CN207051664U - A kind of exposure machine for carrying cleaning and heat abstractor - Google Patents

A kind of exposure machine for carrying cleaning and heat abstractor Download PDF

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Publication number
CN207051664U
CN207051664U CN201720624894.0U CN201720624894U CN207051664U CN 207051664 U CN207051664 U CN 207051664U CN 201720624894 U CN201720624894 U CN 201720624894U CN 207051664 U CN207051664 U CN 207051664U
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CN
China
Prior art keywords
cabinet
lid device
bearing
sides
passage
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Expired - Fee Related
Application number
CN201720624894.0U
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Chinese (zh)
Inventor
邓君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan Longxin Precision Mesh Technology Co Ltd
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Dongguan Longxin Precision Mesh Technology Co Ltd
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Priority to CN201720624894.0U priority Critical patent/CN207051664U/en
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Publication of CN207051664U publication Critical patent/CN207051664U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

It the utility model is related to a kind of exposure machine for carrying cleaning and heat abstractor, it includes cabinet and the operating desk being fixed on cabinet, cabinet upper end is symmetrically arranged with two bearing blocks, upset bearing is installed in bearing block, overturn bearing movable connecting cover body device, lid device both sides are flexibly connected hydraulic stem, the hydraulic stem other end is movably attached to the both sides of cabinet, lid device includes the trip shaft being connected with upset bearing, trip shaft is fixedly connected with cover plate, cover plate both sides are symmetrically arranged with blowing block, front end is installed with handle, coordinate on the outside of blowing block and gas-tpe fitting is installed, gas-tpe fitting is connected to Pneumatic assembly, Pneumatic assembly is connected to operating desk;The utility model may be implemented in carrying out the purging to glass plate before the exposure of next sheet material, prevent dust fall, blowing is closed during blowing, it is then turned on after covering lid device, it is synchronous to open upper strata radiator fan and lower floor's radiator fan, the cross-ventilation in exposure process middle case is realized, realizes that the radiating in casing dissipates pressure.

Description

A kind of exposure machine for carrying cleaning and heat abstractor
Technical field
Exposure machine technical field is the utility model is related to, more particularly to a kind of exposure machine for carrying cleaning and heat abstractor.
Background technology
Exposure machine be electron beam exposure apparatus be set electron optics, electrically, machinery, vacuum, computer technology etc. be in integral Complicated semiconductor processing equipment, in printed-circuit board manufacturing technology, negative map picture is transferred on substrate be committed step it One, one layer of photosensitive material is first coated on substrate, then to carrying out light radiation coated in the photosensitive material on substrate, makes its dissolving Property change, not photosensitive resin does not polymerize, developer solution effect under dissolve, the photosensitive material of photosensitive part polymerize Reaction, which is solidificated on substrate, forms image.
The operation principle of exposure machine determines that exposure machine needs the working environment cleaned very much, when there is dust fall on glass plate Spot is formed on image that will be after development, directly influences the quality of exposure, on the other hand, is needed when partial circuit plate exposes Intense light source is used, intense light source can produce substantial amounts of heat, and existing exposure machine radiating effect is poor, easily causes in exposure machine HTHP, potential safety hazard be present, so being typically chosen can only be placed in the relatively low darkroom of temperature, it is harsh to environmental requirement.
Utility model content
The purpose of this utility model is to provide a kind of exposure machine for carrying cleaning and heat abstractor, by lid device Install blowing block additional, may be implemented in before being exposed to next sheet material and carry out purging to glass plate, prevent dust fall, close during blowing and blow Wind, it is then turned on after covering lid device, it is synchronous to open upper strata radiator fan and lower floor's radiator fan, realize exposure process middle case Interior cross-ventilation, further realize that the radiating in casing dissipates pressure.
In order to realize the above object the technical solution adopted in the utility model is:It is a kind of to carry cleaning and heat abstractor Exposure machine, it includes cabinet(1)Be fixed on cabinet(1)On operating desk(6), described cabinet(1)Upper end is symmetrically arranged with Two bearing blocks(102), described bearing block(102)Upset bearing is inside installed(101), described upset bearing(101)It is living Dynamic connection lid device(3), described lid device(3)Both sides are flexibly connected hydraulic stem(4), described hydraulic stem(4)It is another End is movably attached to cabinet(1)Both sides, described lid device(3)Including with overturning bearing(101)The trip shaft of cooperation (301), described trip shaft(301)It is fixedly connected with cover plate(303), described cover plate(303)Both sides are symmetrically arranged with blowing block (306), front end is installed with handle(304), described blowing block(306)Outside, which coordinates, is provided with gas-tpe fitting(302), institute The gas-tpe fitting stated(302)Pneumatic assembly is connected to, described Pneumatic assembly is connected to operating desk(6).
Further, described cabinet(1)Surrounding offers several square openings, and upper strata is provided with described square opening Radiator fan(8)With lower floor's radiator fan(2), wherein, upper strata radiator fan(8)It is symmetricly set on cabinet(1)Front and back, under Layer radiator fan(2)It is symmetricly set on cabinet(1)The left and right sides, described cabinet(1)Left and right sides upper end is further opened with arc The avoiding hollow groove of shape(103), described avoiding hollow groove(103)With lid device(3)Coordinate, the cabinet(1)Interior lower end fixes peace Equipped with lampshade(7), described lampshade(7)Centre is provided with exposure light source(10), upper end both sides are symmetrically arranged with photograph Bright lamp pipe(9), described exposure light source(10)It is connected to operating desk(6).
Further, described blowing block(306)Bosom offers the first passage(3061)If side offers Dry the second evenly distributed passage(3062), the second described passage inlet end is connected to the first passage(3061), institute The first passage stated(3061)Inlet end connects gas-tpe fitting(302).
Further, described lid device(3)When being covered with cabinet (1), block of drying(306)The second passage (3062)With cabinet(1)Avoiding hollow groove(103)Coordinate.
The beneficial effects of the utility model are:
1st, by installing blowing block additional on lid device, it may be implemented in before being exposed to next sheet material and carry out to glass plate Purging, prevents dust fall, closes blowing during blowing, is then turned on after covering lid device, synchronous to open upper strata radiator fan and lower floor Radiator fan, realizes the cross-ventilation in exposure process middle case, further realizes that the radiating in casing dissipates pressure.
2nd, by installing several upper strata radiator fans and lower floor's radiator fan in cabinet surrounding, and upper strata radiator fan with Lower floor's radiator fan is arranged on different height, realizes the good convection current of each layer of air in casing.
3rd, the first passage connects several the second evenly distributed passages, and the second passage and cover plate on blowing block In 45 degree of angles, realize before lid device and cabinet do not cover to the purging of glass plate.
4th, when lid device and cabinet cover, the second passage of block of drying and the avoiding hollow groove of cabinet coordinate, and realize and are covering Block was dried when upper by wind to casing.
Brief description of the drawings
Fig. 1 is a kind of structural representation for the exposure machine for carrying cleaning and heat abstractor.
Fig. 2 is the structural representation of lid device.
Fig. 3 is the partial sectional view of lid device.
Fig. 4 is the structural representation of cabinet inside.
Complete machine sectional view when Fig. 5 is under lid device lid.
Label character is expressed as shown in figure:1st, cabinet;2nd, lower floor's radiator fan;3rd, lid device;4th, hydraulic stem;5th, glass Glass plate;6th, operating desk;7th, lampshade;8th, upper strata radiator fan;9th, illuminating lamp tube;10th, exposure light source;101st, bearing is overturn; 102nd, bearing block;103rd, avoiding hollow groove;301st, trip shaft;302nd, gas-tpe fitting;303rd, cover plate;304th, shake hands;305th, shading curtain Cloth;306th, blowing block;3061st, the first passage;3062nd, the second passage.
Embodiment
In order that those skilled in the art more fully understand the technical solution of the utility model, below in conjunction with the accompanying drawings to this reality Be described in detail with new, the description of this part be only it is exemplary and explanatory, should not be to the scope of protection of the utility model There is any restriction effect.
As Figure 1-Figure 5, structure of the present utility model is:A kind of exposure machine for carrying cleaning and heat abstractor, it is wrapped Cabinet 1 and the operating desk 6 being fixed on cabinet 1 are included, the described upper end of cabinet 1 is symmetrically arranged with two bearing blocks 102, described Upset bearing 101 is installed, described upset bearing 101 is flexibly connected lid device 3, described lid dress in bearing block 102 Put 3 both sides and be flexibly connected hydraulic stem 4, the described other end of hydraulic stem 4 is movably attached to the both sides of cabinet 1, described lid dress 3 trip shafts 301 for including coordinating with upset bearing 101 are put, described trip shaft 301 is fixedly connected with cover plate 303, described cover plate 303 both sides are symmetrically arranged with blowing block 306, and front end is installed with handle 304, and the described outside of blowing block 306 coordinates installation There is gas-tpe fitting 302, described gas-tpe fitting 302 is connected to Pneumatic assembly, and described Pneumatic assembly is connected to operating desk 6.
Preferably, the described surrounding of cabinet 1 offers several square openings, and upper strata radiating is provided with described square opening Fan 8 and lower floor's radiator fan 2, wherein, upper strata radiator fan 8 is symmetricly set on the front and back of cabinet 1, lower floor's radiator fan 2 The left and right sides of cabinet 1 is symmetricly set on, the described left and right sides upper end of cabinet 1 is further opened with the avoiding hollow groove 103 of arc, described Avoiding hollow groove 103 coordinate with lid device 3, the interior lower end of cabinet 1 is installed with lampshade 7, described reflector lamp Exposure light source 10 is installed among cover 7, upper end both sides are symmetrically arranged with illuminating lamp tube 9, and described exposure light source 10 is connected to behaviour Make platform 6.
Preferably, the described bosom of blowing block 306 offers the first passage 3061, and side offers some uniform Second passage 3062 of arrangement, the second described passage inlet end are connected to the first passage 3061, and described first is logical The inlet end of stomata 3061 connects gas-tpe fitting 302.
Preferably, when described lid device 3 covers with cabinet 1, the second passage 3062 and cabinet 1 of blowing block 306 Avoiding hollow groove 103 coordinate.
When specifically used, first the film is fixed on glass plate 5, places into material to be exposed, covers lid device 3, During exposure, blowing block 306 is realized toward blowing in cabinet 1, upper strata radiator fan 8 and the synchronous unlatching of lower floor's radiator fan 2 Radiating in cabinet 1 dissipates pressure, after the completion of sheet material exposure, opens lid device 3, removes material, be put into next sheet material When blowing block 306 persistently glass plate 5 is purged, prevent dust fall, when blowing, close blowing, in the machine of lid device 3 Reopen after the closing lid of cabinet 1, moved in circles with this.
It should be noted that herein, term " comprising ", "comprising" or its any other variant are intended to non-row His property includes, so that process, method, article or equipment including a series of elements not only include those key elements, and And also include the other element being not expressly set out, or also include for this process, method, article or equipment institute inherently Key element.
Specific case used herein is set forth to principle of the present utility model and embodiment, above example Illustrate that being only intended to help understands method and its core concept of the present utility model.Described above is only of the present utility model preferred Embodiment, it is noted that due to the finiteness of literal expression, and unlimited concrete structure objectively be present, for this technology For the those of ordinary skill in field, on the premise of the utility model principle is not departed from, some improvement, retouching can also be made Or change, above-mentioned technical characteristic can also be combined by rights;These improve retouching, change or combination, or not It is improved by the design of utility model and technical scheme directly application and other occasions, be regarded as protection of the present utility model Scope.

Claims (3)

1. a kind of exposure machine for carrying cleaning and heat abstractor, it includes cabinet(1)Be fixed on cabinet(1)On operating desk (6), it is characterised in that described cabinet(1)Upper end is symmetrically arranged with two bearing blocks(102), described bearing block(102)It is interior Upset bearing is installed(101), described upset bearing(101)It is flexibly connected lid device(3), described lid device(3) Both sides are flexibly connected hydraulic stem(4), described hydraulic stem(4)The other end is movably attached to cabinet(1)Both sides, described lid Device(3)Including with overturning bearing(101)The trip shaft of cooperation(301), described trip shaft(301)It is fixedly connected with cover plate (303), described cover plate(303)Both sides are symmetrically arranged with blowing block(306), front end is installed with handle(304), it is described Blowing block(306)Outside, which coordinates, is provided with gas-tpe fitting(302), described gas-tpe fitting(302)Pneumatic assembly is connected to, it is described Cabinet(1)Surrounding offers several square openings, and upper strata radiator fan is provided with described square opening(8)Radiated with lower floor Fan(2), wherein, upper strata radiator fan(8)It is symmetricly set on cabinet(1)Front and back, lower floor's radiator fan(2)It is symmetrical arranged In cabinet(1)The left and right sides, described cabinet(1)Left and right sides upper end is further opened with the avoiding hollow groove of arc(103), it is described Avoiding hollow groove(103)With lid device(3)Coordinate, the cabinet(1)Interior lower end is installed with lampshade(7), it is described Lampshade(7)Centre is provided with exposure light source(10), upper end both sides are symmetrically arranged with illuminating lamp tube(9), described exposure light Source(10)Operating desk is connected to Pneumatic assembly(6).
A kind of 2. exposure machine for carrying cleaning and heat abstractor according to claim 1, it is characterised in that described blowing Block(306)Bosom offers the first passage(3061), side offers some the second evenly distributed passages (3062), the second described passage inlet end is connected to the first passage(3061), described the first passage(3061)Enter Gas end connects gas-tpe fitting(302).
3. a kind of exposure machine for carrying cleaning and heat abstractor according to claim 1, described lid device(3)With machine When case (1) covers, block of drying(306)The second passage(3062)With cabinet(1)Avoiding hollow groove(103)Coordinate.
CN201720624894.0U 2017-06-01 2017-06-01 A kind of exposure machine for carrying cleaning and heat abstractor Expired - Fee Related CN207051664U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720624894.0U CN207051664U (en) 2017-06-01 2017-06-01 A kind of exposure machine for carrying cleaning and heat abstractor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720624894.0U CN207051664U (en) 2017-06-01 2017-06-01 A kind of exposure machine for carrying cleaning and heat abstractor

Publications (1)

Publication Number Publication Date
CN207051664U true CN207051664U (en) 2018-02-27

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Application Number Title Priority Date Filing Date
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109471334A (en) * 2018-09-29 2019-03-15 张家港奇点光电科技有限公司 A kind of multi-functional OLED exposure machine
CN114114851A (en) * 2021-11-24 2022-03-01 深圳市明正宏电子有限公司 Novel exposure machine and transformation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109471334A (en) * 2018-09-29 2019-03-15 张家港奇点光电科技有限公司 A kind of multi-functional OLED exposure machine
CN114114851A (en) * 2021-11-24 2022-03-01 深圳市明正宏电子有限公司 Novel exposure machine and transformation method thereof

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20180227

Termination date: 20180601