CN206804276U - A kind of test device based on modularity high accuracy microscopic system - Google Patents
A kind of test device based on modularity high accuracy microscopic system Download PDFInfo
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- CN206804276U CN206804276U CN201720590474.5U CN201720590474U CN206804276U CN 206804276 U CN206804276 U CN 206804276U CN 201720590474 U CN201720590474 U CN 201720590474U CN 206804276 U CN206804276 U CN 206804276U
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Abstract
The utility model discloses a kind of test device based on modularity high accuracy microscopic system, camera module, cylinder mirror module, object lens module, Target Board, light source module group and mechanical translation module including test platform and on test platform, mechanical translation module is mutually connected with test platform, Target Board is imaged onto on camera module by object lens module and cylinder mirror module, Target Board is fixed on the connector of mechanical translation module, and Target Board is moved up and down by mechanical translation module with respect to test platform along longitudinal direction；Also include data processing unit, data processing unit includes CPU and the acquisition module and drive module that are connected respectively with CPU；Wherein, acquisition module connection camera module, drive module connection mechanical translation module.The utility model test device is simple in construction, can be used in the detection of tested object lens performance.
Description
Technical field
A kind of test device based on modularity high accuracy microscopic system is the utility model is related to, it is micro- for high accuracy
The measurement demarcation of mirror system, belongs to field of optical measuring technologies.
Background technology
Microcobjective traditional detection method is that the situation for observing asterism picture judges the image quality of object lens.This mode
All kinds of corrupt practices creep in：Due to being eye-observation, so can very be directed to general section of evaluation object lens performance of visible ray；Need the subjectivity of observer
Judge, it is necessary to which veteran testing staff can accurately just judge；Can only qualitatively it judge, no standard measure；Thing can not be understood
Mirror depth of focus situation；The situation of distortion can not be judged.With the development of science and technology, the manufacture and examination criteria to object lens are stricter,
Use general section of object lens is also no longer only limitted to visible ray, it is necessary to which quantitative measures the integrated imaging ability of object lens, and needs
Accurate depth of focus and distortion are measured to meet system requirements, traditional detection mode can not meet these requirements.
Utility model content
Purpose of utility model：Technical problem to be solved in the utility model is to provide a kind of aobvious in high precision based on modularity
The test device of micromirror systems, the test device by demarcating high-precision microscope module and coordinating precision mobile guide rail, so as to
It can be used for the optical property of object lens to be measured in accurate measuring systems.
In order to solve the above technical problems, technical scheme is used by the utility model：
A kind of test device based on modularity high accuracy microscopic system, including test platform and positioned at test platform
On camera module, cylinder mirror module, object lens module, Target Board, light source module group and mechanical translation module, the mechanical translation mould
Group is mutually connected with test platform, and mechanical translation module moves up and down with respect to test platform along longitudinal direction, and Target Board passes through thing
Mirror module and cylinder mirror module are imaged onto on camera module, and Target Board is fixed on the connector of mechanical translation module, and Target Board leads to
Mechanical translation module is crossed to move up and down along longitudinal direction with respect to test platform；Also include data processing unit, data processing unit includes
CPU and the acquisition module being connected respectively with CPU and drive module；Wherein, acquisition module connects
The picture collected is transferred to CPU, drive module connection machine by camera module, camera module by acquisition module
Tool translates module.
Wherein, the Target Board portrays the target of sub-micron line width, including transverse direction by way of photoetching on Target Board,
Longitudinal direction and the striped and contrast grid of 45 degree of multiple directions.
Wherein, the Target Board includes MTF/CTF test targets plate, distortion test target plate and skip test Target Board.
Wherein, the mechanical translation module includes Z axis moving guide rail, and the mobile accuracy of Z axis moving guide rail is less than the 1 of object lens
The a quarter of times depth of focus.
Wherein, the light source module group includes the back lighting of Target Board, the side lighting of Target Board and passes through object lens module
To the coaxial-illuminating of Target Board.
The test philosophy of the utility model test device uses image-forming principle, and Target Board passes through tested object lens and standard cartridge mirror
It is imaged onto on camera, input of the picture that camera collects as data processing unit；Target Board is vertical by high-precision Z-axis guide rail edge
It is accurate mobile to carrying out, often move the depth of field to be measured ten/once IMAQ of progress；Then data processing list is passed through
Member processing, restores MTF/CTF the and Though Focus MTF/CTF curves that can assess object lens performance；By test target
Plate is substituted for distortion test target plate, and distortion is by gathering grid lines image on graticle, carrying out analysis calculating, restore thing
The distortion curve of mirror, so as to not only can be with qualitative but also the integrated imaging ability of object lens to be measured can be gone out with quantitative display.
The utility model test device can by the integrated optical imaging performance (MTF/CTF) of measuring microscope system,
Distortion carries out performance test assessment with depth of focus and to microscopic system and its corresponding optics, electronics and mechanical subsystem,
Including microcobjective, cylinder mirror, industrial camera, the subsystem such as illumination and Mechanical Moving platform, may also be used for assessing demarcation standard
Test target plate；The test equipment can be analyzed the optical property of any wave band, using the teaching of the invention it is possible to provide accurate to measure to comment
The optical property of broken height precision microscopes and subsystem, making up traditional microscope detection mode can not be micro- to high-precision high power
System carries out the problem of high-precision calibrating.
Compared with prior art, technical solutions of the utility model have the advantage that for：
The utility model test device is simple and reasonable, is integrated with high-precision Z-axis guide rail, passes through high-precision Z-axis guide rail
Target Board is driven to move precisely along a longitudinal direction, so as to realize the detection to object lens optical property to be measured.
Brief description of the drawings
Fig. 1 is the systematic schematic diagram of test device of the utility model based on modularity high accuracy microscopic system；
Fig. 2 is the structural representation of test device of the utility model based on modularity high accuracy microscopic system；
Fig. 3 is on all depth of field axles of test device of the utility model based on modularity high accuracy microscopic system and outside axle
The partial enlarged drawing of the MTF/CTF test target plates of full filed；
Fig. 4 is the office of test device distortion test target plate of the utility model based on modularity high accuracy microscopic system
Portion's enlarged drawing.
Embodiment
The technical solution of the utility model is described further below in conjunction with accompanying drawing, but the requires of the utility model is protected
Scope be not limited thereto.
As shown in Fig. 1~2, test device of the utility model based on modularity high accuracy microscopic system, including test
Platform 5 and camera module 1 on test platform 5, cylinder mirror module 2, object lens module 3, Target Board 8, light source module group 4 and
Mechanical translation module 6；Camera module 1, cylinder mirror module 2 and object lens module 3 cooperate connection successively, to mesh in light source module group 4
The coaxial-illuminating light source of target 8 is located on lens barrel module 2, and mechanical translation module 6 is mutually connected with test platform 5, machinery
Translation module 6 is imaged onto phase along longitudinal up and down motion, Target Board 8 with respect to test platform 5 by object lens module 3 and cylinder mirror module 2
On machine module 1, Target Board 8 is fixed on the connector 7 of mechanical translation module 6, and Target Board 8 is driven by mechanical translation module 6
Together with respect to up and down motion of the test platform 5 along longitudinal direction；Also include data processing unit, data processing unit includes central processing
Unit and the acquisition module being connected respectively with CPU and drive module；Wherein, acquisition module connection camera module
1, the picture collected is transferred to CPU, drive module connection mechanical translation by camera module 1 by acquisition module
Module 6, CPU drive mechanical translation module 6 to carry out precision along longitudinal direction and moved by drive module, mechanical translation mould
The distance and the number of movement that the drive Target Board 8 of group 6 moves every time all send instruction to it by CPU.Test device
As an overall microscopic system, camera module, cylinder mirror module, object lens module, Target Board, light source module group and mechanical translation
Module is respectively as the subsystem below microscopic system.
Because microscopic system resolution ratio is high, reach sub-micron rank, portrayed by way of photoetching on Target Board 8
The target of sub-micron line width, as shown in figure 3, including laterally, striped and contrast grid of longitudinal direction and 45 degree of multiple directions etc.；Cylinder
Mirror module 2 and microcobjective module 3 need to reach diffraction limit in certain angle of visual field, distortion and the curvature of field try one's best it is small and smart
It is determined that mark, effectively eliminating the optical quality of standard module introducing with software in system calibrating or measurement influences；Light source illuminates
Module 4 provides the Uniform Illumination of plane space and angular region and is more than microcobjective visual field, uniformity and temporal stabilization
Property is eliminated the effects of the act by high-precision calibrating for later stage systematicness；The resolution ratio of camera 1 can according to the tested multiplying power of object lens 3 and
Resolution capability selects, the dark noise of camera 1, linear dynamic state space, spatial uniformity, and time stability etc. is by based on integrating sphere
Method high accuracy Scaling, for later stage system balance amendment；The mobile accuracy of high precision movement Z axis guide rail 6 is less than most high power
The a quarter of 1 times of depth of focus of several microcobjectives, ideal value are less than 1/10th of 1 times of depth of focus, the linearity and repeated quilt
High accuracy Scaling is used for later stage system balance amendment；Data processing unit is to calculate microscope for analyzing the target picture of collection
The integrated optical imaging performance of system, including the MTF/CTF on the axle of all depth of field with full filed outside axle, distortion and the curvature of field；Adjust
The performance parameter of determinand is calculated with corresponding system offset data, draws out the MTF/CTF of detailed panorama depth full filed,
Distortion curve, test result and report are generated, and shown by data processing unit.
MTF/CTF calculate, by object lens to be measured gather MTF/CTF Target Board original images, successively by performance bounds at
After reason and progress LSP contrast calculating, MTF/CTF values are finally calculated.
The calculating of distortion, distortion Target Board original image is gathered by object lens to be measured, point location calculates each in image
The coordinate of individual point, picture point and the difference of theoretical position are calculated, so as to obtain distortion curve.
The calculating of depth of focus and the curvature of field, set in software first Target Board need mobile number and move every time away from
From then adjustment object lens are in optimal focal plane position；MTF/CTF calculation process above is called to carry out MTF/CTF calculating to image,
MTF/CTF calculating is carried out to the image of each position, all positions calculate Through Focus after the completion of calculating
MTF/CTF curves, finally calculate the curvature of field.
The utility model test device carries out modularity adjustment according to different subsystems to be measured：
When testing microscope total system, test platform framework high-resolution standard target version, standard camera module and
Standard sources module, coordinate microscope to be measured, microscopical optical property is analyzed by tested microscope imaging；
When testing microcobjective, test platform framework high-resolution standard target version, standard cartridge mirror module, standard camera
Module and standard sources module, coordinate microcobjective to be measured, and the optics of microcobjective is analyzed by being tested microscope imaging
Performance；
When test barrel mirror module, test platform framework high-resolution standard target version, standard object lens module, standard camera
Module and standard sources module, coordinate cylinder mirror to be measured, the optics of micro- cylinder mirror to be measured is analyzed by being tested microscope imaging
Performance；
When testing light source module, test platform framework high-resolution standard target version, standard microscope module, standard phase
Machine module, coordinate light source to be measured, the optical property of light source to be measured is analyzed by being tested microscope imaging；
When testing camera module, test platform framework high-resolution standard target version, standard microscope module, standard light
Source module, coordinate camera to be measured, the optical property of camera to be measured is analyzed by being tested microscope imaging；
When demarcating standard target plate, test platform architecture standard microscope module, standard camera module and standard sources
Module, coordinate Target Board to be measured, Target Board to be measured is demarcated by tested microscope imaging；
When test mechanical translates module, test platform framework high-resolution standard target version, standard microscope module, mark
Quasi- camera module and standard sources module, coordinate mechanical platform to be measured, and machinery to be measured is demarcated by tested microscope imaging
Platform property.
Obviously, above-described embodiment is only intended to clearly illustrate the utility model example, and is not to this reality
With the restriction of new embodiment.For those of ordinary skill in the field, may be used also on the basis of the above description
To make other changes in different forms.There is no necessity and possibility to exhaust all the enbodiments.And these
Belong to obvious changes or variations that spirit of the present utility model is extended out still in the scope of protection of the utility model
Among.
Claims (5)
- A kind of 1. test device based on modularity high accuracy microscopic system, it is characterised in that：Including test platform and position It is described in the camera module on test platform, cylinder mirror module, object lens module, Target Board, light source module group and mechanical translation module Mechanical translation module is mutually connected with test platform, and mechanical translation module moves up and down with respect to test platform along longitudinal direction, mesh Target is imaged onto on camera module by object lens module and cylinder mirror module, and Target Board is fixed on the connector of mechanical translation module On, Target Board is moved up and down by mechanical translation module with respect to test platform along longitudinal direction；Also include data processing unit, at data Reason unit includes CPU and the acquisition module and drive module that are connected respectively with CPU；Wherein, adopt Collect module connection camera module, the picture collected is transferred to CPU by acquisition module, driven by camera module Module connects mechanical translation module.
- 2. the test device according to claim 1 based on modularity high accuracy microscopic system, it is characterised in that：It is described Target Board portrays the target of sub-micron line width, including transverse direction, longitudinal direction and 45 degree of multiple sides by way of photoetching on Target Board To striped and contrast grid.
- 3. the test device according to claim 1 based on modularity high accuracy microscopic system, it is characterised in that：It is described Target Board includes MTF/CTF test targets plate, distortion test target plate and skip test Target Board.
- 4. the test device according to claim 1 based on modularity high accuracy microscopic system, it is characterised in that：It is described Mechanical translation module includes Z axis moving guide rail, and the mobile accuracy of Z axis moving guide rail is less than a quarter of 1 times of depth of focus of object lens.
- 5. the test device according to claim 1 based on modularity high accuracy microscopic system, it is characterised in that：It is described Light source module group includes the back lighting of Target Board, the side lighting of Target Board and the coaxial photograph by object lens module to Target Board It is bright.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063638A (en) * | 2017-05-24 | 2017-08-18 | 茂莱（南京）仪器有限公司 | A kind of test device based on the high-precision microscopic system of modularity |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063638A (en) * | 2017-05-24 | 2017-08-18 | 茂莱（南京）仪器有限公司 | A kind of test device based on the high-precision microscopic system of modularity |
| CN107063638B (en) * | 2017-05-24 | 2024-03-08 | 茂莱（南京）仪器有限公司 | Testing device based on modularized high-precision microscope system |
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