CN206656052U - The sealing device connected for pipeline inside and outside vacuum cavity - Google Patents
The sealing device connected for pipeline inside and outside vacuum cavity Download PDFInfo
- Publication number
- CN206656052U CN206656052U CN201621454235.9U CN201621454235U CN206656052U CN 206656052 U CN206656052 U CN 206656052U CN 201621454235 U CN201621454235 U CN 201621454235U CN 206656052 U CN206656052 U CN 206656052U
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- China
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- ring
- flange
- cavity
- pipe joint
- adpting flange
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Abstract
The utility model provides a kind of sealing device for pipeline connection inside and outside vacuum cavity, including pipe joint, retaining ring, adpting flange, sealing ring, o-ring, O-ring, Quick Release Hoop, with cavity flange, pipe joint passes from cavity flange endoporus, sealing ring is enclosed in the groove of pipe joint, adpting flange is enclosed on pipe joint, the bore area of adpting flange is brought into close contact with sealing ring, retaining ring is caught in the groove of pipe joint, and fixed with screw and adpting flange, O-ring is enclosed in o-ring, then by between O-ring Snap joint flange and cavity flange, and by Quick Release Hoop by adpting flange and cavity flange clamping.According to the attachment means of the present utility model for vacuum chamber body vessel, the problem of having can effectively solve the problem that traditional pipeline connecting device the quantity of tie point be excessive in cavity, the generation that artificial installation causes tie point leak case is avoided, very big facility is brought to later stage leak detection work.
Description
Technical field
A kind of sealing device for pipeline connection inside and outside vacuum cavity is the utility model is related to, more particularly to is met extraneous
While pipeline connects with vacuum chamber body vessel, and can meets the sealing device of air-proof condition.Described device can be used for vacuum
The transfer pipeline of liquid or gas connects in cavity.
Background technology
There are many pipelines to need to be connected with exterior line for large area magnetic-controlled sputtering coating equipment, in cavity.
Traditional pipeline connecting device has many places tie point in vacuum cavity, and the quantity of tie point is more, and existing leakage point is also got over
It is more, and very big human factor be present in the sealing of tie point, it is not easy to control.Inspection of traditional pipeline connecting device to the later stage
Leakage work also increases certain burden.
And do not have a kind of sealing device that can solve the problem that above mentioned problem at present.
Utility model content
It is of the present utility model to aim to solve the problem that conventional tube attachment means in cavity for technological deficiency existing for prior art
Excessive tie point inside be present, thoroughly solve the hidden danger that pipeline is revealed in inside cavity, mitigate the burden of leak detection.
In order to reach above-mentioned purpose, the utility model provides a kind of sealing dress for pipeline connection inside and outside vacuum cavity
Put, including pipe joint, retaining ring, adpting flange, sealing ring, o-ring, O-ring, Quick Release Hoop, and cavity flange, the pipe
Pipeline connector is passed from the cavity flange endoporus, and the sealing ring is enclosed in the groove of the pipe joint, the adpting flange
It is enclosed on the pipe joint, the bore area of the adpting flange is brought into close contact with the sealing ring, and the retaining ring is caught in
In the groove of the pipe joint, and fixed with screw and the adpting flange, the O-ring is enclosed in the o-ring, then
The O-ring is caught between the adpting flange and the cavity flange, and by the Quick Release Hoop by the connection
Flange and the cavity flange clamping.
In some embodiments, one end of the pipe joint is screw thread mouth, and one end is pipe mouth, the pipe mouth and pipe
Road is welded into a whole.
In some embodiments, the flange face of the cavity flange can coordinate with O-ring.
In some embodiments, the sealing ring simultaneously with the groove floor and the adpting flange of the pipe joint
Hole surface is brought into close contact.
In some embodiments, the pipe joint is fixed on the adpting flange by the retaining ring, while limits institute
State the axial movement of pipe joint
It is described O-shaped so as to ensure between the O-ring is limited to two flange faces by the o-ring in some embodiments
Circle contacts with the flange face of the adpting flange and the cavity flange simultaneously.
In some embodiments, the Quick Release Hoop clamps the adpting flange and the cavity flange, make both simultaneously with
The 0 type circle is brought into close contact, and reaches sealing effectiveness.
According to the attachment means of the present utility model for vacuum chamber body vessel, traditional pipeline can effectively solve the problem that
The attachment means the problem of quantity of tie point is excessive in cavity, avoid the hair that artificial installation causes tie point leak case
It is raw, very big facility is brought to later stage leak detection work.
Brief description of the drawings
By reading the detailed description made with reference to the following drawings to non-limiting example, other spies of the present utility model
Sign, objects and advantages will become more apparent upon：
Fig. 1 is shown according to the attachment means for vacuum chamber body vessel of specific embodiment of the present utility model
Side view；
Fig. 2 shows the sectional view according to line A-A in Fig. 1.
Embodiment
It is new to this practicality below in conjunction with the accompanying drawings in order to preferably make the technical solution of the utility model clearly show
Type is described further.
Fig. 1 and 2 shows the attachment means for vacuum chamber body vessel of specific embodiment of the present utility model.
As illustrated in fig. 1 and 2, vacuum chamber body vessel attachment means, the device are used for according to the utility model embodiment
It is made up of pipe joint 1, retaining ring 2, adpting flange 3, sealing ring 4, o-ring 5, O-ring 6, Quick Release Hoop 7 and cavity flange 8.
Pipe joint 1 passes after being welded with pipeline from the endoporus of cavity flange 8.Sealing ring 4 is enclosed in the groove of pipe joint 1, adpting flange
3 are enclosed on pipe joint 1, and the bore area of adpting flange 3 is brought into close contact with sealing ring 4.Retaining ring 2 is caught in the groove of pipe joint 1
It is interior, and be connected with screw with adpting flange 3.O-ring 6 is enclosed in o-ring 5, then by its Snap joint flange 3 and cavity flange
Between 8.With Quick Release Hoop 7 by adpting flange 3 and the clamping of cavity flange 8.
The threaded one end mouth of pipe joint 1, one end pipe mouth.Pipe mouth is welded into a whole with pipeline.The screw thread of pipe joint 1
Mouth passes from the endoporus of cavity flange 8.
Sealing ring 4 is enclosed in the groove of pipe joint 1, and adpting flange 3 is enclosed on pipe joint 1, sealing ring 4 while and pipeline
The groove floor of joint 1 and the bore area of adpting flange 3 are brought into close contact, and play sealing function.
Retaining ring 2 is caught in the groove of pipe joint 1, and is connected with screw with adpting flange 3, and retaining ring 2 is by pipe joint 1
It is fixed on adpting flange 3, while limits the axial movement of pipe joint 1.
O-ring 6 is enclosed in o-ring 5, and by between its Snap joint flange 3 and cavity flange 8, o-ring 5 limits O-ring 6
It is scheduled between two flange faces, ensures that O-ring 6 contacts with the flange face of adpting flange 3 and cavity flange 8 simultaneously.
Adpting flange 3 and the clamping of cavity flange 8 are made both while are brought into close contact with 0 type circle 6, reach close by Quick Release Hoop 7
Seal effect.
According to the attachment means of the present utility model for vacuum chamber body vessel, traditional pipeline can effectively solve the problem that
The attachment means the problem of quantity of tie point is excessive in cavity, avoid the hair that artificial installation causes tie point leak case
It is raw, very big facility is brought to later stage leak detection work.
Specific embodiment of the utility model is described above.It is to be appreciated that the utility model not office
It is limited to above-mentioned particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims,
This has no effect on substantive content of the present utility model.
Claims (7)
- A kind of 1. sealing device for pipeline connection inside and outside vacuum cavity, it is characterised in that including pipe joint, retaining ring, Adpting flange, sealing ring, o-ring, O-ring, Quick Release Hoop, and cavity flange, the pipe joint is out of described cavity flange Hole is passed, and the sealing ring is enclosed in the groove of the pipe joint, and the adpting flange is enclosed on the pipe joint, described The bore area of adpting flange is brought into close contact with the sealing ring, and the retaining ring is caught in the groove of the pipe joint, and Fixed with screw and the adpting flange, the O-ring is enclosed in the o-ring, and the O-ring then is caught in into the connection Between flange and the cavity flange, and by the Quick Release Hoop by the adpting flange and the cavity flange clamping.
- 2. the sealing device according to claim 1 for pipeline connection inside and outside vacuum cavity, it is characterised in that the pipe One end of pipeline connector is screw thread mouth, and one end is pipe mouth, and the pipe mouth is welded into a whole with pipeline.
- 3. the sealing device according to claim 2 for pipeline connection inside and outside vacuum cavity, it is characterised in that the chamber The flange face of body flange can coordinate with O-ring.
- 4. the sealing device according to claim 3 for pipeline connection inside and outside vacuum cavity, it is characterised in that described close Seal is brought into close contact with the groove floor of the pipe joint and the bore area of the adpting flange simultaneously.
- 5. the sealing device according to claim 4 for pipeline connection inside and outside vacuum cavity, it is characterised in that described to stop Move back ring the pipe joint is fixed on the adpting flange, while limit the axial movement of the pipe joint.
- 6. the sealing device according to claim 5 for pipeline connection inside and outside vacuum cavity, it is characterised in that the O Between the O-ring is limited to two flange faces by type ring, so as to ensure the O-ring simultaneously with the adpting flange and described The flange face contact of cavity flange.
- 7. the sealing device according to claim 5 for pipeline connection inside and outside vacuum cavity, it is characterised in that described fast Releasing hoop clamps the adpting flange and the cavity flange, makes both while is brought into close contact with the 0 type circle, reaches sealing effect Fruit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621454235.9U CN206656052U (en) | 2016-12-28 | 2016-12-28 | The sealing device connected for pipeline inside and outside vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621454235.9U CN206656052U (en) | 2016-12-28 | 2016-12-28 | The sealing device connected for pipeline inside and outside vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206656052U true CN206656052U (en) | 2017-11-21 |
Family
ID=60313869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621454235.9U Active CN206656052U (en) | 2016-12-28 | 2016-12-28 | The sealing device connected for pipeline inside and outside vacuum cavity |
Country Status (1)
| Country | Link |
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| CN (1) | CN206656052U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107035925A (en) * | 2016-12-28 | 2017-08-11 | 中国建材国际工程集团有限公司 | The sealing device connected for pipeline inside and outside vacuum cavity |
-
2016
- 2016-12-28 CN CN201621454235.9U patent/CN206656052U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107035925A (en) * | 2016-12-28 | 2017-08-11 | 中国建材国际工程集团有限公司 | The sealing device connected for pipeline inside and outside vacuum cavity |
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