CN206533025U - Laser and its frequency multiplication module - Google Patents

Laser and its frequency multiplication module Download PDF

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Publication number
CN206533025U
CN206533025U CN201720208510.7U CN201720208510U CN206533025U CN 206533025 U CN206533025 U CN 206533025U CN 201720208510 U CN201720208510 U CN 201720208510U CN 206533025 U CN206533025 U CN 206533025U
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China
Prior art keywords
frequency
laser
completely reflecting
reflecting mirror
doubling crystal
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CN201720208510.7U
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Chinese (zh)
Inventor
任戬
刘猛
刘健
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Shenzhen JPT Optoelectronics Co Ltd
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Shenzhen JPT Optoelectronics Co Ltd
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Abstract

The utility model is related to a kind of laser and its frequency multiplication module.Frequency multiplication module includes frequency-doubling crystal, dichronic mirror and fundamental frequency completely reflecting mirror.When fundamental frequency completely reflecting mirror is located at first position, fundamental frequency completely reflecting mirror blocks the incidence end of frequency-doubling crystal, so that basic frequency laser cannot be introduced into frequency-doubling crystal.Therefore, basic frequency laser can be exported directly after reflection.During mobile fundamental frequency completely reflecting mirror to the second place, basic frequency laser can realize frequency multiplication into frequency-doubling crystal, to obtain double-frequency laser.Further, the mixed light beam of double-frequency laser is included after dichronic mirror color separation, double-frequency laser part is reflected, so as to realize the output of double-frequency laser.In above-mentioned laser and its frequency multiplication module, it can carry out exporting basic frequency laser and the switching of output double-frequency laser both of which by adjusting the position of fundamental frequency completely reflecting mirror, so as to realize the laser output of two kinds of different frequencies.

Description

Laser and its frequency multiplication module
Technical field
The utility model is related to the technical field of laser, more particularly to a kind of laser and its frequency multiplication module.
Background technology
Laser is widely used in cold working field as one of great utility model in modern science technology.Particularly In nonmetallic and Precision Machining, the application value of laser is especially protruded.Existing laser technology substantially by 808nm or The semiconductor pumped laser crystals of 880nm or the laser beam that 1064nm is produced using linear polarization generator.
And as the whole world increasingly increases the demand of retrofit so that the application field of 532nm green lasers constantly expands Greatly.Accordingly, it would be desirable to frequency conversion be carried out to the fundamental frequency 1064nm laser beams of generation, to obtain the 532nm green lasers of frequency multiplication.At present, The scheme of solid frequency multiplication is used green (light) laser on the market more.Frequency-doubling crystal is set outside the intracavitary or chamber of laser, Make laser beam pass through frequency-doubling crystal to realize conversion of the laser by 1064nm to 532nm.
However, current green (light) laser can only export the 532nm laser beams after frequency conversion, and fundamental frequency can not be exported 1064nm laser.But some scenes then need the laser of two kinds of frequencies of 1064nm and 532nm while using.So, it is necessary to accurate The laser beam that standby two lasers export different frequency respectively could meet demand, and this will cause cost to raise, and also cause behaviour Make inconvenient.
Utility model content
Based on this, it is necessary to which the problem of can only exporting a kind of frequency laser for existing laser can export there is provided one kind The laser and its frequency multiplication module of two kinds of different frequency laser.
A kind of frequency multiplication module, including:
Frequency-doubling crystal, including incidence end and exit end, basic frequency laser can enter the frequency-doubling crystal through the incidence end, and The mixed light beam of the double-frequency laser and the basic frequency laser that are doubled from the exit end output frequency;
Dichronic mirror, is oppositely arranged with the exit end and is tilted relative to the axis of the frequency-doubling crystal, the mixed light Beam can outgoing to the dichronic mirror so that the basic frequency laser occurs transmission and the double-frequency laser reflects;And
The fundamental frequency completely reflecting mirror that activity is set, may be disposed at first position and the second place, the fundamental frequency completely reflecting mirror position When first position, the fundamental frequency completely reflecting mirror blocks the incidence end, so that the basic frequency laser reflects, the fundamental frequency When completely reflecting mirror is located at the second place, the position incidence end is kept away, so that the basic frequency laser enters the frequency-doubling crystal.
In one of the embodiments, in addition to beam shaping component, the beam shaping component and the incidence end phase To setting and coupling, after the basic frequency laser is exported through the beam shaping component, into the frequency-doubling crystal.
In one of the embodiments, the beam shaping component includes convex lens that are relative and be arrangeding in parallel and recessed Mirror, and the relative position of the convex lens and the concavees lens is adjustable.
In one of the embodiments, the fundamental frequency completely reflecting mirror is by sliding and/or rotating, to realize described first Switched between position and the second place.
In one of the embodiments, when the fundamental frequency completely reflecting mirror is located at the first position, the fundamental frequency total reflection Mirror be arranged in parallel with the dichronic mirror.
In one of the embodiments, in addition to the plane of incidence of the fundamental frequency completely reflecting mirror the first output being oppositely arranged Speculum and the second output reflector being oppositely arranged with the plane of incidence of the dichronic mirror, and first output reflector and institute The second output reflector is stated to be arranged in parallel.
In one of the embodiments, first output reflector on the direction perpendicular to the frequency-doubling crystal axis With the distance of second output reflector, less than on the direction along the frequency-doubling crystal axis fundamental frequency completely reflecting mirror with The distance of the dichronic mirror.
In one of the embodiments, the fundamental frequency completely reflecting mirror, the dichronic mirror, first output reflector and institute Axis of second output reflector with the frequency-doubling crystal is stated in 45 degree of angles.
In one of the embodiments, in addition to laser reclaims component, the laser reclaim the plane of incidence of component with it is described The exit facet of dichronic mirror is oppositely arranged, and the basic frequency laser transmitted from the dichronic mirror can after laser recovery component conduction Into in the frequency-doubling crystal.
A kind of laser, it is characterised in that including:
Housing;
The generating device of laser in the housing is installed on, for producing basic frequency laser;And
Frequency multiplication module as any one of above-mentioned preferred embodiment, the frequency multiplication module is installed in the housing simultaneously It is coupled with the generating device of laser, so that the basic frequency laser enters the frequency multiplication module.
Above-mentioned laser and its frequency multiplication module, when fundamental frequency completely reflecting mirror is located at first position, fundamental frequency completely reflecting mirror is blocked The incidence end of frequency-doubling crystal, so that basic frequency laser cannot be introduced into frequency-doubling crystal.Therefore, basic frequency laser can be directly defeated after reflection Go out.During mobile fundamental frequency completely reflecting mirror to the second place, basic frequency laser can realize frequency multiplication into frequency-doubling crystal, be swashed with obtaining frequency multiplication Light.Further, the mixed light beam of double-frequency laser is included after dichronic mirror color separation, double-frequency laser part is reflected, so that real The output of existing double-frequency laser.In above-mentioned laser and its frequency multiplication module, it can be entered by the position for adjusting fundamental frequency completely reflecting mirror Row output basic frequency laser and the switching of output double-frequency laser both of which, so as to realize the laser output of two kinds of different frequencies.
Brief description of the drawings
Fig. 1 is located at structure during first position for the fundamental frequency completely reflecting mirror of times frequency module in the utility model preferred embodiment Schematic diagram;
Fig. 2 is located at the structural representation during second place for fundamental frequency completely reflecting mirror in times frequency module shown in Fig. 1.
Embodiment
For the ease of understanding the utility model, the utility model is more fully retouched below with reference to relevant drawings State.Preferred embodiment of the present utility model is given in accompanying drawing.But, the utility model can come in many different forms Realize, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is made to of the present utility model The understanding of disclosure is more thorough comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element Or can also have element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " level ", " left side ", " right side " and similar statement are for illustrative purposes only.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to technology of the present utility model The implication that the technical staff in domain is generally understood that is identical.It is herein to be in term used in the description of the present utility model The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include The arbitrary and all combination of one or more related Listed Items.
Fig. 1 and Fig. 2 is referred to, the laser in the utility model preferred embodiment includes housing (not shown), laser and sent out Generating apparatus (not shown) and frequency multiplication module 100.
Housing has internal cavity structures, for housing generating device of laser and frequency multiplication module 100.Housing is additionally provided with laser Output channel, the laser for required frequency is exported.
Generating device of laser is installed in housing, for producing basic frequency laser.Specifically in the present embodiment, basic frequency laser is 1064nm laser.Wherein, generating device of laser can swash for solid laser generator, optical-fiber laser generator and other linear polarizations Any one in optical generator.
Frequency multiplication module 100 is installed in housing and is coupled with generating device of laser, so that what generating device of laser was produced Basic frequency laser enters to state frequency multiplication module 100.Wherein, frequency multiplication module 100 includes frequency-doubling crystal 110, dichronic mirror 120 and fundamental frequency total reflection Mirror 130.The each several part of frequency multiplication module 100 can be directly mounted on housing, be also mountable in support (not shown), then passes through branch Frame is installed on housing.
Frequency-doubling crystal 110 includes incidence end and exit end.Wherein, incidence end is located at frequency-doubling crystal 110 respectively with exit end The two ends of axis.Frequency-doubling crystal 110 can be the frequency-doubling crystals such as KTP, KDP, LBO and BBO.Former incident basic frequency laser can be through entering Penetrate end and enter frequency-doubling crystal 110, basic frequency laser doubling frequency in frequency-doubling crystal 110 just can obtain double-frequency laser.Specifically exist In the present embodiment, double-frequency laser is 532nm green lasers.But, because frequency-doubling crystal 110 can not realize percentage to basic frequency laser Hundred conversion.Therefore, from exit end export be the double-frequency laser of doubling frequency and the mixed light beam of basic frequency laser.
The exit end of dichronic mirror 120 and frequency-doubling crystal 110 is oppositely arranged and tilted relative to the axis of frequency-doubling crystal 110. Dichronic mirror 120, which has, plays anti-reflection effect to basic frequency laser, and the characteristic for being totally reflected double-frequency laser.Therefore, mixed light When beam outgoing is to dichronic mirror 120, wherein the fractional transmission of basic frequency laser is to the back side of dichronic mirror 120, and double-frequency laser part is then Reflect.Therefore, basic frequency laser is realized with double-frequency laser and separated, and then obtains pure double-frequency laser.Further, frequency multiplication Laser is reflected into the laser output channel in housing, and laser just can be made to realize the output of double-frequency laser.
Fundamental frequency completely reflecting mirror 130, which has, makes the characteristic that basic frequency laser is totally reflected.The activity of fundamental frequency completely reflecting mirror 130 is set Put, fundamental frequency completely reflecting mirror 130 may be disposed at first position and the second place.Specifically in the present embodiment, fundamental frequency completely reflecting mirror 130 By sliding and/or rotating, switched between the first location and the second location with realizing.Further, fundamental frequency is totally reflected Mirror 130 is driven by motor.When needing to adjust the position of fundamental frequency completely reflecting mirror 130, then electric motor starting, to drive fundamental frequency to be totally reflected Mirror 130 is rotated or slided in housing.
When fundamental frequency completely reflecting mirror 130 is located at first position, fundamental frequency completely reflecting mirror 130 blocks incidence end, so that basic frequency laser Reflect.Therefore, former incident basic frequency laser can not enter frequency-doubling crystal 110.And fundamental frequency completely reflecting mirror 130 is located at second When putting, an incidence end is kept away, so that former incident basic frequency laser enters frequency-doubling crystal 110.
Frequency multiplication module 100 includes two light paths, respectively the first light path and the second light path.Wherein, the first light path includes base Frequency completely reflecting mirror 130, the second light path include frequency multiplication and are vigilant light 110 and dichronic mirror 120.
By switching the position of fundamental frequency completely reflecting mirror 130, laser beam can be made to be switched between two light paths.Fundamental frequency When completely reflecting mirror 130 is located at first position, laser beam is along the first optic path, and basic frequency laser cannot be introduced into frequency-doubling crystal 110 When, and can enter laser output channel by reflection, so that laser realizes the direct output of basic frequency laser.And move fundamental frequency During completely reflecting mirror 130 to the second place, laser beam can be realized along the second optic path, basic frequency laser into frequency-doubling crystal 110 Frequency multiplication.Further, the pure double-frequency laser obtained through the color separation of dichronic mirror 120 makes by being reflected into laser output channel Laser realizes the output of double-frequency laser.Therefore, frequency multiplication module 100 just can be real by adjusting the position of fundamental frequency completely reflecting mirror 130 The laser output of existing two kinds of different frequencies.
In the present embodiment, frequency multiplication module 100 also includes beam shaping component 140.Beam shaping component 140 and incidence End is oppositely arranged and coupled, after basic frequency laser is exported through beam shaping component 140, into frequency-doubling crystal 110.
Specifically, the basic frequency laser that generating device of laser is produced is introduced into beam shaping component 140, pass through beam shaping Component 140 is transmitted to frequency-doubling crystal 110 again after being adjusted to the hot spot of basic frequency laser, so as to lift frequency-doubling crystal 110 to base The transformation efficiency of frequency laser.Wherein, the first light path and the second light path include beam shaping component 140.
Further, in the present embodiment, beam shaping component 140 include convex lens 141 that are relative and be arrangeding in parallel and Concavees lens 143, and the relative position of convex lens 141 and concavees lens 143 is adjustable.
Shrink beam is carried out by the light beam to basic frequency laser, expands or focuses on, the adjustment to light spot shape can be achieved.And root According to the difference of generating device of laser type, the launching spot of basic frequency laser can be caused to have differences.Accordingly, it would be desirable to different shapings Scheme is to adapt to different types of generating device of laser.Specifically, convex lens 141 can be played to light beam respectively with concavees lens 143 Convergence and the effect of diverging.And the relative position by regulation between the two, just it can be adjusted for different launching spots, So as to which different types of launching spot to be shaped to required shape.
In the present embodiment, when fundamental frequency completely reflecting mirror 130 is located at first position, fundamental frequency completely reflecting mirror 130 and dichronic mirror 120 It is arranged in parallel.
The basic frequency laser and double-frequency laser reflected from fundamental frequency completely reflecting mirror 130 and dichronic mirror 120, will be respectively as laser The laser output of two kinds of different frequencies of device.Therefore, fundamental frequency completely reflecting mirror 130 is be arranged in parallel with dichronic mirror 120, two can be made The light beam for planting the laser output of different frequency is parallel.Further, the collimated light beam of above two different frequency just can share sharp Light output passage, so as to make housing compact and be conducive to reduce laser volume.
Further, in the present embodiment, frequency multiplication module 100 also includes the first output reflector 150 and the second output is anti- Penetrate mirror 160.First output reflector 150 and the second output reflector 160 respectively with the plane of incidence of fundamental frequency completely reflecting mirror 130 and point The plane of incidence of Look mirror 120 is oppositely arranged.
First output reflector 150 and the second output reflector 160 can make basic frequency laser and double-frequency laser in its table respectively Face is totally reflected.Wherein, it is introduced into after the basic frequency laser in frequency-doubling crystal 110 reflects through fundamental frequency speculum 130, can be from the The surface of one output reflector 150 is incident, and occurs further total reflection.The double-frequency laser reflected from dichronic mirror 120 Then can be incident from the surface of the second output reflector 160, and occur further total reflection.Therefore, the first output reflector 150 And second output reflector 160 can change in laser two kinds of different frequencies laser output outbound course.First output is anti- Penetrate element of the output reflector 160 of mirror 150 and second respectively as the first light path and the second light path.
Moreover, the first output reflector 150 be arranged in parallel with the second output reflector 160.That is, defeated by first Go out the output reflector 160 of speculum 150 and second to change after outbound course, the light beam for planting the laser output of different frequency is still put down OK.
Further, in the present embodiment, on the direction perpendicular to the axis of frequency-doubling crystal 110, the first output reflection The distance of the output reflector 160 of mirror 150 and second, less than the fundamental frequency completely reflecting mirror 130 on the direction along the axis of frequency-doubling crystal 110 With the distance of dichronic mirror 120.
Specifically, because after the first output reflector 150 and the reflection of the second output reflector 160, two kinds of differences are frequently The spacing of the light beam of the laser output of rate, equal to the first output reflector 150 and the second output reflector 160 perpendicular to frequency multiplication Distance on the axis direction of crystal 110.Therefore, direction is changed by the first output reflector 150 and the second output reflector 160 Afterwards, the beam separation of the laser output of two kinds of different frequencies reduces, therefore the size of laser output channel can further reduce, from And be conducive to further reducing the volume of laser.
Further, in the present embodiment, fundamental frequency completely reflecting mirror 130, dichronic mirror 120, the first output reflector 150 and Axis of second output reflector 160 with frequency-doubling crystal 110 is in 45 degree of angles.
Therefore, the basic frequency laser and double-frequency laser of output can all pass through 45 degree twice of reflection, so that laser The light beam of final output is parallel with the light beam of former incident basic frequency laser, so housing structure can be designed to it is compacter, with A more step reduces the volume of laser.
In addition, also including laser recovery component to lift the frequency multiplication module 100 in efficiency of energy utilization, the present embodiment (not shown).The exit facet that laser reclaims the plane of incidence and dichronic mirror 120 of component is oppositely arranged, and transmitted from dichronic mirror 120 Basic frequency laser can enter in frequency-doubling crystal 110 after reclaiming component conduction through laser.
Because the transformation efficiency of frequency-doubling crystal 110 is limited, therefore the base that quite a few is not converted is included in mixed light beam Frequency laser.Therefore, mixed light beam has substantial portion of basic frequency laser through exit face after dichronic mirror 120.If appointing By its scattering, energy waste will be caused.Reclaiming component by laser can input the basic frequency laser not being converted again in frequency multiplication crystalline substance In body 110, so as to effectively lift energy utilization rate.
Above-mentioned laser and its frequency multiplication module 100, when fundamental frequency completely reflecting mirror 130 is located at first position, fundamental frequency total reflection Mirror 130 blocks the incidence end of frequency-doubling crystal 110, so that basic frequency laser cannot be introduced into frequency-doubling crystal 110.Therefore, basic frequency laser is passed through Can directly it be exported after crossing reflection.When mobile fundamental frequency completely reflecting mirror 130 is to the second place, basic frequency laser can enter frequency-doubling crystal 110 Frequency multiplication is realized, to obtain double-frequency laser.Further, the mixed light beam of double-frequency laser is included after the color separation of dichronic mirror 120, times Frequency laser part is reflected, so as to realize the output of double-frequency laser.In above-mentioned laser and its frequency multiplication module 100, by adjusting The position of integral basis frequency completely reflecting mirror 130 can carry out exporting basic frequency laser with exporting the switching of double-frequency laser both of which, so that Realize the laser output of two kinds of different frequencies.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, the scope of this specification record is all considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and it describes more specific and detailed, But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that for the common skill of this area For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to Protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.

Claims (10)

1. a kind of frequency multiplication module, it is characterised in that including:
Frequency-doubling crystal, including incidence end and exit end, basic frequency laser can enter the frequency-doubling crystal through the incidence end, and from institute State the mixed light beam of double-frequency laser and the basic frequency laser that exit end output frequency is doubled;
Dichronic mirror, is oppositely arranged with the exit end and is tilted relative to the axis of the frequency-doubling crystal, the mixed light beam can Outgoing is to the dichronic mirror, so that the basic frequency laser occurs transmission and the double-frequency laser reflects;And
The fundamental frequency completely reflecting mirror that activity is set, may be disposed at first position and the second place, and the fundamental frequency completely reflecting mirror is located at the During one position, the fundamental frequency completely reflecting mirror blocks the incidence end, so that the basic frequency laser reflects, the fundamental frequency is all-trans When penetrating mirror positioned at the second place, the position incidence end is kept away, so that the basic frequency laser enters the frequency-doubling crystal.
2. frequency multiplication module according to claim 1, it is characterised in that also including beam shaping component, the beam shaping Component is oppositely arranged and coupled with the incidence end, after the basic frequency laser is exported through the beam shaping component, into described Frequency-doubling crystal.
3. frequency multiplication module according to claim 2, it is characterised in that the beam shaping component includes relative and parallel set The convex lens and concavees lens put, and the relative position of the convex lens and the concavees lens is adjustable.
4. frequency multiplication module according to claim 1, it is characterised in that the fundamental frequency completely reflecting mirror is by sliding and/or turning It is dynamic, switched over realizing between the first position and the second place.
5. frequency multiplication module according to claim 1, it is characterised in that the fundamental frequency completely reflecting mirror is located at the first position When, the fundamental frequency completely reflecting mirror be arranged in parallel with the dichronic mirror.
6. frequency multiplication module according to claim 5, it is characterised in that also including the plane of incidence with the fundamental frequency completely reflecting mirror The first output reflector for being oppositely arranged and the second output reflector being oppositely arranged with the plane of incidence of the dichronic mirror, and it is described First output reflector be arranged in parallel with second output reflector.
7. frequency multiplication module according to claim 6, it is characterised in that on the direction perpendicular to the frequency-doubling crystal axis The distance of first output reflector and second output reflector, less than on the direction along the frequency-doubling crystal axis The distance of the fundamental frequency completely reflecting mirror and the dichronic mirror.
8. frequency multiplication module according to claim 7, it is characterised in that the fundamental frequency completely reflecting mirror, the dichronic mirror, described The axis of first output reflector and second output reflector with the frequency-doubling crystal is in 45 degree of angles.
9. the frequency multiplication module according to any one of claim 1 to 8, it is characterised in that also reclaim component including laser, described The exit facet that laser reclaims the plane of incidence and the dichronic mirror of component is oppositely arranged, and the basic frequency laser transmitted from the dichronic mirror It can enter after reclaiming component conduction through the laser in the frequency-doubling crystal.
10. a kind of laser, it is characterised in that including:
Housing;
The generating device of laser in the housing is installed on, for producing basic frequency laser;And
Frequency multiplication module as described in above-mentioned any one of claim 1 to 9, the frequency multiplication module be installed in the housing and with institute State generating device of laser to be coupled, so that the basic frequency laser enters the frequency multiplication module.
CN201720208510.7U 2017-03-03 2017-03-03 Laser and its frequency multiplication module Active CN206533025U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106785874A (en) * 2017-03-03 2017-05-31 深圳市杰普特光电股份有限公司 Laser and its frequency multiplication module
CN109693034A (en) * 2019-02-18 2019-04-30 大族激光科技产业集团股份有限公司 A kind of infrared light method and picosecond laser system of processing out with ultraviolet picosecond laser
CN111338152A (en) * 2020-03-04 2020-06-26 中国科学院理化技术研究所 Device for homogenizing distribution of frequency-doubled light field

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106785874A (en) * 2017-03-03 2017-05-31 深圳市杰普特光电股份有限公司 Laser and its frequency multiplication module
CN109693034A (en) * 2019-02-18 2019-04-30 大族激光科技产业集团股份有限公司 A kind of infrared light method and picosecond laser system of processing out with ultraviolet picosecond laser
CN111338152A (en) * 2020-03-04 2020-06-26 中国科学院理化技术研究所 Device for homogenizing distribution of frequency-doubled light field
CN111338152B (en) * 2020-03-04 2022-09-27 中国科学院理化技术研究所 Device for homogenizing frequency-doubled light field distribution

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