole 5 and the bottom of above-mentioned 4th blind hole.
In preferred embodiments of the present invention, probe 3 wide 1.5mm, long 3mm；First blind hole 4 and the diameter of the 3rd blind hole 5 are excellent
Elect 0.5mm as；First vacuum layer and the second vacuum layer length are both preferably 2mm；The long length of side of first panel 1 and second panel 2
Degree is preferably 6mm.
By explanation and accompanying drawing, the exemplary embodiments of the specific structure of embodiment are given, it is new based on this practicality
Type spirit, can also make other conversions.Although above-mentioned utility model proposes existing preferred embodiment, however, these contents
It is not intended as limiting to.
For a person skilled in the art, after reading described above, various changes and modifications undoubtedly will be evident.
Therefore, appended claims should regard the whole variations and modifications for covering true intention and scope of the present utility model as.
Any and all scope and content of equal value, are all considered as still belonging to intention of the present utility model and model in Claims scope
In enclosing.
Claims (10)
- A kind of 1. probe fetching tool, it is characterised in that including：Vacuum extractor；First panel, the first panel have one first predetermined thickness, and the first panel is provided with the first blind hole and second Blind hole, the bottom of first blind hole connect with the bottom of second blind hole, define the first panel and are rolled over second panel The opposite face of poststack is the first front, and the face for defining the first panel and the non-hinge of the second panel is first side, institute The openend for stating the first blind hole is arranged at first front, and the openend of second blind hole is arranged at the first side；The second panel, the second panel have one second predetermined thickness, the second panel be provided with the 3rd blind hole and 4th blind hole, the bottom of the 3rd blind hole connect with the bottom of the 4th blind hole, define the second panel and described the One panel face opposite after folding is the second front, and the face for defining the second panel and the non-hinge of the first panel is second Side, the openend of the 3rd blind hole are arranged at second front, and the openend of the 4th blind hole is arranged at described the Two side faces；First vacuum hose, one end of first vacuum hose connect the openend of second blind hole, other end connection institute Vacuum extractor is stated, first vacuum hose is provided with the first flow-limiting valve；Second vacuum hose, one end of second vacuum hose connect the openend of the 4th blind hole, other end connection institute Vacuum extractor is stated, second vacuum hose is provided with the second flow-limiting valve.
- 2. probe fetching tool according to claim 1, it is characterised in that the probe fetching tool also includesTriple valve, first vacuum hose connect the vacuum means with second vacuum hose by the triple valve Put, the triple valve is arranged at the vacuum extractor and first flow-limiting valve and the vacuum extractor and described second Between flow-limiting valve.
- 3. probe fetching tool according to claim 1, it is characterised in that second blind hole and first vacuum are soft The junction of pipe is provided with the first tubulose pin, and the 4th blind hole and the junction of second vacuum hose are provided with the second tubulose Pin.
- 4. probe fetching tool according to claim 3, it is characterised in that the first tubulose pin and second pipe The material of shape pin is stainless steel.
- 5. probe fetching tool according to claim 1, it is characterised in that the length of the first panel is more than the spy The length of pin, the length of the second panel are more than the length of the probe.
- 6. probe fetching tool according to claim 1, it is characterised in that the first panel and the second panel shape Shape is identical and is rectangle.
- 7. probe fetching tool according to claim 6, it is characterised in that first blind hole in the first panel It is symmetrical arranged with the 3rd blind hole in the second panel, second blind hole and described second in the first panel The 4th blind hole on panel is symmetrical arranged.
- 8. probe fetching tool according to claim 1, it is characterised in that be provided with the first vacuum inside the first panel Layer, first vacuum layer connect with the bottom of first blind hole and the bottom of second blind hole；The second panel Inside is provided with the second vacuum layer, and second vacuum layer connects with the bottom of the 3rd blind hole and the bottom of the 4th blind hole It is logical.
- 9. probe fetching tool according to claim 1, it is characterised in that in the first side of the first panel First handle is additionally provided with, second handle is additionally provided with the second side of the second panel.
- 10. probe fetching tool according to claim 1, it is characterised in that the first panel and the second panel Material be metal material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720325554.8U CN207067198U (en) | 2017-03-30 | 2017-03-30 | A kind of probe fetching tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720325554.8U CN207067198U (en) | 2017-03-30 | 2017-03-30 | A kind of probe fetching tool |
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| Publication Number | Publication Date |
|---|---|
| CN207067198U true CN207067198U (en) | 2018-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720325554.8U Active CN207067198U (en) | 2017-03-30 | 2017-03-30 | A kind of probe fetching tool |
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| CN (1) | CN207067198U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986310A (en) * | 2023-09-27 | 2023-11-03 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
-
2017
- 2017-03-30 CN CN201720325554.8U patent/CN207067198U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986310A (en) * | 2023-09-27 | 2023-11-03 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
| CN116986310B (en) * | 2023-09-27 | 2023-12-29 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |