CN207031542U - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
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- CN207031542U CN207031542U CN201720910795.9U CN201720910795U CN207031542U CN 207031542 U CN207031542 U CN 207031542U CN 201720910795 U CN201720910795 U CN 201720910795U CN 207031542 U CN207031542 U CN 207031542U
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Abstract
The utility model embodiment discloses a kind of vacuum coating equipment.The vacuum coating equipment includes vacuum coater and vacuum pre-treatment device.Vacuum pre-treatment device includes vavuum pump, vacuum chamber, the microscope carrier being arranged in vacuum chamber, heating system and vacuum measurement system.Plating piece is arranged on microscope carrier；Vavuum pump and vacuum chamber UNICOM, and vacuum chamber is vacuumized；Heating system and vacuum measurement system are arranged in vacuum chamber.Vacuum coating equipment in the application is to be placed in plating piece in the vacuum chamber of condition of high vacuum degree for a long time, efficiently remove in plating piece and be re-fed into vacuum coater after the gas and impurity of residual, and then ensure that the atmosphere constituent in vacuum coater room is stable, so that the Film color on plating piece surface is uniform, activate plating piece surface, improve membranous layer binding force and improve film surface stress, ensure the stability and repeatability of technique for vacuum coating, improve the efficiency and yields of plating piece production.
Description
Technical field
Technical field of vacuum plating is the utility model is related to, more particularly to a kind of vacuum coating equipment.
Background technology
Vacuum coating, the atom referred in vacuum indoor material isolates from heating source to be got on the surface of plating piece,
The major function of vacuum coating includes assigning plating piece apparent height metallic luster effect and mirror effect, and film layer has outstanding
Barrier property, there is provided excellent electromagnetic shielding and conductive effect.Whether plating piece superficial film color is uniform, whether adhesion is firm
Admittedly it is one of important indicator for judging whether coating quality is excellent, if plating piece superficial film irregular colour is even or film layer occurs
Come off, then plating piece will be dropped as defective work.
It is excellent, it is necessary to maintain the atmosphere constituent in vacuum chamber stable for guarantee plating piece coating quality.And plating piece is being made
It is possible to remain some gases in it during work, such as the plating piece that mixed injection molding part metal and plastic-injection form, in order to protect
Both good combinations of card, both have interface or the hole of complexity, and some moisture bearing gas may be then retained in these holes
Or other objects are such as cleaning fluid, antiscuffing paste.
Existing vacuum coating equipment can set corresponding heating-up temperature and vacuum.Set when plating piece is positioned over vacuum coating
After standby, vacuum coating equipment starts and progressively reaches the heating-up temperature and vacuum of its setting.General vacuum coating equipment reaches
Predetermined set heating-up temperature and predetermined vacuum degree (such as reach vacuum 6.0*10-3Pa after), next processing procedure link is just immediately entered,
The process for keeping heating in vacuum for a long time will not be reserved.Because the pore-size in plating piece is particularly small, relative porosity factor
Micropore is especially deep, and gas or other impurities are difficult thoroughly to remove totally under relatively short vacuum and normal temperature state,
Now plating piece surface can also a large amount of miscellaneous gas of remaining be not released, cause plating piece in coating process by atomic collision, table
Face heating makes to remain in gap, the miscellaneous gas of micropore is continually released, and ultimately results in Film color inequality, adhesion is not
Foot, film quality are affected, and then influence the technology stability and repeatability of vacuum coating equipment.
Plating piece discharges gas or impurity during how avoiding vacuum coating, ensures that the atmosphere constituent in vacuum chamber is steady
It is fixed, turn into urgent problem to be solved in technique for vacuum coating.
Utility model content
The utility model provides a kind of vacuum coating equipment, and it can ensure the stability of technique for vacuum coating and can weigh
Renaturation.
To achieve these goals, the technical solution of the utility model is as follows：A kind of vacuum coating equipment, including Vacuum Deposition
Film device and vacuum pre-treatment device, the vacuum pre-treatment device include vavuum pump, vacuum chamber, are arranged in vacuum chamber
Microscope carrier, heating system and vacuum measurement system；
The plating piece is arranged on the microscope carrier；
The vavuum pump and the vacuum chamber UNICOM, and the vacuum chamber is vacuumized；
The heating system and the vacuum measurement system are arranged in the vacuum chamber.
Wherein, the vacuum in the vacuum chamber is less than 1 × 10-2Pa。
Preferably, the first buffering connected with the vacuum chamber is provided with the vacuum pre-treatment device entrance
Room.
It is further preferred that second connected with the vacuum chamber is provided with the vacuum pre-treatment device exit
Surge chamber.
It is further preferred that connected with the vacuum coater is provided with the vacuum coater exit
Three surge chambers.
It is further preferred that the vacuum pre-treatment device also includes aura cleaning device and inert gas supply system
System；
The aura cleaning device is arranged in the vacuum chamber；The inert gas air supply system is arranged at described true
Outside empty cabin, the aura cleaning device is connected with the inert gas air supply system.
Wherein, the vacuum chamber is connected with the vacuum coater arranges or is independently arranged.
The vacuum coater in the application is one or more.
The vacuum coating equipment in the application, it is that plating piece is placed in high vacuum for a long time from above technical scheme
In the vacuum chamber of degree, the gas and impurity of residual in plating piece are efficiently removed, therefore plating piece is during vacuum coating
It is difficult to discharge gas or impurity again, and then ensure that the atmosphere constituent in vacuum coating room is stable, so that the film on plating piece surface
Layer color is uniform, activation plating piece surface, improves membranous layer binding force and improves film surface stress, ensure technique for vacuum coating
Stability and repeatability, improve the efficiency and yields of plating piece production.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
In the required accompanying drawing used be briefly described, it should be apparent that, drawings in the following description are only of the present utility model
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other accompanying drawings.
Fig. 1 is to be preferable to carry out the structural representation of vacuum coating equipment that exemplifies according to one；
Fig. 2 is the structural representation according to another vacuum coating equipment for being preferable to carry out exemplifying.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clear, complete description, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Fig. 1 is to be preferable to carry out the structural representation of vacuum coater that exemplifies according to one.As shown in figure 1, Vacuum Deposition
Film device includes vacuum coater 1 and vacuum pre-treatment device 2.Vacuum pre-treatment device includes vavuum pump 20, vacuum chamber
21st, microscope carrier 22, heating system 23 and the vacuum measurement system 24 being arranged in vacuum chamber.Plating piece is arranged on microscope carrier 22.
Vavuum pump 20 and the UNICOM of vacuum chamber 21, and vacuum chamber is vacuumized.Heating system 23 and vacuum measurement system 24 are set
It is placed in vacuum chamber.
The operation principle of vacuum coating equipment in the utility model is described in detail below.
The processing method of vacuum coating equipment described in the utility model embodiment includes：
Vacuum pre-treatment is carried out to plating piece；
Plating piece after vacuum pre-treatment is put into vacuum coater and carries out vacuum coating.
Specifically, carrying out vacuum pre-treatment to plating piece includes：
Plating piece is placed on the microscope carrier in vacuum chamber；
The first vacuum is evacuated to vacuum chamber, the first temperature is heated to plating piece in vacuum；First
The threshold value of temperature determines that the first temperature is less than the highest bearing temperature of plating piece according to the selection of material of plating piece.
Keep first temperature-resistant, vacuum chamber is maintained the first vacuum setting duration.
Wherein, the numerical value of the first vacuum is less than 1 × 10-2Pa, i.e., in high vacuum state.Vacuum chamber maintenance first is true
The setting duration of reciprocal of duty cycle need to be more than 1 hour；If make gas in plating piece or impurity removes more thoroughly, vacuum chamber maintains the
The setting duration of one vacuum is preferably more than 3 hours.
Plating piece is placed in the vacuum chamber of the first vacuum for a long time, can efficiently remove the gas of residual in plating piece
Body and impurity, then plating piece is just difficult to discharge gas or impurity again during vacuum coating, and then is ensured in vacuum coating room
Atmosphere constituent it is stable so that the Film color on plating piece surface is uniform, plating piece surface can be activated again, film layer is improved and combine
Power simultaneously improves film surface stress, ensures the stability and repeatability of technique for vacuum coating, improves the efficiency of plating piece production
And yields.
The species of plating piece in the application include but is not limited to stainless steel, mixed injection molding part, composite, kirsite,
Plastic cement plated item etc..
It is further preferred that vacuum pre-treatment device also includes aura cleaning device 25 and inert gas air supply system.Brightness
Light cleaning apparatus is arranged in vacuum chamber；Inert gas air supply system is arranged at outside vacuum chamber, aura cleaning device with it is lazy
Property the connection of gas air supply system.
Wherein, the step of aura cleaning device progress aura cleaning includes：
Keep vacuum chamber first temperature-resistant, inert gas is filled with into vacuum chamber to the second vacuum.Wherein,
Two vacuums are more than the first vacuum, and its numerical stability is in the range of 1~2Pa.The preferred high-purity indifferent gas style of inert gas
Such as argon gas.
Aura cleaning device power supply is opened, aura cleaning setting time is carried out to plating piece；
After setting time reaches, aura cleaning device power supply is closed.
By aura cleaning step, ion aura processing can be carried out to the plating piece in vacuum chamber, realized to plated
Part surface carries out surface active, etching processing, can preferably increase plating piece surface cleanness, excludes plating piece adsorption
Gas and moisture, increase the adhesion of plating piece and film layer.
It is further preferred that carrying out vacuum pre-treatment and aura cleaning step to plating piece in the application can be carried out periodically
Alternately.Such as the time that vacuum pre-treatment is carried out to plating piece is set as 1 hour, aura scavenging period 20 minutes.Vacuum first
To reach the first vacuum in cabin, and be heated to the first temperature.The first temperature and the first vacuum are kept after 1 hour, vacuum
High purity inert gas such as argon gas is added in cabin, makes to reach the second vacuum, i.e. 1.0~2.0pa in vacuum chamber, opens aura
Cleaning device power supply, after aura cleaning being carried out to plating piece 20 minutes, aura power supply is closed, closes inert gas air supply system.
Vacuum chamber is recovered to the first vacuum, and be incubated to carrying out aura again after 1 hour and clean 20 minutes.By periodically
Vacuum constant temperature, aura cleaning are carried out to vacuum chamber, plating piece can be made preferably to discharge its internal gas, activate plating piece table
Face, improve plating piece and membranous layer binding force.
Fig. 2 is the structural representation according to another vacuum coating equipment for being preferable to carry out exemplifying.As shown in Fig. 2 vacuum
Filming equipment is preferably provided with the first surge chamber 3 connected with vacuum chamber in vacuum pre-treatment device entrance.First buffering
The application method of room 3 is：First the first surge chamber and vacuum chamber are completely cut off, and plating piece is first put into the first surge chamber；To
One surge chamber is vacuumized, and when vacuum reaches the first vacuum in the first surge chamber, plating piece is delivered to by the first surge chamber
In vacuum chamber.
The second surge chamber 4 connected with vacuum chamber is provided with vacuum pre-treatment device exit.Second surge chamber 4
Application method is：First the second surge chamber and vacuum chamber are completely cut off, and the second surge chamber is vacuumized；When in the second surge chamber
When vacuum reaches the first vacuum, plating piece is delivered in the second surge chamber by vacuum chamber.
The 3rd surge chamber 5 connected with vacuum coater is provided with vacuum coater exit.3rd surge chamber 5
Application method be：First the 3rd surge chamber and vacuum coater are completely cut off, and the 3rd surge chamber is vacuumized；When the 3rd buffering
When indoor vacuum is identical with the vacuum in vacuum coater, plating piece is sent to the 3rd buffering by vacuum coater
Room.
By the setting of above-mentioned first surge chamber, the second surge chamber and the 3rd surge chamber, plating piece can be achieved and entirely locating
Vacuum environment is in non-destructive state all the time during reason., can when only setting a surge chamber or any two surge chamber
Realize that the vacuum environment at corresponding import or export is in not collapse state.
In the application, vacuum chamber can be the setting that is connected with vacuum coater, can also be independently arranged.
Vacuum chamber is connected arrangement with vacuum coater, and plating piece can be fed directly into the environment of vacuum is not destroyed
In vacuum coater, the atmosphere in vacuum coater will not produce change.
Vacuum chamber is independently arranged with vacuum coater.Plating piece is put rapidly after vacuum pre-treatment is carried out in the short time
Enter in vacuum coater.Because open-assembly time is short in an atmosphere, the impurity level such as moisture and gas of plating piece adsorption is not
The atmosphere in vacuum coater can be influenceed.
In the application, the vacuum coater in vacuum coating equipment is one or more., can in vacuum pre-treatment step
Disposably carry out vacuum pre-treatment to the plating piece of batch, after the plating piece of batch carries out vacuum pre-treatment, one can be sent to
Or batch coating film treatment is carried out in multiple vacuum coaters.
The vacuum coating equipment in the application, it is that plating piece is placed in high vacuum for a long time from above technical scheme
In the vacuum chamber of degree, the gas and impurity of residual in plating piece are efficiently removed, therefore plating piece is during vacuum coating
It is difficult to discharge gas or impurity again, and then ensure that the atmosphere constituent in vacuum coating room is stable, so that the film on plating piece surface
Layer color is uniform, activation plating piece surface, improves membranous layer binding force and improves film surface stress, ensure technique for vacuum coating
Stability and repeatability, improve the efficiency and yields of plating piece production.
It should be appreciated that the accurate knot that the utility model is not limited to be described above and is shown in the drawings
Structure, and various modifications and changes can be being carried out without departing from the scope.The scope of the utility model only will by appended right
Ask to limit.
Claims (8)
1. a kind of vacuum coating equipment, including vacuum coater, it is characterised in that described also including vacuum pre-treatment device
Vacuum pre-treatment device includes vavuum pump, vacuum chamber, the microscope carrier being arranged in vacuum chamber, heating system and vacuum measurement system
System；
The plating piece is arranged on the microscope carrier；
The vavuum pump and the vacuum chamber UNICOM, and the vacuum chamber is vacuumized；
The heating system and the vacuum measurement system are arranged in the vacuum chamber.
2. vacuum coating equipment according to claim 1, it is characterised in that the vacuum in the vacuum chamber is less than 1
×10-2Pa。
3. vacuum coating equipment according to claim 1, it is characterised in that set in the vacuum pre-treatment device entrance
It is equipped with the first surge chamber connected with the vacuum chamber.
4. vacuum coating equipment according to claim 3, it is characterised in that set in the vacuum pre-treatment device exit
It is equipped with the second surge chamber connected with the vacuum chamber.
5. vacuum coating equipment according to claim 1, it is characterised in that set in the vacuum coater exit
There is the 3rd surge chamber connected with the vacuum coater.
6. according to any described vacuum coating equipment in claim 1 to 5, it is characterised in that the vacuum pre-treatment device
Also include aura cleaning device and inert gas air supply system；
The aura cleaning device is arranged in the vacuum chamber；The inert gas air supply system is arranged at the vacuum chamber
Outdoor, the aura cleaning device are connected with the inert gas air supply system.
7. vacuum coating equipment according to claim 6, it is characterised in that the vacuum chamber fills with the vacuum coating
Put to be connected and arrange or be independently arranged.
8. vacuum coating equipment according to claim 1, it is characterised in that the vacuum coater is one or more
It is individual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720910795.9U CN207031542U (en) | 2017-07-25 | 2017-07-25 | A kind of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720910795.9U CN207031542U (en) | 2017-07-25 | 2017-07-25 | A kind of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207031542U true CN207031542U (en) | 2018-02-23 |
Family
ID=61462667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720910795.9U Active CN207031542U (en) | 2017-07-25 | 2017-07-25 | A kind of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207031542U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107338420A (en) * | 2017-07-25 | 2017-11-10 | 北京实力源科技开发有限责任公司 | A kind of vacuum coating method and equipment |
| CN114959628A (en) * | 2022-06-18 | 2022-08-30 | 安徽纯源镀膜科技有限公司 | Vacuum ion plating pretreatment equipment |
-
2017
- 2017-07-25 CN CN201720910795.9U patent/CN207031542U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107338420A (en) * | 2017-07-25 | 2017-11-10 | 北京实力源科技开发有限责任公司 | A kind of vacuum coating method and equipment |
| CN114959628A (en) * | 2022-06-18 | 2022-08-30 | 安徽纯源镀膜科技有限公司 | Vacuum ion plating pretreatment equipment |
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