CN206524969U - Mems microphone - Google Patents

Abstract

The utility model discloses a kind of MEMS microphone, it includes the housing provided with receiving space and the MEMS sensor and asic chip that are placed in the housing, the MEMS microphone also includes the MEMS oscillator being placed in receiving space, and the MEMS oscillator electrically connects with the asic chip and provides clock signal for asic chip.MEMS microphone clock frequency of the present utility model is stable, and uniformity is good.

Description

MEMS microphone

【Technical field】

The utility model is related to a kind of audio unit, relates more specifically to a kind of MEMS microphone.

【Background technology】

MEMS microphone is the microphone manufactured based on MEMS technology, is manufactured, can be born very using Surface Mount technique High Reflow Soldering temperature, is easily integrated with CMOS technology and other voicefrequency circuits, and with improved noise removing performance with Good RF and EMI suppresses energy, and it is extensively using on mobile phone, PAD or other portable equipments.At present, MEMS microphone is just progressively Develop to intelligent direction, intelligent MEMS microphone can also have and touch in addition to the sound collection function with conventional microphone Touch the functions such as sensing, intelligent activating.

Asic chip in MEMS microphone needs a stable clock signal to normal work.In the prior art Typically this clock signal is provided by following several schemes：(1) by the clock in pulse density modulator is come for ASIC cores Piece provides clock signal；(2) clock oscillator in the piece of asic chip is provided；(3) after being connected with smart machine, by intelligence Codec chips (coder) in energy equipment are provided.In scheme (1), because PDM clocks are due to needing to undertake signal transmission With the effect of pattern switching, clock frequency is simultaneously unstable, should not as asic chip work clock；In scheme (2), due to Asic chip integrated level is very high, and the frequency that the clock oscillator of each chip internal is difficult in the fabrication process is consistent, Stability and uniformity are poor, and power consumption is big, and frequency is difficult to be made high, can so cause manufactured by the chip using same model The MEMS microphone quality gone out is not fully identical；In scheme (3), Codec chips will remain on state all the time, so exist Smart machine in a dormant state when, Codec chips will still export clock signal, considerably increase the power consumption of smart machine.

【Utility model content】

For the defect of prior art, the utility model provides a kind of MEMS microphone, and it includes being provided with receiving space Housing and the MEMS sensor and asic chip that are placed in the housing, the MEMS microphone also includes being placed in collecting empty Interior MEMS oscillator, the MEMS oscillator electrically connects with the asic chip and provides clock signal for asic chip.

It is preferred that, the MEMS oscillator and MEMS sensor are integrated in one.

It is preferred that, the MEMS oscillator and asic chip are integrated in one.

It is preferred that, the housing includes shell and the wiring board to form receiving space, the MEMS is connect with the casing cover Sensor and the asic chip are each attached on wiring board.

It is preferred that, the MEMS sensor, asic chip and MEMS oscillator are Split type structure.

It is preferred that, the housing includes shell and the wiring board to form receiving space, the MEMS is connect with the casing cover Sensor, the asic chip and MEMS oscillator are each attached on wiring board.

It is preferred that, the MEMS sensor and asic chip are electrically connected by binding gold thread.

It is preferred that, the MEMS oscillator and asic chip are electrically connected by binding gold thread.

It is preferred that, the MEMS microphone is intelligent MEMS microphone.

The beneficial effects of the utility model are：Clock signal is provided for microphone by MEMS oscillator, clock frequency is steady Fixed, uniformity is good, and can export the clock signal of upper frequency, and the clock frequency of its output can be adjusted by asic chip Rate, reduces power consumption.

【Brief description of the drawings】

Fig. 1 is the structural representation of the embodiment 1 of MEMS microphone of the present utility model；

Fig. 2 is the circuit diagram of the embodiment 1 of MEMS microphone of the present utility model；；

Fig. 3 is the circuit diagram of the embodiment 2 of MEMS microphone of the present utility model.

【Embodiment】

To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this The embodiment of utility model is described in detail, and makes above and other purpose of the present utility model, feature and advantage will Become apparent from.Identical reference indicates identical part in whole accompanying drawings.Not deliberately accompanying drawing drawn to scale, emphasis It is purport of the present utility model is shown.

Embodiment 1

As depicted in figs. 1 and 2, MEMS microphone includes the housing 1 provided with receiving space 6 and is placed in the housing 1 MEMS sensor 4 and asic chip 2, the housing 1 include shell 11 and with the shell 11 lid connect to form receiving space 6 Wiring board 12, the MEMS sensor 4 and the asic chip are fixed in assist side 12.MEMS microphone also includes being placed in receipts Hold the MEMS oscillator 3 in space 6, MEMS oscillator 3 is also secured on wiring board 1.In this embodiment, MEMS sensor 4, Asic chip 2 and MEMS oscillator 3 are three mutual discrete devices.The MEMS oscillator 3 passes through with the asic chip 2 Binding gold thread 5 electrically connects and provides clock signal for asic chip 2, and MEMS sensor 4 is with asic chip 2 also by binding gold thread 5 electrical connections.MEMS sensor 4 is typically realized that, for collected sound signal, asic chip 2 is used for collecting by variable capacitance Voice signal handled, such as de-noising, amplification, signal after processing are sent out after the modulation of PDM (not shown)s Go.In addition, MEMS microphone is intelligent MEMS microphone.

For general electronic equipment, the larger volume of quartz (controlled) oscillator is acceptable.But in microphone In narrow space, traditional quartz (controlled) oscillator can not be accommodated completely, and the maximum advantage of MEMS oscillator is that volume is much smaller than Quartz (controlled) oscillator, thus can as intelligent microphone clock source.In addition, the separately fabricated MEMS oscillator clock with encapsulation There is good stability and uniformity, the MEMS oscillator of same batch manufacture can be exported between signal stabilization, different components Identical frequency signal.And the separately fabricated MEMS oscillator with encapsulation, higher clock frequency can be exported, it is low in energy consumption.

Embodiment 2

Referring to Fig. 3, the embodiment and embodiment 1 are differed only in：In example 2, MEMS oscillator and MEMS MEMS oscillator and MEMS sensor are integrated into a chip 43 by sensor integration in one.By MEMS oscillator with MEMS sensor is integrated in one, and can so reduce the number of discrete parts in microphone so that the manufacture of microphone and group Dress is more quick, easy, improves production efficiency.

In addition, in other embodiments, also MEMS oscillator and asic chip can be integrated in one.

By the introduction of above-described embodiment can be seen that this it is new by MEMS oscillator be microphone provide clock letter Number, clock frequency is stable, and uniformity is good, and can export the clock signal of upper frequency, can adjust it by controlling IC The clock frequency of output, reduces power consumption.

Many details are elaborated in the above description to fully understand the utility model.But above description Only it is preferred embodiment of the present utility model, the utility model can be come with being much different from other manner described here Implement, therefore the utility model is not limited by specific implementation disclosed above.Any those skilled in the art exist simultaneously Do not depart under technical solutions of the utility model ambit, it is all new to this practicality using the methods and techniques content of the disclosure above Type technical scheme makes many possible variations and modification, or is revised as the equivalent embodiment of equivalent variations.It is every without departing from this The content of utility model technical scheme, any is simply repaiied according to technical spirit of the present utility model to made for any of the above embodiments Change, equivalent variations and modification, in the range of still falling within technical solutions of the utility model protection.

Claims (9)

1. a kind of MEMS microphone, including the housing provided with receiving space and the MEMS sensor that is placed in the housing and Asic chip, it is characterised in that the MEMS microphone also includes the MEMS oscillator being placed in receiving space, the MEMS shakes Device is swung to electrically connect with the asic chip and provide clock signal for asic chip.

2. MEMS microphone according to claim 1, it is characterised in that the MEMS oscillator and MEMS sensor are integrated In one.

3. MEMS microphone according to claim 1, it is characterised in that the MEMS oscillator and asic chip are integrated in One.

4. the MEMS microphone according to Claims 2 or 3, it is characterised in that the housing include shell and with it is described outer Cap connects the wiring board to form receiving space, and the MEMS sensor and the asic chip are each attached on wiring board.

5. MEMS microphone according to claim 1, it is characterised in that the MEMS sensor, asic chip and MEMS oscillator is Split type structure.

6. MEMS microphone according to claim 5, it is characterised in that the housing include shell and with the casing cover The wiring board to form receiving space is connect, the MEMS sensor, the asic chip and MEMS oscillator are each attached to circuit On plate.

7. MEMS microphone according to claim 1, it is characterised in that the MEMS sensor and asic chip are by tying up Deposit line is electrically connected.

8. MEMS microphone according to claim 1, it is characterised in that the MEMS oscillator and asic chip are by tying up Deposit line is electrically connected.

9. MEMS microphone according to claim 1, it is characterised in that the MEMS microphone is intelligence MEMS Mikes Wind.