CN206671365U - A kind of sample for being used to prepare atomic-force microscope needle-tip - Google Patents
A kind of sample for being used to prepare atomic-force microscope needle-tip Download PDFInfo
- Publication number
- CN206671365U CN206671365U CN201720211684.9U CN201720211684U CN206671365U CN 206671365 U CN206671365 U CN 206671365U CN 201720211684 U CN201720211684 U CN 201720211684U CN 206671365 U CN206671365 U CN 206671365U
- Authority
- CN
- China
- Prior art keywords
- sample
- needle point
- needle
- force microscope
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
It the utility model is related to AFM field,A kind of sample for being used to prepare atomic-force microscope needle-tip,Preparation facilities mainly includes resistance,Cantilever,Needle point,Sample,Gap location between sample and needle point,Thorn,Current feedback system,Electro-optical feedback system,Piezoelectric actuator,Power supply U,The sample includes the first sample and the second sample,First sample surfaces, which have to be recessed with the reverse taper of array arrangement, cheats,There is a diameter 100nm every 100nm,Depth 30nm depression hole,Second sample surfaces have with the projection of array arrangement,There is a high 20nm every 20nm,Diameter 10nm projection,Can also be to same towards inclined raised,Pass through the front and rear application of the first sample and the second sample,Under the high electric field effect that gap location between the sample and needle point is formed,The needle point front end is enabled to grow the thorn for meeting requirement of experiment perpendicular to sample surfaces of hundreds of nanometers of length,Accelerate experiment process.
Description
Technical field
A kind of preparation field of the atomic-force microscope needle-tip of nanostructured is the utility model is related to, particularly can be normal
The simple and effective a kind of use of the needle point for meeting experiment demand, preparation method is prepared under warm atmospheric conditions directly on original needle point
In the sample for preparing atomic-force microscope needle-tip.
Background technology
AFM (Atomic Force Microscope, AFM) is to utilize atom, intermolecular interaction
Power observes the instrument of body surface microscopic appearance, and its general principle is：By the way that the probe of a nano-scale dimension is fixed on
Can be on the micron order elastic cantilever of sensitive manipulation, when needle point and sample are very close, the atom and sample surfaces at needle point tip
Active force between atom can bend the micron order elastic cantilever, deviate original position；Meanwhile there is beam of laser irradiation
Onto cantilever, and reflex in laser monitoring device, the bending of elastic cantilever result in the deviation of laser, thus obtain the inclined of hot spot
Shifting amount, according to the offset and its vibration frequency, as feedback signal, inputted by specific reponse system in computer,
Computer can rebuild 3-D view with this, so as to obtaining the pattern of sample surfaces and composition information.
AFM can work in different modes, and these patterns mainly have contact mode, tapping-mode, lateral
Force mode etc..In contact mode, needle point streaks from sample surfaces, can go out the height on surface from the deflection of cantilever with Direct Analysis
Figure.In tapping-mode or lateral force mode, there is signal source to drive cantilever vibration with some external reference frequency, in scanning sample
During the frequency of cantilever vibration can change, the parameter such as amplitude, phase and resonance is related to the active force of probe and sample room,
The change of the vibration for the external reference that these parameter relative signal sources provide can reflect the property of sample.Wherein, as rapping
One expansion technique of pattern, the phase angle for the signal source that phase shifting modes are vibrated by detecting driving cantilever probe and cantilever probe
The change of the difference (i.e. the phase shift of signal source and actual vibration) at the phase angle of actual vibration is imaged.
AFM (AFM) is with the obvious advantage relative to SEM, and first, AFM can carry
For real three-dimension surface, and SEM can only provide two dimensional image；Second, AFM need not pair
Any specially treated of sample, such as copper facing or carbon, this processing can cause irreversible injury to sample；3rd, atomic force
Microscope at ambient pressure even under liquid environment can works fine, can be used for studying biological macro molecules, or even living
Biological tissue, just as taking a part for the whole, slowly stroked on the surface of object, the shape of atom can be showed intuitively very much.
And electron microscope needs to run in high vacuum conditions.
Atomic-force microscope needle-tip is typically silicon materials Si or Si3N4It is made, difference is coated with outside it according to different needs
Metal level.When traditional atomic force microscope probe needle point is worn, its radius of curvature can become big, scanning obtains sample
Image resolution ratio can be reduced, therefore the imaging of AFM is influenceed very large, therefore atomic force microscopy by its probe
Mirror needle point is running stores, is especially easily lost after high accuracy experiment in use, and replacing needle point is cumbersome and time consuming, and
Delay experiment progress, the method for silicon needle point tip-growth thorn has at present：Ion or electron beam deposition, focused ion beam are carved
Erosion, chemical vapor carbon deposition nanotube or metal nano-tube etc..But the defects of these methods, has：First, cost is higher, second,
Need to carry out in vacuum chamber and the requirement to vacuum is high, third, can not carry out in the original location, it is necessary to interrupt experiments process so that no
The needle point that easily and timely can more renew, it is delayed experiment progress, a kind of sample for being used to prepare atomic-force microscope needle-tip
Can solve this problem.
Utility model content
In order to solve the above problems, it is described it is a kind of be used to preparing the sample of atomic-force microscope needle-tip by the first sample and
The front and rear application of second sample, it directly can in atmospheric conditions be operated and significantly increase atomic-force microscope needle-tip
Acuity, the needle point for meeting experiment demand can either be prepared in the original location without replacing needle point.
Scheme is used by the utility model：
A kind of sample for being used to prepare atomic-force microscope needle-tip, the device for preparing atomic-force microscope needle-tip are main
Including the gap location between resistance, cantilever, needle point, sample, sample and needle point, thorn, current feedback system, electro-optical feedback system
System, piezoelectric actuator, power supply U, wherein power supply U positive poles connect sample, negative pole and connect resistance, current feedback system, cantilever and pin successively
Point, the needle point are fixed on below the cantilever, and the sample is located at below the needle point；When the needle point approaches the sample
When surface is to certain distance, the power supply U is added to the needle point by the resistance, can be between the sample and needle point
Gap location formed a high electric field so that the needle point front end grow hundreds of nanometers of length perpendicular to sample surfaces
The thorn for meeting requirement of experiment, the sample includes the first sample and the second sample, the first sample table mask
Have to be recessed with the reverse taper of array arrangement and cheat, cheated every the depression that 100nm has a diameter 100nm, depth 30nm, described second
Sample surfaces have with the projection of array arrangement, have a high 20nm, diameter 10nm projection every 20nm.Second sample
The projection on surface is to same towards inclined raised, and single direction is carried out using the second sample with the inclined protrusions
Row scanning and enable scanning direction it is relative with the direction of the inclined protrusions when obtain more preferable effect, after a line end of scan
Needle point is lifted away from sample, the scanning that beginning-of-line carries out next line is returned to, is repeated in.The sample is conductor metal nickel or cobalt
Or film, the semi-conducting material Si or GaAs of gold or platinum.
When preparing atomic-force microscope needle-tip, first from first sample, needle point is placed in depression hole top, can
Strengthen focusing electric field after gap location making alive between sample and needle point, it is easier to produce thorn；Use described second instead again
Sample, AFM are worked with tapping-mode, and add relative voltage during scanning, due in scanning process
Needle point and the gentle touchdown of the second sample surfaces projection, so as to make the larger thorn-like of the direction arbitrariness originally grown
Thing slightly changes direction, and grows a thorn for meeting requirement of experiment perpendicular to the sample surfaces.
Thorn formation basic theory：Electric field energy is larger in a relatively affined region holding one of near sample surface
Value, now nanostructure growth can be formed on sample and needle point, spatially, because one of electrode is the point of needle point
End, the electric field is uneven, the transfer of the adsorbates of sample surfaces in non-uniform electric field, and is decomposed, rear self assembly again, from
And to form thorn on needle point.The source of thorn composition material is absorption in the atmospheric environment of needle point and sample surfaces
Hydrocarbon adsorbate, form the decomposition of the hydrocarbon of adsorbate, carbon nanometer formed in needle point and sample surfaces
Structure.By applying power supply, can all there is deposition on sample and needle point, in most cases, it is carbon to deposit the material to get off, by inhaling
Attached hydrocarbon decomposes.
The beneficial effects of the utility model are：
A kind of sample for being used to prepare atomic-force microscope needle-tip is made by the priority of the first sample and the second sample
With can directly prepare needle point in atmospheric conditions, need not both be carried out in vacuum chamber, it is not required that by more complicated system
Standby instrument, method is effective, and what easily and timely can more be renewed meets the needle point of experiment demand, and then continues to test, and adds
Fast experiment process, and cost is low.
Brief description of the drawings
Further illustrated with reference to figure of the present utility model：
Fig. 1 is AFM operating diagram；
Fig. 2 is the enlarged diagram of the gap location between sample and needle point；
Fig. 3 is the first sample enlarged diagram；
Fig. 4 is one of the second sample enlarged diagram；
Fig. 5 is two enlarged diagrams of the second sample.
In figure, 1. resistance, 2. cantilevers, 3. needle points, 4. samples, the gap location between 5. samples and needle point, 6. thorns,
7. current feedback system, 8. electro-optical feedback systems, 9. piezoelectric actuators.
Embodiment
If Fig. 1 is AFM operating diagram, preparing the device of atomic-force microscope needle-tip mainly includes resistance
1st, the gap location 5 between cantilever 2, needle point 3, sample 4, sample and needle point, thorn 6, current feedback system 7, electro-optical feedback system
System 8, piezoelectric actuator 9, power supply U, wherein power supply U positive poles connect sample 4, negative pole and connect resistance 1, current feedback system 7 successively, hang
Arm 2 and needle point 3, the needle point 3 are fixed on the lower section of cantilever 2, and the sample 4 is positioned at the lower section of needle point 3.
If Fig. 2 is the enlarged diagram of the gap location between sample and needle point, when the needle point 3 approaches the table of sample 4
When face is to certain distance, the power supply U is added to the needle point 3 by the resistance 1, can be between the sample and needle point
Gap location 5 formed a high electric field so that the front end of the needle point 3 grow hundreds of nanometers of length perpendicular to sample table
The thorn 6 for meeting requirement of experiment in face.
If Fig. 3 is the first sample enlarged diagram, first sample surfaces have to be recessed with the reverse taper of array arrangement
Hole, there are a diameter 100nm, depth 30nm depression hole every 100nm.
If Fig. 4 is one of the second sample enlarged diagram, second sample surfaces have with the projection of array arrangement, often
There are a high 20nm, diameter 10nm projection every 20nm.
The projection of second sample surfaces, it is to same direction if Fig. 5 is two enlarged diagrams of the second sample
Inclined projection, the scanning of single direction row is carried out using the second sample with the inclined protrusions and makes the direction of scanning with being somebody's turn to do
The direction of inclined protrusions can obtain more preferable effect when relative, needle point is lifted away from into sample after a line end of scan, returns to and goes
Point carries out the scanning of next line, is repeated in.
A kind of sample for being used to prepare atomic-force microscope needle-tip, the device for preparing atomic-force microscope needle-tip are main
Including the gap location 5 between resistance 1, cantilever 2, needle point 3, sample 4, sample and needle point, thorn 6, current feedback system 7, light
Electric reponse system 8, piezoelectric actuator 9, power supply U, wherein power supply U positive poles connect sample 4, negative pole and connect resistance 1, current feedback system successively
System 7, cantilever 2 and needle point 3, the needle point 3 are fixed on the lower section of cantilever 2, and the sample 4 is positioned at the lower section of needle point 3；When
When the needle point 3 approaches the surface of sample 4 to certain distance, the power supply U is added to the needle point 3 by the resistance 1,
A high electric field can be formed in the gap location 5 between the sample and needle point, so that the front end of the needle point 3 is grown
The thorn 6 for meeting requirement of experiment perpendicular to sample surfaces of hundreds of nanometers of length, the sample 4 include the first sample
With the second sample, first sample surfaces, which have to be recessed with the reverse taper of array arrangement, cheats, and has a diameter every 100nm
100nm, depth 30nm depression hole, second sample surfaces have with the projection of array arrangement, have a height every 20nm
20nm, diameter 10nm projection.
The projection of second sample surfaces is to same towards inclined raised, using with the inclined protrusions
Second sample carry out the scanning of single direction row and enable scanning direction it is relative with the direction of the inclined protrusions when obtain more preferably
Effect, needle point is lifted away from sample after a line end of scan, returns to the scanning that beginning-of-line carries out next line, be repeated in.
The sample 4 is the film of conductor metal nickel or cobalt or gold or platinum, semi-conducting material Si or GaAs.
When preparing atomic-force microscope needle-tip, first from first sample, the needle point 3 is placed on depression hole
It is square, after making alive U, focusing electric field can be strengthened in the gap location 5 between the sample and needle point, it is easier to produce thorn；
Use second sample instead again, AFM is worked with tapping-mode, and adds relative voltage during scanning, by
In the needle point 3 described in scanning process and the gentle touchdown of the second sample surfaces projection, so as to make what is originally grown
Arbitrariness larger thorn in direction slightly changes direction, and grows one and meet experiment perpendicular to the surface of sample 4
It is required that the thorn 6.
Claims (3)
1. a kind of sample for being used to prepare atomic-force microscope needle-tip, preparing the device of atomic-force microscope needle-tip mainly includes electricity
Gap location (5), thorn (6) between resistance (1), cantilever (2), needle point (3), sample (4), sample and needle point, current feedback system
Unite (7), electro-optical feedback system (8), piezoelectric actuator (9), power supply U, wherein power supply U positive poles connect sample (4), negative pole connects electricity successively
(1), current feedback system (7), cantilever (2) and needle point (3) are hindered, the needle point (3) is fixed on below the cantilever (2), described
Sample (4) is located at below the needle point (3)；When the needle point (3) approaches the sample (4) surface to certain distance, by institute
State power supply U and the needle point (3) is added to by the resistance (1), can be in gap location (5) formation between the sample and needle point
One high electric field so that the needle point (3) front end grow hundreds of nanometers of length meet reality perpendicular to sample surfaces
The thorn (6) of requirement is tested, it is characterized in that：The sample (4) includes the first sample and the second sample, first sample
Surface, which has to be recessed with the reverse taper of array arrangement, cheats, and has a diameter 100nm, depth 30nm depression hole, institute every 100nm
Stating the second sample surfaces has with the projection of array arrangement, has a high 20nm, diameter 10nm projection every 20nm.
2. a kind of sample for being used to prepare atomic-force microscope needle-tip according to claim 1, it is characterized in that：Described second
The projection of sample surfaces is to same towards inclined raised.
3. a kind of sample for being used to prepare atomic-force microscope needle-tip according to claim 1, it is characterized in that：The sample
(4) be conductor metal nickel or cobalt or gold or platinum film, semi-conducting material Si or GaAs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720211684.9U CN206671365U (en) | 2017-02-24 | 2017-02-24 | A kind of sample for being used to prepare atomic-force microscope needle-tip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720211684.9U CN206671365U (en) | 2017-02-24 | 2017-02-24 | A kind of sample for being used to prepare atomic-force microscope needle-tip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206671365U true CN206671365U (en) | 2017-11-24 |
Family
ID=60376121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720211684.9U Expired - Fee Related CN206671365U (en) | 2017-02-24 | 2017-02-24 | A kind of sample for being used to prepare atomic-force microscope needle-tip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206671365U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414794A (en) * | 2018-01-24 | 2018-08-17 | 胡欢 | A kind of atomic force microscope probe production method with nanoscale ball point |
| CN109507454A (en) * | 2018-11-07 | 2019-03-22 | 中北大学 | A kind of preparation method measuring crystal face active force atomic-force microscope needle-tip |
-
2017
- 2017-02-24 CN CN201720211684.9U patent/CN206671365U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414794A (en) * | 2018-01-24 | 2018-08-17 | 胡欢 | A kind of atomic force microscope probe production method with nanoscale ball point |
| CN109507454A (en) * | 2018-11-07 | 2019-03-22 | 中北大学 | A kind of preparation method measuring crystal face active force atomic-force microscope needle-tip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE102016205941B4 (en) | Apparatus and method for analyzing a defect in a photolithographic mask or a wafer | |
| US7441444B2 (en) | AFM cantilevers and methods for making and using same | |
| US7442926B2 (en) | Nano tip and fabrication method of the same | |
| CN206671365U (en) | A kind of sample for being used to prepare atomic-force microscope needle-tip | |
| KR20100019587A (en) | Spm nanoprobes and the preparation method thereof | |
| Ukraintsev et al. | Artifacts in atomic force microscopy of biological samples | |
| Schäffer et al. | Scanning ion conductance microscopy | |
| CN106771376A (en) | A kind of method for preparing atomic-force microscope needle-tip | |
| Hu et al. | A sub-micron spherical atomic force microscopic tip for surface measurements | |
| Taylor et al. | Pearls found on the way to the ideal interface for scanned probe microscopes | |
| CN206540931U (en) | A kind of current feedback circuit for preparing atomic-force microscope needle-tip | |
| KR100736358B1 (en) | Method to assemble nanostructures at the end of scanning probe microscope's probe and scanning probe microscope with the probe | |
| JP2004268233A (en) | Data recorder using carbon nanotube and data reading/writing method | |
| Boggild et al. | Customizable nanotweezers for manipulation of free-standing nanostructures | |
| Orlov et al. | Ti2NiCu based composite nanotweezers with a shape memory effect and its use for DNA bunches 3D manipulation | |
| Schneiker et al. | Scanning tunnelling engineering | |
| Oberleithner et al. | Living renal epithelial cells imaged by atomic force microscopy | |
| Ramsier et al. | Nanolithography of silicon: An approach for investigating tip-surface interactions during writing | |
| Xu et al. | Design and realization of scanning probe microscope based on a T-shaped high-aspect-ratio probe | |
| Liu et al. | Nanodot deposition and its application with atomic force microscope | |
| Iwasaki et al. | Nanomanipulator based on a high-speed atomic force microscope capable of controlling a cantilever loading force using a magnetic solenoid | |
| Ruiz-Perez et al. | Scanning Probe Microscopy: Tipping the Path Toward Atomic Visions | |
| Iwata et al. | Development of a nano manipulator based on an atomic force microscope coupled with a haptic device: a novel manipulation tool for scanning electron microscopy | |
| Xu et al. | Application of calibrated and reusable probes on a home-made scanning probe microscope platform | |
| Sapcharoenkun | Controlled nanostructure fabrication using atomic force microscopy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171124 Termination date: 20190224 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |