CN206638572U - A kind of laser scanning device applied to laser splash ion gun - Google Patents
A kind of laser scanning device applied to laser splash ion gun Download PDFInfo
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- CN206638572U CN206638572U CN201720390504.8U CN201720390504U CN206638572U CN 206638572 U CN206638572 U CN 206638572U CN 201720390504 U CN201720390504 U CN 201720390504U CN 206638572 U CN206638572 U CN 206638572U
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Abstract
The utility model discloses a kind of laser scanning device applied to laser splash ion gun, it includes：The base part of target is installed；Send the laser of laser beam sputtering target material；Laser is installed and drives the lifting platform of laser lifting；The speculum that the laser beam is reflexed on the laser splash active region of target；Speculum is installed and drives the turntable of speculum rotation, the surfaces of revolution of speculum is perpendicular to the lifting track of laser.The utility model realizes laser beam while can irradiate whole effective areas of target without mobile target, be also not in because signal weakens or disappeared caused by gas leakage the defects of, thoroughly solve tradition because mobile target cause gas leakage the defects of.
Description
Technical field
It the utility model is related to a kind of laser scanning device, and in particular to a kind of laser applied to laser splash ion gun
Scanning means.
Background technology
Laser splash ion gun is widely used as a kind of mass ion source of stabilization.The principle of this ion gun
It is to produce ion using a branch of pulse laser beam irradiation metal targets, ion is sent to mass spectral analysis portion below by cooperation pulse valve
Point.Found in experimentation, if same point on laser beam prolonged exposure target, a depth can be gone out on target by " bombardment " quickly
Hole, caused ion is caused can not to be effectively transported to next stage, the signal that detector observes, which substantially weakens, not to be observed even
Signal, it is necessary to frequently change target, very big inconvenience is brought to use.So it must try to the difference for making laser be radiated at target
Position, make full use of the effective area of target.The more solution method of application is mobile target at present, i.e. target makees two-dimensional movement
Or rotated around fixing axle, allow laser to irradiate the different parts of target.
As shown in figure 1, Fig. 1 is laser splash ion gun schematic diagram.Optical window 1 is fixed in base part 3 with pressure ring 2, light
Window 1 is typically manufactured using the quartz glass of high transmission rate, water white transparency.Target 4 can be driven the direction of arrow along figure to move by pedestal 5
It is dynamic, then coordinate the movement in another direction, so as to change the laser splash active region 7 on target 4, therefore laser beam in theory
The all surface of target 4 can be irradiated to.But this device has a larger defect, target composition surface is found in actual use
6 more or less always have gap in movement or rotary course, and the carrier gas provided by spray valve can be revealed from composition surface 6, take out of and splash
Caused ion is penetrated, causes signal to weaken or disappear.And the gap of composition surface 6 is determined by the intrinsic property of mechanical engagement, can subtract
Small but can not be completely eliminated, gas leak phenomenon certainly exists.
Utility model content
The utility model aim to solve the problem that it is above-mentioned because mobile target cause gas leakage the defects of, realize that laser beam can irradiate target
Whole effective areas of material simultaneously, be also not in because caused by gas leakage signal weaken or disappear the defects of, there is provided one kind application
In the laser scanning device of laser splash ion gun.
Solution of the present utility model is：A kind of laser scanning device applied to laser splash ion gun, it includes：
The base part of target is installed；Send the laser of laser beam sputtering target material；Laser is installed and drives the liter of laser lifting
Platform drops；The speculum that the laser beam is reflexed on the laser splash active region of target；Speculum and driving speculum rotation are installed
The turntable turned, the surfaces of revolution of speculum is perpendicular to the lifting track of laser.
As the further improvement of such scheme, the rotation angle range of speculum is [- θ, θ], when the rotation of speculum
When angle is 0, total optical path of the laser beam again to target from laser to speculum is equal to the focal length of the laser beam, works as speculum
The anglec of rotation be respectively-θ and θ when, the laser beam sputters at the horizontal width direction of the laser splash active region of target respectively
Opposite sides on.
Further, the adjustable height scope of lifting platform meets that the sputtering of the laser beam can cover the laser splash work of target
With the whole vertical height in area.
As the further improvement of such scheme, the setting angle of speculum meets the initial position and the laser of speculum
Beam is in angle of 45 degrees.
As the further improvement of such scheme, by controlling turntable and the front and rear boot sequence of lifting platform and operation
Time, the laser beam is set to complete the sputtering of whole laser splash active region on target or using rotation using rank scanning mode
Whirlpool scan mode completes the sputtering of whole laser splash active region on target.
As the further improvement of such scheme, the laser scanning device also includes the optical window being arranged in base part,
The laser beam transparent optical window is sputtered on target.
Further, the laser scanning device also includes pressure ring one, and optical window is arranged in base part by pressure ring one.
As the further improvement of such scheme, the laser scanning device also includes pressure ring two, and target is pacified by pressure ring two
In base part.
As the further improvement of such scheme, turntable is to be rotated using step motor control worm screw, so as to drive snail
Wheel rotates the electronically controlled rotary table that is rotated of platform being arranged on to realize on the turbine, and speculum is installed on the platform.
As the further improvement of such scheme, lifting platform is using step motor control ball screw turns, so as to drive
Wedge on the dynamic nut installed on the ball-screw promotes the electrical-controlled lifting platform of installation table top progress oscilaltion, laser
Device is arranged on the installation table top.
Laser scanning device of the present utility model is mainly used in laser splash ion gun, anti-by turntable driving rotation
Penetrate mirror and realize sputtering of the laser beam on the whole horizontal width of the laser splash active region of target, driven and risen by lifting platform
Drop laser realizes sputtering of the laser beam in the whole vertical height of the laser splash active region of target.Thus without mobile
Target, realize that laser beam is also not in the signal caused by gas leakage while can irradiate whole effective areas of target
The defects of weakening or disappearing, thoroughly solve tradition because mobile target cause gas leakage the defects of.
Other the utility model can realize laser by controlling the anglec of rotation of turntable and the adjustable height of lifting platform
Effective continuity sputtering of beam, improves operating efficiency；And by control turntable and lifting platform front and rear boot sequence and
Run time, the laser beam is set to complete the sputtering of whole laser splash active region on target using rank scanning mode or adopt
The sputtering of whole laser splash active region is completed on target with vortex scan mode.Therefore the utility model is simple in construction, should
But very flexible with mode, the most key is thoroughly solved because moving the drawbacks of target causes gas leakage.
Brief description of the drawings
Fig. 1 is the structural representation of conventional laser scanning means.
Fig. 2 is the dimensional structure diagram for the laser scanning device that the utility model preferred embodiment provides.
Fig. 3 is Fig. 2 schematic cross-sectional view, and in order to preferably show its inner case, viewing visual angle is adjusted, actual
Mutual alignment relation is defined by the position relationship that accompanying drawing 2 is shown.
Fig. 4 is the scanning pattern schematic diagram of the laser beam of laser scanning device in Fig. 2.
Fig. 5 is another scanning pattern schematic diagram of the laser beam of laser scanning device in Fig. 2.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit the utility model.
Laser scanning device of the present utility model is mainly used in laser splash ion gun, also referring to Fig. 2 and Fig. 3,
Laser scanning device includes base part 12, laser 16, lifting platform 17, speculum 14, turntable 15, optical window 13, pressure ring one
18th, pressure ring 2 19.
Base part 12 is mainly used in installing target 11, and target 11 can be arranged on base part 12 by pressure ring 2 19
On.On the laser beam sputtering target material 11 that laser 16 is sent, transport target is realized in the spray valve carrier gas installed by base part 12
Material 11 because sputtered and caused by ion.It can be led to by setting installation of the optical window 13 in base part 12 to realize in sealing ion
While road, the sputtering of laser beam is not influenceed.Optical window 13 can be arranged in base part 12 by pressure ring 1.Certainly, exist
In other embodiment, pressure ring 1 and pressure ring 2 19 can also all use cohere, the mode such as screens is fixed in base part 12.
Laser 16 is arranged on lifting platform 17, and lifting is driven by lifting platform 17.Speculum 14 is arranged on turntable 15,
Rotation is driven by turntable 15.The surfaces of revolution of speculum 14 is perpendicular to the lifting track of laser 16.
Laser scanning device of the present utility model drives rotating mirror 14 to realize that this swashs when in use, by turntable 15
Sputtering of the light beam on the whole horizontal width of the laser splash active region of target 11, lifting laser is driven by lifting platform 17
16 realize sputtering of the laser beam in the whole vertical height of the laser splash active region of target 11.Thus without mobile target
11, solve tradition because moving the defects of target causes gas leakage, realize that laser beam can irradiate whole effective areas of target
Meanwhile also be not in because caused by gas leakage signal weaken or disappear the defects of.
Turntable 15 can be to be rotated using step motor control worm screw, and the whirlpool is arranged on to realize so as to drive worm gear wheel
The electronically controlled rotary table that platform on wheel is rotated, speculum 14 are installed on the platform.Lifting platform 17 can be to utilize stepping electricity
Machine controls ball screw turns, so as to which wedge of the drive installation on the nut on the ball-screw promotes installation table top to carry out
The electrical-controlled lifting platform of oscilaltion, laser 16 are arranged on the installation table top.
In the present embodiment, laser 16 is arranged on an accurate electrical-controlled lifting platform that can be vertically moved up or down, speculum
14 are arranged in an accurate electronically controlled rotary table, and electrical-controlled lifting platform utilizes step motor control ball screw turns to drive
Wedge on feed screw nut promotes installation table top to be moved up and down, and its motion is stepper motor and leading screw spiral shell
It is female.Electronically controlled rotary table is rotated using step motor control worm screw so as to drive worm gear wheel to realize that the platform being arranged on turbine enters
Row rotates, and its motion is stepper motor and worm and gear.Stepper motor can utilize computer by special drive circuit
Rotating speed and steering are controlled, can thus control electrical-controlled lifting platform to realize that elevating movement and electronically controlled rotary table are realized on computers
Rotary motion.As shown in Fig. 2 the laser 16 on electrical-controlled lifting platform can be moved up and down, then laser beam with
Up and down motion, the speculum 14 in electronically controlled rotary table can be rotated, then what speculum 14 reflected
Laser beam is rotated therewith, and can derive that the rotational angular velocity of laser beam is the rotational angular velocity of speculum 14
Twice.
The rotation angle range of speculum 14 is [- θ, θ], when speculum 14 the anglec of rotation be 0 when, the laser beam from
Laser 16 arrives focal length of the total optical path equal to the laser beam of target 11 to speculum 14 again, when the anglec of rotation point of speculum 14
Not Wei-θ and θ when, the laser beam sputters at the opposite sides in the horizontal width direction of the laser splash active region of target 11 respectively
On.Therefore the rotation angle range of speculum 14 meets that the light path of the laser beam can maintain focal length of the laser beam or so, so as to
Make the laser beam sputtering can cover target 11 laser splash active region whole horizontal width.
The adjustable height scope of lifting platform 17 meets that the sputtering of the laser beam can cover the laser splash active region of target 11
Whole vertical height.By the anglec of rotation (the namely anglec of rotation of speculum 14) and lifting platform 17 that control turntable 15
Adjustable height (the namely adjustable height of laser 16), realize laser beam effective continuity sputtering, improve operating efficiency.
When being equal to the focal length of the laser beam to the light path of target 11 from laser 16 due to the laser beam, the laser beam is in target
Hot spot ability on material 11 is most strong, can inspire more ions, and therefore, the front and rear number range of the focal length is bigger, and ion is dense
The concentration difference of degree is bigger.Therefore the front and rear number range of the focal length is smaller, the less target 11 of suitable size, before the focal length
Number range most preferably J-1.5mm~J+1.5mm afterwards, wherein J are the focal length of the laser beam.Certainly, as long as can meet that ion is dense
The accuracy rating of degree, the front and rear number range of the focal length can be adjusted arbitrarily.
The setting angle of speculum 14, which is tried one's best, meets the initial position of speculum 14 with the laser beam in angle of 45 degrees.So
Laser 16, speculum 14, the hot spot sputtering point of target 11 can be made to be distributed in three apexes of a right angled triangle, and
It ensure that laser beam is equal to the two right angle length of sides of the focal length, i.e. right angled triangle of laser beam from laser 16 to the light path of target 11
Sum is equal to laser beam focal length.Therefore, it can easily accomplish that the anglec of rotation of speculum 14 is in the front and rear numerical value of focal length
In the range of.
By controlling the front and rear boot sequence and run time of turntable 15 and lifting platform 17, make the laser beam using row
Column scan mode completes the sputtering of whole laser splash active region or using vortex scan mode on target 11 on target 11
Complete the sputtering of whole laser splash active region.
Rank scanning mode has two kinds of rank scanning modes of forward and reverse, as shown in figure 4, positive rank scanning mode：
First driving speculum 14 completes the row scanning on the horizontal width to target 11, then drives lifting platform 17 to rise certain altitude and complete
To the column scan in the corresponding vertical height of target 11, the rotation of the opposite direction of speculum 14 is then driven to complete the level to target 11
Backhaul row scanning on width, drive lifting platform 17 to rise certain altitude afterwards and complete in the corresponding vertical height of target 11
Column scan, such section stroke terminate, and continuously perform the sputtering that this section stroke completes the laser splash active region of whole target 11.
The front and rear boot sequence of turntable 15 and lifting platform 17 is fixed, and the run time of turntable 15 and lifting platform 17 is also fixed
's.
Specifically, the angle position of the upper-lower position and speculum 14 that adjust laser 16 makes laser beam be radiated at target 11
One jiao, such as A points, then control precision rotation electric control platform to drive the rotation of speculum 14 to make laser beam from one side of target 11
" strafing " arrives opposite side, and laser beam reaches B points, realizes scanning of the laser beam to target 11 " OK ".Now stop the rotation of speculum 14
Transhipment is dynamic while controlling electrical-controlled lifting platform to drive laser 16 to translate up moves up laser beam, is moved from a line of target 11
Another row is moved, laser beam reaches C points, realizes scanning of the laser beam to target 11 " row ".Now stop the lifting of laser 16
Motion controls electronically controlled rotary table to drive the rotation of speculum 14 to make laser beam from current location " strafing " to opposite side simultaneously, more than repetition
Step, it is possible to reach laser beam and full scan is carried out to the effective area of target 11.
Vortex scan mode has two kinds of vortex scan modes of forward and reverse, as shown in figure 5, positive vortex scan mode：
First driving speculum 14 completes the row scanning on the horizontal width to target 11, then drives lifting platform 17 to rise and complete to target 11
Whole vertical height on column scan, then drive the rotation of speculum 14 opposite direction to complete on the horizontal width of target 11
Backhaul row scans, and drives lifting platform 17 to decline afterwards and completes to the column scan in certain vertical height of target 11, such section
Stroke terminates, and continuously performs the sputtering that this section stroke completes the laser splash active region of whole target 11.Turntable 15 and lifting
The front and rear boot sequence of platform 17 is fixed, and simply the run time of turntable 15 and lifting platform 17 is change, avoids Back Word
Shape circulates.Vortex scan mode is another scanning pattern, and principle is substantially identical with rank scanning mode to be repeated no more.Fig. 4 and
It is the schematic technique of painting that Fig. 5, which is, and the path of practical laser beam wants much compact.
The utility model is simple in construction, it is not necessary to using complicated target jacking mechanism, and due to actually using target 11
Size it is smaller, rotating the change in optical path length brought of speculum 14 and the influence to the focal position of laser beam can almost ignore
Disregard, the rotational angle θ of speculum 14, emergent ray deflects 2 θ therewith, and the turntable 15 of rotating mirror 14 only need to be at one
Less range of motion, faster scanning motion can be achieved, thoroughly solve because moving the drawbacks of target 11 causes gas leakage.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (10)
1. a kind of laser scanning device applied to laser splash ion gun, it includes：
The base part (12) of target (11) is installed；
Send the laser (16) of laser beam sputtering target material (11)；
It is characterized in that：It also includes：
Laser (16) and the lifting platform (17) of driving laser (16) lifting are installed；
The speculum (14) laser beam reflexed on the laser splash active region of target (11)；
Speculum (14) and the turntable (15) of driving speculum (14) rotation are installed, the surfaces of revolution of speculum (14) is perpendicular to sharp
The lifting track of light device (16).
2. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：Speculum
(14) rotation angle range is [- θ, θ], and when the anglec of rotation of speculum (14) is 0, the laser beam is from laser (16)
Focal length of the total optical path equal to the laser beam of target (11) is arrived again to speculum (14), when the anglec of rotation of speculum (14) is distinguished
For-θ and θ when, the laser beam sputters at the opposite sides in the horizontal width direction of the laser splash active region of target (11) respectively
On.
3. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 2, it is characterised in that：Lifting platform
(17) adjustable height scope meets that the sputtering of the laser beam can cover the whole vertical of the laser splash active region of target (11)
Highly.
4. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：Speculum
(14) setting angle meets the initial position of speculum (14) with the laser beam in angle of 45 degrees.
5. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：Pass through control
The front and rear boot sequence and run time of turntable (15) and lifting platform (17), make the laser beam exist using rank scanning mode
The sputtering of whole laser splash active region is completed on target (11) or is completed using vortex scan mode on target (11) entirely
The sputtering of laser splash active region.
6. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：The laser is swept
Imaging apparatus also includes the optical window (13) being arranged in base part (12), and the laser beam transparent optical window (13) sputters at target (11)
On.
7. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 6, it is characterised in that：The laser is swept
Imaging apparatus also includes pressure ring one (18), and optical window (13) is arranged in base part (12) by pressure ring one (18).
8. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：The laser is swept
Imaging apparatus also includes pressure ring two (19), and target (11) is arranged in base part (12) by pressure ring two (19).
9. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：Turntable
(15) it is to be rotated using step motor control worm screw, the platform being arranged on so as to drive worm gear wheel with realizing on the worm gear is carried out
The electronically controlled rotary table of rotation, speculum (14) are installed on the platform.
10. it is applied to the laser scanning device of laser splash ion gun as claimed in claim 1, it is characterised in that：Lifting platform
(17) it is using step motor control ball screw turns, so as to wedge of the drive installation on the nut on the ball-screw
Installation table top is promoted to carry out the electrical-controlled lifting platform of oscilaltion, laser (16) is arranged on the installation table top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720390504.8U CN206638572U (en) | 2017-04-13 | 2017-04-13 | A kind of laser scanning device applied to laser splash ion gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720390504.8U CN206638572U (en) | 2017-04-13 | 2017-04-13 | A kind of laser scanning device applied to laser splash ion gun |
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| Publication Number | Publication Date |
|---|---|
| CN206638572U true CN206638572U (en) | 2017-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720390504.8U Expired - Fee Related CN206638572U (en) | 2017-04-13 | 2017-04-13 | A kind of laser scanning device applied to laser splash ion gun |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374646A (en) * | 2018-09-26 | 2019-02-22 | 上海海事大学 | A kind of CRACKED BEAM detection method based on laser holography |
| CN113985561A (en) * | 2021-11-10 | 2022-01-28 | 中国科学院长春光学精密机械与物理研究所 | Light beam position fine adjustment device |
| CN114706210A (en) * | 2022-04-06 | 2022-07-05 | 国仪量子(合肥)技术有限公司 | Ion loading system and method of ion loading |
-
2017
- 2017-04-13 CN CN201720390504.8U patent/CN206638572U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374646A (en) * | 2018-09-26 | 2019-02-22 | 上海海事大学 | A kind of CRACKED BEAM detection method based on laser holography |
| CN113985561A (en) * | 2021-11-10 | 2022-01-28 | 中国科学院长春光学精密机械与物理研究所 | Light beam position fine adjustment device |
| CN114706210A (en) * | 2022-04-06 | 2022-07-05 | 国仪量子(合肥)技术有限公司 | Ion loading system and method of ion loading |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171114 |