CN2070036U - High-efficiency simple silicon etching cup - Google Patents
High-efficiency simple silicon etching cup Download PDFInfo
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- CN2070036U CN2070036U CN 90206331 CN90206331U CN2070036U CN 2070036 U CN2070036 U CN 2070036U CN 90206331 CN90206331 CN 90206331 CN 90206331 U CN90206331 U CN 90206331U CN 2070036 U CN2070036 U CN 2070036U
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- cup
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Abstract
The utility model discloses a high-efficiency simple silicon etching cup which is a quartz glass product in glass style. Because a toroid water tank sealing replaces a milling ostium sealing between the cover and bottom of the cup, the section of the cup cover is a sandwich layer condensing coil pipe framework. The utility model has the advantages of safety assurance, low cost, no force on the cover ostium, convenient switching, little possibility of damage, favorable interchange ability of components and long service life compared with a homogeneous material milling cup. The utility model can replace milling ostium reflux condensing arrangements in the system of chemistry, electrochemical industry and chemical industry widely.
Description
The utility model relates to a kind of half guiding element device that is used to make, and finishes the corrosion tool of silicon slice corrosion operation.
The anisotropic corrosion technique of silicon has become domestic and international semiconductor device now and has made an important techniques, having become device key of success technology aspect large scale integrated circuit and the Sensitive Apparatus making, be the problem that need at first solve and select appropriate corrosive liquid and rational etching system for use.All at high temperature carry out with regard to several corrosive liquid corrosion of comparatively extensively adopting at present, the variation that Different Red divides the difference of volatilization degree to cause the corrosive liquid proportioning in the corrosive liquid under the high temperature will affect corrosion rate and corrosion quality.For addressing this problem, mostly adopt at present the condenser system device with the ground sealing.The shortcoming of (general chemical reaction system most also adopt this system) this device is: when 1. the ground place makes will to grind, production process is numerous and diverse, improved the cost of manufacture of device; 2. the ground place seals key, and is in use for guaranteeing that the sealing effectiveness ground all covers tightlyer, just relatively difficult when needs are opened; 3. the ground place slightly has damage namely to affect sealing, thereby affects result of use; 4. ground does not have interchangeability, damages a side and then all scraps, and has strengthened use cost; When using the ethylenediamine corrosive liquid, ethylenediamine at high temperature evaporates from solution and in the ground cohesion, the ground place is tightly clung especially, causes the unlatching ground very difficult, and very easily damages ground.This phenomenon also can usually occur in other chemical reaction.
The purpose of this utility model is that the silicon slice corrosion instrument that proposes a kind of new structure namely corrodes cup, and this glass should not only have good sealing, and in use easily operation, and corrosion cup ground is difficult for opening in the prior art to solve,, flimsy problem.
With ethylenediamine corrosive liquid corrosion Si sheet the time, the utility model adopts the water ring hermetically-sealed construction with the shirt rim to replace the ground structure, shown in figure one.The corrosion cup of this structure is made up of two parts: cup section rim of a cup place, bottom periphery has a cannelure, and the outer rim height of this groove is a little less than the rim of a cup height, thereby the water that has guaranteed the sealing cannelure does not enter the composition that influences corrosive liquid in the cup; The cup side is left an air inlet and is chewed, and in corrosion process, feed protective gas and prevent that corrosive liquid is oxidized, as not needing protective gas, then can the latex pipe clamp is dead.The seam of top bowl cover polycrystalline substance for matching with the cup cannelure; Serpentine condenser is at the bowl cover bottom opening, to guarantee in time to discharge the gas that course of reaction produces; Coiled pipe is outside all to be surrounded by cooling water, and cooling water is injected into bottom the bowl cover, overflows from top, is back in the corrosive liquid after can guaranteeing to arrive the bowl cover bottom surface like this and entering the abundant condensation of volatile matter in the coiled pipe again and goes.
Needing to add gentleness in corrosion process whisks son and can directly place corrosive liquid.Practicality more than a year, proving effect is good.
For solving Si sheet in some device fabrication process and the collision problem that whisks son, retrofit on the basis of figure one, at the bottom of cup, add support, or will make stepped ramp type at the bottom of the cup, the size in space is decided by Si sheet diameter.
In order to realize the galvano-cautery that adds of Si sheet, produce the III type again in addition, the difference of III type and I type is that there is the electrode outlet line hole at the bowl cover place.According to required number of electrodes, can make 2 holes, 3 holes so that 4 holes and not wait.If with the sealing of electrode fairlead, also can replace the I type to use.
The corrosion cup of above-mentioned three kinds of structures has all reached and has given the effect of thinking.Facts have proved.The corrosion cup of this series has the following advantages:
1. rim of a cup place water ring sealing has guaranteed sealing effectiveness;
2. the bowl cover bottom is topped by initial cooling water, and condensation effect is good;
3. the rim of a cup place does not have ground, and is easy to loading and unloading, do not stress.Not fragile;
4. if the bowl cover stop portion causes breakage owing to careless, as long as seam breakage height is no more than glass height of bottom annular groove outer rim behind the buckle closure, still can continue to use;
5. owing to be not that ground cooperates,, there is fabulous interchangeability at bowl cover and the cup end, and needing only processing dimension identical is alternative use, has damaged parts and needn't a complete set scrap.
Therefore, it is not only easy to use, reliable to adopt this corrosion cup to form Si sheet etching system, and can greatly reduce system cost and Si sheet corrosion processing cost.
Except the semiconductor devices industry is used for the corrosion of Si sheet; but this corrosion cup also wide popularization and application in chemistry, electrochemical reaction test system; in school's chemistry condensing reflux experimental rig, also can adopt this water ring hermetically-sealed construction to replace ground, have widely dissemination.
Description of drawings:
Fig. 1 is the structural representation of this corrosion cup, and 1 is cannelure among the figure, and 2 is bowl cover root edge seam, and 3 is air inlet, and 4 is coil condenser, and 5 is the condenser opening.
Fig. 2 is II shape corrosion cup cup section stereogram, and 8,9,10 is the cup inner support among the figure, and 11 is cup base frame rank.
Fig. 3 is III type corrosion cup structure schematic diagram.12,13 is the electrode fairlead among the figure, and 14 is corrosive liquid, and 15 are the condensation water, and 16 for whisking son.
Claims (3)
1, a kind of silicon slice corrosion cup, its hermetically-sealed construction is the ground hermetically-sealed construction, of the present utility model being characterised in that adopts the water ring hermetically-sealed construction of band shirt rim to replace original ground structure, the corrosion cup is made up of two parts, the bottom is with a cannelure outside the cup section rim of a cup place, and the outer rim height of this groove is a little less than the rim of a cup height, and top bowl cover bottom margin is the seam that matches with above-mentioned cannelure, a suction nozzle is left in the cup side, serpentine condenser is arranged and at the bowl cover bottom opening in the bowl cover portion.
2, corrode as claimed in claim 1 cup, it is characterized in that a corrosion cup inboard is provided with three supports, stepped ramp type is made at a cup end.
3, corrosion cup as claimed in claim 1 is characterized in that there is the electrode outlet line hole at the bowl cover place, and the number in hole is 2-4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90206331 CN2070036U (en) | 1990-04-28 | 1990-04-28 | High-efficiency simple silicon etching cup |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90206331 CN2070036U (en) | 1990-04-28 | 1990-04-28 | High-efficiency simple silicon etching cup |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2070036U true CN2070036U (en) | 1991-01-23 |
Family
ID=4886941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90206331 Withdrawn CN2070036U (en) | 1990-04-28 | 1990-04-28 | High-efficiency simple silicon etching cup |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2070036U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100341119C (en) * | 2004-12-20 | 2007-10-03 | 华中科技大学 | Silicon microbridge corrosion unit for ferroelectric film infrared detector |
| CN101991325A (en) * | 2010-09-30 | 2011-03-30 | 吴海 | Double-cup connecting loop |
| CN104667559A (en) * | 2013-12-03 | 2015-06-03 | 昆山国显光电有限公司 | Etching acid mist dissociating device |
-
1990
- 1990-04-28 CN CN 90206331 patent/CN2070036U/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100341119C (en) * | 2004-12-20 | 2007-10-03 | 华中科技大学 | Silicon microbridge corrosion unit for ferroelectric film infrared detector |
| CN101991325A (en) * | 2010-09-30 | 2011-03-30 | 吴海 | Double-cup connecting loop |
| CN104667559A (en) * | 2013-12-03 | 2015-06-03 | 昆山国显光电有限公司 | Etching acid mist dissociating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |