CN206817954U - A kind of dry vacuum pump apparatus for reusing residual heat - Google Patents
A kind of dry vacuum pump apparatus for reusing residual heat Download PDFInfo
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- CN206817954U CN206817954U CN201720505652.XU CN201720505652U CN206817954U CN 206817954 U CN206817954 U CN 206817954U CN 201720505652 U CN201720505652 U CN 201720505652U CN 206817954 U CN206817954 U CN 206817954U
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- heat
- vacuum pump
- dry vacuum
- pump apparatus
- residual heat
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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Abstract
The utility model provides a kind of dry vacuum pump apparatus for reusing residual heat, including：Residual heat collection unit, including the first heat carrier and the thermal conducting agent that is contained in the first heat carrier, the first heat carrier are coated on the outside of dry vacuum pump, conducted suitable for absorbing the surplus of its table body, and by waste heat in thermal conducting agent；The internal run-through of waste heat conduction unit, including transmission pipeline and control device, transmission pipeline and the first heat carrier, transmission pipeline are suitable to transmission thermal conducting agent, and control device controls the temperature and flow of thermal conducting agent；Waste heat action cell, including the second heat carrier, the second heat carrier are coated on the outside of vacuum pipe, and inside and the transmission pipeline of the second heat carrier penetrate, and the second heat carrier is suitable to absorb the heat of thermal conducting agent and conducts heat in vacuum pipe.Dry vacuum pump apparatus for reusing residual heat of the present utility model is simple in construction, energy consumption is small, can circulate efficiently using the energy, reduce cost.
Description
Technical field
Technical field of manufacturing semiconductors is the utility model is related to, more particularly to a kind of dry type in semiconductor etch processes
Vavuum pump apparatus for reusing residual heat.
Background technology
In the etching process of semiconductor, reaction chamber can produce substantial amounts of polymer (polymer), under normal circumstances,
Polymer can pass through turbocharger and flow to dry vacuum pump (dry pump) by vacuum pipe, then flowed to and washed by vavuum pump
Device, but in process of production, a part of polymer can be deposited on the vacuum pipe between turbocharger and dry vacuum pump
In, if polymer is deposited on this position, the defects of product can be caused.Current technology is in turbocharger and dry type
Install one section of heating tape on vacuum pipe between vavuum pump additional, specific heating means are by leading to the heating wire in heating tape
Electricity, make its heating, still, the mode of heating of prior art has following drawback：
A) because heating tape operation principle is the fuel factor of electricity, course of work energy consumption is big, is unfavorable for energy-conserving and environment-protective；
B) heating tape produces heat by heating wire, and heating wire during heating easy aging, it is necessary to often change,
Cost is high.
So it is badly in need of a kind of energy-conserving and environment-protective, the heating means of efficient, inexpensive theory or heater of meeting at present with generation
For the mode of heating of prior art.
Utility model content
In view of the above the shortcomings that prior art, the purpose of this utility model is to provide a kind of dry vacuum pump waste heat
Reuse means, the method energy consumption for solving to take heating tape to remove vacuum pipe polymer in the prior art is big and cost is high
The problem of.
To achieve the above object, the utility model provides a kind of dry vacuum pump apparatus for reusing residual heat, suitable for by described in
The waste heat of dry vacuum pump is conducted to vacuum pipe to avoid polymer from being piled up in the vacuum pipe, including：Residual heat collection list
Member, including the first heat carrier and the thermal conducting agent being contained in first heat carrier, first heat carrier is coated on described dry
The outside of formula vavuum pump, suitable for absorbing the surplus of the dry vacuum pump table body, and waste heat is conducted in the thermal conducting agent；Waste heat
Conduction unit, including transmission pipeline and control device, the internal run-through of the transmission pipeline and first heat carrier, the biography
Defeated pipeline is suitable to transmit the thermal conducting agent, and the control device controls the temperature and flow of the thermal conducting agent；Waste heat action cell,
Including the second heat carrier, second heat carrier is coated on the outside of the vacuum pipe, the inside of second heat carrier with
The transmission pipeline insertion, second heat carrier are suitable to absorb the heat of the thermal conducting agent and conduct heat in the vacuum
Pipeline.
In an embodiment of the present utility model, first heat carrier is copper shell or aluminum hull.
In an embodiment of the present utility model, second heat carrier is copper shell or aluminum hull.
In an embodiment of the present utility model, the thermal conducting agent is ethylene glycol.
In an embodiment of the present utility model, the outer surface of the dry vacuum pump is also coated with one layer of thermal conductive silicon
Fat.
In an embodiment of the present utility model, the control device includes：Flow controls subelement, including compression to do
Pathogenic dryness body, first flow controller and connecting shaft propeller, the first flow controller are suitable to control the compression drying gas
The flow of body, connecting shaft propeller rotational described in the compression drying gas-powered, the connecting shaft propeller rotational drive described in lead
The flowing of thermit powder；Temperature control subelement, including heat abstractor, temperature sensor and temperature controller, the heat abstractor
Second flow controller including compression drying gas and the control compression drying gas, the temperature sensor are respectively arranged on
The outer surface of the dry vacuum pump and the outer surface of the vacuum pipe, the temperature controller electrically connect the TEMP
Device, the first flow controller and the second flow controller.
In an embodiment of the present utility model, the flow control subelement is located at residual heat collection unit output
On the transmission pipeline inputted with the waste heat action cell.
In an embodiment of the present utility model, the heat abstractor be located at the waste heat action cell output with it is described
On the transmission pipeline of residual heat collection unit input.
In an embodiment of the present utility model, the outer surface of the transmission pipeline, first heat carrier and institute
The outer surface for stating the second heat carrier is coated with heat-preservation cotton.
In an embodiment of the present utility model, the transmission pipeline is the flexible pipe of sealing.
As described above, dry vacuum pump apparatus for reusing residual heat of the present utility model, has the advantages that：
1st, new device is the residual heat collection that dry vacuum pump scatters and disappears, for heating the vacuum of easily deposition polymer
Pipeline, new device do not need electric energy heating, and energy consumption is small, meet the theory that energy-saving and emission-reduction, circulation efficiently utilize the energy；
2nd, not needing special material, cost is not high, cost-effective as heating tape；
3rd, apparatus structure is simple, is easy to make, economic and practical.
Brief description of the drawings
Fig. 1 is the structural representation of dry vacuum pump apparatus for reusing residual heat of the present utility model.
Fig. 2 is the structural representation of residual heat collection unit in dry vacuum pump apparatus for reusing residual heat of the present utility model.
Fig. 3 is the structural representation of waste heat action cell in dry vacuum pump apparatus for reusing residual heat of the present utility model.
Fig. 4 is the structural representation that flow controls subelement in dry vacuum pump apparatus for reusing residual heat of the present utility model
Figure.
Fig. 5 is the structural representation of heat abstractor in dry vacuum pump apparatus for reusing residual heat of the present utility model.
Fig. 6 is the structural representation of control device in dry vacuum pump apparatus for reusing residual heat of the present utility model
Component label instructions
1 dry vacuum pump
2 vacuum pipes
3 residual heat collection units
31 first heat carriers
32 thermal conducting agents
4 waste heat conduction units
41 transmission pipelines
42 flows control subelement
421 first flow controllers
422 connecting shaft propellers
43 temperature control subelements
431 heat abstractors
4311 second flow controllers
432 temperature sensors
433 temperature controllers
5 waste heat action cells
51 second heat carriers
6 heat-conducting silicone greases
7 heat-preservation cottons
81 first inlet ends
82 second inlet ends
Embodiment
Embodiment of the present utility model is illustrated by particular specific embodiment below, those skilled in the art can be by this
Content disclosed by specification understands other advantages and effect of the present utility model easily.
Fig. 1 is referred to Fig. 6.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., only to
Coordinate the content disclosed in specification, so that those skilled in the art understands and reads, be not limited to the utility model
Enforceable qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size
Adjustment, in the case where not influenceing the effect of the utility model can be generated and the purpose that can reach, all should still fall in the utility model
In the range of disclosed technology contents can be covered.Meanwhile in this specification it is cited as " on ", " under ", "left", "right",
The term of " centre " and " one " etc., understanding for narration is merely convenient to, and is not used to limit the enforceable scope of the utility model,
Its relativeness is altered or modified, in the case where changing technology contents without essence, when being also considered as the enforceable category of the utility model.
Referring to Fig. 1, the utility model provides a kind of dry vacuum pump apparatus for reusing residual heat, including residual heat collection unit
3rd, waste heat conduction unit 4 and waste heat action cell 5, because dry vacuum pump 1 is in normal work, the temperature on its surface is 110
DEG C or so, a similar hot big iron is constantly sharp again to dissipated heat around, dry vacuum pump waste heat of the present utility model
Be exactly by residual heat collection unit 3 to be collected these dispersed heats with device, then by waste heat conduction unit 4 conduct to
Waste heat action cell 5.
Residual heat collection cellular construction schematic diagram is illustrated in figure 2, the residual heat collection unit 3 includes the He of the first heat carrier 31
The thermal conducting agent 32 being contained in first heat carrier 31, first heat carrier 31 are coated on the outer of the dry vacuum pump 1
Side, suitable for absorbing the waste heat on the surface of dry vacuum pump 1, and waste heat is conducted in the thermal conducting agent 32.
The waste heat conduction unit 4 includes transmission pipeline 41 and control device, and the transmission pipeline 41 is led with described first
The internal run-through of hot body 31, the transmission pipeline 41 are suitable to transmit the thermal conducting agent 32, and the control device controls the heat conduction
The temperature and flow of agent 32.
Residual heat collection cellular construction schematic diagram is illustrated in figure 3, the waste heat action cell 5 includes the second heat carrier 51,
Second heat carrier 51 is coated on the outside of the vacuum pipe 2, inside and the transfer tube of second heat carrier 51
Road 41 penetrates, and second heat carrier 51 is suitable to absorb the heat of the thermal conducting agent 32 and conducts heat in the vacuum pipe
2。
The specific work process of apparatus for reusing residual heat is：By the first heat carrier 31 and it is contained in first heat carrier
Thermal conducting agent 32 in 31 collects the waste heat of dry vacuum pump 1, then transmits thermal conducting agent 32 to the vacuum of board by transmission pipeline 41
Pipeline 2 reaches the purpose for removing polymer in vacuum pipe 2, finally improves the yield of product to be heated to it.
As an example, first heat carrier 31 and second heat carrier 51 are copper shell or aluminum hull.Because metal is
The good conductor of heat, such as silver, copper, aluminium is all good conductor, but considers cost of manufacture and practicality, preferably copper material.
As an example, the thermal conducting agent 32 is preferably ethylene glycol, because ethylene glycol good heat conductivity and economical and practical.
As an example, the outer surface of the dry vacuum pump 1 is also coated with one layer of heat-conducting silicone grease 6.Due to dry vacuum pump 1
It is rough, in order to preferably collect waste heat that it distributes, it is necessary to apply one layer of thin heat conduction on the surface of dry vacuum pump 1
Silicone grease 6.
It should be noted that the outer surface of the vacuum pipe 2 is also coated with one layer thin of heat-conducting silicone grease 6.
As an example, the control device includes：Flow controls subelement 42 and temperature control subelement 43；The flow
Control subelement 42 includes compression drying gas (not shown), first flow controller 421 and connecting shaft propeller 422, described
First flow controller 421 is suitable to the flow for controlling the compression drying gas, connecting shaft described in the compression drying gas-powered
Propeller 422 rotates, and the connecting shaft propeller 422 rotates the flowing for driving the thermal conducting agent 32；The temperature control subelement
43 include heat abstractor 431, temperature sensor 432 and temperature controller 433, and the heat abstractor 431 includes compression drying
Gas and the second flow controller 4311 for controlling the compression drying gas, the temperature sensor 432 are respectively arranged on described
The outer surface of dry vacuum pump 1 and the outer surface of the vacuum pipe 2, the temperature controller 433 electrically connect the temperature and passed
Sensor 432, the first flow controller 421 and the second flow controller 4311.
Referring to Fig. 4, controlling the structural representation of subelement for flow, compression drying gas (CDA) is by the first inlet end
81 input and blow connecting shaft propeller 422, move up the glycol flow in transmission pipeline 41, then the flowing handle for passing through ethylene glycol
The waste heat of dry vacuum pump 1 is transferred to vacuum pipe 2 and it is heated.
By controlling the flow of compression drying gas come the flow velocity of the ethylene glycol in controlling transmission pipeline 41, the stream of ethylene glycol
Speed is slower, and the ethylene glycol heated time is longer, then the temperature of ethylene glycol just rises higher, and the end of vacuum pipe 2 is heated effect
Fruit is better.But ethylene glycol can cause very much the radiating of dry vacuum pump 1 in the time of the superficial residence of dry vacuum pump 1 long
It is bad, its normal work can be influenceed, it is therefore desirable to set a rational ethylene glycol flow velocity, can allow it can be to vacuum pipe 2
Suitable temperature is heated to, does not interfere with the normal work of dry vacuum pump 1 again.
Due to also having certain temperature when ethylene glycol is flowed out from waste heat action cell 5, if temperature is too high, this part second two
The radiating of dry vacuum pump 1 will be influenceed during alcohol reflux to 1 surface of dry vacuum pump, and then influences its normal work, so needing
A heat abstractor 431 has been installed additional before ethylene glycol backflow, as shown in figure 5, inputting compression drying by the second inlet end 82
Gas, and brushing to control radiating effect by compression drying gas.It should be noted that the heat abstractor 431 and stream
The difference of amount control subelement 42 is that heat abstractor 431 is not provided with connecting shaft propeller 422, because ethylene glycol need not be driven
Flowing, it is only necessary to play thermolysis.
Acted on as an example, the flow control subelement 42 is located at the residual heat collection unit 3 output with the waste heat
On the transmission pipeline 41 that unit 5 inputs.
As an example, the heat abstractor 431 is located at the waste heat action cell 5 output and the residual heat collection unit 3
On the transmission pipeline 41 of input, namely the heat abstractor 431 is installed additional before ethylene glycol backflow.
As an example, the outer surface of the transmission pipeline 41, first heat carrier 31 and second heat carrier 51
Outer surface be coated with heat-preservation cotton 7, to avoid the loss of heat.
As an example, flexible pipe of the transmission pipeline 41 for sealing.
Referring to Fig. 6, the operation principle of the control device is：Compression drying gas is inputted by the first inlet end 81, the
The flow of one flow controller 421 control compression drying gas is to blow connecting shaft propeller 422, the rotating speed of connecting shaft propeller 422
The flow velocity of ethylene glycol is controlled, so the flow velocity of the indirect control ethylene glycol of first flow controller 421；In heat abstractor 431, pressure
Contracting dry gas is inputted by the second inlet end 82, and second flow controller 4311 controls the flow of compression drying gas to brush second
Glycol is radiated, so as to be controlled to the ethylene glycol temperature of backflow, namely the temperature on the surface of indirect control dry vacuum pump 1
Degree；Its signal is fed back to temperature controller 433, temperature controller 433 by the temperature sensor 432 of the outer surface of dry vacuum pump 1
Rationally instructed for 4,311 1 to second flow controller by computing, the temperature sensor 432 of the outer surface of vacuum pipe 2 is believed
Temperature controller 433 number is fed back to, temperature controller 433 is given the rationally instruction of first flow controller 421 1 by computing, led to
The backfeed loop of control device is crossed, both vacuum pipe 2 was heated, does not interfere with the normal work of dry vacuum pump 1 again.
In summary, the waste heat that dry vacuum pump apparatus for reusing residual heat of the present utility model scatters and disappears dry vacuum pump is received
Collection gets up, and for heating the vacuum pipe of easily deposition polymer, new device does not need electric energy heating, and energy consumption is small, meets energy-conservation
Emission reduction, circulation efficiently utilize the theory of the energy；Avoid using special material that cost is not high, cost-effective as heating tape；This
Apparatus structure is simple, is easy to make, economic and practical.
Above-described embodiment only illustrative principle of the present utility model and its effect are new not for this practicality is limited
Type.Any person skilled in the art can all be carried out without prejudice under spirit and scope of the present utility model to above-described embodiment
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the essence disclosed in the utility model
God and all equivalent modifications completed under technological thought or change, should be covered by claim of the present utility model.
Claims (10)
1. a kind of dry vacuum pump apparatus for reusing residual heat, suitable for by the waste heat of the dry vacuum pump conduct to vacuum pipe with
Polymer is avoided to be piled up in the vacuum pipe, it is characterised in that including：
Residual heat collection unit, including the first heat carrier and the thermal conducting agent being contained in first heat carrier, first heat conduction
Body is coated on the outside of the dry vacuum pump, suitable for absorbing the surplus of the dry vacuum pump table body, and by waste heat conduct in
The thermal conducting agent；
Waste heat conduction unit, including transmission pipeline and control device, the inside of the transmission pipeline and first heat carrier are passed through
Logical, the transmission pipeline is suitable to transmit the thermal conducting agent, and the control device controls the temperature and flow of the thermal conducting agent；
Waste heat action cell, including the second heat carrier, second heat carrier are coated on the outside of the vacuum pipe, and described
The inside of two heat carriers and the transmission pipeline penetrate, and second heat carrier is suitable to the heat for absorbing the thermal conducting agent and by heat
Amount is conducted in the vacuum pipe.
2. dry vacuum pump apparatus for reusing residual heat according to claim 1, it is characterised in that first heat carrier is
Copper shell or aluminum hull.
3. dry vacuum pump apparatus for reusing residual heat according to claim 1, it is characterised in that second heat carrier is
Copper shell or aluminum hull.
4. dry vacuum pump apparatus for reusing residual heat according to claim 1, it is characterised in that the thermal conducting agent is second two
Alcohol.
5. dry vacuum pump apparatus for reusing residual heat according to claim 1, it is characterised in that the dry vacuum pump
Outer surface is also coated with one layer of heat-conducting silicone grease.
6. dry vacuum pump apparatus for reusing residual heat according to claim 1, it is characterised in that the control device bag
Include：
Flow controls subelement, including compression drying gas, first flow controller and connecting shaft propeller, the first flow
Flow of the controller suitable for controlling the compression drying gas, connecting shaft propeller rotational described in the compression drying gas-powered,
The connecting shaft propeller rotational drives the flowing of the thermal conducting agent；
Temperature control subelement, including heat abstractor, temperature sensor and temperature controller, the heat abstractor include compression
Dry gas and the second flow controller for controlling the compression drying gas, the temperature sensor are respectively arranged on the dry type
The outer surface of vavuum pump and the outer surface of the vacuum pipe, the temperature controller electrically connect the temperature sensor, described
First flow controller and the second flow controller.
7. dry vacuum pump apparatus for reusing residual heat according to claim 6, it is characterised in that flow control is single
Member is on the transmission pipeline of the residual heat collection unit output with waste heat action cell input.
8. dry vacuum pump apparatus for reusing residual heat according to claim 6, it is characterised in that the heat abstractor is located at
On the transmission pipeline that the waste heat action cell output inputs with the residual heat collection unit.
9. according to the dry vacuum pump apparatus for reusing residual heat described in claim any one of 1-8, it is characterised in that the transmission
The outer surface of the outer surface of pipeline, first heat carrier and second heat carrier is coated with heat-preservation cotton.
10. according to the dry vacuum pump apparatus for reusing residual heat described in claim any one of 1-8, it is characterised in that the biography
Defeated pipeline is the flexible pipe of sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720505652.XU CN206817954U (en) | 2017-05-09 | 2017-05-09 | A kind of dry vacuum pump apparatus for reusing residual heat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720505652.XU CN206817954U (en) | 2017-05-09 | 2017-05-09 | A kind of dry vacuum pump apparatus for reusing residual heat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206817954U true CN206817954U (en) | 2017-12-29 |
Family
ID=60755348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720505652.XU Active CN206817954U (en) | 2017-05-09 | 2017-05-09 | A kind of dry vacuum pump apparatus for reusing residual heat |
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| Country | Link |
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| CN (1) | CN206817954U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110904427A (en) * | 2019-12-25 | 2020-03-24 | 东莞市天瞳电子有限公司 | Water circulation device for vacuum coating equipment |
-
2017
- 2017-05-09 CN CN201720505652.XU patent/CN206817954U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110904427A (en) * | 2019-12-25 | 2020-03-24 | 东莞市天瞳电子有限公司 | Water circulation device for vacuum coating equipment |
| CN110904427B (en) * | 2019-12-25 | 2024-05-14 | 东莞市天瞳电子有限公司 | Water circulation device for vacuum coating equipment |
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