CN206591202U - A kind of solar cell groove type etching machine - Google Patents

A kind of solar cell groove type etching machine Download PDF

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Publication number
CN206591202U
CN206591202U CN201720174433.8U CN201720174433U CN206591202U CN 206591202 U CN206591202 U CN 206591202U CN 201720174433 U CN201720174433 U CN 201720174433U CN 206591202 U CN206591202 U CN 206591202U
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CN
China
Prior art keywords
groove
texturing slot
solar cell
etching machine
type etching
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Application number
CN201720174433.8U
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Chinese (zh)
Inventor
周军
党继东
刘东续
李栋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Funing atlas sunshine Power Technology Co., Ltd
CSI Cells Co Ltd
Original Assignee
CSI Solar Technologies Inc
CSI GCL Solar Manufacturing Yancheng Co Ltd
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Priority to CN201720174433.8U priority Critical patent/CN206591202U/en
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Abstract

The utility model discloses a kind of solar cell groove type etching machine.It includes feeding groove, the rear end of feeding groove is disposed with the first texturing slot for main reaction and the second texturing slot for assisted reaction, first texturing slot is connected with the first secondary groove, the first drain line is provided between the overfall of first texturing slot and the first secondary groove, first circulation pipeline is provided between first texturing slot and the first secondary groove, first secondary groove is connected with the first cooler, second texturing slot is connected with the second secondary groove, the second drain line is provided between the overfall of second texturing slot and the second secondary groove, second circulation pipeline is provided between second texturing slot and the second secondary groove, second secondary groove is connected with the second cooler.Solar cell groove type etching machine of the present utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, and can effectively solve the problem that the problem of appearance of making herbs into wool, and can be effectively reduced cost.

Description

A kind of solar cell groove type etching machine
Technical field
The utility model is related to technical field of solar cell manufacturing, more particularly to a kind of solar cell groove type etching Machine.
Background technology
Photovoltaic generation is semi-conductor electronic device is effectively absorbed solar radiation using solar energy, and is allowed to turn Become the direct generation of electricity mode of electric energy, be the main flow of current solar power generation.Usually said solar power generation is exactly solar energy Volt generates electricity, also known as solar cell power generation, and its core component is solar battery sheet.
In the fabrication of a solar cell, the isotropic etch generally using acid solution to crystalline silicon in crystal orientation Characteristic, in matte of the silicon chip surface formation similar to " worm hole " structure, by increasing order of reflection of the irradiation light in silicon chip surface, The absorptivity of light is improved, so as to improve the conversion efficiency of monocrystaline silicon solar cell.In the prior art, making herbs into wool section equipment generally makes With chain type texturing machine and groove type etching machine, chain type texturing machine is expensive, and the advantage of groove type etching machine is exactly cheap, but its Inferior position is that the presentation quality of product is poor, it is impossible to reach the market demand.Therefore, it is necessary to which making herbs into wool can effectively be solved by researching and developing one kind Problem of appearance, and lower-cost etching device.
Utility model content
The purpose of this utility model is to provide a kind of solar cell groove type etching machine, and it uses double flute making herbs into wool, main anti- It should be combined with assisted reaction, can effectively solve the problem that the problem of appearance of making herbs into wool, and cost can be effectively reduced.
For up to this purpose, the utility model uses following technical scheme:
A kind of solar cell groove type etching machine, including feeding groove, the rear end of feeding groove is disposed with for main reaction The first texturing slot and the second texturing slot for assisted reaction, the first texturing slot is connected with the first secondary groove, the first texturing slot The first drain line is provided between overfall and the first secondary groove, first circulation is provided between the first texturing slot and the first secondary groove Pipeline, the first secondary groove is connected with the first cooler, and the second texturing slot is connected with the second secondary groove, the overfall of the second texturing slot and the The second drain line is provided between second mate's groove, second circulation pipeline, second are provided between the second texturing slot and the second secondary groove Secondary groove is connected with the second cooler.
Wherein, the bottom land of the first texturing slot and the second texturing slot is provided with temperature sensor.Preferably, the first cooler Control device is all connected with the second cooler.The overflow liquid of first texturing slot enters the first cooling by the first drain line Machine, then return to via first circulation pipeline the bottom of the first texturing slot, temperature sensor is by the temperature feedback measured to controlling dress Put so that the first cooler can cool down circulation rate according to the temperature information adjust automatically of temperature sensor feedback, to reach Need technological temperature.The overflow liquid of second texturing slot enters the second cooler by the second drain line, then via second circulation Pipeline returns to the bottom of the second texturing slot, and temperature sensor is by the temperature feedback measured to control device so that the second cooler Circulation rate can be cooled down according to the temperature information adjust automatically of temperature sensor feedback, to reach required technological temperature.
Wherein, the first texturing slot is connected with additive liquid supply device.The fluid infusion precision of additive liquid supply device is ± 2%, The effect of additive is to buffer reaction rate so that the reaction of silicon chip is uniform.
Wherein, HNO is used in the first texturing slot3, HF, additive, DI water carry out main reaction.Preferably, concentration ratio HF: HNO3:DI:Additive=1:(3.5~4.0):(3.0~3.5):(0.01~0.02);The temperature of first texturing slot is 6~10 ℃.HNO is used in second texturing slot3, HF, DI water carry out assisted reaction, for modifying the uneven of main reaction silicon chip, with solve Problem of appearance.Preferably, concentration ratio HF:HNO3:DI=1:(2.8~3.2):(3.3~3.8);The temperature of second texturing slot is 6 ~10 DEG C.
Wherein, the rear end of the second texturing slot is disposed with the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath, Three rinsing bowls, the 4th rinsing bowl, air-dried groove and blanking groove.
Wherein, the first texturing slot, the second texturing slot, the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath, the 3rd water Washing trough, the 4th rinsing bowl, the bottom land for air-drying groove and blanking groove are provided with bubbling pipe.
Wherein, first circulation pipeline is provided with first circulation pump and the first valve, and second circulation pipeline is provided with second and followed Ring pump and the second valve.
Wherein, the first drain line is provided with the 3rd valve, and the second drain line is provided with the 4th valve.
The beneficial effects of the utility model:First texturing slot is used for main reaction, and the second texturing slot is used for assisted reaction.This The solar cell groove type etching machine of utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, can effectively solved The certainly problem of appearance of making herbs into wool, and cost can be effectively reduced.
Brief description of the drawings
Fig. 1 is the structural representation of solar cell groove type etching machine of the present utility model.
Reference is as follows:
101- feeding grooves;The texturing slots of 102- first;The texturing slots of 103- second;The rinsing bowls of 104- first;105- alkaline baths; The rinsing bowls of 106- second;107- descaling baths;The rinsing bowls of 108- the 3rd;The rinsing bowls of 109- the 4th;110- air-dries groove;111- blankings Groove;The secondary grooves of 112- first;The secondary grooves of 113- second;The coolers of 114- first;The coolers of 115- first;The fluid infusion of 116- additives is filled Put;The drain lines of 201- first;The drain lines of 202- second;203- first circulation pipelines;204- second circulation pipelines;301- One circulating pump;302- second circulation pumps.
Embodiment
The technical solution of the utility model is further illustrated with reference to Fig. 1 and by specific embodiment.
As shown in figure 1, solar cell groove type etching machine includes feeding groove 101, the rear end of feeding groove 101 is disposed with The first texturing slot 102 for main reaction and the second texturing slot 103 for assisted reaction, the first texturing slot 102 are connected with One secondary groove 112, is provided with the first drain line 201, the first system between the overfall of the first texturing slot 102 and the first secondary groove 112 First circulation pipeline 203 is provided between the secondary groove 112 of suede groove 102 and first, the first secondary groove 112 is connected with the first cooler 114, Second texturing slot 103 is connected with the second secondary groove 113, and the is provided between the overfall of the second texturing slot 103 and the second secondary groove 113 Two drain lines 202, are provided with second circulation pipeline 204, the second secondary groove 113 between the second texturing slot 103 and the second secondary groove 113 It is connected with the second cooler 115.
In the present embodiment, the bottom land of the first texturing slot 102 and the second texturing slot 103 is provided with temperature sensor.It is preferred that Ground, the first cooler 114 and the second cooler 115 are all connected with control device.The overflow liquid of first texturing slot 102 passes through first Drain line 201 enters the first cooler 114, then returns to the bottom of the first texturing slot 102 via first circulation pipeline 203, warm Sensor is spent by the temperature feedback measured to control device so that the first cooler 114 can be according to the temperature of temperature sensor feedback Information adjust automatically cooling circulation rate is spent, to reach required technological temperature.The overflow liquid of second texturing slot 103 passes through second Drain line 202 enters the second cooler 115, then returns to the bottom of the second texturing slot 103 via second circulation pipeline 204, warm Sensor is spent by the temperature feedback measured to control device so that the second cooler 115 can be according to the temperature of temperature sensor feedback Information adjust automatically cooling circulation rate is spent, to reach required technological temperature.
In the present embodiment, the first texturing slot 102 is connected with additive liquid supply device 116.The benefit of additive liquid supply device 116 Liquid precision is ± 2%, and the effect of additive is to buffer reaction rate so that the reaction of silicon chip is uniform.
In the present embodiment, HNO is used in the first texturing slot 1023, HF, additive, DI water carry out main reaction.Preferably, it is dense Degree compares HF:HNO3:DI:Additive=1:(3.5~4.0):(3.0~3.5):(0.01~0.02);The temperature of first texturing slot 102 Spend for 6~10 DEG C.HNO is used in second texturing slot 1033, HF, DI water carry out assisted reaction, for modifying main reaction silicon chip It is uneven, to solve problem of appearance.Preferably, concentration ratio HF:HNO3:DI=1:(2.8~3.2):(3.3~3.8);Second system The temperature of suede groove 103 is 6~10 DEG C.
In the present embodiment, the rear end of the second texturing slot 103 is disposed with the first rinsing bowl 104, alkaline bath 105, second Rinsing bowl 106, descaling bath 107, the 3rd rinsing bowl 108, the 4th rinsing bowl 109, air-dried groove 110 and blanking groove 111.
In the present embodiment, the first texturing slot 102, the second texturing slot 103, the first rinsing bowl 104, alkaline bath 105, the second water Washing trough 106, descaling bath 107, the 3rd rinsing bowl 108, the 4th rinsing bowl 109, the bottom land that air-dries groove 110 and blanking groove 111 are all provided with It is equipped with bubbling pipe.
In the present embodiment, first circulation pipeline 203 is provided with the valve of first circulation pump 301 and first, second circulation pipeline 204 are provided with the valve of second circulation pump 302 and second.
In the present embodiment, the first drain line 201 is provided with the 3rd valve, and the second drain line 202 is provided with the 4th valve Door.
The beneficial effects of the utility model:First texturing slot 102 is used for main reaction, and the second texturing slot 103 is used to aid in instead Answer.Solar cell groove type etching machine of the present utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, can The problem of appearance of making herbs into wool is effectively solved, and cost can be effectively reduced.
Above content is only preferred embodiment of the present utility model, for one of ordinary skill in the art, according to this reality With new thought, it will change in specific embodiments and applications, this specification content should not be construed as To limitation of the present utility model.

Claims (7)

1. a kind of solar cell groove type etching machine, including feeding groove, it is characterised in that the rear end of the feeding groove is set gradually There are the first texturing slot for main reaction and the second texturing slot for assisted reaction, it is secondary that first texturing slot is connected with first Groove, the first drain line, first texturing slot are provided between the overfall of first texturing slot and the first secondary groove First circulation pipeline is provided between the described first secondary groove, the described first secondary groove is connected with the first cooler, second system Suede groove is connected with the second secondary groove, and the second discharging tube is provided between the overfall of second texturing slot and the second secondary groove Road, is provided with second circulation pipeline between second texturing slot and the second secondary groove, the described second secondary groove is connected with second Cooler.
2. solar cell groove type etching machine according to claim 1, it is characterised in that first texturing slot and described The bottom land of second texturing slot is provided with temperature sensor.
3. solar cell groove type etching machine according to claim 1, it is characterised in that first texturing slot is connected with Additive liquid supply device.
4. solar cell groove type etching machine according to claim 1, it is characterised in that the rear end of second texturing slot Be disposed with the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath, the 3rd rinsing bowl, the 4th rinsing bowl, air-dry groove and Blanking groove.
5. solar cell groove type etching machine according to claim 4, it is characterised in that first texturing slot, described Second texturing slot, first rinsing bowl, the alkaline bath, second rinsing bowl, the descaling bath, the 3rd washing Groove, the 4th rinsing bowl, the bottom land of the air-dried groove and the blanking groove are provided with bubbling pipe.
6. solar cell groove type etching machine according to claim 1, it is characterised in that the first circulation pipeline is set There are first circulation pump and the first valve, the second circulation pipeline is provided with second circulation pump and the second valve.
7. solar cell groove type etching machine according to claim 1, it is characterised in that first drain line is set There is the 3rd valve, second drain line is provided with the 4th valve.
CN201720174433.8U 2017-02-24 2017-02-24 A kind of solar cell groove type etching machine Active CN206591202U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720174433.8U CN206591202U (en) 2017-02-24 2017-02-24 A kind of solar cell groove type etching machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720174433.8U CN206591202U (en) 2017-02-24 2017-02-24 A kind of solar cell groove type etching machine

Publications (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108054237A (en) * 2017-12-06 2018-05-18 中节能太阳能科技(镇江)有限公司 A kind of black silicon chain-type texture-etching equipment of wet method
CN108963033A (en) * 2018-07-13 2018-12-07 宁波尤利卡太阳能科技发展有限公司 Polycrystalline silicon texturing device and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108054237A (en) * 2017-12-06 2018-05-18 中节能太阳能科技(镇江)有限公司 A kind of black silicon chain-type texture-etching equipment of wet method
CN108963033A (en) * 2018-07-13 2018-12-07 宁波尤利卡太阳能科技发展有限公司 Polycrystalline silicon texturing device and method

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GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province

Patentee after: CSI Cells Co.,Ltd.

Patentee after: Funing atlas sunshine Power Technology Co., Ltd

Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province

Patentee before: CSI Cells Co.,Ltd.

Patentee before: CSI-GCL SOLAR MANUFACTURING (YANCHENG) Co.,Ltd.

CP01 Change in the name or title of a patent holder