CN206862281U - The optical detection apparatus of wire rod - Google Patents
The optical detection apparatus of wire rod Download PDFInfo
- Publication number
- CN206862281U CN206862281U CN201621151481.7U CN201621151481U CN206862281U CN 206862281 U CN206862281 U CN 206862281U CN 201621151481 U CN201621151481 U CN 201621151481U CN 206862281 U CN206862281 U CN 206862281U
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- Prior art keywords
- wire rod
- detection apparatus
- optical detection
- base
- wire
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Abstract
The utility model belongs to testing equipment field, is more particularly to used for the optical detection apparatus of cutting steel wire cut to silicon chip.The optical detection apparatus of wire rod, it includes the base of carrying, and one group of bearing is arranged with base, and bearing is provided with the collimator assembly for being clamped, being tensioned and rotating to wire rod；Optical imaging assemblies, optical imaging assemblies are movably connected on base between bearing, and can be moved back and forth；The utility model designs a kind of optical detection apparatus of the wire rod of automation, under the working condition of simulation wire, fast and accurately the space structure of wire can be measured, the quality of wire is judged.
Description
Technical field
The utility model belongs to testing equipment field, is more particularly to used for the optics of cutting steel wire cut to silicon chip
Detection means.
Background technology
Multi-wire saw is using wire as carrier, and super hard abrasive is carried in high-speed motion by wire, passes through abrasive material
Rolling is carried out to high hard material (such as crystalline silicon, carborundum, sapphire, crystal etc.) and digs grinding to realize cutting.Which is to cut
The advantages that efficiency high, cutting saw kerf are small, material loses less, cutting accuracy is high, surface quality is good is as current main producer
Formula.Wherein, carrier of the wire as carrying abrasive material, the ability of stability and carrying abrasive material in cutting process, for
Cutting efficiency and product quality play extremely important effect.
Now widely used wire is the smooth circular configuration in surface (linear wire), and it has the prominent advantages that
Wire can uniformly carry abrasive material around the direction of its cutting feeding, so as to bring stable cutting surfaces quality.Generally
In the case of, the surface area of wire can be increased by increasing the diameter of wire, so as to strengthen the energy that wire carries abrasive material
For power to improve cutting efficiency, cost is that the width that thus can cause saw kerf increases, so as to bring material loss in cutting process
Increase.The lifting of cutting efficiency also can be by increasing abrasive material the mode such as average grain diameter and corner angle sharpness realize.
Because the wire of circular configuration carries the limited in one's ability of abrasive material, people have devised various structural metals
Silk, to improve the ability that wire carries abrasive material, how the quality of wire control, this is just needed to wire
The structure and parameter on surface measures.
The detection to wire mainly carries out artificial hand by measuring projector to the structure of wire in the prior art
Dynamic measurement,
First, the two-dimensional projection of the wire of measuring projector measurement, can only measure the structure in a certain measurement direction, and
Incisory wire is three-D space structure body, measures the structure on different directions, it is necessary to manually be rotated to wire,
The problem of both ends rotation is asynchronous, and wire there may be torsion in rotation process be present, measurement accuracy is poor, can not be accurate
Qualification determination is carried out to the structure of wire；And in the prior art load testing can not be carried out to metal, wire can not be simulated
Working condition is tested；
Secondly, silicon chip cutting wire diameter between 0.08-0.60mm, the structure on its surface it is smaller,
At 5 μm, its last precision is all manually estimated to read out the measurement accuracy of measuring projector of the prior art, precision compared with
Difference, for some trickle structural failures, possibly it can not measure, but this trickle error, it is right in silicon chip cutting process
Serious influence be present in the quality of silicon chip surface.
The content of the invention
For above-mentioned technical problem, the utility model designs a kind of optical detection apparatus of the wire rod of automation, is simulating
Under the working condition of wire, fast and accurately the space structure of wire can be measured, the quality of wire is entered
Row judges.
Realize that the technical solution of the utility model is as follows：
The optical detection apparatus of wire rod, it includes the base of carrying, is arranged with one group of bearing on base, its feature exists
In：
Bearing is provided with the collimator assembly for being clamped, being tensioned and rotating to wire rod；
Optical imaging assemblies, optical imaging assemblies are movably connected on base between bearing, and can be carried out reciprocal
Motion；
The utility model is clamped fixation to wire by collimator assembly, and can apply pulling force on the metal filament
The working condition of wire is simulated, and can be rotated, the convenient space structure to wire measures, the optical imagery of setting
Component can be moved back and forth, and the structure of the wire on a segment distance is measured.
Described collimator assembly includes being separately positioned on bearing determining rotary components and dynamic rotary components, determines rotary components
With the centering component to wire rod positioning is provided with dynamic rotary components, the centering component of setting is used to wire rod be fixed,
Guarantee determines rotary components and dynamic rotary components on the same axis.
The lazy-tongs that rotary components and dynamic rotary components synchronous axial system are determined in driving are additionally provided with described bearing, setting
Lazy-tongs drive simultaneously determines rotary components and dynamic rotary components, avoids the problem of wire rod reverses in measurement process, ensures
The precision of measurement.
Described lazy-tongs include the synchronous rotating shaft being arranged on two bearings, and bearing is provided with driving synchronous rotating shaft
Synchronous motor, synchronous rotating shaft are connected by timing belt with determining rotary components and dynamic rotary components.
The described rotating shaft determined rotary components and include being connected on bearing, one end of rotating shaft is provided with universal adjustment component, fixed
Heart component is connected on universal adjustment component, and bearing is provided with axle sleeve, and rotating shaft is arranged in the axle sleeve of bearing, and roller end is set
Universal adjustment component can realize the fine settings of all directions, ensure the precision of wire rod both ends positioning, centering component is used for line
Material is positioned and clamped.
Pulling force sensor is provided between rotating shaft and universal adjustment component, pulling force sensor is used for being applied on wire rod
Pulling force is detected, the accurate use environment for simulating wire rod.
Described dynamic rotary components include the turning set being connected on bearing, and the connection slided is provided with described turning set
Axle, one end of connecting shaft are provided with universal adjustment component, and centering component is connected on universal adjustment component, and the other end is provided with driving and connected
The pretension power set that spindle is slided.
Described optical imaging assemblies include projection sensor, and projection sensor is connected on reciprocating mechanism, back and forth
Motion is connected on base.
Described reciprocating mechanism includes the slide rail being arranged on base, and Mobile base is movably connected on slide rail, is projected
Sensor is connected on Mobile base, and servomotor is provided with described base, and servomotor is connected with screw mandrel, screw mandrel and movement
Seat connection, or described reciprocating mechanism include being arranged on linear electric motors on base, and Mobile base is connected to linear electric motors
On, projection sensor is connected on Mobile base.
Centering component includes fixed block, has a plane on fixed block, and plane includes mounting plane and positioning plane, also
Including adjustment block, adjustment block is connected on the mounting plane of fixed block, has clinoplain, clinoplain in described adjustment block
With positioning planar shaped forming V-shape positioning area, described clinoplain and positioning plane as the acclive plane of tool.
Described universal adjustment component includes connecting portion, and connecting portion is provided with universal regulating mechanism, universal regulating mechanism with
Clamping part connects, and on the holder portion, the universal regulating mechanism of setting can be adjusted the connection of centering component to the axis of clamping part
Section, ensure dynamic rotary components and determine the centering component of rotary components on the same axis.
Described universal regulating mechanism includes the adjustment hole on the connecting portion axial end that sets, uniform on connecting portion side face
Provided with the adjusting screw for stretching into adjustment hole, the axial end of described clamping part is provided with adjustable column, and adjustable column stretches into adjustment hole
Interior and be connected with adjusting screw, the axial end of described clamping part is provided with retaining ring, and retaining ring passes through screw and connecting portion
Axial end connects.
Described universal regulating mechanism includes the regulation locking hole being uniformly arranged on connecting portion axial end, the clamping part
The axis of end face be provided with ball bumps, the clamping part of ball bumps surrounding is provided with connection ring, passes through regulation in connection ring
Lock-screw is connected with regulation locking hole, and the axial end of described ball bumps and connecting portion offsets.
In summary, the utility model has the advantages that：
1st, the utility model is clamped fixation to wire by collimator assembly, and can apply pulling force on the metal filament
To simulate the working condition of wire, solve the problems, such as that original wire can not accurately reinforce test；And can rotate, it is convenient
The space structure of wire is measured, the optical imaging assemblies of setting can move back and forth, to the metal on a segment distance
The structure of silk measures.
2nd, wire uses open clamping in the utility model, and clamping, and universal tune can be quickly carried out to wire rod
Section component can be rapidly performed by the regulation of axiality, realize the automation of the space structure measurement of wire rod, and measuring speed is fast,
The problem of precision is high, overcomes low precision existing for manual measurement in the prior art, and efficiency is low, further, the utility model
Stability Analysis of Structures, do not disturbed by external factor, improve the uniformity of test product, that is, also improve by wire processing and
Into product yield.
Brief description of the drawings
Fig. 1 is the structural representation of the optical detection apparatus of wire rod；
Fig. 2 is the structural representation of dynamic rotary components；
Fig. 3 is the structural representation for determining rotary components；
Fig. 4 is the structural representation of centering component；
Fig. 5 is the exploded perspective view of universal adjustment component；
Fig. 6 is the schematic elevation view after Fig. 5 combination；
Fig. 7 be Fig. 6 in A-A to schematic cross-sectional view；
Fig. 8 is the exploded perspective view of the universal adjustment component of another way；
Fig. 9 is the schematic elevation view after Fig. 8 combinations；
Figure 10 is the structural representation of optical image unit；
1 is base in figure, and 2 be bearing, and 21 be axle sleeve, and 3 be optical imaging assemblies, and 4 is determine rotary components, and 5 be dynamic rotation
Component, 6 be lazy-tongs, and 7 be universal adjustment component, and 8 be centering component, and 41 be rotating shaft, and 42 be pulling force sensor, and 51 be rotation
Set, 52 be connecting shaft, and 53 be pretension power set, and 31 is project sensor, and 32 be reciprocating mechanism, and 321 be guide rail, 322
It is screw mandrel for Mobile base, 324,81 be adjustment block, and 82 be fixed block, and 811 be clinoplain, and 821 be mounting plane, and 822 be fixed
Bit plane, 83 be V-arrangement positioning area, and 71 be connecting portion, and 73 be clamping part, and 711 be adjustment hole, and 72 be retaining ring, and 74 be screw, 75
It is adjusting screw for adjustable column, 76,712 be regulation locking hole, and 78 be connection ring, and 79 be regulation lock-screw, and 790 be spherical convex
Rise.
Embodiment
The utility model is further illustrated with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, the optical detection apparatus of wire rod, it includes the base 1 of carrying, one group of branch is arranged with base 1
Seat 2, bearing 2 are provided with the collimator assembly for being clamped, being tensioned and rotating to wire rod；
Optical imaging assemblies 3, optical imaging assemblies are movably connected on base between bearing, and can be carried out past
Multiple motion；
The utility model is clamped fixation to wire by collimator assembly, and can apply pulling force on the metal filament
The working condition of wire is simulated, and can be rotated, the convenient space structure to wire measures, the optical imagery of setting
Component can be moved back and forth, and the structure of the wire on a segment distance is measured, so as to enter to obtain the quality of wire
Row judges.
Described collimator assembly includes being separately positioned on bearing 3 determining rotary components 4 and dynamic rotary components 5, fixed rotation
The centering component 8 to wire rod positioning is provided with component 4 and dynamic rotary components 5, the centering component of setting is used to enter wire rod
Row is fixed, and guarantee determines rotary components and dynamic rotary components on the same axis, and the dynamic rotary components of setting are used with rotary components are determined
In being clamped fixation to wire rod, and wire rod can be driven to be rotated, the steric parameter of wire rod can be measured.
The lazy-tongs 6 that rotary components 4 and the synchronous axial system of dynamic rotary components 5 are determined in driving are additionally provided with described bearing 2, if
The lazy-tongs while driving put determine rotary components and dynamic rotary components, avoid the problem of wire rod reverses in measurement process,
It ensure that the precision of measurement.
Described lazy-tongs include the synchronous rotating shaft being arranged on two bearings, and bearing is provided with driving synchronous rotating shaft
Synchronous motor, synchronous rotating shaft are connected by gear unit with determining rotary components and dynamic rotary components, and preferable gear unit is same
Step band or gear transmission unit.
Further, described lazy-tongs, which can be two, to be divided with the motor of Synchronization Control, motor
Not with determining rotary components and dynamic rotary components, it is controlled using same controller, rotary components and dynamic rotary components are determined in guarantee
The synchronism of rotation, avoids the problem of wire reverses in rotation process.
As shown in Fig. 3 institutes, the described rotating shaft 41 determined rotary components and include being connected on bearing, one end of rotating shaft 41 is provided with
Universal adjustment component 7, centering component 8 are connected on universal adjustment component 7, and bearing 2 is provided with axle sleeve 21, and rotating shaft 41 is arranged on branch
In the axle sleeve 21 of seat, the universal adjustment component 7 of the end set of rotating shaft 41 can realize the fine setting of all directions, ensure wire rod both ends
The precision of positioning, centering component are used to wire rod is positioned and clamped.
Pulling force sensor 42 is provided between rotating shaft 41 and universal adjustment component 7, pulling force sensor 42 is used for being applied to
Pulling force on wire rod is detected, and the accurate use environment for simulating wire rod, avoids frictional force existing for assembling structure to environment
Simulation is existing to be influenceed.
As shown in Fig. 2 described dynamic rotary components include being connected to turning set 51 on bearing, in described turning set 51
Connecting shaft 52 provided with slip, one end of connecting shaft 52 are provided with universal adjustment component 7, and centering component 8 is connected to universal adjustment group
On part 7, the other end is provided with the pretension power set 53 that drive connection axle 52 slides, the rotation of turning set realize dynamic rotary components with
Determine the synchronous axial system of rotary components, in rotation process, turning set drives connecting shaft to rotate, and connecting shaft can be slided relative to turning set
It is dynamic, realize and reinforced on wire rod, be easy to simulate the working environment of wire rod, pretension power set are rotating for drive connection axle 52
Being moved in set, apply active force so as to realize to wire rod, it is preferred that pretension power set are servomotor and screw body, its
The size of the control reinforcing of energy precision, so as to realize the accurate simulation of use state.
Described optical imaging assemblies 3 include projection sensor 31, and projection sensor 31 is connected to reciprocating mechanism 32
On, reciprocating mechanism 32 is connected on base 1, and described projection sensor is preferably laser projection sensor, and laser is thrown
Shadow sensor has preferable precision, and the three-dimensional structure of minor diameter wire rod accurately can be measured, and convenient use person is accurate
The true structure to wire rod judges that further, projection sensor can also be traditional projection imaging sensor, tradition
Projection shaping sensor can be used for the detection of bounce to axle class, disk-like accessory.
As shown in Figure 10, described reciprocating mechanism 32 includes the slide rail 321 being arranged on base 1, and Mobile base 322 is lived
Dynamic to be connected on slide rail 321, projection sensor 31 is connected on Mobile base 322, and servomotor is provided with described base 1,
Servomotor is connected with screw mandrel 324, and screw mandrel 324 is connected with Mobile base 322, and described servo control mechanism is located at the shell set on base
In vivo, do not show in the accompanying drawings, the type of drive of servomotor and screw mandrel, those skilled in the art are readily appreciated that.
Or described reciprocating mechanism includes being arranged on linear electric motors on base 1, Mobile base 322 is connected to straight line
On motor, projection sensor 31 is connected on Mobile base 322, and the installation relation of linear electric motors and base is simple, therefore does not draw
Accompanying drawing is annotated.
Above-mentioned reciprocating mechanism realizes the movement of projection sensor, due to laser projection sensor test scope very
It is small, the test to wire rod can not be completed in a test scope, therefore movement is needed to expand the measurement range of projection sensor,
Meet test needs, and the transmission stability of above-mentioned reciprocating mechanism is good, stationarity is good, is advantageous to projection sensor and is surveyed
Examination.
Centering component includes fixed block 82, has a plane on fixed block 82, and plane includes mounting plane 821 and positioning
Plane 822, in addition to adjustment block 81, adjustment block 81 are connected on the mounting plane 821 of fixed block 82, in described adjustment block 81
With clinoplain 811, clinoplain 811 and positioning plane 822 form V-arrangement positioning area 83, described clinoplain 811 and fixed
Bit plane 822 is has acclive plane, and wire rod is embedded in the bottom of the groove of V-type shape positioning area, due to clinoplain and positioning
To have acclive plane, its contact with wire rod contacts, has preferable positioning accuracy, overcome existing skill plane for point
There is the problem of position error using linear cutter wire rod locating slot in art, ensure that positioning precision.
As shown in figure 5, described universal adjustment component includes connecting portion 71, connecting portion 71 is provided with universal regulating mechanism,
Universal regulating mechanism is connected with clamping part 73, and centering component 8 is connected on clamping part 73, and the universal regulating mechanism of setting can be right
The axis of clamping part is adjusted, and ensures dynamic rotary components and determines the centering component of rotary components on the same axis.
As shown in Figure 6 and Figure 7, described universal regulating mechanism includes the adjustment hole on the axial end of connecting portion 71 of setting
711, the adjusting screw 76 for stretching into adjustment hole is laid with the side face of connecting portion 71, is set on the axial end of described clamping part 73
There is adjustable column 75, adjustable column 75 is stretched into adjustment hole 711 and is connected with adjusting screw 76, the axial end of described clamping part 73
Provided with retaining ring 72, retaining ring 72 is connected by screw 74 with the axial end of connecting portion 71, in this mode, passes through adjusting screw
Active force is applied to adjustable column from different directions, so that there is trickle change in displacement in different directions in clamping part, after
And accurate axial location is found, it ensure that dynamic rotary components and determine the axiality of rotary components.
As shown in Figure 8 and Figure 9, described universal regulating mechanism includes the regulation lock being uniformly arranged on connecting portion axial end
Tieholen 712, the axis of the end face of the clamping part 73 are provided with ball bumps 790, set on the clamping part of the surrounding of ball bumps 790
There is connection ring 78, be connected in connection ring 78 by adjusting lock-screw 79 with regulation locking hole 712, described ball bumps 790
Offseted with the axial end of connecting portion 71, the ball bumps of clamping part and the axial end of connecting portion offset in this mode, then
The position of the axis of clamping part is controlled by controlling to adjust the depth of lock-screw screw-in, then finds accurate axis position
Put, ensure that dynamic rotary components and determine the axiality of rotary components.
In summary, the utility model has the advantages that：
1st, the utility model is clamped fixation to wire by collimator assembly, and can apply pulling force on the metal filament
To simulate the working condition of wire, solve the problems, such as that original wire can not accurately reinforce test；And can rotate, it is convenient
The space structure of wire is measured, the optical imaging assemblies of setting can move back and forth, to the metal on a segment distance
The structure of silk measures.
2nd, wire uses open clamping in the utility model, and clamping, and universal tune can be quickly carried out to wire rod
Section component can be rapidly performed by the regulation of axiality, realize the automation of the space structure measurement of wire rod, and measuring speed is fast,
The problem of precision is high, overcomes low precision existing for manual measurement in the prior art, and efficiency is low, further, the utility model
Stability Analysis of Structures, do not disturbed by external factor, improve the uniformity of test product, that is, also improve by wire processing and
Into product yield.
Claims (12)
1. the optical detection apparatus of wire rod, it includes the base of carrying, one group of bearing is arranged with base, it is characterised in that：
Bearing is provided with the collimator assembly for being clamped, being tensioned and rotating to wire rod；
Optical imaging assemblies, optical imaging assemblies are movably connected on base between bearing, and can back and forth be transported
It is dynamic.
2. the optical detection apparatus of wire rod according to claim 1, it is characterised in that：Described collimator assembly includes difference
It is arranged on bearing and determines rotary components and dynamic rotary components, determines to be provided with rotary components and dynamic rotary components and wire rod is determined
The centering component of position.
3. the optical detection apparatus of wire rod according to claim 1, it is characterised in that：Driving is additionally provided with described bearing
The lazy-tongs that collimator assembly rotates.
4. the optical detection apparatus of wire rod according to claim 2, it is characterised in that：Described rotary components of determining include connecting
The rotating shaft being connected on bearing, one end of rotating shaft are provided with universal adjustment component, and centering component is connected on universal adjustment component.
5. the optical detection apparatus of wire rod according to claim 4, it is characterised in that：Rotating shaft and universal adjustment component it
Between be provided with pulling force sensor.
6. the optical detection apparatus of wire rod according to claim 2, it is characterised in that：Described dynamic rotary components include connecting
The turning set being connected on bearing, described turning set is interior to be provided with the connecting shaft slided, and one end of connecting shaft is provided with universal adjustment group
Part, centering component are connected on universal adjustment component, and the other end is provided with the pretension power set that drive connection axle slides.
7. the optical detection apparatus of wire rod according to claim 1, it is characterised in that：Described optical imaging assemblies include
Sensor is projected, projection sensor is connected on reciprocating mechanism, and reciprocating mechanism is connected on base.
8. the optical detection apparatus of wire rod according to claim 7, it is characterised in that：Described reciprocating mechanism includes
The slide rail being arranged on base, Mobile base are movably connected on slide rail, and projection sensor is connected on Mobile base, described base
On be provided with servomotor, servomotor is connected with screw mandrel, and screw mandrel is connected with Mobile base, or described reciprocating mechanism bag
The linear electric motors being arranged on base are included, Mobile base is connected on linear electric motors, and projection sensor is connected on Mobile base.
9. the optical detection apparatus of the wire rod according to any one of claim 2,4,5, it is characterised in that：Centering component bag
Fixed block is included, there is a plane on fixed block, plane includes mounting plane and positioning plane, in addition to adjustment block, adjustment block
It is connected on the mounting plane of fixed block, there is clinoplain, clinoplain and positioning planar shaped forming V-shape in described adjustment block
Positioning area, described clinoplain and positioning plane are the acclive plane of tool.
10. the optical detection apparatus of the wire rod according to claim 4,6 any one, it is characterised in that：Described is universal
Adjusting part includes connecting portion, and connecting portion is provided with universal regulating mechanism, and universal regulating mechanism is connected with clamping part, component of feeling relieved
Connection is on the holder portion.
11. the optical detection apparatus of wire rod according to claim 10, it is characterised in that：Described universal regulating mechanism bag
The adjustment hole on the connecting portion axial end of setting is included, the adjusting screw for stretching into adjustment hole, institute are laid with connecting portion side face
The axial end for the clamping part stated is provided with adjustable column, and adjustable column is stretched into adjustment hole and is connected with adjusting screw, described folder
The axial end for holding portion is provided with retaining ring, and retaining ring is connected by the axial end of screw and connecting portion.
12. the optical detection apparatus of wire rod according to claim 10, it is characterised in that：Described universal regulating mechanism bag
The regulation locking hole being uniformly arranged on connecting portion axial end is included, the axis of the end face of the clamping part is provided with ball bumps,
The clamping part of ball bumps surrounding is provided with connection ring, is connected in connection ring by adjusting lock-screw with regulation locking hole, institute
The ball bumps and the axial end of connecting portion stated offset.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621151481.7U CN206862281U (en) | 2016-10-27 | 2016-10-27 | The optical detection apparatus of wire rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621151481.7U CN206862281U (en) | 2016-10-27 | 2016-10-27 | The optical detection apparatus of wire rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206862281U true CN206862281U (en) | 2018-01-09 |
Family
ID=60814858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621151481.7U Expired - Fee Related CN206862281U (en) | 2016-10-27 | 2016-10-27 | The optical detection apparatus of wire rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206862281U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192329A (en) * | 2016-10-27 | 2017-09-22 | 常州瑞莱博自动化科技有限公司 | The optical detection apparatus of wire rod |
-
2016
- 2016-10-27 CN CN201621151481.7U patent/CN206862281U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192329A (en) * | 2016-10-27 | 2017-09-22 | 常州瑞莱博自动化科技有限公司 | The optical detection apparatus of wire rod |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180109 Termination date: 20211027 |
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| CF01 | Termination of patent right due to non-payment of annual fee |