CN206661841U - A kind of tilting mirror laser cleaning device - Google Patents
A kind of tilting mirror laser cleaning device Download PDFInfo
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- CN206661841U CN206661841U CN201720277413.3U CN201720277413U CN206661841U CN 206661841 U CN206661841 U CN 206661841U CN 201720277413 U CN201720277413 U CN 201720277413U CN 206661841 U CN206661841 U CN 206661841U
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Abstract
The utility model discloses a kind of tilting mirror laser cleaning device, it is related to laser cleaning technique field, mainly by laser, photoswitch, beam expander, collimater, scanning mirror and the aspherical cylindrical mirrors of f theta are formed, laser caused by the laser passes through the photoswitch successively, the beam expander, the collimater, the scanning mirror, scanning mirror uniform rotation under the drive of motor, laser reflection is entered into the aspherical cylindrical mirrors of f theta, the aspherical cylindrical mirrors of f theta are by the Laser Focusing that the scanning mirror reflects to working face to be cleaned.Based on the guiding theory sternly coordinated, according to the overall architecture form of rotating mirror system, rational deployment is carried out, it is very convenient, there is reasonable in design, simple in construction, the features such as operation is flexible, and versatility is good.
Description
Technical field
Laser cleaning technique field is the utility model is related to, especially a kind of tilting mirror laser cleaning device.
Background technology
Traditional cleaning method includes mechanical cleaning, Chemical cleaning, ultrasonic wave cleaning etc..Mechanical cleaning i.e. using scrape, wipe,
The mechanical means such as brush, sandblasting remove surface contaminants；Chemical cleaning, ultrasonic wave cleaning Chang Yin bring secondary pollution using cleaning agent
Problem.At present, the high-end cleaning of main flow uses laser cleaning method, and laser cleaning is without these disadvantages.Laser cleaning it is notable excellent
Gesture is that what it is because of contact surface to be cleaned is light, so as to scratch substrate, can realize the precision cleaning of constituency positioning, and
And do not have to any solution, noxious material is not produced, is a kind of green cleaning technology.
But there is following a few point defects in existing laser cleaning mode：1st, hand holding handle design comparison weight, about 5Kg, no
It is adapted to worker to continue washing and cleaning operation, different design closes body mechanics's design；2nd, cleaning speed is slow, and cleaning speed is by probe motor
Reciprocating frequency and rate limitation；3rd, electric motor starting and stopping delay influenceing big on cleaning performance；4th, repeated washing, scanning
Motor easily radiates bad.
Utility model content
In view of the above-mentioned problems, the utility model provides a kind of tilting mirror laser cleaning device.
A kind of tilting mirror laser cleaning device, mainly by laser, photoswitch, beam expander, collimater, scanning mirror and f-
The aspherical cylindrical mirrors of theta are formed, and laser caused by the laser is successively by the photoswitch, beam expander, described
Collimater, the scanning mirror, scanning mirror uniform rotation under the drive of motor, laser reflection is entered into the f-
The aspherical cylindrical mirrors of theta, the aspherical cylindrical mirrors of f-theta are by the Laser Focusing that the scanning mirror reflects to be cleaned
On working face.
Further, the scanning mirror uses 6 face prisms, surface plating reflectance coating.
Further, the laser uses wavelength 1064nm laser, emergent light spot 2mm.
Further, the beam expander uses variable multiple beam expander, and laser facula is expanded as 15mm.
Further, the aspherical focus of cylindrical mirror of the f-theta is 255mm, and laser beam is gathered into one 25 μm directly
The hot spot in footpath.
Further, the photoswitch is used for the folding for controlling laser optical path, before the scanning mirror not yet uniform rotation,
Photoswitch is closed, until the scanning mirror enters uniform rotation.
The beneficial effects of the utility model：Based on the guiding theory sternly coordinated, according to the overall architecture form of rotating mirror system,
Rational deployment is carried out, it is very convenient, there is reasonable in design, simple in construction, the features such as operation is flexible, and versatility is good；Using tilting mirror
The mode of scanning, scanning accuracy can be effectively improved, be adapted to quick, the accurate cleaning of foreign matter；Maximum scan linear velocity can reach
To 200m/s, 160 × 160mm of scanning range, sensitivity ＜ 3um, repeatable accuracy<±10um.
Brief description of the drawings
Fig. 1 is the overall structure diagram of tilting mirror laser cleaning device.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and detailed description.It is of the present utility model
Embodiment provides for the sake of example and description, and be not be limited to exhaustively or by the utility model it is disclosed
Form.Many modifications and variations are obvious for the ordinary skill in the art.Selection and description are implemented
Example be in order to more preferably illustrate principle and practical application of the present utility model, and make one of ordinary skill in the art it will be appreciated that
The utility model is so as to designing the various embodiments with various modifications suitable for special-purpose.
Embodiment 1
A kind of tilting mirror laser cleaning device, as shown in figure 1, mainly by laser 10, photoswitch 20, beam expander 30, collimation
Device 40, scanning mirror 50 and the aspherical cylindrical mirrors 60 of f-theta are formed, and laser caused by the laser 10 is successively by described
Photoswitch 20, the beam expander 30, the collimater 40, the scanning mirror 50, band of the scanning mirror 50 in motor 70
Dynamic lower uniform rotation, enters the aspherical cylindrical mirrors 60 of the f-theta, the aspherical cylindrical mirrors of f-theta by laser reflection
60 by the Laser Focusing that the scanning mirror 50 reflects to working face to be cleaned.
By photoswitch 20 and beam expander 30, the light that beam expander 30 sends laser 10 expands the laser that laser 10 is sent
Beam irradiates the surface of scanning mirror 50, scanning mirror 50 is with motor 70 into the laser facula of certain multiple by the laser expanded
Rotate.With the rotation of scanning mirror 50, laser facula can be irradiated on the aspherical cylindrical mirrors 60 of f-theta, by f-
The aspherical cylindrical mirrors 60 of theta, laser can be focused into the spot size for meeting laser cleaning.
This example uses 1064nm long wavelength lasers, emergent light spot 2mm；Laser engine photoswitch is designed using magnetic valve；
By variable multiple beam expander, laser facula is expanded as 15mm；Then collimater is passed through, by laser entering by scanning mirror
Hole, into rotating mirror system, the motor driven scanning mirror in rotating mirror system is rotated with constant speed, and laser beam is anti-by tilting mirror
That penetrates face is reflected into the aspherical cylindrical mirrors of f-theta, and the aspherical cylindrical mirror selective focus of f-theta is 255mm, can be by laser
Beam is gathered into the hot spot of a 25um diameter（M^2=1), formation one is a diameter of on the aspherical cylindrical mirror focal planes of f-theta
25um cleaning hot spot, the hot spot form scanning laser with the rotation of motor.Line 160 × 160mm of scanning range of the light beam,
Suitable laser parameter is set, cleaning laser beam can be produced, meets cleaning demand.
Obviously, described embodiment is only part of the embodiment of the present utility model, rather than whole embodiments.
Based on the embodiment in the utility model, this area and those of ordinary skill in the related art are not making creative work
Under the premise of the every other embodiment that is obtained, should all belong to the scope of the utility model protection.
Claims (6)
- A kind of 1. tilting mirror laser cleaning device, it is characterised in that：Mainly by laser, photoswitch, beam expander, collimater, scanning Tilting mirror and the aspherical cylindrical mirrors of f-theta are formed, laser caused by the laser successively by the photoswitch, described expand Device, the collimater, the scanning mirror, scanning mirror uniform rotation under the drive of motor, laser reflection is entered The aspherical cylindrical mirrors of f-theta, the aspherical cylindrical mirrors of f-theta arrive the Laser Focusing that the scanning mirror reflects On working face to be cleaned.
- 2. tilting mirror laser cleaning device according to claim 1, it is characterised in that：The scanning mirror uses 6 face prisms, Plate reflectance coating in surface.
- 3. tilting mirror laser cleaning device according to claim 1, it is characterised in that：The laser uses wavelength 1064nm Laser, emergent light spot 2mm.
- 4. tilting mirror laser cleaning device according to claim 1, it is characterised in that：The beam expander is expanded using variable multiple Beam device, laser facula is expanded as 15mm.
- 5. tilting mirror laser cleaning device according to claim 1, it is characterised in that：The aspherical cylindrical mirrors of f-theta 255mm is focused to, laser beam is gathered into the hot spot of 25 μ m diameters.
- 6. according to the tilting mirror laser cleaning device described in claim 1-5 any one, it is characterised in that：The photoswitch is used for The folding of laser optical path is controlled, before the scanning mirror not yet uniform rotation, photoswitch is closed, until the scanning Tilting mirror enters uniform rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720277413.3U CN206661841U (en) | 2017-03-21 | 2017-03-21 | A kind of tilting mirror laser cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720277413.3U CN206661841U (en) | 2017-03-21 | 2017-03-21 | A kind of tilting mirror laser cleaning device |
Publications (1)
| Publication Number | Publication Date |
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| CN206661841U true CN206661841U (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720277413.3U Active CN206661841U (en) | 2017-03-21 | 2017-03-21 | A kind of tilting mirror laser cleaning device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN111871965A (en) * | 2020-06-30 | 2020-11-03 | 中国科学院理化技术研究所 | Laser cleaning arm and laser cleaning robot |
| CN113376829A (en) * | 2021-07-06 | 2021-09-10 | 江苏亮点光电研究有限公司 | Optical transmitting device of laser dazzler |
| CN113917682A (en) * | 2021-09-30 | 2022-01-11 | 武汉翔明激光科技有限公司 | Rotating mirror structure for laser cleaning and control method thereof |
-
2017
- 2017-03-21 CN CN201720277413.3U patent/CN206661841U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN110153106B (en) * | 2019-04-29 | 2024-02-13 | 苏州创鑫激光科技有限公司 | Laser cleaning system and cleaning method |
| CN111871965A (en) * | 2020-06-30 | 2020-11-03 | 中国科学院理化技术研究所 | Laser cleaning arm and laser cleaning robot |
| CN113376829A (en) * | 2021-07-06 | 2021-09-10 | 江苏亮点光电研究有限公司 | Optical transmitting device of laser dazzler |
| CN113917682A (en) * | 2021-09-30 | 2022-01-11 | 武汉翔明激光科技有限公司 | Rotating mirror structure for laser cleaning and control method thereof |
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