CN207016845U - Prepare fragile metal microballoon coating sample disk - Google Patents
Prepare fragile metal microballoon coating sample disk Download PDFInfo
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- CN207016845U CN207016845U CN201720867025.0U CN201720867025U CN207016845U CN 207016845 U CN207016845 U CN 207016845U CN 201720867025 U CN201720867025 U CN 201720867025U CN 207016845 U CN207016845 U CN 207016845U
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- coating
- fragile metal
- sample disc
- microballoon
- sample
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Abstract
The utility model discloses one kind to prepare fragile metal microballoon coating sample disk, it is related to microballoon coat preparing technology field, the coating shedding for solving existing sample disc inner surface produces disintegrating slag, adheres to the surface of microballoon, the problem of causing the surface roughness of microsphere surface fragile metal coating to increase.The technical solution adopted in the utility model is：The inner surface shape in curved surface of sample disc, inner surface is rough-shape, is sequentially applied on the outside of inner surface and is coated with aluminized coating and graphite carbon coating.Aluminized coating can promote fragile metal coating stress relaxation to discharge；Graphite carbon coating can strengthen the adhesive force between fragile metal and aluminized coating, by the collective effect of two kinds of transition zones, suppress fragile metal coating and come off fragmentation from quartz specimen disk inner surface, improve microsphere surface quality.Sample disc processing method carries out surface etch cleaning treatment to the surface in sample disc using ion beam, then sputters coating aluminized coating and graphite carbon coating respectively；In addition, sample disc is reusable after simple process is processed.
Description
Technical field
It the utility model is related to microballoon coat preparing technology field, and in particular to one kind prepares the brittle gold of spherical microsphere surface
Belong to the sample disc of coating, and the processing method of the sample disc.
Background technology
In research and production activity, particularly, it is necessary in microballoon (a diameter of millimeter or Asia in inertial confinement fusion research
Grade) the various metal coatings of the uniform coating in surface, and have strict want to the surface roughness of microsphere surface metal coating
Ask.Coating process microballoon needs sample disc support, and sample disc can be also deposited to while deposition and atomic deposits to microsphere surface
Inner surface.When the coating layer thickness of the inner surface of sample disc is blocked up or stress is excessive, coating can come off from sample disc inner surface
And disintegrating slag is produced, particularly fragile metal (W, Mo etc.) coating, disintegrating slag can be adhered on the surface of motion microballoon, micro- so as to cause
The surface roughness of ball surface metal coating increases rapidly.
For example, the patent document that notification number is the U of CN 201552114 discloses a kind of Slanting type microsphere rolling device, should
Device drives microballoon disk to rotate by stepper motor, realizes that microballoon lines up to roll in microballoon disk groove, avoids microballoon and microballoon
Disk collides, and reduces the collision between microballoon, but when fragile metal overweight coating (a few micron levels), fragile metal coating because
Stress is excessive easily to come off from microsphere sample disk inner surface and produces disintegrating slag, and the microballoon in motion can attach disintegrating slag, cause microballoon
The surface roughness of surface fragile metal coating increases sharply, and has a strong impact on the quality of microsphere surface coating.
The tungsten that the sample disc inner surface of experimental test surface, quartz specimen disk or only one layer transition zone deposits 1~5 μm applies
After layer, the situation of disk undercoating local shedding fragmentation just occurs.
Utility model content
The utility model provides one kind and prepares fragile metal microballoon coating sample disk first, solves table in existing sample disc
The coating shedding in face simultaneously produces disintegrating slag, and disintegrating slag adheres to the surface of microballoon, causes the surface of microsphere surface fragile metal coating thick
Rugosity increases, the problem of having a strong impact on microsphere surface coating quality.
Technical scheme is used by the utility model solves above-mentioned technical problem：Prepare fragile metal microballoon coating sample
Disk, the inner surface shape in curved surface of sample disc, inner surface is rough-shape, is sequentially applied on the outside of inner surface and is coated with aluminized coating and graphitic carbon painting
Layer.
It is further：The thickness of the aluminized coating is 1~3 μm, and the thickness of graphite carbon coating is 0.2~0.6 μm.
It is further：The inner surface of the sample disc is in spherical cambered surface shape.
Specifically, the sample disc is quartz specimen disk.
The utility model also provides a kind of processing method for preparing fragile metal microballoon coating sample disk, including following step
Suddenly：
A, the inner surface of sample disc is carried out being roughened frosted processing；
B, sample disc is cleaned up, inserted after drying in vacuum chamber, the surface in sample disc is carried out using ion beam
Surface etch cleaning treatment, then coating aluminized coating and graphite carbon coating are sputtered respectively in sample disc inner surface；
C, taken out after being cooled to room temperature out of vacuum chamber.
Fragile metal microballoon coating sample disk is prepared to above-mentioned, after using a period of time, coating on inner surface local shedding
When disintegrating slag occurs in fragmentation, in order to solve the renovation of sample disc, the problem of to realize reuse, the utility model provides a kind of system
The processing method of standby fragile metal microballoon coating sample disk, comprises the following steps：
A, by it is used prepare fragile metal microballoon coating sample disk and be put into acid or alkaline solution be ultrasonically treated,
Dissolve aluminized coating, fragile metal coating comes off therewith；
B, with the step B of above-mentioned processing method；
C, with the step C of above-mentioned processing method.
It is further：In the step B, the thickness of aluminized coating is 1~3 μm, the thickness of graphite carbon coating for 0.2~
0.6μm。
It is further：The inner surface of the sample disc is in spherical cambered surface shape.
Specifically, the sample disc is quartz specimen disk.
The beneficial effects of the utility model are：It is rough-shape to prepare the inner surface of fragile metal microballoon coating sample disk, can
The adhesive force between aluminized coating and sample disc is improved, aluminized coating has preferable ductility, can promote fragile metal coating stress
Relaxation discharges；And graphite carbon coating can effectively strengthen the adhesive force between fragile metal and aluminized coating, so pass through two kinds of transition
The collective effect of layer can effectively suppress fragile metal coating and be come off from quartz specimen disk inner surface the situation of fragmentation, suppress microballoon sample
The increase of fragile metal Coating Surface Roughness caused by product panel surface is scaling-off, improves microsphere surface quality.
The sample disc of standby fragile metal microballoon coating is simple in construction, and raw material sources are wide, low manufacture cost, repeatable to make
With having a wide range of application, can greatly improve the surface quality of microsphere surface fragile metal coating.
Brief description of the drawings
Fig. 1 is the structural representation that the utility model prepares fragile metal microballoon coating sample disk.
Parts, position and numbering in figure：Sample disc 1, aluminized coating 2, graphite carbon coating 3.
Embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings.
As shown in figure 1, the utility model prepares fragile metal microballoon coating sample disk, the inner surface of sample disc 1 is in curved surface
Shape, such as in spherical cambered surface shape, the inner surface of sample disc 1 is rough-shape, is sequentially applied on the outside of inner surface and is coated with aluminized coating 2 and graphitic carbon
Coating 3.The thickness of aluminized coating 2 is 1~3 μm, and the thickness of graphite carbon coating 3 is 0.2~0.6 μm.Sample disc 1 is quartz specimen
Disk, inner surface is rough-shape, can improve the adhesive force between aluminized coating 2 and quartz specimen disk.Aluminized coating 2, which has, preferably to extend
Property, fragile metal coating stress relaxation can be promoted to discharge, graphite carbon coating 3 can strengthen attached between fragile metal and aluminized coating 2
Put forth effort.
In addition, aluminized coating 2 can be had certain adhesive force and other coatings of ductility to substitute by other, for example, gold plating or
Copper coating, but because the adhesive force between gold plating and copper coating and quartz specimen disk is slightly poor, its effect will with respect to aluminized coating 2
Difference, so it is preferred scheme to consider from aluminized coating.Correspondingly, graphite carbon coating 3 can also be substituted with titanium coating, simply
Effect will difference.
Aluminized coating 2 and graphite carbon coating 3 are used as two kinds of transition zones, and collective effect suppresses fragile metal coating from quartz specimen
The inner surface of disk 1 comes off fragmentation, reduce the surface of sample disc 1 it is scaling-off caused by fragile metal Coating Surface Roughness increased feelings
Condition, improve microsphere surface quality.The sample disc inner surface deposition 1~5 of testing surface, quartz specimen disk or only one layer transition zone
μm tungsten coating after, the situation of disk undercoating local shedding fragmentation just occurs, and the utility model prepares fragile metal microballoon
Coating sample disk can deposit situation of the tungsten coating without the fragmentation that substantially comes off of 20 μ m-thicks.
The utility model also provides a kind of above-mentioned processing method for preparing fragile metal microballoon coating sample disk, including following
Step：
A, the inner surface of sample disc 1 is carried out being roughened frosted processing, wherein sample disc 1 is quartz material, sample disc 1
Inner surface is in spherical cambered surface shape.
B, sample disc 1 is cleaned up, inserts in vacuum chamber after drying, the surface in sample disc 1 is entered using ion beam
Row surface etch cleaning treatment, then coating aluminized coating 2 and graphite carbon coating 3 are sputtered respectively in the inner surface of sample disc 1；Wherein, aluminium
The thickness of coating 2 is 1~3 μm, and the thickness of graphite carbon coating 3 is 0.2~0.6 μm.The rough inner surface of sample disc 1 and ion beam
Etch cleaner can effectively improve the adhesive force between aluminized coating 2 and sample disc 1.
C, taken out after being cooled to room temperature out of vacuum chamber, prepare fragile metal microballoon coating sample disk.
To it is above-mentioned it is of the present utility model prepare fragile metal microballoon coating sample disk, when using a period of time after, inner surface
When there is disintegrating slag in coating local shedding fragmentation, in order to realize renovation, with reuse, the utility model provide one kind prepare it is brittle
The processing method of metallic microspheres coating sample disk, comprises the following steps：
A, by it is used prepare fragile metal microballoon coating sample disk and be put into acid or alkaline solution be ultrasonically treated,
Dissolve aluminized coating 2, fragile metal coating comes off therewith, obtains clean quartz specimen disk.
B, with the step B of above-mentioned processing method；
C, with the step C of above-mentioned processing method.
The processing method that above two prepares fragile metal microballoon coating sample disk, implementation cost is low, is easy to make for crisp
The sample disc of hard metal microballoon coating；And can renovate, realize and reuse, greatly improve microsphere surface fragile metal coating
Surface quality.
Claims (4)
1. prepare fragile metal microballoon coating sample disk, it is characterised in that：The inner surface shape in curved surface of sample disc (1), inner surface
It is rough-shape, sequentially applied on the outside of inner surface and be coated with aluminized coating (2) and graphite carbon coating (3).
2. prepare fragile metal microballoon coating sample disk as claimed in claim 1, it is characterised in that：The aluminized coating (2)
Thickness is 1~3 μm, and the thickness of graphite carbon coating (3) is 0.2~0.6 μm.
3. prepare fragile metal microballoon coating sample disk as claimed in claim 1, it is characterised in that：The sample disc (1)
Inner surface is in spherical cambered surface shape.
4. prepare fragile metal microballoon coating sample disk as claimed in claim 1, it is characterised in that：The sample disc (1) is
Quartz specimen disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720867025.0U CN207016845U (en) | 2017-07-17 | 2017-07-17 | Prepare fragile metal microballoon coating sample disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720867025.0U CN207016845U (en) | 2017-07-17 | 2017-07-17 | Prepare fragile metal microballoon coating sample disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207016845U true CN207016845U (en) | 2018-02-16 |
Family
ID=61484360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720867025.0U Withdrawn - After Issue CN207016845U (en) | 2017-07-17 | 2017-07-17 | Prepare fragile metal microballoon coating sample disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207016845U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107217234A (en) * | 2017-07-17 | 2017-09-29 | 中国工程物理研究院激光聚变研究中心 | Prepare fragile metal microballoon coating sample disk and its processing method |
-
2017
- 2017-07-17 CN CN201720867025.0U patent/CN207016845U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107217234A (en) * | 2017-07-17 | 2017-09-29 | 中国工程物理研究院激光聚变研究中心 | Prepare fragile metal microballoon coating sample disk and its processing method |
| CN107217234B (en) * | 2017-07-17 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | Sample tray for preparing brittle and hard metal microsphere coating and processing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180216 Effective date of abandoning: 20230613 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20180216 Effective date of abandoning: 20230613 |