CN206619583U - Match the antidrip etching groove lid structure of chain type diffusion - Google Patents
Match the antidrip etching groove lid structure of chain type diffusion Download PDFInfo
- Publication number
- CN206619583U CN206619583U CN201720157855.4U CN201720157855U CN206619583U CN 206619583 U CN206619583 U CN 206619583U CN 201720157855 U CN201720157855 U CN 201720157855U CN 206619583 U CN206619583 U CN 206619583U
- Authority
- CN
- China
- Prior art keywords
- groove lid
- dropping liquid
- antidrip
- board
- chain type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 15
- 238000005530 etching Methods 0.000 title claims description 17
- 239000007788 liquid Substances 0.000 claims abstract description 31
- 210000005056 cell body Anatomy 0.000 claims abstract description 24
- 238000007747 plating Methods 0.000 claims abstract description 18
- 210000002421 cell wall Anatomy 0.000 claims abstract description 12
- 238000007599 discharging Methods 0.000 claims abstract description 8
- 239000010865 sewage Substances 0.000 claims abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004224 protection Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemically Coating (AREA)
Abstract
Groove lid structure is etched the utility model discloses a kind of antidrip for matching chain type diffusion, including the one side opening groove lid for being used to close cell body being made up of the corrugated plating positioned at top surface and the side plate positioned at four sides, the concave-board for being used for collecting dropping liquid is provided with below the trough inwall of the corrugated plating, the discharging tube for being connected with and being connected with outside sewage disposal device on three-back-shaped reservoir, the three-back-shaped reservoir is provided with groove lid opening in the side plate.The groove lid structure is eliminated in the prior art by the way of the consumptive materials such as sponge absorb dropping liquid, dropping liquid is effectively collected in the design being combined using corrugated plating and concave-board, the dropping liquid being collected on concave-board from overflowing along the three-back-shaped reservoir of cell wall inflow, discharged again via discharging tube outside cell body, dropping liquid is avoided to be dropped on the silicon chip in cell body, while can also avoid consumptive material from falling to electrical property caused by cell body reduces.
Description
Technical field
The utility model is related to the groove lid structure of the etching groove in solar cell piece production technical field, more particularly to a kind of
Match the antidrip etching groove lid structure of chain type diffusion.
Background technology
Solar battery sheet manufacture after diffuseing to form PN junction, it is necessary to by etching procedure corrosion of silicon lateral edge,
Prevent edge conducting electric leakage.
Present diffusion technique has two kinds of tubular type and chain type, and wherein chain type diffusion couple spreads than tubular type, even if removing silicon chip table
The PSG (phosphorosilicate glass) in face, still there is one layer of phosphorus rich layer on PN junction surface.The PN junction of chain type divergent contour typically cannot be directly used to too
Positive energy battery is, it is necessary to the height for using etch step generally use in sheet resistance lifting and edge isolation, the present industry of matching
Sheet resistance technique.
The gas that etching groove is volatilized has oxidation to the PN junction surface without protections such as moisture films, only through peroxidating
Can to chain type spread after silicon chip proceed sheet resistance lifting process, but if the protection without moisture film, air humidity compared with
In the case of big, water droplet is readily formed on etching slot cover plate, water droplet is dropped in silicon chip surface, reabsorbs the HF/HNO3 in groove
Mixed atmosphere will corrode PN junction, cause blackspot under EL, electrical property reduction.
The existing useful acid-proof sponge absorption acid solution of antidrip technology, infrared lamps cover plate lamp mode, but these sides
Formula is required for using consumptive material, and falls with the risk of cell body.
It would therefore be highly desirable to solve the above problems.
Utility model content
Utility model purpose：The purpose of this utility model be to provide one kind prevent etching dropping liquid and dropping liquid can collect automatically simultaneously
Discharge the antidrip etching groove lid structure of the matching chain type diffusion outside cell body.
Technical scheme：To realize object above, a kind of antidrip etching for matching chain type diffusion described in the utility model
Groove lid structure, including the one side open slot for being used to close cell body being made up of the corrugated plating positioned at top surface and the side plate positioned at four sides
The concave-board for being used for collecting dropping liquid is provided with below lid, the trough inwall of the corrugated plating, in the side plate at groove lid opening
Provided with three-back-shaped reservoir, the discharging tube being connected with outside sewage disposal device is connected with the three-back-shaped reservoir.The groove
Lid structure eliminate in the prior art using the consumptive materials such as sponge absorb dropping liquid by the way of, be combined using corrugated plating and concave-board
Dropping liquid is effectively collected in design, the dropping liquid being collected into from being overflowed on concave-board in cell wall flows into three-back-shaped reservoir, then via
Outside discharging tube discharge cell body, it is to avoid dropping liquid is dropped on the silicon chip in cell body, is caused while can also avoid consumptive material from falling to cell body
Electrical property reduction.
Wherein, the ripple cross sectional shape of the corrugated plating is triangular form.Cross sectional shape is the plate of the corrugated plating of triangular form
Gradient and wave trough position more flowing down using dropping liquid, prevent dropping liquid from condensing the silicon chip being directly dropped in cell body on the cover board
On.
It is preferred that, the two ends of the concave-board are connected with side plate, and the upper surface of concave-board is offered for accommodating dropping liquid
Notch, offering conduction hole below the concave-board at the cell wall.
Further, the notch cross sectional shape of the concave-board is triangular form.The concave-board can be by the drop being collected into two
Side channel wall is split into shallow bid drop stream and flowed out from conduction hole, and along both sides, cell wall goes downstream, and flows into three-back-shaped reservoir.
Furthermore, a pair of openings side of the groove lid extends to form wing plate to both sides.
It is preferred that, at least one described wing plate, which is provided with, to be used to move the handle that groove lid leaves cell body.
Beneficial effect：Compared with prior art, the utility model has advantages below：The groove lid structure eliminates existing first
Have in technology by the way of the consumptive materials such as sponge absorb dropping liquid, drop is effectively collected in the design being combined using corrugated plating and concave-board
Liquid, the dropping liquid being collected into discharges cell body from being overflowed on concave-board along the three-back-shaped reservoir of cell wall inflow, then via discharging tube
Outside, it is to avoid dropping liquid is dropped on the silicon chip in cell body, while can also avoid consumptive material from falling to electrical property caused by cell body reduces；Its
Plate gradient and wave trough position more flowing down using dropping liquid of the secondary cross sectional shape for the corrugated plating of triangular form, prevent dropping liquid in lid
Cohesion is directly dropped on the silicon chip in cell body on plate；Also the drop being collected into can be split into by the concave-board to both sides cell wall
Shallow bid drop stream flows out from conduction hole, and along both sides, cell wall goes downstream, and flows into three-back-shaped reservoir；Finally the groove lid structure with
Former board compatibility is high, changes simple, simple in construction, more robust.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of removal corrugated plating in the utility model；
Fig. 3 is the structural representation of the utility model concave frid.
Embodiment
The technical solution of the utility model is described further below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, the antidrip etching groove lid structure of the utility model matching chain type diffusion, groove lid 3, groove
Plate 4 and three-back-shaped reservoir 5.Above-mentioned groove lid 3 is by being used for that the corrugated plating 1 positioned at top surface and the side plate 2 positioned at four sides are constituted
The concave-board 4 for being provided with below the one side opening groove lid 3 of cell body, and the trough inwall of above-mentioned corrugated plating 1 and being used for collecting dropping liquid is closed,
It is provided with three-back-shaped reservoir 5, the three-back-shaped reservoir 5 and is connected with and outside sewage disposal at the opening of groove lid 3 in side plate 2
The discharging tube 6 that equipment is connected.The groove lid structure eliminate in the prior art using the consumptive materials such as sponge absorb dropping liquid by the way of, adopt
Dropping liquid is effectively collected in the design being combined with corrugated plating and concave-board, and the dropping liquid being collected into is overflowed from concave-board along cell wall stream
Enter in three-back-shaped reservoir, then discharged via discharging tube outside cell body, it is to avoid dropping liquid is dropped on the silicon chip in cell body, while also may be used
Avoiding consumptive material from falling to electrical property caused by cell body reduces.
As shown in figure 3, the two ends of above-mentioned concave-board 4 are connected with side plate 2, the upper surface of concave-board 4 is offered for holding
Receive the notch 7 of dropping liquid, conduction hole 8 is being offered below the concave-board 4 at cell wall.The wherein notch section shape of concave-board 4
Shape is triangular form, and the drop being collected into can be split into shallow bid drop stream to both sides cell wall and be flowed out from conduction hole by the concave-board, suitable
Both sides cell wall to go downstream, flow into three-back-shaped reservoir.
The ripple cross sectional shape of above-mentioned corrugated plating 1 is triangular form.Cross sectional shape is the plate gradient of the corrugated plating of triangular form
And wave trough position more flowing down using dropping liquid, prevent dropping liquid from condensing on the cover board on the silicon chip being directly dropped in cell body.
A pair of openings side of groove lid 3 extends to form wing plate 9 to both sides in the utility model, is set at least one wing plate 9
There is the handle 10 that cell body is left for moving groove lid 3.
The groove lid structure and former board compatibility are high, change simple, simple in construction, more robust.
Claims (6)
1. a kind of antidrip etching groove lid structure for matching chain type diffusion, it is characterised in that：Including by the corrugated plating positioned at top surface
(1) the one side opening groove lid (3) for being used to close cell body of side plate (2) composition and positioned at four sides, the trough of the corrugated plating (1)
The concave-board (4) for being used for collecting dropping liquid is provided with below inwall, is provided with three-back-shaped at groove lid (3) opening in the side plate (2)
The discharging tube (6) being connected with outside sewage disposal device is connected with reservoir (5), the three-back-shaped reservoir (5).
2. the antidrip etching groove lid structure of matching chain type diffusion according to claim 1, it is characterised in that：The ripple
The ripple cross sectional shape of plate (1) is triangular form.
3. the antidrip etching groove lid structure of matching chain type diffusion according to claim 1, it is characterised in that：The groove
The two ends of plate (4) are connected with side plate (2), and the upper surface of concave-board (4) offers the notch (7) for accommodating dropping liquid, by
Conduction hole (8) is offered below concave-board (4) at nearly cell wall.
4. the antidrip etching groove lid structure of matching chain type diffusion according to claim 3, it is characterised in that：The groove
Notch (7) cross sectional shape of plate (4) is triangular form.
5. the antidrip etching groove lid structure of matching chain type diffusion according to claim 1, it is characterised in that：The groove lid
(3) a pair of openings side extends to form wing plate (9) to both sides.
6. the antidrip etching groove lid structure of matching chain type diffusion according to claim 5, it is characterised in that：It is described at least
One wing plate (9), which is provided with, to be used to move the handle (10) that groove lid (3) leaves cell body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720157855.4U CN206619583U (en) | 2017-02-21 | 2017-02-21 | Match the antidrip etching groove lid structure of chain type diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720157855.4U CN206619583U (en) | 2017-02-21 | 2017-02-21 | Match the antidrip etching groove lid structure of chain type diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206619583U true CN206619583U (en) | 2017-11-07 |
Family
ID=60231111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720157855.4U Expired - Fee Related CN206619583U (en) | 2017-02-21 | 2017-02-21 | Match the antidrip etching groove lid structure of chain type diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206619583U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166809A (en) * | 2018-07-12 | 2019-01-08 | 深圳市华星光电技术有限公司 | Wet etching equipment |
| CN109530279A (en) * | 2018-11-11 | 2019-03-29 | 上海神舟新能源发展有限公司 | A kind of condensed water wiping arrangement applied to wet type chain type etching apparatus |
| CN114472362A (en) * | 2021-12-30 | 2022-05-13 | 华海清科股份有限公司 | Wafer cleaning device |
-
2017
- 2017-02-21 CN CN201720157855.4U patent/CN206619583U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166809A (en) * | 2018-07-12 | 2019-01-08 | 深圳市华星光电技术有限公司 | Wet etching equipment |
| CN109530279A (en) * | 2018-11-11 | 2019-03-29 | 上海神舟新能源发展有限公司 | A kind of condensed water wiping arrangement applied to wet type chain type etching apparatus |
| CN114472362A (en) * | 2021-12-30 | 2022-05-13 | 华海清科股份有限公司 | Wafer cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 12 Xinhua Road, Xinhua District, Wuxi City, Jiangsu Province, 214028 Patentee after: WUXI RITUO PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address before: 214028 Xishi Road 20-1, Wuxi New District, Jiangsu Province Patentee before: WUXI DEXIN SOLAR POWER Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171107 |