CN206819974U - Quartz boat cooling cabinet - Google Patents
Quartz boat cooling cabinet Download PDFInfo
- Publication number
- CN206819974U CN206819974U CN201720567149.7U CN201720567149U CN206819974U CN 206819974 U CN206819974 U CN 206819974U CN 201720567149 U CN201720567149 U CN 201720567149U CN 206819974 U CN206819974 U CN 206819974U
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- CN
- China
- Prior art keywords
- chamber
- cabinet
- cooling
- air
- quartz boat
- Prior art date
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
It the utility model is related to a kind of quartz boat cooling cabinet, before use, at air pipe interface access nitrogen pump, the quartz boat for filling silicon chip is positioned on the dividing plate in cooling cabinet, operational outfit after closing cabinet door, blower fan start, the air draught into air-inlet cavity room, into air intake chamber gas after blower fan enter deposit wind chamber, the air-flow deposited in wind chamber enters cooling chamber by blowing mouth, air-flow passes through silicon chip, takes away silicon chip heat, is discharged by top exhaust outlet；Primarily efficient filter is provided with air inlet, blowing mouth is provided with high efficiency filter, it is ensured that air-supply cleaning.Cabinet is equipped with differential pressure indicator, and for observing the pressure in cooling chamber, in cooling chamber's negative pressure, nitrogen is filled with into cooling chamber, cooling chamber is kept malleation；The utility model shortens silicon chip temperature fall time, there is provided silicon chip spatial cache, reduces pollution suffered during silicon chip cooling, reduces the generation of bad.
Description
Technical field
Solar battery sheet processing technique field is the utility model is related to, more particularly, to a kind of quartz boat cooling cabinet.
Background technology
At present in solar cell making technology, in diffusion and PDA bottom sheet, the silicon chip of fresh baked need to be dropped to by 250 DEG C
25 DEG C of normal temperature, existing way are the Temperature fall in workshop condition, and bottom sheet enters next procedure, this drop after being down to normal temperature
The temperature fall time length of warm method, a wheel temperature fall time need 35 minutes, and cooling environment is poor, and silicon chip is easily contaminated, causes bad.
Utility model content
The technical problems to be solved in the utility model is：In order to overcome the cool-down method of silicon chip in the prior art cooling to be present
Time is grown, and a wheel temperature fall time needs 35 minutes, and cooling environment is poor, and silicon chip is easily contaminated, the problem of causing bad, there is provided one
Kind quartz boat cooling cabinet.
Technical scheme is used by the utility model solves its technical problem：A kind of quartz boat cooling cabinet, including cabinet,
The cabinet includes air intake chamber, deposits wind chamber and cooling chamber, and air inlet, the air inlet are offered on the air intake chamber
Roughing efficiency air filter is inside installed with, the air-inlet cavity indoor location has blower fan, and wind chamber is deposited in the gas outlet of the blower fan with described
Room connects, and the wind chamber of depositing be arranged in parallel with the cooling chamber, and described deposit opens up between wind chamber and the cooling chamber
There is blowing mouth, high efficiency particulate air filter is installed with the blowing mouth, exhaust outlet is offered above the cooling chamber, it is described
Some air pipe interfaces are offered in cooling chamber, differential pressure indicator is provided with the cooling chamber.
The utility model before use, at air pipe interface access nitrogen pump, the quartz boat for filling silicon chip is positioned over cold
But on the dividing plate in cabinet, operational outfit after cabinet door is closed, blower fan starts, the air draught into air-inlet cavity room, into the gas of air intake chamber
Body enters after blower fan deposits wind chamber, and the air-flow deposited in wind chamber enters cooling chamber by blowing mouth, and air-flow passes through silicon chip, taken away
Silicon chip heat, discharged by top exhaust outlet；Primarily efficient filter is provided with air inlet, blowing mouth is provided with high efficiency filter, it is ensured that air-supply is clear
It is clean.Cabinet is equipped with differential pressure indicator, for observing the pressure in cooling chamber, in cooling chamber's negative pressure, is filled with into cooling chamber
Nitrogen, cooling chamber is set to keep malleation.
Some dividing plates for being used to deposit quartz boat are installed with the cooling chamber, quartz boat is placed on dividing plate
On, more quartz boat can be placed, improves the cooling effectiveness of cooling cabinet of the present utility model.
The frame of cooling chamber's cabinet door is 304 stainless steels, and door core is safety glass, transparent cabinet door, is easy to observe
The cooling situation of silicon chip on quartz boat in cabinet.
In order that cabinet has different height, adjustable bottom feet is installed with four angles of the cabinet floor,
Make the purposes of cooling cabinet of the present utility model wider.
Castor is installed with four angles of the cabinet floor, cabinet floor installs the roller that can be rolled, just
In movement cooling cabinet of the present utility model.
The beneficial effects of the utility model are:Quartz boat cooling cabinet of the present utility model, before use, at air pipe interface
Nitrogen pump is accessed, the quartz boat for filling silicon chip is positioned on the dividing plate in cooling cabinet, closes operational outfit after cabinet door, blower fan opens
Dynamic, the air draught into air-inlet cavity room, the gas into air intake chamber enters after blower fan and deposits wind chamber, deposit air-flow in wind chamber by
Blowing mouth enters cooling chamber, and air-flow passes through silicon chip, takes away silicon chip heat, discharged by top exhaust outlet；It is provided with just in air inlet
Effect filtering, blowing mouth are provided with high efficiency filter, it is ensured that air-supply cleaning.Cabinet is equipped with differential pressure indicator, for observing the pressure in cooling chamber
Power, in cooling chamber's negative pressure, nitrogen is filled with into cooling chamber, cooling chamber is kept malleation；The utility model shortens
Silicon chip temperature fall time, there is provided silicon chip spatial cache, reduce pollution suffered during silicon chip cooling, reduce the production of bad
It is raw.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is front view of the present utility model；
Fig. 2 is sectional view of the present utility model.
In figure：1. cabinet, 2. air intake chambers, 3. deposit wind chamber, 4. cooling chamber, 5. air inlets, 6. roughing efficiency air filters, 7.
Blower fan, 8. blowing mouths, 9. high efficiency particulate air filters, 10. exhaust outlets, 11. air pipe interfaces, 12. dividing plates, 13. frames, 14. cores, 15.
Adjustable bottom feet, 16. castors.
Embodiment
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
A kind of quartz boat cooling cabinet as shown in Figure 1, including cabinet 1, the cabinet 1 include air intake chamber 2, deposit wind chamber
3 and cooling chamber 4, air inlet 5 is offered on the air intake chamber 2, and roughing efficiency air filter 6 is installed with the air inlet 5,
Blower fan 7 is installed in the air intake chamber 2, as shown in Fig. 2 the gas outlet of the blower fan 7 connects with the wind chamber 3 of depositing, institute
State and deposit wind chamber 3 and be arranged in parallel with the cooling chamber 4, described deposit offers blowing between wind chamber 3 and the cooling chamber 4
Mouthfuls 8, high efficiency particulate air filter 9 is installed with the blowing mouth 8, and the top of the cooling chamber 4 offers exhaust outlet 10, described
Some air pipe interfaces 11 are offered in cooling chamber 4, differential pressure indicator is provided with the cooling chamber 4, is consolidated in the cooling chamber 4
Quartz boat is placed on dividing plate 12 equipped with some dividing plates 12 for being used to deposit quartz boat, can place more quartz by Dingan County
Boat, improve the cooling effectiveness of cooling cabinet of the present utility model.
The frame 13 of the cabinet door of cooling chamber 4 is 304 stainless steels, and door core 14 is safety glass, transparent cabinet door, is easy to
Observe the cooling situation of silicon chip on the quartz boat in cabinet 1.
In order that cabinet 1 has different height, adjustable bottom feet is installed with four angles of the bottom surface of cabinet 1
15, make the purposes of cooling cabinet of the present utility model wider.
Castor 16, the rolling that the installation of the bottom surface of cabinet 1 can roll are installed with four angles of the bottom surface of cabinet 1
Wheel, cooling cabinet of the present utility model easy to remove..
The utility model before use, at air pipe interface 11 access nitrogen pump, the quartz boat for filling silicon chip is positioned over
On dividing plate 12 in cooling cabinet, operational outfit after cabinet door is closed, blower fan 7 starts, the air draught into air intake chamber 2, into air-inlet cavity
The gas of room 2 enters after blower fan 7 deposits wind chamber 3, and the air-flow deposited in wind chamber 3 enters cooling chamber 4, air-flow by blowing mouth 8
By silicon chip, silicon chip heat is taken away, is discharged by top exhaust outlet 10；Primarily efficient filter is provided with air inlet 5, blowing mouth 8 is provided with height
Effect filtering, it is ensured that air-supply cleaning.Cabinet 1 is equipped with differential pressure indicator, for observing the pressure in cooling chamber 4, in the negative pressure of cooling chamber 4
When, nitrogen is filled with into cooling chamber 4, cooling chamber 4 is kept malleation.
Be installed with the cooling chamber 4 it is some be used to deposit the dividing plates 12 of quartz boat, by quartz boat be placed on every
On plate 12, more quartz boat can be placed, improves the cooling effectiveness of cooling cabinet of the present utility model.
The frame 13 of the cabinet door of cooling chamber 4 is 304 stainless steels, and door core 14 is safety glass, transparent cabinet door, is easy to
Observe the cooling situation of silicon chip on the quartz boat in cabinet 1.
In order that cabinet 1 has different height, adjustable bottom feet is installed with four angles of the bottom surface of cabinet 1
15, make the purposes of cooling cabinet of the present utility model wider.
Castor 16, the rolling that the installation of the bottom surface of cabinet 1 can roll are installed with four angles of the bottom surface of cabinet 1
Wheel, cooling cabinet of the present utility model easy to remove.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this item utility model technological thought completely.This item is real
The content being not limited to new technical scope on specification, it is necessary to which its technology is determined according to right
Property scope.
Claims (5)
- A kind of 1. quartz boat cooling cabinet, it is characterised in that：Including cabinet (1), the cabinet (1) includes air intake chamber (2), deposits wind Chamber (3) and cooling chamber (4), air inlet (5) is offered on the air intake chamber (2), is fixedly mounted in the air inlet (5) There is roughing efficiency air filter (6), blower fan (7) is installed in the air intake chamber (2), wind is deposited in the gas outlet of the blower fan (7) with described Chamber (3) connects, and the wind chamber (3) of depositing be arranged in parallel with the cooling chamber (4), it is described deposit wind chamber (3) with it is described cold But blowing mouth (8) is offered between chamber (4), high efficiency particulate air filter (9), the cooling are installed with the blowing mouth (8) Exhaust outlet (10) is offered above chamber (4), some air pipe interfaces (11) are offered on the cooling chamber (4), it is described cold But it is provided with differential pressure indicator in chamber (4).
- 2. quartz boat cooling cabinet as claimed in claim 1, it is characterised in that：The cooling chamber (4) is if interior be installed with Do the dividing plate (12) for depositing quartz boat.
- 3. quartz boat cooling cabinet as claimed in claim 1, it is characterised in that：The frame (13) of cooling chamber (4) cabinet door For stainless steel, door core (14) is safety glass.
- 4. quartz boat cooling cabinet as claimed in claim 1, it is characterised in that：It is solid on four angles of cabinet (1) bottom surface Dingan County is equipped with adjustable bottom feet (15).
- 5. quartz boat cooling cabinet as claimed in claim 1, it is characterised in that：It is solid on four angles of cabinet (1) bottom surface Dingan County is equipped with castor (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720567149.7U CN206819974U (en) | 2017-05-19 | 2017-05-19 | Quartz boat cooling cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720567149.7U CN206819974U (en) | 2017-05-19 | 2017-05-19 | Quartz boat cooling cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206819974U true CN206819974U (en) | 2017-12-29 |
Family
ID=60756908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720567149.7U Active CN206819974U (en) | 2017-05-19 | 2017-05-19 | Quartz boat cooling cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206819974U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106997862A (en) * | 2017-05-19 | 2017-08-01 | 常州亿晶光电科技有限公司 | Quartz boat cooling cabinet |
-
2017
- 2017-05-19 CN CN201720567149.7U patent/CN206819974U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106997862A (en) * | 2017-05-19 | 2017-08-01 | 常州亿晶光电科技有限公司 | Quartz boat cooling cabinet |
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