CN206997020U - The piezoelectric supersonic generator of multi-frequency - Google Patents
The piezoelectric supersonic generator of multi-frequency Download PDFInfo
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- CN206997020U CN206997020U CN201720717544.9U CN201720717544U CN206997020U CN 206997020 U CN206997020 U CN 206997020U CN 201720717544 U CN201720717544 U CN 201720717544U CN 206997020 U CN206997020 U CN 206997020U
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- mems cantilever
- frequency
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- supersonic generator
- piezoelectric
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Abstract
The utility model discloses a kind of piezoelectric supersonic generator of multi-frequency, is a kind of small volume, in light weight, simple to operate, frequency-adjustable, and be easy to the novel ultrasonic generator integrated with other devices.The piezoelectric supersonic generator of the multi-frequency is using High Resistivity Si as substrate, MEMS cantilever beam pull-down electrodes are provided with substrate, MEMS cantilever beam bridge piers are provided with MEMS cantilever beam pull-down electrodes, MEMS cantilever beams are provided with MEMS cantilever beam bridge piers, piezoelectric ZnO is provided between MEMS cantilever beams and MEMS cantilever beam pull-down electrodes.The utility model is due to having different length in MEMS cantilever arrays, characteristic frequency is different, so as to realize the ultrasonic wave of multi-frequency.
Description
Technical field
Piezoelectric supersonic generator of a kind of multi-frequency and preparation method thereof is the utility model is related to, belongs to ultrasound, microelectronics
Mechanical system technique field.
Background technology
Ultrasonic wave is the sound wave that a kind of frequency is higher than 20000 hertz, and ultrasonic wave is approximately equal to listening for people because of its lower-frequency limit
Feel the upper limit and gain the name.Ultrasonic wave has the characteristics such as pack, orientation and reflection, transmission, thus produces, propagates and connect by ultrasonic wave
The process of receipts is so as to completing a kind of ultrasonic technique.
Over nearly more than 20 years, with the rapid development of MEMS technology, in-depth study is carried out to MEMS cantilever beam structures so that
MEMS technology is possibly realized applied to ultrasonic generator.Ultrasonic technique has extensively in the fields such as biomedicine, collection of energy
Application.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of piezoelectric supersonic generator of multi-frequency, by using
The MEMS cantilever beam Technology designs MEMS cantilever beams of different length, so as to realizing the frequency Sexual behavior mode of ultrasonic generator.This is super
Acoustic generator has miniaturized structure, simple to operate, it is easy of integration the features such as.
The utility model uses following technical scheme to solve above-mentioned technical problem：
The utility model provides a kind of piezoelectric supersonic generator of multi-frequency, the piezoelectric supersonic generator using silicon as substrate,
MEMS cantilever beams pull-down electrode and MEMS cantilever beam bridge piers are provided with a silicon substrate；The MEMS cantilever beams bridge pier is provided with MEMS
Cantilever array, one end of each MEMS cantilever beams in the MEMS cantilever arrays are fixed on MEMS cantilever beam bridge piers,
The other end is free end；Each MEMS cantilever beams are respectively arranged below a MEMS cantilever beam pull-down electrode, each MEMS cantilevers
Piezoelectric material layer is provided with beam pull-down electrode.
As further prioritization scheme of the present utility model, each MEMS cantilever beams length in MEMS cantilever arrays is equal
Differ.
As further prioritization scheme of the present utility model, the MEMS cantilever beams number in MEMS cantilever arrays is 5.
As further prioritization scheme of the present utility model, the silicon substrate is High Resistivity Si SOI substrate.
As further prioritization scheme of the present utility model, piezoelectric ZnO.
The utility model compared with prior art, has following technique effect using above technical scheme：
1st, the piezoelectric supersonic generator has the MEMS cantilever array structures of different length, therefore can produce different frequencies
The ultrasonic signal of rate, can be the ultrasonic signal or the continuous ultrasonic signal of frequency of a series of frequency-distributeds；
2nd, the piezoelectric supersonic generator has the MEMS cantilever array structures of different length, therefore can improve system
Efficiency caused by ultrasound, and the fault-tolerant error of system frequency can be improved；
3rd, the piezoelectric supersonic generator is using MEMS cantilever beam structures, therefore the structure has small volume, in light weight,
It is easy to other devices to integrate, such as implantating biological chip.
Brief description of the drawings
Fig. 1 is the top view of the piezoelectric supersonic generator of different length MEMS cantilever array structures.
Fig. 2 is the sectional view of unifrequent piezoelectric supersonic generator.
In figure：1 is silicon substrate, and 2 be MEMS cantilever beam pull-down electrodes, and 3 be MEMS cantilever beams, and 4 be MEMS cantilever beam bridge piers,
5 be piezoelectric ZnO layer, and 6 be MEMS cantilever beam fixing ends, and 7 be MEMS cantilever beams free end.
Fig. 3 is the sectional view that unifrequent piezoelectric supersonic generator after voltage drive is added between upper bottom crown.
Embodiment
The technical solution of the utility model is described in further detail below in conjunction with the accompanying drawings：
The utility model provides a kind of piezoelectric supersonic generator of multi-frequency, using High Resistivity Si as substrate 1, is designed on substrate
There are MEMS cantilever beams pull-down electrode 2, the array of MEMS cantilever beams 3 of different length, piezoelectric ZnO layer 5.As shown in figure 1, will not
With the MEMS cantilever arrays and two parallel conductive plates of the MEMS cantilever beams pull-down electrode as capacitor of length, centre has one
Fixed interval.MEMS cantilever beams one end of different length is fixed on bridge pier 4 as fixing end, the other end as free end can more than
Lower movement.
If applying voltage between MEMS cantilever beams pull-down electrode 2 and MEMS cantilever beams 3, because MEMS cantilever beams are fixed
Hold that 6 is irremovable and MEMS cantilever beams free end 7 can move up and down, MEMS cantilever beams 3 are in electrostatic force after voltage is applied
Under can bend.When bending sufficiently large, MEMS cantilever beams free end 7 can be touched on piezoelectric ZnO 5, now MEMS cantilevers
Electrical potential difference between beam pull-down electrode 2 and MEMS cantilever beams 3 reduces, and electrostatic force reduces, in the elastic-restoring force of MEMS cantilever beams 3
Under effect, MEMS cantilever beams 3 return to initial position.Then, electrostatic force once more pulls downward on MEMS cantilever beams, repeatedly this
Process.Because MEMS cantilever beams 3 have different length, characteristic frequency is also different, so as to which this structure can produce multi-frequency
Ultrasonic wave.
Unifrequent piezoelectric supersonic generator between upper bottom crown as shown in Fig. 2 add voltage drive, when voltage reaches
During certain value, MEMS cantilever beams free end can start to bend under electrostatic force.The size of the electrostatic force depends on being added in two
The length of the voltage swing at end, parallel electrode plate spacing and MEMS cantilever beams.When bending to a certain degree, MEMS cantilevers
Beam free end can touch piezoelectric ZnO as shown in figure 3, being at this moment equivalent to connect capacitor positive/negative plate, capacitor
Electric discharge, electrostatic force disappear.In the presence of elastic-restoring force, MEMS cantilever beams can return to initial position.Then, electrostatic force is again
MEMS cantilever beams are pulled downward on again, repeatedly this process, so as to produce with MEMS cantilever beam characteristic frequency identical ultrasonic waves,
MEMS cantilever beams length is different, and characteristic frequency is different.In repetitive process, because MEMS cantilever beams length is different, eigenfrequency
Difference, therefore the piezoelectric ultrasonic of multi-frequency can be produced, ultrasonic frequency can realize from 20kHz to 800kHz scope.
The piezoelectric supersonic generator of the utility model multi-frequency uses the MEMS cantilever arrays of five different lengths, each
A MEMS cantilever beams pull-down electrode and a piezoelectric ZnO are respectively arranged below MEMS cantilever beams.By in MEMS cantilevers
Apply voltage between beam pull-down electrode and MEMS cantilever beams, due to electrostatic force, the MEMS cantilever beams of such different length just have
Different degrees of bending.When bending to a certain degree, MEMS cantilever beams will touch piezoelectric ZnO, at this moment electrostatic
Power, which reduces, even to disappear, and MEMS cantilever beams return to initial position, quiet when MEMS cantilever beams leave piezoelectric ZnO
Electric power gradually recovers, and again pulls down MEMS cantilever beams, so repeatedly.Due to having different length in MEMS cantilever arrays
Degree, characteristic frequency is different, so as to realize the ultrasonic wave of multi-frequency.
Its preparation method of the piezoelectric supersonic generator of multi-frequency is：
（1）Prepare silicon substrate：What is selected is High Resistivity Si SOI substrate；
（2）Photoetching：Remove the photoresist in MEMS cantilever beam pull-down electrodes, MEMS cantilever beam bridge piers；
（3）Sputtering gold：MEMS cantilever beams pull-down electrode and MEMS cantilever beam bridge piers are formed, thickness is 0.5 μm；
（4）Deposit piezoelectric ZnO layer：Pulled down with plasma enhanced CVD method technique in MEMS cantilever beams
The piezoelectric ZnO layer of 1 μ m thick is grown on electrode；
（5）Deposit simultaneously photoetching polyimide sacrificial layer：Coat the polyimide sacrificial layer of 1 μ m-thick, it is desirable to fill up pit, gather
The thickness of acid imide sacrifice layer determines the height between different length MEMS cantilever beams and MEMS cantilever beam pull-down electrodes, photoetching
Polyimide sacrificial layer, only retain the sacrifice layer under cantilever beam；
（6）Plating gold；Different length MEMS cantilever beams are electroplated, golden thickness is 1 μm；
（7）Releasing sacrificial layer；The polyimide sacrificial layer below different length MEMS cantilever beam structures is discharged with developer solution,
And be dehydrated with absolute ethyl alcohol, form the different length MEMS cantilever beam structures of suspension.
Distinguish whether be the structure standard it is as follows：
The ultrasonic generator structure is using the different MEMS cantilever array structures of five length.Operation principle is：Pass through
DC voltage is applied to different length MEMS cantilever arrays and MEMS cantilever beams pull-down electrode, so under electrostatic force not
Different degrees of bending is just had with length MEMS cantilever beams.When bending to a certain degree, will be connect with piezoelectric ZnO
Touch, electrostatic force, which reduces, even to disappear, and elastic force causes MEMS cantilever beams to return to initial position.Then electrostatic force gradually recovers,
Said process is repeated, the MEMS cantilever beams of different length produce vibration, produce ultrasonic wave.Due to having in MEMS cantilever arrays
Different length, characteristic frequency is different, so as to realize the ultrasonic wave of multi-frequency.
Meet that the structure of conditions above is considered as the piezoelectric supersonic generator of multi-frequency of the present utility model.
It is described above, the embodiment only in the utility model, but the scope of protection of the utility model not office
It is limited to this, any people for being familiar with the technology is in the technical scope disclosed by the utility model, it will be appreciated that the conversion expected is replaced
Change, should all cover within scope of the present utility model, therefore, the scope of protection of the utility model should be with claim
The protection domain of book is defined.
Claims (5)
1. the piezoelectric supersonic generator of multi-frequency, it is characterised in that the piezoelectric supersonic generator is using silicon as substrate, on a silicon substrate
Provided with MEMS cantilever beams pull-down electrode and MEMS cantilever beam bridge piers；The MEMS cantilever beams bridge pier is provided with MEMS cantilever beam battle arrays
Arrange, one end of each MEMS cantilever beams in the MEMS cantilever arrays is fixed on MEMS cantilever beam bridge piers, and the other end is
Free end；Each MEMS cantilever beams are respectively arranged below a MEMS cantilever beam pull-down electrode, each MEMS cantilever beams drop-down electricity
Piezoelectric material layer is provided with extremely.
2. the piezoelectric supersonic generator of multi-frequency according to claim 1, it is characterised in that in MEMS cantilever arrays
Each MEMS cantilever beam length differs.
3. the piezoelectric supersonic generator of multi-frequency according to claim 1, it is characterised in that in MEMS cantilever arrays
MEMS cantilever beams number is 5.
4. the piezoelectric supersonic generator of multi-frequency according to claim 1, it is characterised in that the silicon substrate is High Resistivity Si
SOI substrate.
5. the piezoelectric supersonic generator of multi-frequency according to claim 1, it is characterised in that piezoelectric ZnO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720717544.9U CN206997020U (en) | 2017-06-20 | 2017-06-20 | The piezoelectric supersonic generator of multi-frequency |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720717544.9U CN206997020U (en) | 2017-06-20 | 2017-06-20 | The piezoelectric supersonic generator of multi-frequency |
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| CN206997020U true CN206997020U (en) | 2018-02-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107413612A (en) * | 2017-06-20 | 2017-12-01 | 南京邮电大学 | Piezoelectric supersonic generator of multi-frequency and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107413612A (en) * | 2017-06-20 | 2017-12-01 | 南京邮电大学 | Piezoelectric supersonic generator of multi-frequency and preparation method thereof |
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Effective date of registration: 20221221 Address after: Room 1284, Block D, Tengfei Building, No. 88, Jiangmiao Road, Yanchuangyuan, Nanjing District, China (Jiangsu) Pilot Free Trade Zone, 211800, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: 210023 9 Wen Yuan Road, Qixia District, Nanjing, Jiangsu. Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |
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