CN207066689U - Mass spectrum leak detection equipment with gas recovering mechanism - Google Patents

Abstract

The utility model discloses a kind of mass spectrum leak detection equipment with gas recovering mechanism, the mass spectrum leak detection equipment includes vacuum cavity, gas recovering mechanism, trace gas source and control device.The gas recovering mechanism includes gas recovery on-off valve, reclaim surge tank, recovery vacuum pump, low-pressure tank and air compressor machine, the input of the gas recovery on-off valve is used to turn on connection with the casing to be measured, the output end of the gas recovery on-off valve turns on connection with the recovery surge tank and the recovery vacuum pump, the recovery surge tank turns on connection with the input of the recovery vacuum pump, the low-pressure tank turns on connection with the output end of the recovery vacuum pump and the input of the air compressor machine, the output end of the air compressor machine turns on connection with the trace gas source.The utility model recovery utilization rate is high, and recovery speed is fast and efficiency high.

Description

Mass spectrum leak detection equipment with gas recovering mechanism

Technical field

It the utility model is related to box body tightness detection technique field, more particularly to a kind of matter with gas recovering mechanism Compose leak test plant.

Background technology

Mass spectrum leak detection technology is used widely in scientific research and industrial department, and its major advantage is can be in various detection works The quantitative detection of slip is realized under the conditions of condition, and its hunt leak high resolution, measurement range are wide, especially suitable for minute leakage rate Accurate measure.In order to save testing cost, it is necessary to which search gas recycling to being filled with workpiece, existing after leak detection During to search gas recycling, there is what recovery utilization rate and recovery speed can not get both to ask for equipment and technique Topic, therefore, how to provide a kind of quick, efficient search gas recycling equipment is that the technology for being badly in need of capturing at present is difficult Topic.

Utility model content

The utility model is based on above one or more problem, there is provided a kind of mass spectrum inspection with gas recovering mechanism Equipment is leaked, to solve the problems, such as that recovery utilization rate in the prior art and recovery speed can not get both.

The utility model provides a kind of mass spectrum leak detection equipment with gas recovering mechanism, for detecting the gas of casing to be measured Close property, it includes：Vacuum cavity, gas recovering mechanism, trace gas source and control device；Use is provided with the vacuum cavity In the accommodating chamber for accommodating the casing to be measured；The gas recovering mechanism includes gas recovery on-off valve, recovery vacuum pump, low pressure Tank and air compressor machine, the input of the gas recovery on-off valve are used to turn on connection, the gas recovery with the casing to be measured The output end of on-off valve turns on connection, output end and institute of the low-pressure tank with the recovery vacuum pump with the recovery vacuum pump The input conducting connection of air compressor machine is stated, the output end of the air compressor machine turns on connection with the trace gas source；The tracer Gas source is used to turn on connection with the casing to be measured, to provide search gas to the casing to be measured；The control device with The gas recovery on-off valve, recovery vacuum pump and pneumatics mechatronics, for controlling the gas recovery on-off valve, recovery true Empty pump and air compressor machine work.

In summary, the mass spectrum leak detection equipment of the present utility model with gas recovering mechanism, due to the mass spectrum leak detection The gas recovering mechanism of equipment includes gas recovery on-off valve, recovery surge tank, recovery vacuum pump, low-pressure tank and pneumatics Machine, the input of the gas recovery on-off valve are used to turn on connection with the casing to be measured, the gas recovery on-off valve Output end turns on connection, the recovery surge tank and the recovery vacuum pump with the recovery surge tank and the recovery vacuum pump Input conducting connection, the low-pressure tank turns on company with the output end of the recovery vacuum pump and the input of the air compressor machine Connect, the output end of the air compressor machine turns on connection with the trace gas source.During work, recovery vacuum pump is first by surge tank Search gas is evacuated in low-pressure tank, and then recovery vacuum pump again extracts the search gas in the casing to be measured out, makes described show Track gas is delivered in the surge tank and the low-pressure tank, when the air pressure in the low-pressure tank reaches preset value, air compressor machine Search gas in the low-pressure tank is evacuated in trace gas source.Therefore, its recovery utilization rate is high, and recovery speed is fast and efficiency It is high.

Brief description of the drawings

Fig. 1 is the structural representation of the mass spectrum leak detection equipment of the present utility model with connector；

Fig. 2 is structural representation when support frame, vacuum cavity and elevating mechanism of the present utility model cooperate；

Fig. 3 is the structural representation of the utility model upper cover body；

Fig. 4 is the structural representation of the utility model lower cover；

Fig. 5 is the enlarged drawing of a-quadrant shown in Fig. 2；

Fig. 6 is the enlarged drawing of B area shown in Fig. 2；

Fig. 7 is the structural representation of connector of the present utility model；

Fig. 8 is the profile of connector of the present utility model；

Fig. 9 is the explosive view of connector of the present utility model；

Figure 10 is attachment structure schematic diagram when part-structure of the present utility model coordinates with casing to be measured；

Figure 11 is attachment structure schematic diagram when part-structure of the present utility model coordinates with casing to be measured；

Figure 12 is the flow chart of the utility model second embodiment；

Figure 13 is the flow chart of the utility model 3rd embodiment；

Figure 14 is the flow chart of the utility model fourth embodiment.

Embodiment

The utility model is described in detail with reference to the accompanying drawings and examples.If it should be noted that do not conflict, Each feature in the utility model embodiment and embodiment can be combined with each other, the scope of protection of the utility model it It is interior.

Embodiment one

Fig. 1, Figure 10 and Figure 11 are referred to, the utility model provides a kind of mass spectrum leak detection with gas recovering mechanism and set Standby, for detecting casing 20a to be measured air-tightness, the casing 20a to be measured can be that gearbox, water tank or fuel tank etc. have gas The casing of close property requirement.The mass spectrum leak detection equipment includes support frame 10, grating sensor 11, vacuum cavity 20, elevating mechanism 30th, be classified extraction sector 40, trace gas source 50, classification inflation mechanism 60, mass spectrum leak detection device 70, gas recovering mechanism 80 and Control device 90.

Fig. 1 and Fig. 6 is referred to, support frame as described above 10 is provided with the first guide rail along the Longitudinal extending of support frame as described above 10 12 and second guide rail 13, the cross section of first guide rail 12 is in work shape.The cross section of second guide rail 13 is V-shaped, described First guide rail 12 and second guide rail 13 are arranged at intervals.Support frame as described above 10 is formed with for placing the vacuum cavity 20 Receiving space, support frame as described above 10 positioned at the outside of the receiving space formed with place mouth 14.

The grating sensor 11 is fixed at the placement mouth 14, and it includes transmitter 11a and receiver 11b, described Transmitter 11a and receiver 11b is separately positioned on the both sides that position is relative at the placement mouth 14, the transmitter 11a and institute Receiver 11b is stated to electrically connect with the control device 90.The transmitter 11a sends infrared light and is irradiated to reception during work On device 11b, shape light curtain in a row.When light curtain is blocked, after the receiver 11b detects certain road intensity variation, you can Judge the danger zone for thering is foreign matter to enter light curtain setting, then output control signals to the control device 90, the control dress The 90 controls elevating mechanism 30 is put to be stopped.By setting the grating sensor 11, thus work as user by casing to be measured 20a be put into the vacuum cavity 20 or from the vacuum cavity 20 take out the casing 20a to be measured when, the peace of user can be protected Entirely.

Fig. 1 to Fig. 4 is referred to, the vacuum cavity 20 includes upper cover body 21 and lower cover 22, and the lid of upper cover body 21 is set On the lower cover 22, formed with accommodating chamber 23 between the upper cover body 21 and the lower cover 22.The lower cover 22 wraps Support base 22a, elastic supporting member for supporting optical member 22b and supporting plate component 22c are included, the support base 22a is placed on support frame as described above 10, institute State elastic supporting member for supporting optical member 22b to be fixed on the support base 22a, one end of the support base 22a is provided with guide groove 22d, described First guide rail 12 is plugged in the guide groove 22d.The lower cover 22 can be along first guide rail under external force 12 move up and down, thus the upper cover body 21 can preferably be covered with lower cover 22 together with or separate.The gripper shoe groups Part 22c is placed on the elastic supporting member for supporting optical member 22b.Wherein, the supporting plate component 22c includes plate body 22e and is fixed on described Some elastic spacer 22f on the plate body 22e surface towards the lid, when the casing 20a to be measured is placed in into the receiving When in chamber 23, the casing 20a to be measured is placed on the elastic spacer 22f, thus can increase stability.The elastic spacer 22f can be rubber strip, be not specifically limited herein.By setting the elastic supporting member for supporting optical member 22b, therefore, when the lower cover 22 close to the upper cover body 21 move upwards when, can avoid because of the contact surface between the lower cover 22 and the upper cover body 21 Lid composition surface does not reach seal request up and down caused by not parallel；When the lower cover 22 depart from the upper cover body 21 and to During lower motion, the casing 20a to be measured can be avoided by enormous impact.The elastic supporting member for supporting optical member 22b can be spring, shell fragment or Person's air bag etc., is not specifically limited herein.

The upper cover body 21 is provided with elastic top plate 21a, the elasticity at the tip position positioned at the accommodating chamber 23 Top plate 21a is used to support in the casing 20a to be measured, preferably to fix the casing 20a to be measured.In the present embodiment, The upper cover body 21 is fixed on support frame as described above 10, and the lower cover 22 is movably set on support frame as described above 10.It can manage Solution, the structure of the vacuum cavity 20 are not specifically limited herein, as long as being provided with the vacuum cavity 20 for holding Receive the accommodating chamber 23 of the casing 20a to be measured.

It is preferred that refer to Fig. 7 to Fig. 9, the lower cover 22 is connected with connector 200, the connector 200 with it is described The conducting connection of trace gas source 50, is treated for the search gas in the trace gas source 50 to be imported in the accommodating chamber 23 In measuring tank body 20a.

The connector 200 includes outer tube 220, limit casing 230, elastic seal cartridge 240, limited cover 231 and piston 260, one end of the limit casing 230 is plugged in the outer tube 220, and the other end of the limit casing 230 extends to Outside the outer tube 220, the elastic seal cartridge 240 is plugged in the limit casing 230, and the lid of limited cover 231 is located at The limit casing 230 is backwards to one end of the outer tube 220, to hinder the elastic seal cartridge 240 towards backwards to the overcoat The direction motion of pipe 220.

The piston 260 includes hollow stick harness 261 and the stop part 262 at the outer peripheral face of stick harness 261, described One end activity of stick harness 261 is plugged in the outer tube 220, and the other end activity of the stick harness 261 is plugged in described spacing In sleeve pipe 230.Gas port 222, one end and the overcoat of the gas port 222 are provided with the tube wall of the outer tube 220 The outer surface of pipe 220 is connected, and the other end of the gas port 222 is connected and is located at the internal face of the outer tube 220 The stop part 262 is backwards to the side of the elastic seal cartridge 240.The gas port 222 is described for compressed gas to be passed through When gas port 222 is injected in the outer tube 220, the compressed gas promotes the piston 260 towards the elastic seal cartridge 240 Motion, the elastic seal cartridge 240 are extruded and deformed by the piston 260.

It is preferred that the connector 200 also includes cushion pad 270, packing ring 250, joint 280, fixed plate 210, fixed seat 290th, clips 221, the first fixed block 293, the second fixed block 294, lead 295, retaining spring 296 and positioning bead 297.Institute State and the first accommodating chamber 220a being coaxially disposed and the second accommodating chamber 220b, first accommodating chamber are provided with outer tube 220 220a cross-sectional area is more than the cross-sectional area of the second accommodating chamber 220b, and one end of the stick harness 261 is plugged in the limit In the sleeve pipe 230 of position, the other end of the stick harness 261 is plugged in the second accommodating chamber 220b, and the stop part 262 is located at institute State in the first accommodating chamber 220a, one end of the limit casing 230 is plugged in one end of the first accommodating chamber 220a.Due to The cross-sectional area of the first accommodating chamber 220a is more than the cross-sectional area of the second accommodating chamber 220b, thus can increase the pressure The contact area of contracting gas and the stop part 262, is easy to promote the piston 260 to move.

The cushion pad 270 is set on the stick harness 261 and positioned at the end face of the limit casing 230 and the stop Between portion 262.In a ring, the cushion pad 270 is towards the stop part 262 for the cushion pad 270 and the stop part 262 End face fitted with the stop part 262.When the elastic seal cartridge 240 is by the extruding of the piston 260 and in compression During state, the cushion pad 270 abuts towards the end face of the limit casing 230 with the elasticity of limit casing 230, when described When elastic seal cartridge 240 is stretched out completely, the cushion pad 270 is towards the end face of the limit casing 230 and the limit casing 230 interval pre-determined distances, thus preferably avoid being hit in the motion process of piston 260, extend service life.Its In, the cushion pad 270 and the elastic seal cartridge 240 can be rubber sleeve or silica gel sheath etc., and its material is not done specifically herein Limit.

The packing ring 250 in a ring, the packing ring 250 between the elastic seal cartridge 240 and the piston 260, One end end face of the packing ring 250 abuts against with the elastic seal cartridge 240, the other end end face of the packing ring 250 with it is described Piston 260 abuts against.By setting the packing ring 250, thus can avoid the elastic seal cartridge 240 arbitrarily slide or deformation and Cause to connect untight problem.

First holding tank 261a of annular, the other end of the stick harness 261 are set at one end outer peripheral face of the stick harness 261 It is provided with the second holding tank 261c, the first holding tank 261a of annular and is inserted with and the limit casing at outer peripheral face It is inserted with the first sealing ring 261b, the second holding tank 261c that 230 elasticity abut with the second accommodating chamber 220b's The second sealing ring 261d that cavity wall elasticity abuts, the outer peripheral face of the stop part 262 are provided with the 3rd holding tank 262a, and described the Be inserted with three holding tank 262a with the cavity wall of the first accommodating chamber 220a the 3rd sealing ring 262b that abuts of elasticity, thus compared with Gas is avoided to leak well.

The joint 280 be fixed on the outer tube 220 backwards to the limited cover 231 one end, for the tracer The pipeline (not shown) connection of gas source connection, the joint 280 are provided with the first perforation 281 and the second perforation 282, institute Longitudinal extending of first perforation 281 along the joint 280 is stated to set and run through the relative both ends of the surface in the position of joint 280, institute State the first perforation 281 to connect with the outer tube 220 and the conducting of piston 260, for importing search gas, second perforation 282 are arranged in the side wall of the joint 280, and in order to be connected with pipeline, connection is more firm.

The fixed plate 210 is fixed on the vacuum cavity, and the fixed seat 290 is fixed in the fixed plate 210, The fixed seat 290 is provided with fixing groove 291, and the outer tube 220 is plugged in the fixing groove 291 and extended to described solid Determine outside groove 291, the both ends of the clips 221 are each attached in the fixed seat 290 and are located at the fixing groove 291 respectively Relative both sides are put, the clips 221 are coated on the side that the outer tube 220 is exposed to outside the fixing groove 291.

First fixed block 293 and second fixed block 294 are each attached in the fixed plate 210, and position respectively On the outside of the relative both ends in the position of fixed plate 210, the fixed seat 290 is provided with pilot hole 292, the pilot hole 292 The both ends of the surface relative through the position of fixed seat 290, the lead 295 through the pilot hole 292 and with the fixation Seat 290 is flexibly connected, so that the fixed seat 290 can be along the guiding movement of the lead 295, thus can be adjusted as needed The position of the whole fixed seat 290, in order to which the pipeline that casing to be measured connects with the trace gas source carries out fast assembling-disassembling.Institute The one end for stating lead 295 is connected with first fixed block 293, and the other end of the lead 295 is fixed with described second Block 294 is connected.

The first locating slot 210a and the second locating slot 210b, the part of positioning bead 297 are provided with the fixed plate 210 Insert in second locating slots of the first locating slot 210a or described 210b, the fixed seat 290 is provided with holding tank 298, institute State retaining spring 296 to be plugged in the holding tank 298, one end of the retaining spring 296 is supported with the elasticity of positioning bead 297 Connect, the other end of the retaining spring 296 abuts with the elasticity of fixed seat 290.By the retaining spring 296 and described fixed Position pearl 297 coordinates with the first locating slot 210a, the second locating slot 210b, to be positioned to the fixed seat 290, works as institute When stating positioning bead 297 and being located at the first locating slot 210a, the fixed seat 290 is located at first of the fixed plate 210 Place is put, when the positioning bead 297 is located at the second locating slot 210b, the fixed seat 290 is located at the fixed plate 210 The second place, thus it is relatively stable reliable to fix the fixed seat 290.

Before being inflated to the casing 20a to be measured, the compressed air of compressed air source (not shown) is led by described Stomata 222 is imported in the outer tube 220, so as to promote the piston 260 to be moved towards the elastic seal cartridge 240, the bullet Property sealing shroud 240 by the limited cover 231 and the packing ring 250 crimp, so as to being closely clamped in and treat measuring tank In the connecting tube of body 20a conducting connections, thus gas leakage is not only preferably avoided, and more convenient user connects；Treated when to described When measuring tank body 20a is inflated, the search gas of the trace gas source 50 is by the connector 280, the outer tube 220, institute State piston 260 and packing ring 250 enters in the connecting tube, finally flow into the casing 20a to be measured.By setting the buffering Pad 270, thus the piston 260 can be avoided to be hit with the limit casing 230.By setting the packing ring 250, thus can keep away Exempt from the elastic seal cartridge 240 arbitrarily to slide or deform and cause to connect untight problem.

Fig. 2 and Fig. 5 is referred to, the elevating mechanism 30 includes bearing 31, connecting shaft 32, sprocket wheel 33, chain 34, balancing weight 35 and cylinder 36, the bearing 31 be fixed on support frame as described above 10, the connecting shaft 32 is connected with the bearing 31, the chain Wheel 33 is set in the connecting shaft 32, and the chain 34 engages with the sprocket wheel 33 to be connected, one end of the chain 34 and institute State lower cover 22 to be connected, the other end of the chain 34 is connected with the balancing weight 35.First is fixed with the balancing weight 35 Pulley 35a and second pulley 35b, the first pulley 35a and second pulley 35b are located at the two of second guide rail 13 respectively Side.One end of the cylinder 36 is fixed on support frame as described above 10, and the other end of the cylinder 36 is connected with the lower cover 22. The cylinder 36 drives the lower cover 22 to be moved upwardly or downwardly during work, first pulley 35a and second pulley the 35b edge The guiding movement of second guide rail 13, so that the upper cover body 21 is combined together or separated with the lower cover 22. Because one end of the chain 34 is connected with the lower cover 22, the other end of the chain 34 is connected with the balancing weight 35, , can be relatively labor-saving thus when the cylinder 36 drives the lower cover 22 to move upwards, and the lower cover 22 moves to most During high point, the lower cover 22 can be fitted close with the upper cover body 21.Because the cross section of second guide rail 13 is in V Shape, thus be not only convenient for the first pulley 35a and second pulley 35b and coordinate with second guide rail 13, it is easy to manufacture, and It is not easy to derail, more reliably.

Referring to Fig. 10, the classification extraction sector 40 includes chamber vacuum pump 41 and fore pump 42, the chamber vacuum The conducting of pump 41 and the vacuum cavity 20 connects, for taking out the gas in the accommodating chamber 23, so as to the casing to be measured In 20a before filling search gas, the air in the casing 20a to be measured and the accommodating chamber 23 is extracted out, avoided in air Gas impacts to detection.The fore pump 42 connects with the chamber vacuum pump 41 conducting, in the chamber vacuum Pump 41 takes out the gas in the accommodating chamber 23 before working, to drive the chamber vacuum pump 41 to be operated.Due to the prime The pumping speed of pump 42 is fast, but final vacuum is low, and the final vacuum of the chamber vacuum pump 41 is higher, thus passes through the chamber Body vavuum pump 41 coordinates with fore pump 42, so that the utility model pumping speed is fast, final vacuum is higher.Wherein, in this implementation In example, the chamber vacuum pump 41 is lobe pump, and the fore pump 42 is sliding vane rotary pump, and the sliding vane rotary pump is two, two institutes State sliding vane rotary pump to be set up in parallel, thus can be quickly evacuated.

It is preferred that the mass spectrum leak detection equipment also includes casing aspirator vacuum pump 43, casing cavity switching valve 44, the first chamber Pressure sensor 45, the second chamber pressure sensor 46, correction switch valve 47 and scaling bottle 48, the casing aspirator vacuum pump 43 are used to turn on connection with the casing 20a to be measured, and the gas in the casing 20a to be measured is extracted out, thus can avoid sky Gas in gas impacts to detection.

The casing cavity switching valve 44 connects with the casing aspirator vacuum pump 43 and the conducting of the vacuum cavity 20, institute State casing cavity switching valve 44 to be additionally operable to turn on connection with the casing 20a to be measured, so as to take out the when first stage institute of air Stating vacuum cavity 20 can connect with the casing 20a to be measured, and the casing pumping is true when taking out the second stage of air Empty pump 43 individually can be evacuated to the casing 20a to be measured.Specifically, in the present embodiment, the first rank of air is being taken out Duan Shi, the casing cavity switching valve 44 are opened, and the vacuum cavity 20 connects with the casing 20a to be measured, thus can be quick Take out the air in the vacuum cavity 20 and the casing 20a to be measured in ground.When being evacuated to air pressure inside and reaching preset value, into Two-stage, that is, the chamber vacuum pump 41, fore pump 42 and the casing cavity switching valve 44 are closed, is evacuated by the casing Vavuum pump 43 is evacuated to the casing 20a to be measured, until the air pressure inside of the casing 20a to be measured reaches preset value, from And the air in air can be preferably avoided to impact detection.

The first chamber pressure sensor 45 and the second chamber pressure sensor 46 are electrically connected with the control device 90 Connect, the first chamber pressure sensor 45 and the second chamber pressure sensor 46 are used to detect the accommodating chamber 23 Air pressure, wherein, the first chamber pressure sensor 45 is different from the measurement range of the second chamber pressure sensor 46.By In simultaneously right with the second chamber pressure sensor 46 by different the first chamber pressure sensor 45 of measurement range Air pressure in the accommodating chamber 23 is detected, therefore can improve accuracy of detection, preferably avoids judging by accident.

The correction switch valve 47 connects with the scaling bottle 48 and the conducting of the vacuum cavity 20, to control the demarcation Whether the search gas in bottle 48 is discharged into the accommodating chamber 23, so that the mass spectrum leak detection device 70 can be according to the demarcation 48 pairs of slips of bottle are corrected.The control device 90 and correction switch valve 47, chamber vacuum pump 41 and the prime Pump 42 electrically connects, for controlling correction switch valve 47, the chamber vacuum pump 41 and the fore pump 42 to work.It can manage Solution, in order to improve detection efficiency, after the casing 20a to be measured of every detection predetermined number, the control device 90 controls institute Correction switch valve 47 is stated to open, so that the mass spectrum leak detection device 70 is corrected according to the scaling bottle 48 to slip, because And trace gas leak can be avoided to be judged by accident when causing detection.

The trace gas source 50 is used to turn on connection with the casing 20a to be measured, to be provided to the casing 20a to be measured Search gas.Specifically, in the present embodiment, the trace gas source 50 includes high pressure search gas tank 51 and search gas is fast Valve 52 is filled, the high pressure search gas tank 51 is used to fill search gas, and the search gas fast charge valve 52 is used to control the height Press the open and close of search gas tank 51.

Please continue to refer to Figure 10, the classification inflation mechanism 60 includes the first inflation branch road 61 and second and inflates branch road 62, The first inflation branch road 61 includes the first search gas supply valve 61a, the input of the first search gas supply valve 61a Turn on and connect with the trace gas source 50, the output end of the first search gas supply valve 61a is used to treat measuring tank with described Body 20a conducting connections, the first search gas supply valve 61a are used for the first output quantity for controlling the search gas.

The second inflation branch road 62 includes the second search gas supply valve 62a, the second search gas supply valve 62a The conducting of input and the trace gas source 50 connect, the output end of the second search gas supply valve 62a is used for and institute Casing 20a conductings connection to be measured is stated, the second search gas supply valve 62a is used to control the second of the search gas to export Amount, second output quantity are more than first output quantity.

The control device 90 and the first search gas supply valve 61a and the second search gas supply valve 62a Electrical connection, to control the first search gas supply valve 61a and the second search gas supply valve 62a to open and close.

It is preferred that the first inflation branch road 61 also includes the first surge tank 61b and choke valve 61c, first buffering Tank 61b turns on connection with the trace gas source 50 and the first search gas supply valve 61a, for keeping in the tracer gas Body source 50 conveys the search gas that comes to buffer search gas pressure oscillation.The input of the choke valve 61c and first delays Tank 61b conducting connections are rushed, the output end of the choke valve 61c turns on connection with the first search gas supply valve 61a.At this In embodiment, the first search gas supply valve 61a is needle-valve, is cooperated by the choke valve 61c and the needle-valve, So as to avoid the air pressure change of the first surge tank 61b output from causing search gas that needle-valve the exports ripple within the unit interval The problem of dynamic larger.

It is preferred that the mass spectrum leak detection equipment also includes fast charge pressure switch 52a and absolute pressure sensor 52b.The tracer The conducting of the input of gas fast charge valve 52 and the high pressure search gas tank 51 connects, the search gas fast charge valve 52 it is defeated Go out end and turn on connection, institute with the input of the first surge tank 61b and the input of the second search gas supply valve 62a The output end that fast charge pressure switch 52a is stated with the first surge tank 61b turns on connection, for monitoring first surge tank Air pressure in 61b simultaneously sends the pressure information in the first surge tank 61b to the control device 90.

The control device 90 electrically connects with the fast charge pressure switch 52a and the search gas fast charge valve 52, is used for The search gas fast charge valve 52 is controlled to open when the air pressure in the first surge tank 61b is less than preset value, so that first Surge tank 61b air pressure is kept within a preset range.

The absolute pressure sensor 52b electrically connects with the control device 90, the absolute pressure sensor 52b and the tracer gas The output end conducting connection of body fast charge valve 52, for monitoring the gas of the search gas from the search gas fast charge valve 52 discharge Pressure.

The mass spectrum leak detection device 70 connects with the vacuum cavity 20 conducting, for detecting the institute in the accommodating chamber 23 Search gas content is stated, so as to judge whether the casing 20a to be measured is qualified.Because the mass spectrum leak detection device 70 is existing skill Art, do not repeating herein.

When starting to fill the search gas to the casing 20a to be measured, the control device 90 controls described first to show Track gas supply valve 61a is opened, and closes the second search gas supply valve 62a, to be supplied by first search gas Valve 61a fills a small amount of search gas (being no more than 3KPa) into the casing 20a to be measured, if the casing 20a sealings to be measured compared with Difference, then the mass spectrum leak detection device 70 will soon detect.If the casing 20a leakages to be measured can not be detected immediately, Then control device 90 controls the first search gas supply valve 61a to close, and opens the second search gas supply valve 62a, Substantial amounts of search gas is conveyed by the second search gas supply valve 62a to the casing 20a to be measured (to be no more than 10KPa), then the mass spectrum leak detection device 70 detects the air-tightness of the casing 20a to be measured again, so as to can not only improve detection Efficiency, and preferably avoid judging by accident.

Figure 11 is referred to, the gas recovering mechanism 80 includes gas recovery on-off valve 81, recovery surge tank 82, recovery very Empty pump 83, low-pressure tank 84 and air compressor machine 85, the input of the gas recovery on-off valve 81 are used to lead with the casing 20a to be measured Lead to and connect, the output end of the gas recovery on-off valve 81 connects with the recovery surge tank 82 and the conducting of the recovery vacuum pump 83 Connect, the recovery surge tank 82 turns on connection, the low-pressure tank 84 and the recovery with the input of the recovery vacuum pump 83 The conducting connection of the input of the output end of vavuum pump 83 and the air compressor machine 85, output end and the tracer of the air compressor machine 85 The conducting connection of gas source 50.

The control device 90 electrically connects with the gas recovery on-off valve 81, recovery vacuum pump 83 and air compressor machine 85, uses Worked in controlling gas recovery on-off valve 81, recovery vacuum pump 83 and the air compressor machine 85.

It is preferred that the gas recovering mechanism 80 also includes tonifying Qi on-off valve 86, angled seat on-off valve 86a, low pressure pressure tank Sensor 87, filtering pressure reducing valve 88a, trace gas concentration analytical equipment 88 and gas recovery pressure sensor 89, the tonifying Qi The input of on-off valve 86, which is used to turn on trace gas source 50, to be connected, output end and the low pressure of the tonifying Qi on-off valve 86 The conducting connection of tank 84；One end of the angled seat on-off valve 86a connects with recovery surge tank 82 conducting, the angled seat on-off valve The 86a other end connects with the gas recovery on-off valve 81 and the conducting of the recovery vacuum pump 83, and the low pressure pressure tank passes Sensor 87 electrically connects with the control device 90, and the low-pressure tank pressure sensor 87 is used for the gas for detecting the low-pressure tank 84 Pressure, to open tonifying Qi on-off valve 86 when the air pressure of the low-pressure tank 84 is less than preset value, and when the low-pressure tank 84 Pressure open the air compressor machine 85 when being higher than preset value.

The input of the filtering pressure reducing valve 88a turns on connection, the filtering decompression with the output end of the air compressor machine 85 Valve 88a output end connects with the trace gas concentration analytical equipment 88 conducting.The gas recovery pressure sensor 89 with The output end conducting connection of the air compressor machine 85, the gas recovery pressure sensor 89 electrically connect with the control device 90. It is preferred that the volume of the recovery surge tank 82 is at least 10 times of the casing 20a to be measured, so as to make the test tank Interior search gas is easier to flow into the recovery surge tank 82.

When carrying out gas recovery, the control device 90 first opens the recovery vacuum pump 83 and control angled seat on-off valve 86a is opened, and the search gas in the recovery surge tank 82 is evacuated in low-pressure tank 84, then control device 90 controls described Gas recovery on-off valve 81 is opened, by the search gas in the casing 20a to be measured be delivered to it is described recovery surge tank 82 and In the low-pressure tank 84, when the air pressure in the low-pressure tank 84 reaches preset value, control device 90 controls the air compressor machine 85 Gas in the low-pressure tank 84 is pumped into high pressure search gas tank 51.

Embodiment two

Figure 12 is referred to, the invention also discloses a kind of mass spectrum leak detection method, for detecting casing 20a to be measured gas Close property, comprises the following steps：

S11, casing 20a to be measured is placed in the accommodating chamber 23 of vacuum cavity 20；

Before the casing 20a to be measured is placed in the accommodating chamber 23, control device 90 is controlled under the drive of cylinder 36 Lid 22 moves downward, so that lower cover 22 moves downward away from upper cover body 21, the lower cover 22 and makes elevating mechanism 30 Balancing weight 35 moves upwards.When the lower cover 22 moves to predeterminated position, cylinder 36 controls the upper cover body 21 to stop at On the predeterminated position, now, the accommodating chamber 23 is opened completely, then casing 20a to be measured is placed in the receiving of vacuum cavity 20 In chamber 23, then the lower cover 22 is controlled to move upwards by the cylinder 36 again, by upper cover body 21 and the lower cover 22 are combined, and now, the accommodating chamber 23 is a closed cavity.It is appreciated that when, as long as can be by casing to be measured 20a is placed in the accommodating chamber 23 of vacuum cavity 20, and its implementation is not specifically limited herein.

S12, fore pump 42 are evacuated to the accommodating chamber 23 of vacuum cavity 20；

The vacuum pumping rate of the fore pump 42 is fast, and also can quickly start at ambient pressure, thus can preferably avoid big Influence of the gas to testing result.The fore pump 42 can be sliding vane rotary pump.

S13, the fore pump 42 drive chamber vacuum pump 41 to be evacuated the accommodating chamber 23 simultaneously；

Because 41 pumping speed of the cavity cavity vavuum pump are fast, but ultimate pressure is low, and the pumping speed of the fore pump 42 is fast, but Final vacuum is low, and the final vacuum of the chamber vacuum pump 41 is higher, thus by the chamber vacuum pump 41 with before Level pump 42 coordinates, so that the utility model pumping speed is fast, final vacuum is higher.In addition, institute is driven by the fore pump 42 State cavity cavity vavuum pump 41 to work, cause service life short when the cavity cavity vavuum pump 41 can be avoided to open at ambient pressure The problem of.Wherein, in the present embodiment, the chamber vacuum pump 41 is lobe pump, and the fore pump 42 is sliding vane rotary pump, described After sliding vane rotary pump opens the 3-5 seconds, the lobe pump is just opened, and when vacuum reaches 10-20Pa, is just closed cavity and is vacuumized break-make Valve 41a, stop being evacuated cavity.

S14, trace gas source 50 fill search gas to the casing 20a to be measured；

The search gas supply valve for turning on connection in trace gas source 50 with the casing 20a to be measured is opened, so that described The high pressure search gas tank 51 that search gas is compressed with trace gas source 50 fills search gas to the casing 20a to be measured, institute It can be argon gas, ammonia, helium or deuterium etc. to state search gas, be not specifically limited herein.

S15, mass spectrum leak detection device 70 detect the search gas content in accommodating chamber 23, so as to judge described to treat measuring tank Whether body 20a is qualified.

It is preferred that also include step S131 after the step S13：Open and the casing 20a to be measured and the vacuum The casing cavity switching valve 44 of the conducting connection of cavity 20, so that the casing 20a to be measured and the vacuum cavity 20 turn on.Due to The vacuum cavity 20 and the casing 20a to be measured are entered simultaneously by the fore pump 42 and the cavity cavity vavuum pump 41 Row pumping, therefore, preferably prevent the casing 20a deformations to be measured.

It is preferred that also include S132 after the step S131：The casing cavity switching valve 44 is closed, then passes through case Body aspirator vacuum pump 43 is evacuated to the casing 20a to be measured.In the step, treated by casing aspirator vacuum pump 43 to described Measuring tank body 20a is individually evacuated, thus can better assure that the gas in the casing 20a to be measured is evacuated to required state.

It is preferred that also include step S133 after the step S132：Search gas in scaling bottle 48 is emitted into institute State in accommodating chamber 23, the mass spectrum leak detection device 70 is emitted into the search gas in the accommodating chamber 23 according to the scaling bottle 48 Slip is corrected.By the step, thus can avoid after multiple casing 20a to be measured are detected, the search gas of leakage Detection is caused to judge by accident.

It is preferred that the step S15 is specifically included：The mass spectrum leak detection device 70 is detected outside the casing 20a to be measured Search gas content, if the search gas content outside the casing 20a to be measured is more than preset value, the mass spectrum leak detection dress The index line ascensional range for putting 70 is more than predetermined amplitude.By the step, human eye can directly be sentenced by observing the index line Whether the casing 20a to be measured that breaks is qualified, thus is easy to use.

Embodiment three

Figure 13 is referred to, the invention also discloses another mass spectrum leak detection method, for detecting casing 20a's to be measured Air-tightness, it comprises the following steps：

S20, casing 20a to be measured is placed in the accommodating chamber 23 of vacuum cavity 20；

The step in the embodiment two step S11 it is similar, will not be repeated here.

S21, trace gas source 50 convey showing for the first output quantity by the first inflation branch road 61 to the casing 20a to be measured Track gas；

In the step, a small amount of search gas is conveyed to the casing 20a to be measured by the described first inflation branch road 61, if The casing 20a sealings to be measured are poor, then the search gas is largely leaked in the body of accommodating chamber 23, thus can be avoided A large amount of conveyings cause to waste, and in excessive trace gas leak to the accommodating chamber 23, cleaning is relatively time-consuming, so as to cause to examine It is low to survey efficiency.

It is preferred that the trace gas source 50 includes high pressure search gas tank 51 and led with the high pressure search gas tank 51 Lead to the search gas fast charge valve 52 connect, the high pressure search gas tank 51 is used to fill the search gas, the search gas Fast charge valve 52 is used for the opening and closing for controlling the high pressure search gas tank 51；The first inflation branch road 61 shows including first Track gas supply valve 61a, the first surge tank 61b and fast charge pressure switch 52a, the first search gas supply valve 61a's is defeated Go out end to be used to turn on connection, the input and described first of the first search gas supply valve 61a with the casing 20a to be measured Surge tank 61b conducting connections, the first surge tank 61b connect with the search gas fast charge valve 52 conducting, the fast pressurising Power switch 52a turns on company with the input of the first search gas supply valve 61a and the output end of the first surge tank 61b Connect, the fast charge pressure switch 52a is used to detect the first surge tank 61b air pressure insides, when in the first surge tank 61b Air pressure control the search gas fast charge valve 52 to open when being less than preset value so that the first surge tank 61b air pressure is maintained at pre- If in scope.By the surge tank and the first search gas supply valve 61a cooperation, so as to make first inflation The stable a small amount of search gas of the output of branch road 61.

S22, mass spectrum leak detection device 70 detect the search gas content outside the casing 20a to be measured, if described treat measuring tank Search gas content outside body 20a is more than preset value, then the mass spectrum leak detection device 70 sends the casing 20a to be measured and do not conformed to The prompt message of lattice, otherwise into step S23；

It is preferred that the step S22 is specifically included：The mass spectrum leak detection device 70 is detected outside the casing 20a to be measured Search gas content, if the search gas content outside the casing 20a to be measured is more than preset value, the mass spectrum leak detection dress The index line ascensional range for putting 70 is more than predetermined amplitude.

S23, the trace gas source 50 are by the second inflation branch road 62 again to the output of casing 20a conveyings second to be measured The search gas of amount, wherein, first output quantity is less than second output quantity；

In the step, in order to detect the casing 20a to be measured that can not be detected in the step s 21, thus pass through the second inflation Branch road 62 conveys substantial amounts of search gas to the casing 20a to be measured, i.e., described first output quantity is less than second output quantity, So as to as far as possible detect underproof casing 20a to be measured, so as to improve accuracy rate.

It is preferred that the second inflation branch road 62 includes the second search gas supply valve 62a, second search gas supplies The input and the trace gas source 50 conducting for answering valve 62a are connected, and the output end of the second search gas supply valve 62a is used In turning on connection with the casing 20a to be measured.

S24, mass spectrum leak detection device 70 detect the search gas content outside the casing 20a to be measured, if described treat measuring tank Search gas content outside body 20a is more than preset value, then the mass spectrum leak detection device 70 sends the casing 20a to be measured and do not conformed to The prompt message of lattice.

It is preferred that the step S24 is specifically included：The mass spectrum leak detection device 70 is detected outside the casing 20a to be measured Search gas content, if the search gas content outside the casing 20a to be measured is more than preset value, the mass spectrum leak detection dress 70 controls are put to be used to characterize the underproof red lights of casing 20a to be measured.Glowed by the red light and carry out sign and treat measuring tank Body 20a is unqualified thus more user-friendly.

Example IV

Figure 14 is referred to, the invention also discloses another mass spectrum leak detection method, for detecting casing 20a's to be measured Air-tightness, it comprises the following steps：

S31, casing 20a to be measured is placed in the accommodating chamber 23 of vacuum cavity 20；

S32, air extractor are evacuated to the accommodating chamber 23 of vacuum cavity 20；

S33, trace gas source 50 fill search gas to the casing 20a to be measured；

S34, mass spectrum leak detection device 70 detect the search gas content in accommodating chamber 23, so as to judge described to treat measuring tank Whether body 20a is qualified；

The search gas reclaimed in surge tank 82 is evacuated in low-pressure tank 84 by S35, recovery vacuum pump 83；

In the step, in order to which the search gas being stored in the recovery surge tank 82 is extracted out, it can fill more New search gas, coordinated by the recovery surge tank 82 with the recovery vacuum pump 83, so as to quick and more thorough The search gas in the casing 20a to be measured is released.

It is preferred that the step S35 is specifically included：After first opening the preset time of recovery vacuum pump 83, institute is then turned on Recovery surge tank 82 is stated, so that the search gas reclaimed in surge tank 82 is evacuated in low-pressure tank 84 by recovery vacuum pump 83.

S36, recovery vacuum pump 83 extract the search gas in the casing 20a to be measured out, convey the search gas To the recovery surge tank 82 and the low-pressure tank 84；

It is preferred that also include step S361 after the step S36：Tonifying Qi on-off valve 86 is opened, makes trace gas source 50 Search gas is conveyed to the low-pressure tank 84.The step can enable the low-pressure tank 84 be stored with enough search gas, with Just discharge.

S37, when the air pressure in the low-pressure tank 84 reaches preset value, air compressor machine 85 is by the tracer in the low-pressure tank 84 Gas is evacuated in trace gas source 50.

The search gas in the low-pressure tank 84 is evacuated in trace gas source 50 by the air compressor machine 85, thus it is described Search gas is repeatable to be utilized, thus cost-saved.

It is preferred that also include S381 after the step S37：Detect the dense of the search gas that the air compressor machine 85 is discharged Degree, when the concentration of the search gas of the air compressor machine 85 discharge is less than preset value, it will be evacuated in the trace gas source 50 Search gas is discharged.The step can avoid user from using undesirable search gas, so as to improve the accuracy of detection.

It is preferred that also include step S382 after the step S37：To the air outside the vacuum chamber carry out filtering and It is compressed to after drying process in gas source tank, then by the gas source tank to the vacuum cavity 20 and the casing to be measured 20a backfills air.

In the step, to after the vacuum cavity 20 and the casing 20a backfills air to be measured, it can be easy to the vacuum Cavity 20 is opened, and to carry out next casing 20a to be measured detection, can improve detection efficiency.

Embodiment of the present utility model is the foregoing is only, not thereby limits the scope of the claims of the present utility model, it is all It is the equivalent structure or equivalent flow conversion made using the utility model specification and accompanying drawing content, or directly or indirectly uses In other related technical areas, similarly it is included in scope of patent protection of the present utility model.

Claims (10)

1. A kind of 1. mass spectrum leak detection equipment with gas recovering mechanism, for detecting the air-tightness of casing to be measured, it is characterised in that Including：Vacuum cavity, gas recovering mechanism, trace gas source and control device；

   The accommodating chamber for accommodating the casing to be measured is provided with the vacuum cavity；

   The gas recovering mechanism includes gas recovery on-off valve, recovery vacuum pump, low-pressure tank and air compressor machine, the gas recovery The input of on-off valve is used to turn on connection with the casing to be measured, output end and the recovery of the gas recovery on-off valve Vavuum pump conducting connection, the low-pressure tank turn on company with the output end of the recovery vacuum pump and the input of the air compressor machine Connect, the output end of the air compressor machine turns on connection with the trace gas source；

   The trace gas source is used to turn on connection with the casing to be measured, to provide search gas to the casing to be measured；

   The control device and the gas recovery on-off valve, recovery vacuum pump and pneumatics mechatronics, for controlling described return Getter body on-off valve, recovery vacuum pump and air compressor machine work.
2. 2. there is the mass spectrum leak detection equipment of gas recovering mechanism as claimed in claim 1, it is characterised in that the gas recovery Mechanism also includes recovery surge tank, and the output end of the gas recovery on-off valve turns on connection with the recovery surge tank, described Recovery surge tank turns on connection with the input of the recovery vacuum pump.
3. 3. there is the mass spectrum leak detection equipment of gas recovering mechanism as claimed in claim 1, it is characterised in that the gas recovery Mechanism also includes tonifying Qi on-off valve and low-pressure tank pressure sensor, and the input of the tonifying Qi on-off valve is used for and trace gas source Conducting connection, the output end of the tonifying Qi on-off valve turn on connection with the low-pressure tank；The low-pressure tank pressure sensor and institute Control device electrical connection is stated, the low-pressure tank pressure sensor is used for the air pressure for detecting the low-pressure tank, with when the low pressure The air pressure of tank opens tonifying Qi on-off valve when being less than preset value, and is opening institute when the pressure of the low-pressure tank is higher than preset value State air compressor machine.
4. 4. there is the mass spectrum leak detection equipment of gas recovering mechanism as claimed in claim 3, it is characterised in that the gas recovery Mechanism also includes filtering pressure reducing valve and trace gas concentration analytical equipment, the input of the filtering pressure reducing valve and the air compressor machine Output end conducting connection, the output end of the filtering pressure reducing valve turns on connection with the trace gas concentration analytical equipment.
5. 5. there is the mass spectrum leak detection equipment of gas recovering mechanism as claimed in claim 1, it is characterised in that the gas recovery Mechanism also includes the gas recovery pressure sensor that connection is turned on the output end of the air compressor machine, and the gas recovery pressure passes Sensor electrically connects with the control device.
6. 6. there is the mass spectrum leak detection equipment of gas recovering mechanism as claimed in claim 1, it is characterised in that the mass spectrum leak detection Equipment also includes connector, and the connector is connected with the vacuum cavity and turns on connection with the trace gas source, is used for Search gas in the trace gas source is imported in the casing to be measured in the accommodating chamber；

   The connector includes outer tube, limit casing, elastic seal cartridge, limited cover and piston, one end of the limit casing It is plugged in the outer tube, the other end of the limit casing is extended to outside the outer tube, and the elastic seal cartridge plugs In the limit casing, the limited cover lid is located at the limit casing backwards to one end of the outer tube, with described in obstruction Elastic seal cartridge moves towards backwards to the direction of the outer tube；The piston includes hollow stick harness and positioned at the stick harness periphery Stop part at face, one end activity of the stick harness are plugged in the outer tube, and the other end activity of the stick harness is plugged in In the limit casing, gas port, one end of the gas port and the outer tube are provided with the tube wall of the outer tube Outer surface is connected, and the other end of the gas port is connected with the internal face of the outer tube and is located at the stop part backwards The side of the elastic seal cartridge, the gas port are used to by the gas port inject compressed gas in the outer tube When, the compressed gas promotes the piston to be moved towards the elastic seal cartridge, and the elastic seal cartridge is squeezed by the piston Press and deform.
7. 7. the mass spectrum leak detection equipment according to claim 6 with gas recovering mechanism, it is characterised in that the connector Also include cushion pad, the cushion pad be set on the stick harness and positioned at the end face of the limit casing and the stop part it Between；

   In a ring, the cushion pad is towards the end face of the stop part and the stop part for the cushion pad and the stop part Fit；When the elastic seal cartridge is in compressive state by the extruding of the piston, the cushion pad is towards the limit End face and the limit casing of position sleeve pipe are elastic to abut, when the elastic seal cartridge is stretched out completely, the cushion pad towards The end face of the limit casing and limit casing interval pre-determined distance.
8. 8. the mass spectrum leak detection equipment according to claim 6 with gas recovering mechanism, it is characterised in that the connector Also include fixed plate, fixed seat and clips, the fixed plate is fixed on the vacuum cavity, and the fixed seat is fixed on institute State in fixed plate, the fixed seat is provided with fixing groove, and the outer tube is plugged in the fixing groove and extended to described solid Determine outside groove, the both ends of the clips be each attached in the fixed seat and respectively positioned at the fixed groove location it is relative two Side, the clips are coated on the side that the outer tube is exposed to outside the fixing groove.
9. 9. the mass spectrum leak detection equipment according to claim 8 with gas recovering mechanism, it is characterised in that the connector Also include the first fixed block, the second fixed block and lead, first fixed block and second fixed block are each attached to institute State in fixed plate, and respectively on the outside of the relative both ends of the fixed Board position, the fixed seat is provided with pilot hole, described Pilot hole through the relative both ends of the surface in the fixed seat position, through the pilot hole and with the fixed seat live by the lead Dynamic connection, so that the fixed seat can be solid with described first along the guiding movement of the lead, one end of the lead Determine block to be connected, the other end of the lead is connected with second fixed block.
10. 10. the mass spectrum leak detection equipment according to claim 9 with gas recovering mechanism, it is characterised in that the connection Head also includes retaining spring and positioning bead, and the first locating slot and the second locating slot, the positioning bead are provided with the fixed plate In first locating slot described in partial insertion or second locating slot, the fixed seat is provided with holding tank, the retaining spring Be plugged in the holding tank, one end of the retaining spring and the positioning bead elasticity abut, the retaining spring it is another End abuts with fixed seat elasticity.