CN206998617U - 弧面磨盘在线修整机构 - Google Patents
弧面磨盘在线修整机构 Download PDFInfo
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- CN206998617U CN206998617U CN201720899128.5U CN201720899128U CN206998617U CN 206998617 U CN206998617 U CN 206998617U CN 201720899128 U CN201720899128 U CN 201720899128U CN 206998617 U CN206998617 U CN 206998617U
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CN201720899128.5U CN206998617U (zh) | 2017-07-24 | 2017-07-24 | 弧面磨盘在线修整机构 |
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Cited By (1)
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CN108581843A (zh) * | 2018-04-28 | 2018-09-28 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 抛光修整装置及研磨抛光设备 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108581843A (zh) * | 2018-04-28 | 2018-09-28 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 抛光修整装置及研磨抛光设备 |
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Effective date of registration: 20210325 Address after: 518000 floor 1-2, building 1, Baotang hi tech Industrial Park, Tangwei village, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Fonda Semiconductor Equipment Co.,Ltd. Address before: 518000 1-2 / F, building 1, Baotang hi tech Industrial Park, Tangwei village, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN FONDA GRINDING TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210423 Address after: 518000 Room 201, building 34, block B, Yuanshan Industrial Zone, Shangcun community, Gongming street, Guangming District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Mengqi Semiconductor Equipment Co.,Ltd. Address before: 518000 floor 1-2, building 1, Baotang hi tech Industrial Park, Tangwei village, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Fonda Semiconductor Equipment Co.,Ltd. |