CN206591202U - A kind of solar cell groove type etching machine - Google Patents
A kind of solar cell groove type etching machine Download PDFInfo
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- CN206591202U CN206591202U CN201720174433.8U CN201720174433U CN206591202U CN 206591202 U CN206591202 U CN 206591202U CN 201720174433 U CN201720174433 U CN 201720174433U CN 206591202 U CN206591202 U CN 206591202U
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- groove
- texturing slot
- solar cell
- etching machine
- type etching
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Abstract
The utility model discloses a kind of solar cell groove type etching machine.It includes feeding groove, the rear end of feeding groove is disposed with the first texturing slot for main reaction and the second texturing slot for assisted reaction, first texturing slot is connected with the first secondary groove, the first drain line is provided between the overfall of first texturing slot and the first secondary groove, first circulation pipeline is provided between first texturing slot and the first secondary groove, first secondary groove is connected with the first cooler, second texturing slot is connected with the second secondary groove, the second drain line is provided between the overfall of second texturing slot and the second secondary groove, second circulation pipeline is provided between second texturing slot and the second secondary groove, second secondary groove is connected with the second cooler.Solar cell groove type etching machine of the present utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, and can effectively solve the problem that the problem of appearance of making herbs into wool, and can be effectively reduced cost.
Description
Technical field
The utility model is related to technical field of solar cell manufacturing, more particularly to a kind of solar cell groove type etching
Machine.
Background technology
Photovoltaic generation is semi-conductor electronic device is effectively absorbed solar radiation using solar energy, and is allowed to turn
Become the direct generation of electricity mode of electric energy, be the main flow of current solar power generation.Usually said solar power generation is exactly solar energy
Volt generates electricity, also known as solar cell power generation, and its core component is solar battery sheet.
In the fabrication of a solar cell, the isotropic etch generally using acid solution to crystalline silicon in crystal orientation
Characteristic, in matte of the silicon chip surface formation similar to " worm hole " structure, by increasing order of reflection of the irradiation light in silicon chip surface,
The absorptivity of light is improved, so as to improve the conversion efficiency of monocrystaline silicon solar cell.In the prior art, making herbs into wool section equipment generally makes
With chain type texturing machine and groove type etching machine, chain type texturing machine is expensive, and the advantage of groove type etching machine is exactly cheap, but its
Inferior position is that the presentation quality of product is poor, it is impossible to reach the market demand.Therefore, it is necessary to which making herbs into wool can effectively be solved by researching and developing one kind
Problem of appearance, and lower-cost etching device.
Utility model content
The purpose of this utility model is to provide a kind of solar cell groove type etching machine, and it uses double flute making herbs into wool, main anti-
It should be combined with assisted reaction, can effectively solve the problem that the problem of appearance of making herbs into wool, and cost can be effectively reduced.
For up to this purpose, the utility model uses following technical scheme：
A kind of solar cell groove type etching machine, including feeding groove, the rear end of feeding groove is disposed with for main reaction
The first texturing slot and the second texturing slot for assisted reaction, the first texturing slot is connected with the first secondary groove, the first texturing slot
The first drain line is provided between overfall and the first secondary groove, first circulation is provided between the first texturing slot and the first secondary groove
Pipeline, the first secondary groove is connected with the first cooler, and the second texturing slot is connected with the second secondary groove, the overfall of the second texturing slot and the
The second drain line is provided between second mate's groove, second circulation pipeline, second are provided between the second texturing slot and the second secondary groove
Secondary groove is connected with the second cooler.
Wherein, the bottom land of the first texturing slot and the second texturing slot is provided with temperature sensor.Preferably, the first cooler
Control device is all connected with the second cooler.The overflow liquid of first texturing slot enters the first cooling by the first drain line
Machine, then return to via first circulation pipeline the bottom of the first texturing slot, temperature sensor is by the temperature feedback measured to controlling dress
Put so that the first cooler can cool down circulation rate according to the temperature information adjust automatically of temperature sensor feedback, to reach
Need technological temperature.The overflow liquid of second texturing slot enters the second cooler by the second drain line, then via second circulation
Pipeline returns to the bottom of the second texturing slot, and temperature sensor is by the temperature feedback measured to control device so that the second cooler
Circulation rate can be cooled down according to the temperature information adjust automatically of temperature sensor feedback, to reach required technological temperature.
Wherein, the first texturing slot is connected with additive liquid supply device.The fluid infusion precision of additive liquid supply device is ± 2%,
The effect of additive is to buffer reaction rate so that the reaction of silicon chip is uniform.
Wherein, HNO is used in the first texturing slot3, HF, additive, DI water carry out main reaction.Preferably, concentration ratio HF：
HNO3：DI：Additive=1：(3.5~4.0)：(3.0~3.5)：(0.01~0.02)；The temperature of first texturing slot is 6~10
℃.HNO is used in second texturing slot3, HF, DI water carry out assisted reaction, for modifying the uneven of main reaction silicon chip, with solve
Problem of appearance.Preferably, concentration ratio HF：HNO3：DI=1：(2.8~3.2)：(3.3~3.8)；The temperature of second texturing slot is 6
~10 DEG C.
Wherein, the rear end of the second texturing slot is disposed with the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath,
Three rinsing bowls, the 4th rinsing bowl, air-dried groove and blanking groove.
Wherein, the first texturing slot, the second texturing slot, the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath, the 3rd water
Washing trough, the 4th rinsing bowl, the bottom land for air-drying groove and blanking groove are provided with bubbling pipe.
Wherein, first circulation pipeline is provided with first circulation pump and the first valve, and second circulation pipeline is provided with second and followed
Ring pump and the second valve.
Wherein, the first drain line is provided with the 3rd valve, and the second drain line is provided with the 4th valve.
The beneficial effects of the utility model：First texturing slot is used for main reaction, and the second texturing slot is used for assisted reaction.This
The solar cell groove type etching machine of utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, can effectively solved
The certainly problem of appearance of making herbs into wool, and cost can be effectively reduced.
Brief description of the drawings
Fig. 1 is the structural representation of solar cell groove type etching machine of the present utility model.
Reference is as follows：
101- feeding grooves；The texturing slots of 102- first；The texturing slots of 103- second；The rinsing bowls of 104- first；105- alkaline baths；
The rinsing bowls of 106- second；107- descaling baths；The rinsing bowls of 108- the 3rd；The rinsing bowls of 109- the 4th；110- air-dries groove；111- blankings
Groove；The secondary grooves of 112- first；The secondary grooves of 113- second；The coolers of 114- first；The coolers of 115- first；The fluid infusion of 116- additives is filled
Put；The drain lines of 201- first；The drain lines of 202- second；203- first circulation pipelines；204- second circulation pipelines；301-
One circulating pump；302- second circulation pumps.
Embodiment
The technical solution of the utility model is further illustrated with reference to Fig. 1 and by specific embodiment.
As shown in figure 1, solar cell groove type etching machine includes feeding groove 101, the rear end of feeding groove 101 is disposed with
The first texturing slot 102 for main reaction and the second texturing slot 103 for assisted reaction, the first texturing slot 102 are connected with
One secondary groove 112, is provided with the first drain line 201, the first system between the overfall of the first texturing slot 102 and the first secondary groove 112
First circulation pipeline 203 is provided between the secondary groove 112 of suede groove 102 and first, the first secondary groove 112 is connected with the first cooler 114,
Second texturing slot 103 is connected with the second secondary groove 113, and the is provided between the overfall of the second texturing slot 103 and the second secondary groove 113
Two drain lines 202, are provided with second circulation pipeline 204, the second secondary groove 113 between the second texturing slot 103 and the second secondary groove 113
It is connected with the second cooler 115.
In the present embodiment, the bottom land of the first texturing slot 102 and the second texturing slot 103 is provided with temperature sensor.It is preferred that
Ground, the first cooler 114 and the second cooler 115 are all connected with control device.The overflow liquid of first texturing slot 102 passes through first
Drain line 201 enters the first cooler 114, then returns to the bottom of the first texturing slot 102 via first circulation pipeline 203, warm
Sensor is spent by the temperature feedback measured to control device so that the first cooler 114 can be according to the temperature of temperature sensor feedback
Information adjust automatically cooling circulation rate is spent, to reach required technological temperature.The overflow liquid of second texturing slot 103 passes through second
Drain line 202 enters the second cooler 115, then returns to the bottom of the second texturing slot 103 via second circulation pipeline 204, warm
Sensor is spent by the temperature feedback measured to control device so that the second cooler 115 can be according to the temperature of temperature sensor feedback
Information adjust automatically cooling circulation rate is spent, to reach required technological temperature.
In the present embodiment, the first texturing slot 102 is connected with additive liquid supply device 116.The benefit of additive liquid supply device 116
Liquid precision is ± 2%, and the effect of additive is to buffer reaction rate so that the reaction of silicon chip is uniform.
In the present embodiment, HNO is used in the first texturing slot 1023, HF, additive, DI water carry out main reaction.Preferably, it is dense
Degree compares HF：HNO3：DI：Additive=1：(3.5~4.0)：(3.0~3.5)：(0.01~0.02)；The temperature of first texturing slot 102
Spend for 6~10 DEG C.HNO is used in second texturing slot 1033, HF, DI water carry out assisted reaction, for modifying main reaction silicon chip
It is uneven, to solve problem of appearance.Preferably, concentration ratio HF：HNO3：DI=1：(2.8~3.2)：(3.3~3.8)；Second system
The temperature of suede groove 103 is 6~10 DEG C.
In the present embodiment, the rear end of the second texturing slot 103 is disposed with the first rinsing bowl 104, alkaline bath 105, second
Rinsing bowl 106, descaling bath 107, the 3rd rinsing bowl 108, the 4th rinsing bowl 109, air-dried groove 110 and blanking groove 111.
In the present embodiment, the first texturing slot 102, the second texturing slot 103, the first rinsing bowl 104, alkaline bath 105, the second water
Washing trough 106, descaling bath 107, the 3rd rinsing bowl 108, the 4th rinsing bowl 109, the bottom land that air-dries groove 110 and blanking groove 111 are all provided with
It is equipped with bubbling pipe.
In the present embodiment, first circulation pipeline 203 is provided with the valve of first circulation pump 301 and first, second circulation pipeline
204 are provided with the valve of second circulation pump 302 and second.
In the present embodiment, the first drain line 201 is provided with the 3rd valve, and the second drain line 202 is provided with the 4th valve
Door.
The beneficial effects of the utility model：First texturing slot 102 is used for main reaction, and the second texturing slot 103 is used to aid in instead
Answer.Solar cell groove type etching machine of the present utility model uses double flute making herbs into wool, and main reaction and assisted reaction are combined, can
The problem of appearance of making herbs into wool is effectively solved, and cost can be effectively reduced.
Above content is only preferred embodiment of the present utility model, for one of ordinary skill in the art, according to this reality
With new thought, it will change in specific embodiments and applications, this specification content should not be construed as
To limitation of the present utility model.
Claims (7)
1. a kind of solar cell groove type etching machine, including feeding groove, it is characterised in that the rear end of the feeding groove is set gradually
There are the first texturing slot for main reaction and the second texturing slot for assisted reaction, it is secondary that first texturing slot is connected with first
Groove, the first drain line, first texturing slot are provided between the overfall of first texturing slot and the first secondary groove
First circulation pipeline is provided between the described first secondary groove, the described first secondary groove is connected with the first cooler, second system
Suede groove is connected with the second secondary groove, and the second discharging tube is provided between the overfall of second texturing slot and the second secondary groove
Road, is provided with second circulation pipeline between second texturing slot and the second secondary groove, the described second secondary groove is connected with second
Cooler.
2. solar cell groove type etching machine according to claim 1, it is characterised in that first texturing slot and described
The bottom land of second texturing slot is provided with temperature sensor.
3. solar cell groove type etching machine according to claim 1, it is characterised in that first texturing slot is connected with
Additive liquid supply device.
4. solar cell groove type etching machine according to claim 1, it is characterised in that the rear end of second texturing slot
Be disposed with the first rinsing bowl, alkaline bath, the second rinsing bowl, descaling bath, the 3rd rinsing bowl, the 4th rinsing bowl, air-dry groove and
Blanking groove.
5. solar cell groove type etching machine according to claim 4, it is characterised in that first texturing slot, described
Second texturing slot, first rinsing bowl, the alkaline bath, second rinsing bowl, the descaling bath, the 3rd washing
Groove, the 4th rinsing bowl, the bottom land of the air-dried groove and the blanking groove are provided with bubbling pipe.
6. solar cell groove type etching machine according to claim 1, it is characterised in that the first circulation pipeline is set
There are first circulation pump and the first valve, the second circulation pipeline is provided with second circulation pump and the second valve.
7. solar cell groove type etching machine according to claim 1, it is characterised in that first drain line is set
There is the 3rd valve, second drain line is provided with the 4th valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720174433.8U CN206591202U (en) | 2017-02-24 | 2017-02-24 | A kind of solar cell groove type etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720174433.8U CN206591202U (en) | 2017-02-24 | 2017-02-24 | A kind of solar cell groove type etching machine |
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| Publication Number | Publication Date |
|---|---|
| CN206591202U true CN206591202U (en) | 2017-10-27 |
Family
ID=60127049
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720174433.8U Active CN206591202U (en) | 2017-02-24 | 2017-02-24 | A kind of solar cell groove type etching machine |
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| CN (1) | CN206591202U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108054237A (en) * | 2017-12-06 | 2018-05-18 | 中节能太阳能科技（镇江）有限公司 | A kind of black silicon chain-type texture-etching equipment of wet method |
| CN108963033A (en) * | 2018-07-13 | 2018-12-07 | 宁波尤利卡太阳能科技发展有限公司 | Polycrystalline silicon texturing device and method |
-
2017
- 2017-02-24 CN CN201720174433.8U patent/CN206591202U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108054237A (en) * | 2017-12-06 | 2018-05-18 | 中节能太阳能科技（镇江）有限公司 | A kind of black silicon chain-type texture-etching equipment of wet method |
| CN108963033A (en) * | 2018-07-13 | 2018-12-07 | 宁波尤利卡太阳能科技发展有限公司 | Polycrystalline silicon texturing device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Funing atlas sunshine Power Technology Co., Ltd Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI-GCL SOLAR MANUFACTURING (YANCHENG) Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |