CN207043869U - A kind of electrostriction ultrasonic vibration burnishing device - Google Patents
A kind of electrostriction ultrasonic vibration burnishing device Download PDFInfo
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- CN207043869U CN207043869U CN201720983235.6U CN201720983235U CN207043869U CN 207043869 U CN207043869 U CN 207043869U CN 201720983235 U CN201720983235 U CN 201720983235U CN 207043869 U CN207043869 U CN 207043869U
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- polishing
- base
- burnishing device
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- polissoir
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model provides a kind of electrostriction ultrasonic vibration burnishing device, including polissoir, base, polishing pad and electrostrictive actuator；The polissoir is connected with the base by three pillars, and the polishing pad is placed in above the polissoir, and the electrostrictive actuator is placed in the submounts.The utility model utilizes ultrasonic vibration and ultraprecise CMP composite polishings, it can obviously reduce the metamorphic layer thickness of workpiece surface, greatly improve polished surface quality, in the presence of ultrasonic vibration, abrasive particle dispersion effect in polishing fluid is good so that more abrasive particles participate in polishing, reduce abrasive wear speed, and then CMP planarization fluid exchange frequency is reduced, save polishing cost.
Description
Technical field
Plant equipment Surface-micromachining process field is the utility model is related to, more particularly to a kind of electrostriction ultrasonic vibration is thrown
Electro-optical device.
Background technology
CMP (Chemical Mechanical Polishing, chemically mechanical polishing) is a kind of using fine in polishing fluid
The mechanism of abrasive particle obtains the processing method of super-smooth surface quality, and unique at this stage achievable half with chemical action
The industrial method of conductor wafer planarization and Ultra-smooth machining.But in existing CMP production operations, due in CMP planarization liquid
What is used is mostly nano-particle, and the specific surface area of nano-particle is larger, and surface energy is higher, therefore the grain in polishing process polishing fluid
Son is easily reunited and dispersion effect is poor.In addition, the material that semicon industry uses is mostly hard brittle material, CMP process in which materials is gone
Except rate is generally relatively low.Therefore, to promote the development of CMP technique, polishing process abrasive particle in the urgent need to address is easily reunited, dispersion effect
Poor raising, and the problems such as polishing efficiency is relatively low.
The content of the invention
The utility model provides a kind of electrostriction ultrasonic vibration burnishing device, by caused by electrostrictive actuator
Ultrasonic vibration aids in CMP, its ultrasonic dither is delivered on polishing disk using electrostrictive actuator, realizes polishing fluid
Disperseing for middle abrasive particle, significantly improves the agglomeration of abrasive particle, so as to reduce rapidoprint damaged surface layer thickness, effectively improves
CMP quality and efficiency.
To achieve these goals, the utility model takes following technical scheme：
A kind of electrostriction ultrasonic vibration burnishing device, including polissoir, base, polishing pad and electrostriction actuating
Device；The polissoir is connected with the base by pillar, and the polishing pad is placed in above the polissoir, the electricity
Expansion actuator is caused to be placed in the submounts.
Further, the struts number is three, and three rubber springs are respectively provided with each pillar.
Further, three screwed holes are along the circumferential direction opened up in the base outer ring, three pillars pass through described
Three screwed holes are connected with the base screw.
Further, four are opened up on peripherally disposed three boss of the base inner ring, each boss
Screwed hole, the electrostrictive actuator are connected by four screwed holes with the base screw.
Further, three electrostrictive actuators are installed, described three electrostrictive actuators are on the base
Same frequency vibrates or different frequency vibration.
Further, described polissoir is polishing disk, and the polishing disk is using the electrostrictive actuator as driving
Mode.
Further, the base is connected as an entirety, described burnishing device and institute with chemical-mechanical polisher
Chemical-mechanical polisher is stated to support the use.
The ultrasonic vibration polishing dress described in the utility model it can be seen from above-mentioned technical scheme provided by the utility model
Put and integrate polishing disk, polishing pad, electrostrictive actuator, aided in by ultrasonic vibration caused by electrostrictive actuator
CMP, its ultrasonic dither is delivered on polishing disk using electrostrictive actuator, realizes the scattered of abrasive particle in polishing fluid,
Significantly improve the agglomeration of abrasive particle, so as to reduce rapidoprint damaged surface layer thickness, effectively improve CMP quality and effect
Rate.
The additional aspect of the utility model and advantage will be set forth in part in the description, and these are by from following description
In become obvious, or by it is of the present utility model practice recognize.
Brief description of the drawings
It is required in being described below to embodiment in order to illustrate more clearly of the technical scheme of the utility model embodiment
The accompanying drawing used is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present utility model
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is a kind of structural representation for electrostriction ultrasonic vibration burnishing device that the utility model embodiment provides；
Fig. 2 is the schematic diagram of polishing pad in Fig. 1 that the utility model embodiment provides；
Fig. 3 is the scheme of installation of electrostrictive actuator in Fig. 1 that the utility model embodiment provides；
Fig. 4 is the schematic diagram for Fig. 1 center bases that the utility model embodiment provides.
【Reference】
1 polishing disk；2 polishing pads；3 electrostrictive actuators；4 pillars；
5 bases；6 rubber springs；The boss of 7 screwed hole 8.
Embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein
Same or similar label represents same or similar element or the element with same or like function from beginning to end.Lead to below
It is exemplary to cross the embodiment being described with reference to the drawings, and is only used for explaining the utility model, and can not be construed to this practicality
New limitation.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singulative " one " used herein, " one
It is individual ", " described " and "the" may also comprise plural form.It is to be further understood that used in specification of the present utility model
Wording " comprising " refer to the feature, integer, step, operation, element and/or component be present, but it is not excluded that in the presence of or
Addition one or more other features, integer, step, operation, element, component and/or their groups.It should be understood that work as us
Element is claimed to be " connected " or during " coupled " to another element, it can be directly connected or coupled to other elements, or can also
Intermediary element be present.In addition, " connection " used herein or " coupling " can include wireless connection or coupling.It is used herein to arrange
Taking leave "and/or" includes any cell of one or more associated list items and all combines.
Those skilled in the art of the present technique are appreciated that unless otherwise defined, all terms used herein (including technology art
Language and scientific terminology) with the general understanding identical meaning with the those of ordinary skill in the utility model art.Also
It should be understood that those terms defined in such as general dictionary should be understood that with the context of prior art
The consistent meaning of meaning, and unless defined as here, will not be explained with the implication of idealization or overly formal.
For ease of the understanding to the utility model embodiment, done below in conjunction with accompanying drawing by taking several specific embodiments as an example into
The explanation of one step, and each embodiment does not form the restriction to the utility model embodiment.
Fig. 1 is a kind of structural representation for electrostriction ultrasonic vibration burnishing device that the utility model embodiment provides；
Fig. 2 is the schematic diagram of polishing pad in Fig. 1 that the utility model embodiment provides；Fig. 3 is Fig. 1 that the utility model embodiment provides
The scheme of installation of middle electrostrictive actuator；As shown in Fig. 1 knots Fig. 2,3：
A kind of electrostriction ultrasonic vibration burnishing device, including polissoir 1, base 5, polishing pad 2 and electrostriction cause
Dynamic device 3；The polissoir 1 and the base 5 are connected by pillar 4, and the polishing pad 2 is placed on the polissoir 1
Face, the electrostrictive actuator 3 are placed in above the base 5.
The quantity of pillar 4 is three, three rubber springs 6 is respectively provided with each pillar 4, for realizing the branch
The leveling of the pretension of post 4 and the polissoir 1.
Described polissoir 1 is polishing disk, and the polishing disk 1 is type of drive with the electrostrictive actuator 3.
Polishing disk 1 is disperseed in polishing fluid using electrostrictive actuator as ultrasonic vibration source using the dither of polishing disk 1
Abrasive particle, avoid agglomeration of abrasive particles.
The polishing disk 1 is used to amplify amplitude caused by the electrostrictive actuator 3 in the case where setting excited frequency.
In the case of certain amplitude, frequency more high-energy-density is bigger, and it is better to vibrate additional effect, and same
In medium, the frequency of vibration is higher, and wavelength is shorter, and directionality is better；
Because the wavelength of high frequency ultrasound is very short, that decays in gaseous environment is especially fast, therefore upper polishing disk 1 and polishing pad
There can not be airspace as far as possible between 2 and polishing pad 2 and polishing fluid.
At work, polishing disk 1 starts to rotate, and operation can be polished to workpiece by being put into polishing fluid, and electrostriction causes
Dynamic device 3 starts to drive, and ultrasonic dither is delivered to the throwing contacted therewith through ultrasonic transformer as caused by electrostrictive actuator 3
CD 1, most ultrasonic vibration is delivered to polishing pad 2 with polishing fluid, making polishing fluid particle effectively play a role, utilizing polishing at last
The dither deformation of disk 1 improves polishing efficiency, under ultrasonic vibration and chemical machinery compound action, realizes that workpiece surface material is gone
Remove, hence it is evident that improve workpiece polishing efficiency, greatly improve workpiece surface quality.
Fig. 4 is the schematic diagram for Fig. 1 center bases that the utility model embodiment provides, as shown in Figure 4：
Three screwed holes 7 are along the circumferential direction opened up in the outer ring of base 5, three pillars 4 pass through three spiral shells
The hole of line 7 is connected with the base screw.
Four screwed holes 7 are opened up on peripherally disposed three boss 8 of the base inner ring, each boss 8,
The electrostrictive actuator is connected by four screwed holes 7 and the screw of base 5.
Three electrostrictive actuators are installed, described three electrostrictive actuators can same frequency vibration on the base
Or different frequency vibration.
Described burnishing device can be used cooperatively with existing chemical-mechanical polisher, can be by chemical-mechanical polishing mathing
Polishing disk is connected to become an entirety with base 5 using bonding way, or directly substitutes original polishing disk 1.It is described for improving
The polishing efficiency of chemical-mechanical polisher and it is polished workpiece surface quality.
Those skilled in the art will be understood that the placement quantity of above-mentioned electrostrictive actuator is only for example, and other are existing
Or the placement quantity for the electrostrictive actuator being likely to occur from now on is such as applicable to the utility model embodiment, should also be included in
Within scope of protection of the utility model, and it is incorporated herein by reference herein.
Those skilled in the art will be understood that the placement quantity of above-mentioned pillar is only for example, and other are existing or from now on may
The placement quantity of the pillar of appearance is such as applicable to the utility model embodiment, also should be included in scope of protection of the utility model with
It is interior, and be incorporated herein by reference herein.
Those skilled in the art will be understood that the quantity that opens up of above-mentioned screwed hole is only for example, and other are existing or from now on may be used
The quantity that opens up for the screwed hole that can occur such as is applicable to the utility model embodiment, should also be included in the utility model protection model
Within enclosing, and it is incorporated herein by reference herein.
Those skilled in the art will be understood that the setting quantity of above-mentioned rubber spring is only for example, and other are existing or from now on
The setting quantity for the rubber spring being likely to occur such as is applicable to the utility model embodiment, should also be included in the utility model and protect
Protect within scope, and be incorporated herein by reference herein.
Those skilled in the art will be understood that the setting quantity of above-mentioned boss is only for example, and other are existing or from now on may
The setting quantity of the boss of appearance is such as applicable to the utility model embodiment, also should be included in scope of protection of the utility model with
It is interior, and be incorporated herein by reference herein.
In summary, the burnishing device described in the utility model embodiment is compatible with existing CMP tool, is mountable to
Polishing is participated in CMP planarization, the polishing disk utilizes the dither point of polishing disk using electrostrictive actuator as ultrasonic vibration source
The agglomeration of abrasive particles in polishing fluid is dissipated, improves polishing efficiency.
The utility model utilizes ultrasonic vibration and ultraprecise CMP composite polishings, can obviously reduce the metamorphic layer of workpiece surface
Thickness, greatly improve polished surface quality.In the presence of ultrasonic vibration, the abrasive particle dispersion effect in polishing fluid is good so that more
More abrasive particles participates in polishing, reduces abrasive wear speed, and then reduces CMP planarization fluid exchange frequency, saves polishing cost.
One of ordinary skill in the art will appreciate that：Accompanying drawing is the schematic diagram of one embodiment, module in accompanying drawing or
Flow is not necessarily implemented necessary to the utility model.
One of ordinary skill in the art will appreciate that：The part in device in embodiment can describe to divide according to embodiment
It is distributed in the device of embodiment, respective change can also be carried out and be disposed other than in one or more devices of the present embodiment.On
The part for stating embodiment can be merged into a part, can also be further split into multiple subassemblies.
It is described above, the only preferable embodiment of the utility model, but the scope of protection of the utility model is not
This is confined to, any one skilled in the art can readily occur in the technical scope that the utility model discloses
Change or replacement, should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should
It is defined by scope of the claims.
Claims (7)
1. a kind of electrostriction ultrasonic vibration burnishing device, it is characterised in that including polissoir, base, polishing pad and electroluminescent
Expansion actuator；The polissoir is connected with the base by pillar, and the polishing pad is placed on the polissoir
Face, the electrostrictive actuator are placed in the submounts.
2. burnishing device according to claim 1, it is characterised in that the struts number is three, each pillar
On be respectively provided with three rubber springs.
3. burnishing device according to claim 1, it is characterised in that along the circumferential direction open up three in the base outer ring
Screwed hole, three pillars are connected by three screwed holes with the base screw.
4. burnishing device according to claim 1, it is characterised in that peripherally disposed three in the base inner ring
Boss, opens up four screwed holes on each boss, the electrostrictive actuator by four screwed holes with it is described
Base screw is connected.
5. burnishing device according to claim 1, it is characterised in that three electrostriction actuatings are installed on the base
Device, described three electrostrictive actuators are that same frequency vibrates or different frequency vibrates.
6. burnishing device according to claim 1, it is characterised in that described polissoir is polishing disk, the polishing
Disk is using the electrostrictive actuator as type of drive.
7. burnishing device according to claim 1, it is characterised in that the base is connected as with chemical-mechanical polisher
One entirety, described burnishing device support the use with the chemical-mechanical polisher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720983235.6U CN207043869U (en) | 2017-08-08 | 2017-08-08 | A kind of electrostriction ultrasonic vibration burnishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720983235.6U CN207043869U (en) | 2017-08-08 | 2017-08-08 | A kind of electrostriction ultrasonic vibration burnishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207043869U true CN207043869U (en) | 2018-02-27 |
Family
ID=61500107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720983235.6U Active CN207043869U (en) | 2017-08-08 | 2017-08-08 | A kind of electrostriction ultrasonic vibration burnishing device |
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| CN (1) | CN207043869U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107363649A (en) * | 2017-08-08 | 2017-11-21 | 北京交通大学 | A kind of electrostriction ultrasonic vibration burnishing device |
-
2017
- 2017-08-08 CN CN201720983235.6U patent/CN207043869U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107363649A (en) * | 2017-08-08 | 2017-11-21 | 北京交通大学 | A kind of electrostriction ultrasonic vibration burnishing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200617 Address after: 344000 Jiangxi city of Fuzhou Province Jin Ni Road No. 198 Park A7 building 3 floor Patentee after: JIANGXI DEYI SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Address before: 100044 Beijing city Haidian District Xizhimen Shangyuan Village No. 3 Patentee before: Beijing Jiaotong University |
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| TR01 | Transfer of patent right |