CN206735998U - Etch the processing system of high-concentration waste liquid recycling - Google Patents
Etch the processing system of high-concentration waste liquid recycling Download PDFInfo
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- CN206735998U CN206735998U CN201720093505.6U CN201720093505U CN206735998U CN 206735998 U CN206735998 U CN 206735998U CN 201720093505 U CN201720093505 U CN 201720093505U CN 206735998 U CN206735998 U CN 206735998U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/30—Wastewater or sewage treatment systems using renewable energies
- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
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Abstract
The utility model discloses the processing system of etching high-concentration waste liquid recycling, including four stage processing systems, the four stages processing system includes first stage processing system, second stage processing system, phase III processing system and the fourth stage processing system being sequentially connected by pump, the utility model is designed reasonably, the thorough recycling recovery of the fluorine ion and nitrate ion in waste liquid can be realized, existing environment zero is born.
Description
Technical field
It the utility model is related to industrial wastes process field, more particularly to the processing of etching high-concentration waste liquid recycling
System.
Background technology
Photoelectricity industry (glass surface version etch process), glass work (glass etching processing procedure), wafer semiconductor industry (titanium dioxide
Silicon crystal unit etch process) and photovoltaic (manufacture of solar energy face version) industry etc., in the country, because its industrial technology is used with hydrofluoric acid
(10~20%) and nitric acid (5~15%) nitration mixture is the Main Ingredients and Appearance of etching solution, is to utilize hydrofluoric acid erodable silica
Characteristic；But because hydrofluoric acid can become calcirm-fluoride (CaF with calcium reaction in bone in human tissue structure2, it is commonly called as fluorite), due to it
React fairly small (the calcirm-fluoride KSP=1.7X10 of KSP-Ⅰ0), therefore high concentration of hydrofluoric acid is to have the risk of amputation after human contact, therefore
In high technology industrial parks prevalence a word language, " water breakthrough is not water ", what it was talked is exactly hydrofluoric acid solution.And in etching waste water row
Its fluorinion concentration is still very high when putting, and etching solution is to keep its acidity, often adds the nitric acid of high concentration, and in
Suitable danger and difficulty are added during processing, and environmental protection specification in the whole world has control concentration (total nitrate ion discharge
The control of nitrogen).
In presently used common process, system processing is not carried out to caused etching waste liquid in process, but
Directly transported as discarded object, so need constantly to change etching liquid, also have the manufacturer for handling this class waste water in addition, with
Simple acid-base neutralization and dosing coagulating sedimentation are handled, due to being handled in a manner of waste water, when sludge is formed and precipitated, and calcirm-fluoride
Molecule it is quite trickle, in wherein add coagulant (PAC) and macromolecule flocculation aid (Polymer) it is rapid to increase molecule particles
Precipitation, calcirm-fluoride is handled with sludge direction, adds social cost and the wasting of resources, and the product so handled has
It is a variety of, include including silica (SiO2), calcirm-fluoride (CaF2), sodium fluoride (NaF) and sodium hexafluorisilicate (Na2SiF6), mix
Close a variety ofization of product, it is meant that product purity is not high and reclaims the feasibility that uses and value is less considerable, and is only capable of when danger
Discarded object is done harm to handle, and fluorine ion is resource rather than discarded object in fluorine industry, is processed as direction then to put the cart before the horse, and is wasted
Resource, and secondary pollution is caused to environment.
Utility model content
To overcome disadvantages mentioned above, the purpose of this utility model is that providing one kind thoroughly provides fluorine ion and nitrate ion
Source, the compound of high-purity is formed, return to the etching high-concentration waste liquid born using and to existing environment zero in market and reclaim again
The processing system utilized.
The purpose of this utility model can be achieved through the following technical solutions：Etch the place of high-concentration waste liquid recycling
Reason system, including four stage processing systems, the first stage that the four stages processing system includes being sequentially connected by pump are handled
System, second stage processing system, phase III processing system and fourth stage processing system；
The first stage processing system include be sequentially connected by pump existing pond, adjustment tank-I, reactive tank-I, product
Dewaterer-I, collecting tank-I, neutralization chamber-I, neutralization chamber-II and collecting tank-II, the collecting tank-I connect with the reactive tank-I
Connect, the product dewatering machine-I is associated with drying machine, and the reactive tank-I is connected with NaOH drug slots, the NaOH drug slots and dosing
Machine is connected, and the NaOH drug slots are connected with NaOH bubble explosive barrels by chemicals feeder, and the adjustment tank-I is in parallel with adjustment tank-II, institute
It is in parallel with collecting tank-II to state collecting tank-I, the reactive tank-I is connected with the collecting tank-II by product dewatering machine-II, institute
State between adjustment tank-I and the reactive tank-I, acid and alkali-proof pump is provided between the adjustment tank-I and the reactive tank-II, it is described
Between reactive tank-I and the product dewatering machine-I, between the reactive tank-I and the product dewatering machine-II, the collection
Between groove-I and the neutralization chamber-I, acid and alkali-resistance pneumatic diaphragm pump is provided between the collecting tank-II and the neutralization chamber-I；
The second stage processing system include be sequentially connected by pump adjustment tank-III, reactive tank-II, product dehydrate
Machine-III and collecting tank-IV, the product dewatering machine-III associate with the drying machine, and the collecting tank-IV and the adjustment tank-
III connection, the reactive tank-II is in parallel with reactive tank-III, and the pump is acid and alkali-resistance pneumatic diaphragm pump；
The phase III processing system include be sequentially connected adjustment tank-IV, MVR equipment, cooling groove, crystallization tank, production
Pint water dispenser-IV and collecting tank-V, the collecting tank-V are connected with the adjustment tank-III, the collecting tank-IV and institute
State crystallization tank connection, the product dewatering machine-IV associates with the drying machine, it is described cool between groove and the crystallization tank, institute
State between crystallization tank and the product dewatering machine-IV, between the collecting tank-V and the crystallization tank and the adjustment tank-III
Provided with acid and alkali-resistance pneumatic diaphragm pump.
The fourth stage processing system includes MVR equipment, circulating slot-I, circulating slot-II and releasing chute, and the MVR is set
Standby connection circulating slot-I, circulating slot-II and releasing chute, the MVR equipment forms inner loop with the circulating slot-I, described
MVR equipment forms inner loop with the circulating slot-II, and the circulating slot-I and circulating slot-II pass through acid and alkali-resistance pneumatic diaphragm
Pump is connected with hot water reclamation set, and the releasing chute is connected by acid and alkali-resistance pneumatic diaphragm pump with reclamation set and pure water with cistern
Connecing, the MVR equipment is connected with the adjustment tank-I and adjustment tank-II, and the reclamation set is connected with NaOH bubble explosive barrels,
Between the releasing chute and the pure water cistern, between the circulating slot-I and the hot water reclamation set, the circulation
Be provided with acid and alkali-resistance pneumatic diaphragm pump between groove-II and the hot water reclamation set, the circulating slot-I and the MVR equipment it
Between, between the circulating slot-II and the MVR equipment be provided with water pump.
The acid and alkali-resistance pneumatic diaphragm pump is connected by five mouthfuls of two valves with air compressor machine.
Further, the MVR equipment and the circulating slot-I, the MVR equipment and the circulating slot-II, described put
Stainless steel motor-driven valve, the collection are provided between chute and the pure water cistern, the releasing chute and the reclamation set
Between groove-I and the reactive tank-I and the neutralization chamber-I, the collecting tank-II and the reactive tank-I and the neutralization chamber-
Between I, between the adjustment tank-III and the reactive tank-II and reactive tank-III, the reactive tank-II and reactive tank-III with
Between the product dewatering machine-III, between the collecting tank-IV and the adjustment tank-IV and the adjustment tank-III, it is described
NaOH steeps between explosive barrel and the NaOH drug slots, is provided between the collecting tank-V and the crystallization tank and the adjustment tank-III
PVC acid and alkali-resistance motor-driven valves.
Further, the adjustment tank-I, adjustment tank-II, reactive tank-I, adjustment tank-III, reactive tank-II, reactive tank-
IIIth, adjustment tank-IV, cooling groove, crystallization tank and NaOH bubble explosive barrels are connected with air blower by gas piping valve respectively.
Further, the air blower includes air blower-I and air blower-II, and the air blower-I and air blower-II are handed over
Temporary substitute is made.
Further, the NaOH drug slots include NaOH drug slots-I, NaOH drug slots-II, NaOH drug slots-III and NaOH medicines
Groove-IV, the NaOH drug slots-I are connected with the neutralization chamber-I and neutralization chamber-II, the NaOH drug slots-II, NaOH drug slots-III
It is connected with NaOH drug slots-IV with the reactive tank-I.
Further, the NaOH steeps explosive barrel, adjustment tank-I, reactive tank-I, cooling groove, crystallization tank, circulating slot-I and followed
Temperature monitoring is provided with annular groove-II.
Further, the existing pond, adjustment tank-I, reactive tank-I, collecting tank-I, collecting tank-II, collecting tank-III, tune
Whole groove-III, reactive tank-II, reactive tank-III, collecting tank-IV, adjustment tank-IV, cooling groove, crystallization tank, collecting tank-V, circulation
Water-level gauge is respectively equipped with groove-I, circulating slot-II and releasing chute.
Further, the drying machine is double-cone dryer, can accelerate the rate of drying of material, improves drying efficiency,
Reach the purpose of evenly drying.
Further, water flow monitor is provided between the adjustment tank-I and the reactive tank-I.
Further, mixer is provided with the neutralization chamber-I and neutralization chamber-II and PH is counted.
Further, the product dewatering machine-I, the product dewatering machine-II, the product dewatering machine-III and the production
Pint water dispenser-IV is provided with oil-immersed type pressure gauge and citation formula pressure gauge, and the oil-immersed type pressure gauge can be estimated by operating personnel
Pressure value, the pressure signal measured by the citation formula pressure gauge are sent to PLC as the foundation automatically controlled.
The processing method of high-concentration waste liquid recycling is etched, mainly H is included in the waste liquid2SiF6And HNO3, it is described
Processing method comprises the following steps：
(1) first stage-sodium hexafluorisilicate：Institute's fluoride ion has reacted generation hexafluorosilicic acid more in etching waste discharge
Form, with acid and alkali-resistance pneumatic diaphragm dosing pump mode, control liquid caustic soda chemical feeding quantity is added in reactive tank-I, is reacted to hexafluorosilicic acid
Sodium (Na2SiF6), while dosing, the start-stop of dosing pump is monitored with temperature sense, the thick bubble that aeration is provided with reactive tank dissipates
Gas disk, full and uniform stirring, now, plate and frame dewaterer work pump startup filter, the sodium hexafluorisilicate of precipitation is dehydrated,
The product that dehydration is completed is packaged into finished product into drier；
(2) second stage-calcirm-fluoride：The filtering of first stage is completed into waste water to be pumped into reactive tank-I and reactive tank-II,
Add calcium hydroxide (Ca (OH)2) further remove Natural zeolite, generation calcirm-fluoride (CaF2) precipitation, when in any of which reactive tank
Calcirm-fluoride reaction complete, the electrically operated valve at reactive tank bottom is opened, and now dewaterer working barrel is opened, and is filtered, has been dehydrated
Calcirm-fluoride (CaF after2) carry out drying and packaging；
(3) phase III and fourth stage-sodium nitrate (NaNO3)：Waste water is completed into the filtering of second stage and imports MVR
In (mechanical steam recompression technology) equipment, the MVR equipment shares two to enter, four go out：
Two enter, and are respectively " influent stream waste water " and " vapour compression machine cooling circulating water becomes a mandarin "；
Four go out, be respectively " distillation water outlet ", " vapour compression machine cooling circulating water go out stream ", " high concentration concentration waste water " and
" Low Temperature Steam in system "；
Wherein, influent stream waste water is first heated to 90 DEG C -95 DEG C after working barrel enters MVR equipment, and MVR is introduced with circulating pump
At the top of equipment, after circulating steam under pressure with vapour compression machine, make to be steam heated to 115 DEG C -118 DEG C, the drop in the MVR equipment
The discharge distillation water outlet of film steaming device bottom, the MVR device bottoms drainpipe discharge a certain amount of high concentration concentration waste water, the distillation
Water outlet before MVR equipment is excluded, first import MVR equipment in gas-liquid separation bucket, now, Low Temperature Steam discharge, " vapour compression machine
Cooling circulating water go out stream " discharge after be divided into circulating slot-I and circulating slot-II, with work pump mode backflow import vapour compression machine with
Its operation temperature is reduced, factory's shower water, circulating slot-I and circulating slot-II difference are supplied to after being back to certain temperature
Work is alternated, distillation water outlet discharges MVR equipment with working barrel, if factory hot water demand amount is more than supply, uses running water
Moisturizing adds, and distillation water outlet is with working barrel discharge MVR equipment to releasing chute；
High concentration concentration waste water is imported in cooling groove, when less than design temperature, crystallization tank is pumped into and prepares filtering nitric acid
Sodium crystallizes, and now carries out filtering means dehydration with two position control working barrel in crystallization tank, is carried out after the completion of dehydration by drying machine
Drying, it is dried to obtain sodium nitrate (NaNO3) product, filter and complete the adjustment tank-III that water is returned to before calcirm-fluoride reaction.
Brief description of the drawings
Fig. 1 is the structured flowchart of the utility model embodiment.
In figure：
Embodiment
Preferred embodiment of the present utility model is described in detail below in conjunction with the accompanying drawings, so that the advantages of the utility model
It can be easier to be readily appreciated by one skilled in the art with feature, it is apparent clear and definite so as to be made to the scope of protection of the utility model
Define.
Referring to shown in accompanying drawing 1, the processing system of the etching high-concentration waste liquid recycling in the present embodiment, including：First,
First stage-sodium hexafluorisilicate
1. before system boot
Circulating slot-I (T17) and circulating slot-II (T18) are filled to high water level with running water, then releasing chute (T19) is anti-
Explosive barrel " D01 " is filled to again until explosive barrel " D02 ", explosive barrel " D03 ", " D04 " and " D05 " bubble medicine are completed.
2. steep medicine
Pipeline valve " V20 " is opened, shutoff valve " V21 ", pump " P19 " is under " ON " state by releasing chute (T19) interior recycle-water
(REC WATER) (it is anhydrous in releasing chute when system operates for the first time, replace coming into operation to MVR with running water, be delivered to medicine
In bucket " D01 ", pump " P19 " " OFF " when high water level；Now, quantification tablet alkali is put into explosive barrel " D01 " manually；
Now, temperature within the barrel monitoring meter " TE07 " schedule 60 DEG C (can be adjusted with man-machine design), during more than design temperature, system high temperature shifting
Report acts, and stops dispensing, when temperature drops to 40 DEG C (being adjusted with man-machine design), offers medicine again to quantitative and completes (to determine
It is 1800KG that amount, which refers to addition water, and piece alkali is 1800KG, is brewed to 50%, proportion 1.52NaOH solution).
The NaOH solution soaked is injected into explosive barrel " D02 ", " D03 ", " D04 " and " D05 " paramount liquid with chemicals feeder " C01 "
Position, now, while injection, is separately turned on pipeline valve " V22 ", " V23 ", " V24 " and " V25 "；Injection is completed, pipe valve
For " OFF " state.
Bubble medicine adjusts system blower " A02 " or " A03 " simultaneously, and (two spare unit each other, are used alternatingly.) explosive barrel top gas
Body pipeline valve " AV10 " is opened, and bubble medicine completes manual-lock.
If explosive barrel " D01 " is when low liquid level, issue " explosive barrel low liquid level moves report ", to notify operating personnel to carry out steeping medicine work
Make, when operating personnel carry out bubble medicine, shifting report switch can be closed in a manual manner.
3. water inlet
Existing pond " T00 " interior waste water is imported into the system adjustment tank-I " T01 " and adjustment tank-II with intake pump " P00 "
In " T02 ", now, if temperature monitoring " TE01 " is set in adjustment tank-I " T01 " less than 10 DEG C, valve " V13 " is opened, low-temperature steam
Import, when temperature monitoring " TE01 " is higher than 15 DEG C, valve " V13 " is closed, and low-temperature steam stops importing.
Now, adjustment tank-I " T01 " interior water-level gauge " LE01 " monitors high water level, reactive tank-I " T03 " interior water-level gauge
" LE02 " monitors low water level, and (two alternate-runnings, failure of pump escape start to another by acid and alkali-proof pump " P01 " or " P02 "
Move report.) start and inject waste water in reactive tank-I " T03 " when liquid level gauge " LE02 " high water level reaches, pump stopping action is (resistance to
Water quantity monitoring meter " FM1 " is flow monitoring device afterwards by acid and alkali pumps " P01 " and " P02 ").
While water inlet, system blower is opened and gas piping valve " AV01 " and " AV02 " unlatching, waste water is filled part and stirs
Mixing is mixed, when pump stopping acts, pipeline valve " AV01 " and " AV02 " are closed.
4. dosing and stirring
When acid and alkali-proof pump " P01 " or " P02 " stopping act (reactive tank-I (" T03 ") reaches high water level), system PLC prisons
At least two liquid levels are located at Gao Shui in control explosive barrel " D03 ", " D04 " and " D05 " liquid level " LE19 ", " LE20 " and " LE21 " three liquid level
Position state, now into dosing stirring.
If complete in " LE19 ", " LE20 " and " LE21 " three liquid level be located at high water level state, start chemicals feeder " C04 ", operation
Drug slot " D03 ", operation liquid level " LE19 ", when drug slot " D03 " interior liquid caustic soda is beaten to low liquid level by high level, is replaced by startup chemicals feeder
" C05 ", operation drug slot " D04 ", operation liquid level " LE20 "；When any explosive barrel is beaten to low liquid level by chemicals feeder, PLC issue " explosive barrels
Low liquid level moves report ", steep medicine work to notify operating personnel to carry out.
If only two explosive barrels operate corresponding chemicals feeder, now issue " explosive barrel low liquid level moves report ", to notify to grasp in high level
Carry out steeping medicine work as personnel.
If only an explosive barrel is when high level, stop dosing, now issue " explosive barrel low liquid level moves report ", notify operating personnel
Carry out steeping medicine work.
Explosive barrel " D02 " liquid level gauge " LE18 " now issue " explosive barrel low liquid level moves report ", notifies operating personnel when low water level
Liquid caustic soda is injected in explosive barrel " D02 " by explosive barrel " D01 " interior medicine with chemicals feeder " C01 " manual mode in a manual manner, now managed
Road valve " V22 " is opened, and injection is completed, and chemicals feeder " C01 " and pipeline valve " V23 " are closed.
Monitoring temperature in reactive tank is carried out while dosing, if being more than 50 DEG C (can adjust with man-machine design), stops adding
Medicine, continue dosing if being cooled to below 40 DEG C.
If explosive barrel " D01 " is when low liquid level, issue " explosive barrel low liquid level moves report ", to notify operating personnel to carry out steeping medicine work
Make, when operating personnel carry out bubble medicine, shifting report switch can be closed in a manual manner.
While dosing, system blower operating, valve " AV03 " is opened.
5. filtering
This stage filtering product dewaterer has two product dewatering machines-I " K01 " and product dewatering machine-II " K02 ", corresponding
Acid and alkali-resistance membrane pump is " P03 " and " P04 ", and corresponding filtered water collection groove is " T04 " and " T05 ", and the liquid level in corresponding groove is calculated as
" LE03 " and " LE04 " (being digital level meter), it is " P05 " and " P06 " that water delivery pump is completed in corresponding filtering, corresponding filtering
Water return valve is " V01 " and " V03 ", and it is " V02 " and " V04 " that corresponding filtering, which completes water and carries out diaphragm valve,.
Reactive tank-I (T03) continues aeration agitation, the time is located at 30 minutes when chemicals feeder stops dosing in reactive tank
(can be adjusted in man-machine setting), after the completion of, system is filtered, and is filtered lasting aeration to filtration in time slot and is completed, filtering
Operating pressure is set in 6KG/CM2.(in aeration time-histories, gas piping valve " AV03 " is opened.)
" manual ", " automatic " and " stopping " may be selected in product dewatering machine, when " manual ", if 6KG/CM2And filtering completes water not
Water outlet continues more than 5 minutes again, and representative products dewaterer filtering time-histories has been completed, and now filtrate is full, and it is pneumatic to stop acid and alkali-resistance
Membrane pump, product dewatering machine conveyer action, oil hydraulic cylinder release of pressure, opens sheet frame, product material unloads automatically, defeated by product dewatering machine
Machine is sent to be transported to hopper (being transported to drying machine drying manually), oil hydraulic cylinder send pressure, sheet frame plywood, and acid and alkali-resistance pneumatic diaphragm pump moves
Make, continue to filter；During dewaterer " automatic ", " PP01 " (or " PP02 ") gauge pressure is continued above 6KG/CM2(it can be adjusted with man-machine setting
It is whole) more than, the interior liquid level gauge of corresponding collecting tank-I (T04) " LE03 " or collecting tank-II " T05 " interior liquid level gauge " LE04 ", every 10
Minute (can be by man-machine setting) liquid level difference is no more than 1 centimeter, and plate and frame dewaterer is automatically performed above-mentioned " manual " program；Product takes off
When water dispenser is set in " stopping ", maintenance shut-downs.
When filtration system carries out " automatic ", start acid and alkali-resistance pneumatic diaphragm pump " P03 ", filtering completes water and enters collecting tank-I
" T04 ", liquid level gauge " LE03 " control acid and alkali-resistance pneumatic diaphragm pump " P05 " is when 50 centimeters of height of water level " skyer " in groove, water level
Highly 10 centimeters " low to stop ", now open 5 minutes (can be by for pipeline valve " V01 " when acid and alkali-resistance pneumatic diaphragm pump " P03 " just starts
Man-machine setting adjustment), pipeline valve " V02 " is closed, and filtering is completed water and is back in reactive tank-I " T03 ", after the completion of 5 minutes, mistake
Filter completes water and imports progress neutralization reaction in neutralization chamber-I " T06 ", (reactive tank-I " T03 " interior liquid level gauge when filtering is completed
" LE02 " is located at low water level), now, acid and alkali-resistance pneumatic diaphragm pump " P03 " stops, and acid and alkali-resistance pneumatic diaphragm pump " P05 " operates extremely
Stop during collecting tank-I " T04 " low water level, pipeline valve " V01 " and " V02 " close (filter action completion).
When filtration system carries out " automatic ", if adjustment tank-I " T01 " interior liquid level gauge " LE01 " is located at high water level, except just
In starting product dewatering machine-I " K01 " and relevant device, dynamic product dewatering machine-II " K02 " and relevant device are set up another, that is, is started resistance to
Soda acid pneumatic diaphragm pump " P04 ", filtering complete water and enter collecting tank-II " T05 ", and set liquid level gauge " LE04 " control is acidproof in groove
Alkali pneumatic diaphragm pump " P06 " is when 50 centimeters of height of water level " skyer ", height of water level 10 centimeters " low to stop ", now in acid and alkali-resistance gas
Pipeline valve " V03 " opens 5 minutes (can be adjusted by man-machine setting) when dynamic membrane pump " P04 " just starts, and pipeline valve " V04 " is closed,
Filtering is completed water and is back in reactive tank-I " T03 ", and after the completion of 5 minutes, filtering completion water, which is imported in neutralization chamber-I " T06 ", to be carried out
Neutralization reaction.Filtering complete when (reactive tank-I " T03 " interior liquid level gauge " LE02 " is located at low water level), now, acid and alkali-resistance pneumatically every
Membrane pump " P03 " and " P04 " stop, when acid and alkali-resistance pneumatic diaphragm pump " P05 " and " P06 " running are to collecting tank-II " T05 " low water level
Stop, pipeline valve " V03 " and " V04 " close (filter action completion).
For ensure filtering complete water into neutralization chamber-I " T06 " be clarified wastewater, acid and alkali-resistance pneumatic diaphragm pump " P03 " or
" P04 ", which starts initial 5 minutes (can be adjusted by man-machine setting), must be back to reactive tank-I " T03 ".
When filtration system operates, system blower is persistently opened, and gas piping valve " AV03 " is opened, and instead, is closed, filtering
When system carries out " manual ", each equipment and the manually opened test of pipeline valve.
6. neutralize
The neutralization reaction in two times of this stage, system equipment have included neutralization chamber-I " T06 ", groove auxiliary equipment mixer
" M01 ", soda acid dosing controller and sensor " PH01 ", chemicals feeder " C02 ", neutralization chamber-I " T07 ", the stirring of groove auxiliary equipment
Machine " M02 ", soda acid dosing controller and sensor " PH02 ", chemicals feeder " C03 ", collecting tank-III " T08 " and acid and alkali-resistance pneumatically every
Membrane pump " P07 ".
Waste water via pipeline valve " V02 " and or " V04 " water conservancy diversion enter neutralization chamber-I " T06 ", i.e., pipeline valve " V02 " and or
When " V04 " is opened, mixer " M01 " and " M02 " come into operation, now soda acid dosing controller and sensor " PH01 " detecting water
It (can be set when groove " T06 " interior pH value is less than 5.5 in being adjusted on soda acid dosing controller), start chemicals feeder " C02 " action dosing,
Stop dosing higher than 5.5；Soda acid dosing controller and sensor " PH02 " detecting tank " T07 " interior pH value (can be in when being less than 6.5
Setting is adjusted on soda acid dosing controller), start chemicals feeder " C02 " action dosing, stop dosing higher than 6.5；This part waste water
T07 to T08 is flowed through by T06 in an overflow manner, acid and alkali-resistance pneumatic diaphragm pump " P07 " is set in collecting tank-III " T08 ", is extracted useless
Water is to adjustment tank-III " T09 ", and it is controlled by liquid level gauge " LE05 ", and skyer is low to stop.
2nd, second stage-calcirm-fluoride
1. water inlet, dosing and stirring
Hold on last stage, waste water is extracted to adjustment tank-III " T09 ", in groove automatically by acid and alkali-resistance pneumatic diaphragm pump " P07 "
Start acid and alkali-proof pump " P08 " during interior liquid level gauge " LE06 " high water level, now, if in reactive tank-II " T10 " interior liquid level gauge " LE07 "
Monitor and opened and pipeline valve " V06 ", " V07 " and " V08 " closing for low water level, pipeline valve " V05 ", monitored to liquid level gauge " LE07 "
For high water level (full water) when, acid and alkali-proof pump " P08 " stop, pipeline valve " V05 " close.
Start acid and alkali-proof pump " P08 " when adjustment tank-III " T09 " interior liquid level gauge " LE06 " high water level, now, if in reaction
Groove-II " T10 " interior liquid level gauge " LE07 " monitoring is high water level or acid and alkali-resistance pneumatic diaphragm pump " P09 " just in running, now, pipeline
Valve " V06 " open and pipeline valve " V05 " close, to liquid level gauge " LE08 " monitoring be high water level (full water) when, acid and alkali-proof pump " P08 "
Stop, pipeline valve " V06 " is closed.
If adjustment tank-III " T09 " interior liquid level gauge " LE06 " superelevation liquid level, reactive tank-II " T10 " interior liquid level gauge " LE07 " is high
Liquid level (or acid and alkali-resistance is pneumatically every in pump " P09 " operating), and, reactive tank-III " T11 " interior liquid level gauge " LE08 " high level (or it is resistance to
Soda acid pneumatically every pump " P10 " operating in), now, acid and alkali-resistance pneumatically every pump " P03 " and or " P04 " shut down, system PLC hair
Cloth " full water moves report ".
Reactive tank-II " T10 " and or during reactive tank-III " T11 " full water, react back PLC system and send that " full water dosing moves
Report ", and in setting " TT10 " and " TT11 " snap-type button in control panel, personnel to be operated add calcium hydroxide respectively manually
Enter reactive tank-II " T10 " and or during reactive tank-III " T11 ", return to operating surface version and will give as security button button and press respectively, confirm artificial
Dosing is completed, and completion notice PLC is acted.
When acid and alkali-proof pump " P08 " acts, gas piping valve " AV04 " is opened, and system blower is opened.
System is notified artificial dosing when completing, i.e. TT10 and or TT11 snap-type buttons when being separately or concurrently pressed.
Corresponding groove overhead gas pipeline valve " AV05 " and or " AV06 " in dispensing when open, system blower open, reaction
Groove continues with Gas Stirring 30 minutes.
In water inlet, dosing and whipping process, pipeline valve " V07 " corresponding to two reactive tanks and " V08 " each self closing.
2. filtering
This stage filtering product dewaterer has one " K03 ", corresponding reactive tank-II " T10 " and reactive tank-III " T11 ", right
It is " V07 " and " V08 " to answer pipeline valve, and corresponding filtration pump is acid and alkali-resistance membrane pump " P09 " and " P10 ", corresponds to filter water
Groove is collecting tank-IV " T12 ", and liquid level is calculated as " LE09 " (digital level meter) in corresponding groove, and water delivery pump is completed in corresponding filtering
For " P11 ", corresponding filter water return valve is " V10 ", and it is " V09 " that corresponding filtering, which completes water and carries out diaphragm valve,.
Reactive tank-II " T10 " and or reactive tank-III " T11 " after the completion of artificial dosing, lasting aeration stirs in reactive tank
To mix, the time is located at 30 minutes (can be adjusted in man-machine interface), after the completion of, system is filtered, filtration pressure setting 6KG/
CM2.When reactive tank-II " T10 " filters, pipeline valve " V07 " is opened, acid and alkali-resistance pneumatic diaphragm pump " P09 " action；Reactive tank-III
When " T11 " is filtered, pipeline valve " V08 " is opened, acid and alkali-resistance pneumatic diaphragm pump " P10 " action；Two reactive tanks can be filtered simultaneously
Action.
" manual ", " automatic " and " stopping " may be selected in product dewatering machine, when " manual ", if 6KG/CM2And filtering completes water not
Water outlet continues more than 5 minutes again, and representative products dewaterer filtering time-histories has been completed, and now filtrate is full, and it is pneumatic to stop acid and alkali-resistance
Membrane pump " P09 " and or " P10 ", the action of product dewatering machine conveyer, oil hydraulic cylinder release of pressure, open sheet frame, product material unloads automatically,
Hopper is transported to by product dewatering machine conveyer, oil hydraulic cylinder send pressure, sheet frame plywood, acid and alkali-resistance pneumatic diaphragm pump " P09 " and or " P10 "
Action, continues to filter；During dewaterer " automatic ", " PP03 " gauge pressure is continued above 6KG/CM2More than, corresponding collecting tank-IV
" T12 " interior liquid level gauge " LE09 ", every 10 minutes (can be by man-machine setting) liquid level difference are no more than 1 centimeter, and plate and frame dewaterer is automatic
Complete above-mentioned " manual " program；During product dewatering machine setting " stopping ", maintenance shut-downs.
Filtration system carry out " automatic " when, start acid and alkali-resistance pneumatic diaphragm pump " P09 " and or " P10 ", correspondence pipeline valve
" V07 " and " V08 " is also corresponding unlatching, and filtering completes water and enters collecting tank-IV " T12 ", and set liquid level gauge " LE09 " controls in groove
Acid and alkali-resistance pneumatic diaphragm pump " P11 " processed is when 50 centimeters of height of water level " skyer ", height of water level 10 centimeters " low to stop ", now product
When dewaterer has just completed discharging action, pipeline valve " V10 " unlatching 5 minutes (can be by when acid and alkali-resistance pneumatic diaphragm pump " P11 " just starts
Man-machine setting is adjusted), pipeline valve " V09 " is closed, and filtering is completed water and is back in adjustment tank-III " T09 ", after the completion of 5 minutes, filtering
Complete water and import adjustment tank-IV " T13 ", (reactive tank-II " T10 " interior liquid level gauge " LE07 " is located at low water level when filtering is completed；And
Or, reactive tank-III " T11 " interior liquid level gauge " LE08 " is located at low water level), now, corresponding acid and alkali-resistance pneumatic diaphragm pump " P09 " and or
" P10 " stops, and acid and alkali-resistance pneumatic diaphragm pump " P11 " stops when operating waste water to adjustment tank-IV " T13 " low water level, corresponding pipeline
Valve " V07 " and or " V08 " closing；Pipeline valve " V09 " and or " V10 " close, filter action complete.
It is clarified wastewater to ensure that filtering completes water into adjustment tank-IV " T13 ", product dewatering machine moves in just completion discharging
When making, acid and alkali-resistance pneumatic diaphragm pump " P11 ", which starts initial 5 minutes (can be adjusted by man-machine setting), must be back to adjustment tank-III
“T09”。
Filtration system operate when, system blower is persistently opened, gas piping valve " AV05 " and or " AV06 " open, instead
It, closes.
Adjustment tank-IV if " T13 " liquid level gauge " LE10 " in more than surcharge water level, acid and alkali-resistance pneumatic diaphragm pump " P09 " and
" P10 " stopping is acted, and pipeline valve " V07 " and " V08 " are closed, PLC " full water moves report ".
When filtration system carries out " manual ", each equipment and the manually opened test of pipeline valve.
3rd, phase III-sodium nitrate
1. water inlet, cooling and crystallization
When liquid level gauge " LE10 " high water level is set in adjustment tank-IV " T13 ", suction pump is set by waste water certainly in MVR rapid steamers
Import in MVR, high concentration concentrates waste water in first carrying out heat exchange with influent stream waste water with heat-exchangers of the plate type in MVR equipment, improves
Influent stream wastewater temperature, cooling groove " T14 " being subsequently entered, when MVR is acted, system blower is opened, gas piping valve " AV07 ",
" AV08 " and " AV09 " is opened, and is set " TE03 " and " LE11 " in cooling groove " T14 ", waste water (can be in man-machine less than 50 DEG C in temperature
Operation adjustment), when liquid level gauge exceedes high water level, waste water is imported crystallization tank " T15 " by acid and alkali-resistance pneumatic diaphragm pump " P12 " automatically
Interior, acid and alkali-resistance pneumatic diaphragm pump " P12 " is higher than 50 DEG C and or liquid level gauge " LE11 " low water level and or liquid level in water thermometer " TE03 "
Shut down when counting " LE12 " high water level, when MVR and acid and alkali-resistance pneumatic diaphragm pump " P12 " stop, gas piping valve " AV08 " closes
Close.
Groove " T14 " cool when superelevation liquid level, system closes MVR, PLC " full water moves report ".
MVR " manual " or when " automatic ", circulating pump-I " T17 " and or circulating pump-II " T18 " must an at least groove be height
Water level, when " automatic ", circulation work pump and related valves automatically turn on, and circulating water flow steams contracting machine operation temperature to reduce in formation
Degree, if two grooves are low water level, PLC " water shortage moves report ".
Waste water enters crystallization tank " T15 " decrease temperature crystalline again, and in being set in groove " TE03 " and " LE11 ", wastewater temperature is less than 35
DEG C (can be adjusted in human-machine operation), when liquid level gauge exceedes high water level, waste water is imported and produced by acid and alkali-resistance pneumatic diaphragm pump " P13 " automatically
Pint water dispenser " K04 ", acid and alkali-resistance pneumatic diaphragm pump " P12 " in water thermometer " TE04 " higher than 45 DEG C (being adjusted in human-machine operation) and
Or liquid level gauge " LE11 " shuts down when low water level.
When MVR and acid and alkali-resistance pneumatic diaphragm pump " P13 " stop, gas piping valve " AV09 " is closed.
2. filtering
Filtering product dewaterer designed by this stage has one " K04 ", corresponding crystallization tank " T15 ", corresponding filtration
Pump is acid and alkali-resistance membrane pump " P13 ", and corresponding filtering trough be collecting tank-V " T16 ", and it is (several to be calculated as " LE13 " for liquid level in corresponding groove
Word formula liquid level gauge), it is " P14 " that water delivery pump is completed in corresponding filtering, and corresponding filter water return valve is " V11 ", and corresponding filtering is completed
It is " V12 " that water, which carries out diaphragm valve,.
Crystallization tank " T15 " temperature is less than 35 DEG C, during high level, and acid and alkali-resistance pneumatic diaphragm pump " P13 " starts to filter, crystallization tank
Interior to continue aeration agitation, acid and alkali-resistance pneumatic diaphragm pump " P12 " stopping is acted, and system is filtered, and filtration pressure is set as
6KG/CM2。
" manual ", " automatic " and " stopping " may be selected in product dewatering machine, and when " manual ", filtering completes water no longer water outlet and continues 5
More than minute, the filtering of representative products dewaterer has been completed, and now filtrate is full, stops acid and alkali-resistance pneumatic diaphragm pump " P13 ", product
Dewaterer conveyer is acted, oil hydraulic cylinder release of pressure, opens sheet frame, and product material is unloaded automatically, and material is transported to by product dewatering machine conveyer
Groove, oil hydraulic cylinder send pressure, sheet frame plywood, acid and alkali-resistance pneumatic diaphragm pump " P13 " action, continue to filter；During dewaterer " automatic ",
" PP03 " gauge pressure is continued above 6KG/CM2More than, the interior liquid level gauge of corresponding collecting tank-V " T16 " " LE13 " every 10 minutes (can
By man-machine setting) for liquid level difference no more than 1 centimeter, plate and frame dewaterer is automatically performed above-mentioned " manual " program；Product dewatering machine is set
When fixed " stopping ", maintenance shut-downs.
Filtration system carry out " automatic " when, start acid and alkali-resistance pneumatic diaphragm pump " P13 ", filtering complete water into collecting tank-
V " T16 ", set liquid level gauge " LE13 " control acid and alkali-resistance pneumatic diaphragm pump " P14 " is " high when 50 centimeters of height of water level in groove
Beat ", height of water level 10 centimeters " low to stop ", now when product dewatering machine just completes discharging action, acid and alkali-resistance pneumatic diaphragm pump
Pipeline valve " V11 " opens 5 minutes (can be adjusted by man-machine setting) when " P14 " is just started, and pipeline valve " V12 " is closed, and filtering is completed
Water is back in crystallization tank " T15 ", and after the completion of 5 minutes, pipeline valve " V11 " and " V12 " corresponding switching, filtering completion water, which imports, to be adjusted
Whole groove-III " T09 ", when filtering is completed (crystallization tank " T10 " interior liquid level gauge " LE12 " is located at low water level), now, corresponding acid and alkali-resistance
Pneumatic diaphragm pump " P13 " stops, and acid and alkali-resistance pneumatic diaphragm pump " P14 " stops when operating waste water to adjustment tank-III " T09 " low water level
Only, corresponding pipeline valve " V11 " and " V12 " is closed, and filter action is completed.
When filter action continues, acid and alkali-resistance pneumatic diaphragm pump " P13 " continuous firing, if now adjustment tank-III " T09 " is super
During high water level, acid and alkali-resistance pneumatic diaphragm pump " P13 " is stopped, PLC " full water moves report ".
It is clarified wastewater to ensure that filtering completes water into adjustment tank-III " T09 ", product dewatering machine moves in just completion discharging
When making, acid and alkali-resistance pneumatic diaphragm pump " P14 ", which starts initial 5 minutes (can be adjusted by man-machine setting), must be back to crystallization tank
“T15”。
When filtration system operates, system blower is persistently opened, and gas piping valve " AV09 " is opened, conversely, closing.System
When system MVR and acid and alkali-resistance pneumatic diaphragm pump " P13 " start, gas piping valve " AV09 " is opened, conversely, closing.
When filtration system carries out " manual ", each equipment and the manually opened test of pipeline valve.
4th, fourth stage
MVR equipment two is entered and four go out altogether, as follows：
Two enter, and are respectively " influent stream waste water " and " Pistonless compressor cooling circulating water becomes a mandarin ".
Wherein, " Pistonless compressor recirculated water becomes a mandarin " is with running water (CITY WATER) moisturizing.
Four go out, and are hot systems, be respectively " distillation water outlet ", " Pistonless compressor cooling circulating water go out stream ", " high concentration is dense
Contracting waste water " and " low-temperature steam in system ".
1. low-temperature steam
Controlled and flowed to by pipeline valve " V13 ", " V14 " and " V15 ", adjustment tank-I " T01 " waste water water temperature meter " LE01 "
During less than 10 DEG C (being adjusted by man-machine setting), " V13 " is opened；When instead, higher than 15 DEG C (being adjusted by man-machine setting), close.
Circulating water chennel-I " T17 " and circulating water chennel-II " T18 " institute are to water circulating pump " P15 " and " P17 ", wherein a cell body
And during pump work, corresponding pipeline valve " V14 " or " V15 " is opened, another closing.(this is recirculated water in acceleration warming circulating tank
Temperature, speed is reclaimed with profit.)
2. Pistonless compressor cooling circulating water goes out stream
Water circulating pump " P15 " and " P17 " corresponding to circulating water chennel-I " T17 " and circulating water chennel-II " T18 ", wherein a groove
When body and pump work, corresponding pipeline valve " V16 " or " V17 " is opened, another closing；Form circulation closed system in one.Corresponding groove
Interior thermometer " TE05 " and " TE06 ", if more than 50 DEG C of temperature (being adjusted by man-machine setting), by corresponding acid and alkali-resistance pneumatic diaphragm
Pump " P16 " and " P18 " control skyer by liquid level gauge in corresponding groove " LE14 " and " LE15 " in an automatic fashion and low stopped；Two grooves and its
System, blocked operation do action (such as " P16 " action draining, the circulation temperature lowering work of " P17 " catcher, open by corresponding pipeline valve " V16 "
Open, form interior circulate.).
3. distill water outlet
Water outlet is distilled first to carry out with influent stream waste water with heat-exchangers of the plate type (in MVR equipment) before MVR equipment is discharged
Exchange and (improve influent stream wastewater temperature, purpose is energy-conservation) and discharge MVR at once, be drained into releasing chute " T19 ", it is corresponding acidproof
Alkali pneumatic diaphragm pump " P19 ", its corresponding liquid level gauge " LE15 ", skyer is low when " automatic " stops, pipeline valve " V22 ", into pure water
Adjustment tank, when system steeps medicine, " manual " opening pipeline valve " V21 ".
5th, it is other
The system adjusts system blower totally two, " A02 " and " A03 " the using and the reserved, gas piping valve when " automatic "
" AV01 ", " AV02 ", " AV03 ", " AV04 ", " AV05 ", " AV06 ", " AV07 ", " AV08 ", " AV09 " and " AV10 " wherein appoints
When one valve is opened, air blower automatically turns on wherein one, and start and stop replace automatically.
Product dewatering machine amounts to four, product dewatering machine-I " K01 ", product dewatering machine-II " K02 ", product dewatering machine-III
The corresponding filtration pump of " K03 " and product dewatering machine-IV " K04 ", acid and alkali-resistance pneumatic diaphragm pump " P03 ", " P04 ", " P09 ",
" P10 " and " P13 ", when " automatic " start, drainage reflux must be first passed through, to ensure each work-in-process purity.
Embodiment of above is only to illustrate technical concepts and features of the present utility model, and purpose is in being familiar with technique in allowing
People understand content of the present utility model and be carried out, the scope of protection of the utility model, all bases can not be limited with this
The equivalent change or modification that the utility model Spirit Essence is done, it should all be covered by the scope of protection of the utility model.
Claims (11)
1. etch the processing system of high-concentration waste liquid recycling, it is characterised in that：Including four stage processing systems, described four
Phase process system include be sequentially connected by pump first stage processing system, second stage processing system, at the phase III
Reason system and fourth stage processing system；
The first stage processing system include be sequentially connected by pump existing pond, adjustment tank-I, reactive tank-I, product dehydrate
Machine-I, collecting tank-I, neutralization chamber-I, neutralization chamber-II and collecting tank-II, the collecting tank-I are connected with the reactive tank-I, institute
State product dewatering machine-I to associate with drying machine, the reactive tank-I is connected with NaOH drug slots, and the NaOH drug slots connect with chemicals feeder
Connect, the NaOH drug slots are connected with NaOH bubble explosive barrels by chemicals feeder, and the adjustment tank-I is in parallel with adjustment tank-II, the receipts
Collection groove-I is in parallel with collecting tank-II, and the reactive tank-I is connected with the collecting tank-II by product dewatering machine-II, the tune
Acid and alkali-proof pump is provided between whole groove-I and the reactive tank-I, between the reactive tank-I and the product dewatering machine-I, described
Between reactive tank-I and the product dewatering machine-II, between the collecting tank-I and the neutralization chamber-I, the collecting tank-II
Acid and alkali-resistance pneumatic diaphragm pump is provided between the neutralization chamber-I；
The second stage processing system include be sequentially connected by pump adjustment tank-III, reactive tank-II, product dewatering machine-III
With collecting tank-IV, the product dewatering machine-III associates with the drying machine, and the collecting tank-IV connects with the adjustment tank-III
Connect, the reactive tank-II is in parallel with reactive tank-III, and the pump is acid and alkali-resistance pneumatic diaphragm pump；
The phase III processing system takes off including the adjustment tank-IV, MVR equipment, cool groove, crystallization tank, product being sequentially connected
Water dispenser-IV and collecting tank-V, the collecting tank-V are connected with the adjustment tank-III, the collecting tank-IV and the crystallization tank
Connection, the product dewatering machine-IV associates with the drying machine, it is described cool between groove and the crystallization tank, the crystallization tank
It is provided between the product dewatering machine-IV, between the collecting tank-V and the crystallization tank and the adjustment tank-III acidproof
Alkali pneumatic diaphragm pump；
The fourth stage processing system includes MVR equipment, circulating slot-I, circulating slot-II and releasing chute, and the MVR equipment connects
Circulating slot-I, circulating slot-II and releasing chute are connect, the MVR equipment forms inner loop with the circulating slot-I, and the MVR is set
Standby to form inner loop with the circulating slot-II, the circulating slot-I and circulating slot-II pass through acid and alkali-resistance pneumatic diaphragm pump and heat
Water recycling device is connected, and the releasing chute is connected by acid and alkali-resistance pneumatic diaphragm pump with reclamation set and pure water with cistern, institute
State MVR equipment to be connected with the adjustment tank-I and adjustment tank-II, the reclamation set is connected with NaOH bubble explosive barrels, described
Between releasing chute and the pure water cistern, between the circulating slot-I and the hot water reclamation set, the circulating slot-II
Acid and alkali-resistance pneumatic diaphragm pump is provided between the hot water reclamation set, between the circulating pump-I and the MVR equipment, described
Water pump is provided between circulating slot-II and the MVR equipment；
The acid and alkali-resistance pneumatic diaphragm pump is connected by five mouthfuls of two valves with air compressor machine.
2. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described
MVR equipment and the circulating slot-I, the MVR equipment and the circulating slot-II, the releasing chute and the pure water water storage
It is provided with stainless steel motor-driven valve between pond, the releasing chute and the reclamation set, collecting tank-I and the reactive tank-I and described
Between neutralization chamber-I, between the collecting tank-II and the reactive tank-I and the neutralization chamber-I, the adjustment tank-III and institute
State between reactive tank-II and reactive tank-III, between the reactive tank-II and reactive tank-III and the product dewatering machine-III, institute
State between collecting tank-IV and the adjustment tank-IV, between the collecting tank-IV and the adjustment tank-III, the NaOH bubble medicine
It is acidproof that PVC is provided between bucket and the NaOH drug slots, between the collecting tank-V and the crystallization tank and the adjustment tank-III
Alkali motor-driven valve.
3. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：The tune
Whole groove-I, adjustment tank-II, reactive tank-I, adjustment tank-III, reactive tank-II, reactive tank-III, adjustment tank-IV, cooling groove, crystallization
Groove and NaOH bubble explosive barrels are connected with air blower by gas piping valve respectively.
4. the processing system of etching high-concentration waste liquid recycling according to claim 3, it is characterised in that：The drum
Blower fan includes air blower-I and air blower-II, air blower-I and air blower-II alternation.
5. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described
NaOH drug slots include NaOH drug slots-I, NaOH drug slots-II, NaOH drug slots-III and NaOH drug slot-IV, the NaOH drug slots-I with
The neutralization chamber-I and neutralization chamber-II connection, the NaOH drug slots-II, NaOH drug slots-III and NaOH drug slots-IV with it is described anti-
Groove-I is answered to connect.
6. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described
Temperature monitoring is provided with NaOH bubbles explosive barrel, adjustment tank-I, reactive tank-I, cooling groove, crystallization tank, circulating slot-I and circulating slot-II
Device.
7. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described existing
There are pond, adjustment tank-I, reactive tank-I, collecting tank-I, collecting tank-II, collecting tank-III, adjustment tank-III, reactive tank-II, reaction
Groove-III, collecting tank-IV, adjustment tank-IV, cooling groove, crystallization tank, collecting tank-V, circulating slot-I, circulating slot-II, releasing chute,
Water-level gauge is respectively equipped with NaOH bubbles explosive barrel, NaOH drug slots-I, NaOH drug slots-II, NaOH drug slots-III and NaOH drug slots-IV.
8. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described dry
Dry machine is double-cone dryer.
9. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：The tune
Water flow monitor is provided between whole groove-I and the reactive tank-I.
10. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described
Mixer is provided with neutralization chamber-I and neutralization chamber-II and PH is counted.
11. the processing system of etching high-concentration waste liquid recycling according to claim 1, it is characterised in that：It is described
Product dewatering machine-I, the product dewatering machine-II, the product dewatering machine-III and the product dewatering machine-IV are provided with PVC
Oil-immersed type pressure gauge and citation formula pressure gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720093505.6U CN206735998U (en) | 2017-01-22 | 2017-01-22 | Etch the processing system of high-concentration waste liquid recycling |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720093505.6U CN206735998U (en) | 2017-01-22 | 2017-01-22 | Etch the processing system of high-concentration waste liquid recycling |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106830480A (en) * | 2017-01-22 | 2017-06-13 | 冯合生 | Etch the processing system and method for high-concentration waste liquid recycling |
| CN109148338A (en) * | 2018-09-04 | 2019-01-04 | 杭州中芯晶圆半导体股份有限公司 | A kind of method and device for improving etching machine nitration mixture and changing liquid efficiency |
-
2017
- 2017-01-22 CN CN201720093505.6U patent/CN206735998U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106830480A (en) * | 2017-01-22 | 2017-06-13 | 冯合生 | Etch the processing system and method for high-concentration waste liquid recycling |
| CN106830480B (en) * | 2017-01-22 | 2020-12-18 | 冯合生 | Treatment system and method for recycling high-concentration waste etching liquid |
| CN109148338A (en) * | 2018-09-04 | 2019-01-04 | 杭州中芯晶圆半导体股份有限公司 | A kind of method and device for improving etching machine nitration mixture and changing liquid efficiency |
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