CN206862278U - A kind of on-line measurement device of ultra-thin glass thickness - Google Patents
A kind of on-line measurement device of ultra-thin glass thickness Download PDFInfo
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- CN206862278U CN206862278U CN201720489272.1U CN201720489272U CN206862278U CN 206862278 U CN206862278 U CN 206862278U CN 201720489272 U CN201720489272 U CN 201720489272U CN 206862278 U CN206862278 U CN 206862278U
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Abstract
The utility model discloses the thickness of glass real-time online measuring device in a kind of glass thinning technique, including benchmark probe and inductive probe, wherein, benchmark probe includes benchmark probe support sleeve pipe, current vortex reference seat, benchmark probe laser range sensor and benchmark probe buffer spring；Inductive probe includes inductive probe supporting sleeve, current vortex sensor, inductive probe laser range sensor and inductive probe buffer spring, two sensorses detect that spacing caused by corresponding benchmark probe buffer spring and inductive probe buffer spring generation compressive deformation changes respectively, realize thickness measure.The automatic measurement mechanism that the utility model is realized by multiple sensors, the influence of corrosive solution, and real-time online can be avoided to obtain accurate metrical information in glass thinning and secondary hardening technique are carried out.
Description
Technical field
The utility model belongs to thickness measurement technique field, and in particular to a kind of ultra-thin glass measurer for thickness, especially
The automatic real-time measurement thickness of glass suitable for ultra-thin glass secondary hardening and reduction process.
Background technology
The glass used in the equipment such as mobile phone, tablet personal computer, LCD TV generally requires that base glass is thinned
It is this to be thinned so as to obtain the higher glass of thickness thinner (thickness is as thin as such as 0.11mm), intensity with the technique of secondary hardening
Glass afterwards can just be used as electronic equipment screen glass.
In current glass thinning technique, typically by large stretch of glass immersion in certain electrolyte solution, Ran Houli
Produce chemical reaction constantly to erode the outer layer of glass with electrolyte solution and glass, so realize the thinned of base glass with
The function of secondary hardening.During technique progress, it is necessary to the thickness of monitoring glass in real time, process is controlled,
To avoid the finished glass after processing excessively thin or blocked up.
At present for the real-time measurement of thickness of glass, generally there are contact type measurement and the class of non-contact measurement two.For connecing
Touch measures, and because glass is soaked in corrosive solution, the corrosivity of solution causes most contact measurement method
It frequently can lead to sensor surface to be damaged, or even bring measurement error.And thickness of glass is very thin, often 0.12~
0.33mm, even if carrying out manual measurement using instruments such as micrometers, the phenomenon mode for being caught broken glass is also easily caused, therefore contact
The on-line measurement mode of formula can not accurately obtain thickness of glass.
For non-cpntact measurement, optical profile type, condenser type, ultrasonic wave etc. are generally comprised, but all have the problem of different to cause
Measurement is inaccurate, such as conventional measuring method is, it is necessary to know solution refractive index, mother glass refractive index, but this two
It is kind often different and different with sample, and the solution film thickness of glass surface is uneven (or even is deposited in glass surface
In water droplet situation), in addition, constantly can be floated at random substantial amounts of bubble in the solution tank of immersion glass, the size of bubble, bubble
The factors such as floating interval of floating dock have uncertainty, therefore obtain the more external factor of measured value needs using measuring method, and
And cost also can be higher, it is difficult to obtains accurate measurements.Condenser type thickness measuring then must be known by mother glass and the dielectric of solution is normal
Number, and because the influence of glass surface sample path length also brings along the problem of measurement error is higher, conventional ultrasound wave method
Device is because glass is excessively thin and solution film causes thickness measure larger error to be present.Therefore it is difficult to using contactless measurement
Thickness of glass in direct measurement solution tank, though glass is taken out into direct measurement, but because glass surface has residual solution, and
The non-contact method such as sample path length skewness, the ultrasound for causing to use at present, optics is difficult to obtain accurate measurement
Value.
In fact, because there has been no suitable, effective metering system at present to realize the automatic of thickness of glass in the technique
Change on-line measurement work, in this technique process, thickness of glass information is obtained using manual method and remains a kind of master
Means are wanted, its technique generally use following steps：(1) one block of mother glass with processed glass phase same material is placed first to enter
Enter in solution tank, because mother glass and processed glass are completely the same in material, thickness etc., it can be considered that by technique
Mother glass thickness after processing can reflect the thickness of processed glass.(2) at regular intervals, operating personnel are by sample glass
Glass proposes solution tank, is detected using micrometer.Because glass is very thin, therefore measurement process must be noted that to avoid micrometer
It is caught broken glass.(3) if the thickness of mother glass exceedes desired thickness, glass processing is continued；Conversely, as useless if excessively thin
Product.In fact, this artificial measuring method, the experience of heavy dependence operating personnel, and still it is not avoided that what is be caught broken
Problem, and can make it that the thickness error of end product glass is excessive due to the operating error of operating personnel, it might even be possible to reach
0.025mm。
Utility model content
For the disadvantages described above or Improvement requirement of prior art, the utility model is provided in a kind of glass thinning technique
Thickness of glass real-time online measuring device, by the measurement apparatus structure and sensor arrangement of optimization, it can be achieved to subtracting
The real-time accurate on-line measurement with the thickness of glass under etchant solution environment in thin technique, measurement result is accurately reliable, can
To avoid glass in measurement from being caught broken or the problem of error is excessive, cost is too high.
To achieve the above object, according to the utility model, there is provided the thickness of glass in a kind of glass thinning technique exists in real time
Line measurement apparatus, it includes the benchmark that is separately positioned on two relative outer side surfaces of glass to be measured and can be moved relative to corresponding surface
Probe and inductive probe, wherein,
The benchmark probe includes benchmark probe support sleeve pipe, is arranged on the close glass to be measured of benchmark probe support sleeve pipe
One end end mouth of pipe on current vortex reference seat, the benchmark that is arranged on the mouth of pipe of benchmark probe support sleeve pipe other end end visits
Head laser range sensor and be coaxially contained in the benchmark probe support sleeve pipe and both ends respectively with the benchmark pop one's head in
Laser range sensor and the benchmark probe buffer spring of current vortex reference seat contact；
The inductive probe includes inductive probe supporting sleeve, is arranged on inductive probe supporting sleeve close to glass to be measured
Current vortex sensor on the mouth of pipe of one end end, the inductive probe being arranged on the mouth of pipe of inductive probe supporting sleeve other end end
Laser range sensor and coaxially it is contained in the inductive probe supporting sleeve and both ends sense with the current vortex respectively
Device and the inductive probe buffer spring of inductive probe laser range sensor contact；
During the benchmark probe and inductive probe move to glass surface to be measured in opposite directions under active force driving, the benchmark
Probe laser range sensor and the detectable corresponding benchmark probe buffer spring of inductive probe laser range sensor and sense
Buffer spring should be popped one's head in because because touching glass surface to be measured compressed shape occurs for current vortex reference seat and current vortex sensor
Change causes spacing to change, and this moment can obtain it between corresponding current vortex reference seat using above-mentioned current vortex sensor
Spacing, you can obtain the exact value of thickness of glass.
As improvement of the present utility model, the current vortex reference seat can the relatively described benchmark probe support cannula tip mouth of pipe
Move in the axial direction, deformation is produced so as to which driving benchmark probe buffer spring can be realized.
As improvement of the present utility model, there is raised round platform, the raised set centered on the current vortex reference seat
In the benchmark probe support sleeve pipe mouth of pipe, gap is provided between round platform outer and benchmark probe support box face, to ensure
Current vortex reference seat can move axially in sleeve pipe.
As improvement of the present utility model, the current vortex sensor can relatively described inductive probe supporting sleeve end pipe
Mouth is moved in the axial direction, and deformation is produced so as to realize driving inductive probe buffer spring.
As improvement of the present utility model, there is raised round platform, projection suit centered on the current vortex sensor
On the inductive probe supporting sleeve mouth of pipe, gap is provided between round platform outer and inductive probe supporting sleeve end face, to ensure electricity
Eddy current sensor can move axially in sleeve pipe.
As improvement of the present utility model, the periphery of the benchmark probe support sleeve pipe is socketed with benchmark probe bellows,
Benchmark probe bellows one end is connected with current vortex reference seat, to match current vortex reference seat in relative datum probe support sleeve pipe
The axial movement of end, and protect benchmark probe not influenceed by etchant solution.
As improvement of the present utility model, benchmark probe support jacket exterior is additionally provided with benchmark probe cable support set
Pipe, for accommodating and supporting the benchmark probe laser range sensor cable being connected with benchmark probe laser range sensor.
As improvement of the present utility model, inductive probe supporting sleeve periphery is socketed with inductive probe bellows, and sensing is visited
Head bellows one end is connected with current vortex sensor, to match current vortex sensor in relative induction probe support cannula tip
Axial movement, and protect inductive probe not influenceed by etchant solution.
As improvement of the present utility model, inductive probe cable support set is additionally provided with outside inductive probe supporting sleeve
Pipe, for accommodating and supporting the current vortex sensor cable being connected with inductive probe laser range sensor.
As improvement of the present utility model, respectively current vortex reference seat and current vortex sensor each with glass table to be measured
Anticorrosion with painting coating on the end face of face contact, thickness of glass is by obtaining distance between current vortex reference seat and current vortex sensor
And coating thickness and obtain.
As improvement of the present utility model, the laser range sensors of the probe of setting two and corresponding current vortex reference seat or
The distance between current vortex sensor change threshold, distance change amount are more than corresponding threshold value, it is determined that are current vortex reference seat
Glass surface is respectively contacted with current vortex sensor, to eliminate vibration effect.
As improvement of the present utility model, the benchmark probe support sleeve pipe and inductive probe supporting sleeve are coaxially arranged,
It is preferred that glass relatively to be measured is arranged symmetrically, and its axis is vertical with glass surface to be measured.
In the utility model, benchmark probe and inductive probe support the use, and form a set of multisensor syste, when measurement glass
During glass thickness, benchmark probe and inductive probe move to glass direction simultaneously, and the current vortex reference seat in benchmark probe employs
Metal with low-resistivity, high permeability --- permalloy so that it is produced to the current vortex sensor in inductive probe
Electromagnetic field bring more significant change, so as to improve measurement sensitivity.Simultaneously as the high permeability of permalloy can be more
It is significant to improve effectiveness, so as to avoid the high frequency magnetic field of current vortex sensor from influenceing the electric wire in benchmark probe
Road.The distance between current vortex sensor and current vortex reference seat can produce different voltage swings, so as to be carried for judging distance
For foundation.When benchmark probe and inductive probe contact are with glass surface, the distance of two probes is exactly the thickness of glass, and this
Exactly the information can be obtained according to the range measurement principle of current vortex sensor.
When benchmark probe and inductive probe are to touch tested glass, it is believed that the buffering elastic inside 2 probes
Spring is still uncompressed.But due to being not aware that thickness of glass in advance, so 2 probes may proceed to the side to tested glass surface
To movement.At this moment, 2 buffer springs can be compressed, and avoid being caught broken tested glass.On the other hand, because spring is compressed, therefore visit
Laser range sensor surface the distance between current vortex sensor and its pedestal corresponding to inside head changes.
At the same time, because the laser range sensor in benchmark probe and inductive probe can measure the sensor respectively
Work as 2 buffer springs to current vortex reference seat and the distance of current vortex sensor bottom and compressed or be released in surface
When, laser range sensor will necessarily obtain the variable quantity of above-mentioned distance.Obviously, when distance increase, then expression spring is released,
I.e. probe leaves tested glass surface；Then represent that spring is compressed when distance reduces, that is, pop one's head in and sent out in tested glass surface
Raw contact.It may determine that whether two probes clamp glass surface by this method.
The laser range sensor that uses and precision that need not be too high.First, using the main of laser range sensor
Purpose is to can interpolate that whether probe clamps tested glass, i.e. whether buffer spring is compressed to enough distances, and this
Individual change distance is commonly greater than 2mm.Secondly, the most minimal thickness of glass only has 0.2mm.Therefore in 10mm distance measurement ranges
Interior, 1% precision of laser ranging meets actual measurement request enough.
Detecting head surface is handled using plastic-spraying and sylphon seal, it is ensured that probe can be with corrosivity glass solution
Environment in realize accurate measurement.Under this mode, when obtaining actual glass thickness value, the distance values got must subtract
The plastic-spraying thickness degree of detecting head surface.Although spray layer thickness is difficult to obtain, benchmark is popped one's head in and sensed in no glass
After probe is in close contact, sprayed coating gross thickness can be directly obtained.
The pumping signal of current vortex sensor is provided by master control computing subsystem, and the PLL in cpu chip can be utilized mono-
Member makes CLK output pins produce frequency fexSquare wave.The square wave is nursed one's health into signal to noise ratio after 7 rank bandwidth-limited circuits and is more than
80dBm sine wave signal.The signal is divided into two-way, is sent into current vortex sensor after power amplification circuit all the way, separately
It is sent to phase-sensitive detection circuit as local oscillation signal all the way outside.Detecting circuit comes from current vortex sensor using local oscillation signal processing
Signal, so as to obtain the signal of a low frequency.The signal then just reflects between current vortex sensor and current vortex reference seat
Distance, therefore the amplitude change frequency of the signal can be used for probe clamping glass speed.Current vortex sensor output signal
After detecting circuit, then nursed one's health using pre-amplification circuit 1# and low-pass filter circuit, realize that signal to noise ratio reaches 85dB
Signal, be then used to ADC sampling processings.
Two laser range sensors can be exported distance value in a manner of voltage, to ensure optimal measurement accuracy,
The range position that voltage is adjusted to ADC inside cpu chip should be output it, therefore the pre-amplification circuit 2# in the present apparatus is with before
Put amplifying circuit 3# and use subtraction amplification circuit so that its Full-span output meet demand, so as to improve Measurement Resolution.So
The output signal of modulate circuit is connected to ADC in CPU piece by LPF again afterwards.Further, since the output of sensor is
It is non-linear, therefore can obtain actual measured value using interpolation algorithm in cpu chip.
After measurement, ARM chips can utilize analog or digital interface to send the thickness of glass result after calculating
Go out, simulation output is then output to DAC modulate circuits using DAC in the piece of ARM chips, and DAC modulate circuits can believe the output
Number be converted to 0 to 20mA master meter to export, digital interface can then use Ethernet, RS485 and CAN Bus connect output.
In addition, be improve system compatibility and scalability, master control computing subsystem employ Ethernet, RS485 and
CAN Bus interface upper layer information management systems realize information exchange function.These digital interfaces can not only send measurement number
According to, and corresponding control action can be made according to the various instructions from upper layer information management system.To improve integrated level,
Master control computing subsystem provides some Redundant Control interfaces for automation clamping apparatus, mainly including multiple displacement servo systems
Digital control interface, status alert output interface, multiple limit switch state input interfaces.These interfaces can be used as redundancy section
In the presence of, if automating clamping apparatus without using these Interface Controllers, other kinds of controller, such as PLC can be used, it is logical
Cross Ethernet or RS485 interfaces obtain measurement data and control decision from master control computing subsystem.Master control computing subsystem
In carry special FLASH storage circuits, be used for preserve measuring system arrange parameter, including laser range sensor configuration
Parameter, current vortex sensor parameter, servo parameter, transmission device parameter, measurement control parameter, data calculating parameter etc..
Different sensors, servo-drive system and upper layer information management parameters can be adapted to by changing these parameters, so as to realize this
Measurement apparatus has extensive suitability and flexibility ratio.
The utility model is primarily based on 2 sets of laser range sensors and 1 set of current vortex thickness measuring unit, and utilizes processing
Device carries out integrated treatment to sensing data, to obtain control decision.Due to using spring to be tested as probe contacts in device
Buffer cell during glass, therefore when using the decision information auto-control clamping apparatus, it is possible to prevente effectively from measurement is visited
Head is caught broken the situation of tested glass, and completes accurate thickness measure, so as to realize that it is micro- that in-process measurement error reaches ± 3
A kind of on-line measurement thickness of glass device below rice., can if the measurement apparatus and method are combined with automation clamping apparatus
Realize the work of unattended full-automatic on-line measurement thickness of glass, and the apparatus and method have that size is small, precision
High, automaticity height, operation and interface are convenient, install the advantages of easy maintenance.
The device is primarily based on current vortex thickness measuring unit and obtains thickness information, and is obtained with reference to 2 sets of laser ranging units
The informix taken judges whether current vortex thickness measuring unit has touched tested glass surface, and then obtains tested glass
Accurate actual (real) thickness data；2 sets of central laser ranging units are used in combination and can had by the device with buffer spring simultaneously
Effect avoids being caught broken tested glass in measurement process.Further, the CPU element of the device is to according to real time sensor data
Integrated treatment result can obtain the control decision of servo control mechanism, so as to realize the Automated condtrol of clamping apparatus.Therefore, if will
The measurement apparatus is combined with automation clamping apparatus, can be formed the online thickness measurement system of full-automatic glass, especially may be used
The drawbacks of avoiding conventional contact thickness of glass measuring method from being easily caught broken glass, and reach high steady in corrosive solution environment
Qualitative and high-precision measurement.
Specifically, according to the contemplated above technical scheme of the utility model compared to prior art, skill specific as follows
Art effect：
(1) the utility model uses multiple sensors, and it to obtaining data by carrying out fusion treatment, to realize that glass subtracts
There is provided solution to the automatic measurement of thickness of glass in thin technique process, can under with etchant solution environment,
Realize high accuracy, high reliability, the measurement of higher flexible control.
(2) the utility model is based on current vortex sensor and obtains thickness of glass information, while utilizes laser range sensor
The location variation of current vortex sensor and its pedestal in probe is obtained with buffer spring, so as to be kept away for automated exchanged cutter equipment
Exempt to be caught broken glass offer metrical information.
(3) the distance change amount information that the utility model obtains to laser sensor carries out threshold value setting, can be effective
During avoiding operation device, because device vibration causes the ranging information of laser sensor to change the erroneous judgement that brings.For
The vibration of automation equipment misidentification is avoided to provide decision support for probe contacts glass surface.
(4) the utility model handles laser range sensor data with current vortex sensor data through information fusion method
Afterwards, 2 probes how can be moved for automated exchanged cutter equipment more accurately control strategy is provided, measurement can be avoided inaccurate and
The phenomenon for being caught broken glass occurs.
(5) the utility model is that master control computing subsystem is configured with multiple interfaces, including 4 arrive 20mA analog interfaces, ether
Network interface, RS485 interfaces, CAN Bus interfaces, to adapt to different upper layer information management system interfaces.And using configuration
Digital communication interface realize control of the upper layer information management system to the device.Numeral output/input interface simultaneously can be by interior
The motion control arithmetic put provides Redundant Control for automated exchanged cutter equipment.
(6) the utility model can realize measurement of the thickness 0.12 to the thickness of glass between 0.5mm, and absolute measurement
Precision is less than ± 0.003mm.
Brief description of the drawings
Fig. 1 is the circuit structure block diagram according to the measurement apparatus constructed by the utility model one embodiment；
Fig. 2 is the structural representation according to the measuring probe of the measurement apparatus constructed by the utility model one embodiment；
Fig. 3 is the measuring system formed in the measurements according to the measurement apparatus constructed by the utility model one embodiment
Structural representation (does not draw cable)；
Fig. 4 is current vortex range measurement principle schematic diagram；
Fig. 5 is thickness measure size distribution schematic diagram；
Graph of relation of the output voltage with laser reflection distance that Fig. 6 is laser range sensor GP2Y0A51SK0F；
Fig. 7 is the control strategy general flow chart that automated exchanged cutter equipment is judged according to sensing data.
In all of the figs, identical reference is used for representing identical element or structure, wherein：1- benchmark probe,
2- inductive probes, 3- master controls computing subsystem, 4- horizontal displacement limit switch 2#, 5- horizontal displacement servo-drive systems 2#, 6-
Horizontal displacement transmission device 2#, 7- vertical displacement limit switch, 8- vertical displacements servo-drive system, 9- vertical displacements transmission dress
Put, 10- horizontal displacement transmission device 1#, 11- horizontal displacement servo-drive system 1#, 12- horizontal displacement limit switches 1#, 101-
Benchmark probe cable supporting sleeve, 102- benchmark probe laser range sensor cable, 103- benchmark probe supports sleeve pipe,
104- benchmark probe buffer spring, 105- benchmark probe bellows, 106- inductive probes bellows, 107- inductive probes
Buffer spring, 108- inductive probes supporting sleeve, 109- inductive probe laser range sensors cable, 110- inductive probes
Cable support sleeve, 111- current vortex sensors cable, 112- inductive probes laser range sensor, 113- current vortexs pass
Sensor, 114- current vortexs reference seat, 115- benchmark probe laser range sensor, 301- high frequency pumpings power amplification circuit,
302- detecting circuits, 303- pre-amplification circuit 1#, 304- low-pass filter circuit 2#, 305- low-pass filter circuits 1#,
306- bandwidth-limited circuits, 307-ARM chip circuits, 308-DAC output modulate circuit, 309- ethernet interface circuits,
310-RS485 interface circuits, 311-CAN Bus interface circuits, 312-FLASH storage circuits, 313- crystal oscillators, 314- numbers
Word input driving circuit, 315-numeral output drive circuit, 316- low-pass filter circuit 3#, 317- pre-amplification circuits
3#, 318- pre-amplification circuit 2#.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit the utility model.In addition, institute in each embodiment of the utility model disclosed below
As long as the technical characteristic being related to does not form conflict each other, can is mutually combined.
Referring to Fig. 1, Fig. 2 and Fig. 3, according to one kind constructed by the utility model one embodiment during glass thinning
High-precision thickness of glass on-line measurement device is realized, is made up of three units, is benchmark probe 1, the and of inductive probe 2 respectively
Master control computing subsystem 3.
It is f that master control computing subsystem 3 provides frequency to inductive probe 2 firstexSinusoidal excitation signal, and from benchmark pop one's head in
1st, inductive probe 2 obtains the signal of 2 laser range sensors and current vortex sensor；Master control computing subsystem 3 passes through signal
After modulate circuit, data acquisition is carried out to sensor signal, and these sampled datas are subjected to integrated treatment, it is automatic so as to obtain
The control decision of clamping apparatus, so that automated exchanged cutter equipment can cause benchmark probe 1 and sensing to visit according to the control decision
First 2 stabilization, it is reliable, nondestructive touch mother glass surface, and then obtain accurately being tested thickness of glass information.
Exchanged in addition, master control computing subsystem 3 can utilize multiple interfaces to complete information with upper layer information management system, example
Actual measurement data, control decision information content are such as sent, and receives to come from upper layer information management system control command.
As shown in Fig. 2 wherein benchmark probe 1 includes benchmark probe cable supporting sleeve 101, benchmark probe laser ranging passes
Sensor cable 102, benchmark probe support sleeve pipe 103, benchmark probe buffer spring 104, benchmark probe bellows 105, current vortex
Reference seat 114 and benchmark probe laser range sensor 115.The main body of current vortex reference seat 114 preferably using low-resistivity,
The permalloy of high permeability.
Wherein, benchmark probe laser range sensor 115 is arranged on one end end of benchmark probe support sleeve pipe 103, electric whirlpool
Stream reference seat 114 is arranged on other end end (preferably close to glass one end to be measured) and it can relative datum probe support sleeve pipe
103 ends move axially, it is preferable that current vortex reference seat 114 is the round platform of intermediate projections, and projection is sleeved on benchmark probe support
On the mouth of pipe of sleeve pipe 103, it is L to have length between the outer and the end of benchmark probe support sleeve pipe 103 of current vortex reference seat 1141's
Gap, to ensure that current vortex reference seat 114 can move axially in sleeve pipe.Benchmark probe buffer spring 104 is co-axially mounted to base
In quasi- probe support sleeve pipe 103 and both ends abut with benchmark probe laser range sensor 115 and current vortex reference seat 114 respectively
Contact.The periphery of benchmark probe support sleeve pipe 103 is socketed with benchmark probe bellows 105, benchmark probe one end of bellows 105 and electricity
Vortex reference seat 114 connects, and is moved with matching current vortex reference seat 114 in the axial direction of the end of relative datum probe support sleeve pipe 103
It is dynamic, and protect benchmark probe 1 not influenceed by etchant solution.
Benchmark probe cable supporting sleeve 101 is additionally provided with outside benchmark probe support sleeve pipe 103, for accommodating and supporting
The benchmark probe laser range sensor cable 102 being connected with benchmark probe laser range sensor 115.
Inductive probe 2 includes inductive probe bellows 106, inductive probe buffer spring 107, inductive probe supporting sleeve
108th, inductive probe laser range sensor cable 109, inductive probe cable support sleeve 110, current vortex sensor cable
111st, inductive probe laser range sensor 112 and current vortex sensor 113.
Wherein, inductive probe laser range sensor 112 is arranged on one end end of inductive probe supporting sleeve 108, electric whirlpool
Flow sensor 113 is arranged on other end end (preferably close to glass one end to be measured) and it can relative induction probe support sleeve pipe
108 ends move axially, it is preferable that current vortex sensor 113 is the round platform of intermediate projections, and the projection is sleeved on inductive probe branch
On the mouth of pipe of support set pipe 108, it is L to have length between the outer and the end of inductive probe supporting sleeve 108 of current vortex sensor 1131
Gap, to ensure that current vortex sensor 113 can move axially in sleeve pipe.Inductive probe buffer spring 107 is co-axially mounted to
In inductive probe supporting sleeve 108 and both ends are supported with inductive probe laser range sensor 112 and current vortex sensor 113 respectively
Contact.The periphery of inductive probe supporting sleeve 108 is socketed with inductive probe bellows 106, the one end of inductive probe bellows 106 with
Current vortex sensor 113 connects, to match current vortex sensor 113 in the axial direction of the end of relative induction probe support sleeve pipe 108
It is mobile, and protect inductive probe 2 not influenceed by etchant solution.
Inductive probe cable support sleeve 110 is additionally provided with outside inductive probe supporting sleeve 108, for accommodating and supporting
The current vortex sensor cable 111 being connected with inductive probe laser range sensor 112.
During measurement, benchmark probe 1 and inductive probe 2 are coaxially oppositely arranged, and mother glass is arranged between and its table
Face is vertical with two probe axis.After benchmark probe 1 and inductive probe 2 touch mother glass surface, if probe continues to clamp
Glass, then 2 buffer springs 104 and 107 can be caused to be compressed, and then 2 laser range sensors can obtain current vortex sensing
The location variation of device 113 and current vortex reference seat 114 in probe.Meanwhile current vortex sensor 113 will obtain its surface and arrive
The distance on the surface of current vortex reference seat 114.In view of the movement relation of the above, current vortex reference seat 114 and benchmark probe support set
Between pipe 103, between current vortex sensor 113 and inductive probe supporting sleeve 108, it is necessary to have enough buffer distance L1, and L1
Size it is relevant with the coefficient of elasticity of buffer spring 104 and 107.
It is the current vortex transmission principle based on electromagnetic field due to obtaining thickness of glass information, therefore current vortex reference seat 114
Main body using low-resistivity, the permalloy of high permeability.According to Theory of Electromagnetic Field, due to the magnetic permeability μ of extraneous medium1More
Height, then induced-current is bigger, i.e. the influence to primary magnetic field is bigger.In this case, the curve shown in Fig. 4 can be significantly improved
Slope.Therefore the main body using permalloy as current vortex reference seat 114 can then effectively improve the spirit of current vortex sensor
Sensitivity.
The processing work of all probe signals is completed by the master control computing subsystem 3, in a preferred embodiment
In subsystem 3 include high frequency pumping power amplification circuit 301, detecting circuit 302, pre-amplification circuit 303, LPF
Circuit 304, low-pass filter circuit 305, bandwidth-limited circuit 306, ARM chip circuits 307, DAC output modulate circuit 308, with
Too network interface circuit 309, RS485 interface circuits 310, CAN Bus interface circuits 311, FLASH storage circuits 312, crystal oscillator 313,
Numeral input drive circuit 314, numeral output drive circuit 315, low-pass filter circuit 316, pre-amplification circuit 317 and preposition
Amplifying circuit 318.
DAC output frequencies f in ARM chip circuits 307exSignal, after bandpass filtering, by the high frequency pumping work(
The pumping signal that rate amplifying circuit 301 obtains enough power is output to current vortex sensor 113；Current vortex sensor 113 it is defeated
Go out signal after detecting circuit 302 removes and encourages fundamental frequency signal to obtain electromagnetic field variation signal, then through pre-amplification circuit
303rd, sampling processing is carried out by the ADC in ARM chip circuits 307 after low-pass filter circuit 305.Inductive probe laser ranging passes
Sensor 112 and benchmark probe laser range sensor 115 are respectively connecting to pre-amplification circuit 318 and pre-amplification circuit 317
Handled, feeding ARM chip circuits 307 are carried out after then low-pass filter circuit 304 and low-pass filter circuit 316 complete filtering
Digital sample.
ARM chip circuits 307 carry out analysis and synthesis processing to all sampled datas, so as to obtain accurately tested glass
Glass thickness information, and the control decision of the automation clamping apparatus optimized, and numeral output drive circuit 315 can be passed through
To automated exchanged cutter equipment displacement servo system provide control signal, while using numeral input drive circuit 314 received from
Each limit switch signal in dynamic clamping apparatus.
ARM chip circuits 307 are connected with DAC output modulate circuits 308, and are exported and adjusted to DAC using DAC in CPU piece
The output signal of circuit 308 is managed, realizes that segmentation represents probe distance so as to may be implemented in 4 output areas for arriving 20mA.
ARM chip circuits 307 and ethernet interface circuit 309, RS485 interface circuits 310, CAN Bus interface circuits
311 are connected, and are used for digitized communication, and any one digital interface may be selected and realize the measurement apparatus and top level control system
Communication, including control decision information is sent to top level control system, measuring state and data are sent to top level control system, are received
The work such as the instruction from top level control system.
ARM chip circuits are calculating and the control core unit of master control computing subsystem, and the present embodiment uses integrated level
High ARM chips, to reduce system development costs and improve integrated level.It is preferred that the cpu chip is based on ARM Cortex-M4 framves
The K60P100M100SF2V2 (Freescale, Freescale company) of structure, chip internal carry 16 ADC and 12 DAC, with
And a variety of external interfaces.Because thickness of glass is no more than 0.4mm, and the measurement range of current vortex sensor may be set in
10mm, therefore directly can realize using 16 ADC in piece therefore at least 0.001mm resolution ratio.
Bellows 105 and 106 is carried on benchmark probe 1 and inductive probe 2, it is preferable that can be used and be existed as shown in Figure 5
2 detecting head surfaces carry out the method for plastic-spraying to avoid damage of the corrosive solution to probe.Because spray be present in 2 detecting head surfaces
Mould thickness, therefore the distance value H that sensor obtainsmShould be mother glass thickness HgWith total coating layer thickness Δ H sums.But
The face coat thickness deltat H of benchmark probe 11Face coat thickness with inductive probe 2 is unknown quantity.Therefore, surveyed
Before measuring work, 2 probes are controlled to carry out surface contact using automated exchanged cutter equipment, as shown in Figure 5.At this moment can acquire total
Coating layer thickness Δ H, and then carry out calculating according to the following formula when then measuring and obtain mother glass thickness Hg：
Hg=Hm-ΔH (1)
Due to popping one's head in, vibration that may be present during exercise can cause current vortex sensor 113 and current vortex reference seat 114
Position in respective probe changes, so that the measurement data of laser range sensor 102 and 112 is present because this shakes
The dynamic electrical noise signals brought.To solve this problem, it is preferable that this programme is understood relative to probe according to vibration characteristics first
Touch the distance change amount Δ L that the spring brought after tested glass surface is compressedMFor, vibrate the distance change amount brought
ΔLVIt is far smaller than Δ LM.Therefore can be judged by way of given threshold, the ranging for avoiding vibration from bringing influences.
In real work, if the distance change amount that laser range sensor obtains exceedes threshold value, and the distance that current vortex sensor obtains
Value is less than setting value (being preferably 1mm in the present embodiment), then can determine whether to have clamped tested glass surface to have popped one's head in.Separately
Outside, before the thickness data that current vortex sensor obtains exceedes setting value, the distance that all laser range sensors obtain becomes
Change amount can easily be determined the influence to be brought by device vibration.Both determination methods, it can effectively avoid shaking
The dynamic influence brought.Secondly, before the thickness data that current vortex sensor obtains is more than 1mm, if some laser ranging senses
The distance change amount that device obtains exceedes threshold value, then it is known that tested glass is not in the middle of two probes.So, as long as
Allow probe to return back to the position can of limit switch to complete once to reset correction work, so as to ensure that glass can be constantly in 2
The middle of individual probe.It is controlled and the substantially flow of decision-making is as shown in Figure 7.
2 probes in the device of the present embodiment are preferably installed in the way of shown in Fig. 3.Benchmark probe 1 is pacified
On horizontal displacement transmission device 10, its movement is controlled by horizontal displacement servo-drive system 11.Inductive probe 2 is installed in level
On shift gear 6, its movement is controlled by horizontal displacement servo-drive system 5.
When needing to measure mother glass thickness according to technological requirement, vertical displacement servo-drive system 8 controls vertical displacement to pass
Dynamic device 9 drives mother glass to rise, and stops rising when touching vertical displacement limit switch 7, and prepares to measure.Then
Automated exchanged cutter equipment control benchmark probe 1 and inductive probe 2 move to mother glass direction simultaneously.Clamp the process of mother glass
In, master control computing subsystem 3 can be controlled appropriately decision-making according to current sensor situation.When benchmark probe 1 and sensing are visited
First 2 touch the traveling that can then stop probe behind mother glass surface, and obtain mother glass thickness measurement, so as to survey
Amount terminates.After measurement terminates, automated exchanged cutter equipment control benchmark probe 1 and inductive probe 2 are simultaneously to leaving mother glass
Direction is moved, and stops movement when being respectively contacted horizontal displacement limit switch 12 and horizontal displacement limit switch 4.Specific flow
Reference can be made to shown in Fig. 7.
In addition, in order to improve the compatibility of the device, the master control computing subsystem 3 of the device provide multiple interfaces with it is upper
Layer managing system carries out information exchange, including：
(1) 4 are provided to the actual mother glass measurement thickness information of 20mA analog outputs；
(2) Ethernet interface is provided：It can be used for the Complete Information interaction for realizing upper layer information system.Including sending and working as
Preceding each sensor measurement data, final measurement is sent, the automated exchanged cutter equipment control decision after optimizing is sent, receives and
Control instruction, other control information of reception from upper strata from upper strata；
(3) RS485 and CAN Bus interfaces are provided：Because communication speed is relatively low, therefore it is only capable of completing in Ethernet interface
Partial information function.Including sending final measurement, sending the measurement data of current each moment all the sensors, receive and
Control instruction from upper strata.
In the present embodiment, it is preferable that the device is not using 4 to 20mA analog output interface circuits as single measured value
Output, but represented with additional status information output.That is, the numerical value of its interface output is not fairly linear, but uses
Segmentation represents different conditions.In the present embodiment, the segmented content can be as follows：
(1) output arrives 15mA for 4：Represent to obtain accurate measurement numerical value, and number range arrives 1.5mm for 0；
(2) when output is more than 15mA, but it is less than 16mA：Represent that the distance between 2 probes value is less than 10mm；
(3) when output is more than 16mA, but it is less than 17mA：Represent that the distance between 2 probes are more than 10mm but normal
In the range of；
(4) when output is more than 17mA, but it is less than 18mA：Represent that measurement has problem, it is necessary to remeasure；
(5) when output is more than 18mA, but it is less than 19mA：Represent measurement apparatus by built in self testing survey pinpoint the problems, it is necessary to
Maintenance；
(6) other output valves：Retain at present；
Using this analog output mode, on the premise of it ensure that resolution ratio, tension management system can be allowed only to make
The basal conditions of the device are obtained with the interface can.In this case, the device can only be made as a transmitter
With greatly simplify the connecting mode of remaining tension management system.
Increasingly complex use is above-mentioned Ethernet connecting mode, this mode cause the automatic measurement mechanism with
Combination between other devices is more flexible, because Ethernet has very high transmission rate, therefore can be with complete using the interface
Into all information exchanges of present apparatus.In order to preferably realize information exchange, answered in the utility model embodiment by formulating
With layer protocol, information exchange is realized by way of coding and decoding, can be completed：(1) by all the sensors in the device
Measurement data is sent to tension management information system sequentially in time；(2) the sample glass for obtaining the final measurement of the device
Glass thickness information is sent；(3) control decision information of the device to automated exchanged cutter equipment is sent to tension management information system
System；(4) control instruction from all upper stratas is received, including：Stop measure and reset, measure start, working method setting etc..
(3) and (4) article realization of above-mentioned ethernet feature causes the combination of the automatic measurement equipment and other equipment more
To be flexible.It is, for example, possible to use tension management information system auto-control clamping apparatus, can also be filled by the automatic measurement
Put and clamping apparatus is automated by tension management information system indirect control.Although a variety of mutual contact modes can be realized, it is
The real-time of control, and it is not recommended that passing through tension management information system indirect control automates clamping apparatus.
Because the message transmission rate of the RS485 and CAN Bus interfaces in the device is much smaller than Ethernet speed, therefore this
Two kinds of interfaces are mainly used in substituting the 4 simulation output interfaces for arriving 20mA, so as to realize relatively simple data transfer.
Preferably, extra FLASH can be carried inside the master control computing subsystem 3 of the device of the present embodiment to store
Chip, and carry out data interaction using I2C interface and the storage chip.This storage chip is used to preserve all of the device
Work and application parameter, including：Working method, probe all penalty coefficients, IP address argument, system connection set-up mode,
And other all information interaction approach with tension management information system.When device starts, will be read from the storage chip
All working parameter is taken, and is operated according to these parameters.Because these parameters can be entered by upper layer information management system
Row changes, so the device is adapted to a variety of automated exchanged cutter equipment and upper layer information management system, so as to realize flexibly effectively
Automatic measurement work.For the equipment of preset parameter, the utility model has the advantage that：
In reduction probe there is the measurement error caused by inconsistency in sensor：Must between all the sensors in probe
So more or less presence inconsistency, it is this inconsistent by setting compensating parameter to reduce.Therefore modification can be passed through
The inconsistent influence that compensating parameter is brought to avoid replacing from popping one's head in.
As it will be easily appreciated by one skilled in the art that preferred embodiment of the present utility model is the foregoing is only, not
To limit the utility model, any modification of all made within spirit of the present utility model and principle, equivalent substitution and change
Enter, should be included within the scope of protection of the utility model.
Claims (10)
1. the thickness of glass real-time online measuring device in a kind of glass thinning technique, it includes being separately positioned on glass phase to be measured
To two outer side surfaces and can relative to the benchmark probe (1) and inductive probe (2) of corresponding surface movement, wherein,
The benchmark probe (1) includes benchmark probe support sleeve pipe (103), is arranged on leaning on for benchmark probe support sleeve pipe (103)
Current vortex reference seat (114) on one end end mouth of pipe of nearly glass to be measured, to be arranged on benchmark probe support sleeve pipe (103) another
Hold the probe laser range sensor of the benchmark on the mouth of pipe of end (115) and be coaxially contained in the benchmark probe support sleeve pipe
(103) base that in and both ends contact with benchmark probe laser range sensor (115) and current vortex reference seat (114) respectively
Quasi- probe buffer spring (104)；
The inductive probe (2) includes inductive probe supporting sleeve (108), to be arranged on inductive probe supporting sleeve (108) close
Current vortex sensor (113) on one end end mouth of pipe of glass to be measured, it is arranged on inductive probe supporting sleeve (108) other end
Inductive probe laser range sensor (112) on the mouth of pipe of end and coaxially it is contained in the inductive probe supporting sleeve
(108) sense that interior and both ends contact with the current vortex sensor (113) and inductive probe laser range sensor (112) respectively
Should be popped one's head in buffer spring (107)；
During the benchmark probe and inductive probe move to glass surface to be measured in opposite directions, benchmark probe laser range sensor
(115) and inductive probe laser range sensor (112) can detect corresponding benchmark probe buffer spring (104) and sensing is visited
Head buffer spring (107) due to current vortex reference seat (114) and current vortex sensor (113) because touching glass surface to be measured and
Generation compressive deformation causes spacing to change, so as to which above-mentioned current vortex sensor (113) can obtain itself and corresponding current vortex
Spacing between reference seat (114), you can obtain the exact value of thickness of glass.
2. the thickness of glass real-time online measuring device in glass thinning technique according to claim 1, wherein, the electricity
It is vortexed reference seat (114) or current vortex sensor (113) can relatively described benchmark probe support sleeve pipe (103) or inductive probe branch
Support set pipe (108) end mouth of pipe moves in the axial direction, so as to realize driving benchmark probe buffer spring (104) or inductive probe
Buffer spring (107) and produce deformation.
3. the thickness of glass real-time online measuring device in glass thinning technique according to claim 1, wherein, the electricity
It is vortexed centered on reference seat (114) or current vortex sensor (113) and is sleeved on benchmark with raised round platform, raised correspond to
In probe support sleeve pipe (103) or inductive probe supporting sleeve (108) mouth of pipe, round platform outer and benchmark probe support sleeve pipe
(103) gap or between inductive probe supporting sleeve (108) end face is provided with, to ensure current vortex reference seat (114) or current vortex
Sensor (113) can move axially in sleeve pipe.
4. the thickness of glass real-time online measuring device in glass thinning technique according to claim 1, wherein, the base
The periphery of quasi- probe support sleeve pipe (103) be socketed with benchmark probe bellows (105), benchmark probe bellows (105) one end with
Current vortex reference seat (114) connects, to match current vortex reference seat (114) in relative datum probe support sleeve pipe (103) end
Axial movement, and protect benchmark probe (1) do not influenceed by etchant solution.
5. the thickness of glass real-time online measuring device in glass thinning technique according to claim 4, wherein, wherein,
Benchmark probe cable supporting sleeve (101) is additionally provided with outside benchmark probe support sleeve pipe (103), for accommodating and supporting and base
The benchmark probe laser range sensor cable (102) of quasi- probe laser range sensor (115) connection.
6. the thickness of glass real-time online measuring device in glass thinning technique according to claim 1, wherein, sensing is visited
Head supporting sleeve (108) periphery is socketed with inductive probe bellows (106), inductive probe bellows (106) one end and current vortex
Sensor (113) connects, to match current vortex sensor (113) in the axial direction of relative induction probe support sleeve pipe (108) end
It is mobile, and protect inductive probe (2) not influenceed by etchant solution.
7. the thickness of glass real-time online measuring device in glass thinning technique according to claim 6, wherein, sensing is visited
Inductive probe cable support sleeve (110) is additionally provided with outside head supporting sleeve (108), for accommodating and supporting and inductive probe
The current vortex sensor cable (111) of laser range sensor (112) connection.
8. the thickness of glass real-time online measuring device in the glass thinning technique according to any one of claim 1-7,
Wherein, respectively on the end face that current vortex reference seat (114) and current vortex sensor (113) each contact with glass surface to be measured
Anticorrosion with painting coating, thickness of glass by obtain between current vortex reference seat (114) and current vortex sensor (113) distance and
The thickness of coating and obtain.
9. the thickness of glass real-time online measuring device in the glass thinning technique according to any one of claim 1-7,
Wherein, laser range sensors and the corresponding current vortex reference seat (114) of the probe of setting two or current vortex sensor (113) it
Between distance change threshold value, distance change amount is more than corresponding threshold value, it is determined that for current vortex reference seat (114) and current vortex biography
Sensor (113) is respectively contacted glass surface, to eliminate vibration effect.
10. the thickness of glass real-time online measuring device in the glass thinning technique according to any one of claim 1-7,
Wherein, the benchmark probe support sleeve pipe (103) and inductive probe supporting sleeve (108) are coaxially arranged, and glass relatively to be measured is in
It is arranged symmetrically, and its axis is vertical with glass surface to be measured.
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