CN206467288U - A kind of adjustable tube furnace of flow of aerating air with assembling die - Google Patents

A kind of adjustable tube furnace of flow of aerating air with assembling die Download PDF

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Publication number
CN206467288U
CN206467288U CN201621404270.XU CN201621404270U CN206467288U CN 206467288 U CN206467288 U CN 206467288U CN 201621404270 U CN201621404270 U CN 201621404270U CN 206467288 U CN206467288 U CN 206467288U
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CN
China
Prior art keywords
hole
tube furnace
mold
flow
assembling die
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Expired - Fee Related
Application number
CN201621404270.XU
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Chinese (zh)
Inventor
李成海
丁佩岭
孙鹏飞
张云龙
张瑞霞
胡明
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Jiamusi University
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Jiamusi University
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Publication date
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Priority to CN201621404270.XU priority Critical patent/CN206467288U/en
Application granted granted Critical
Publication of CN206467288U publication Critical patent/CN206467288U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

A kind of adjustable tube furnace of flow of aerating air with assembling die, it is related to a kind of tube furnace, and in particular to a kind of adjustable tube furnace of flow of aerating air with assembling die.When the utility model carries out chemical vapour deposition reaction to solve existing tube furnace, its less problem of internal free space.The utility model includes furnace shell, layer of refractory insulating material, first electrode, second electrode, thermocouple and multiple electrical bars, layer of refractory insulating material is arranged in furnace shell, multiple electrical bars are along the circumferential direction uniformly inserted into layer of refractory insulating material, first electrode, second electrode, thermocouple is connected with electrical bar, the utility model also includes front mold, rear mold, front apron and rear baffle, front mold and rear mold are disposed side by side in heat-resistant insulating layer from front to back, front apron is arranged on the outside of front mold, rear baffle is arranged on the outside of rear mold, multiple first through hole and the second through hole are laid with front mold and rear mold.The utility model belongs to chemical field.

Description

A kind of adjustable tube furnace of flow of aerating air with assembling die
Technical field
The utility model is related to a kind of tube furnace, and in particular to a kind of adjustable tubular type of flow of aerating air with assembling die Stove, belongs to chemical field.
Background technology
Chemical vapour deposition technique is a kind of important technology for preparing nano material and surface modification.Using common tube furnace It is thick in caliber because the density variation of different types of reacting gas and carrier gas is larger when carrying out chemical vapour deposition reaction Tube furnace in carry out chemical vapor deposition when easily occur laminar flow problem, it is necessary to air inlet is mixed.Mixed gas is main It is to be mixed using swirler, but swirler is general outside tube furnace, and laminar flow phenomenon and valency are there is also when gas flows Lattice are expensive.At present, prepare carbon nanomaterial with the caliber of tube furnace using chemical vapour deposition technique and be generally an inch.Change Learn vapour deposition not to be widely used also with the tube furnace of Large Diameter Pipeline, it means that processed sample or workpiece will be by The limitation of equipment and can not be widely used.
Utility model content
When the utility model carries out chemical vapour deposition reaction to solve existing tube furnace, its internal free space is less Problem, and then propose a kind of adjustable tube furnace of flow of aerating air with assembling die.
The utility model adopts the technical scheme that to solve the above problems:The utility model includes furnace shell, high temperature insulation Material layer, first electrode, second electrode, thermocouple and multiple electrical bars, layer of refractory insulating material are arranged in furnace shell, Duo Ge electricity Hot pin is along the circumferential direction uniformly inserted into layer of refractory insulating material, and first electrode, second electrode, thermocouple connect with electrical bar Connect, the utility model also includes front mold, rear mold, front apron and rear baffle, and front mold and rear mold are set side by side from front to back Put in layer of refractory insulating material, front apron is arranged on the outside of front mold, rear baffle is arranged on the outside of rear mold, front mold With multiple first through hole and the second through hole are laid with rear mold.
The beneficial effects of the utility model are:The utility model uses front mold, rear mold, front apron and rear baffle phase The hole of adjustable breathing area size is set with reference to design, and in front mold and rear mold so that air inlet eddy generation reaches To the purpose of mixed gas, the adjustable hole of breathing area is also equipped with rear mold, gas is avoided in chemical vapor deposition Mixing is uneven and can not handle large-size sample or workpiece due to being influenceed by tubular type boiler tube footpath;In chemical vapor deposition During product, position and breathing area of the front mold with rear mold by the rational control passage of rotation can effectively be adjusted The direction of motion of air-flow and the air pressure of reaction zone, promote gas mixing to avoid laminar flow phenomenon;Both Large Diameter Pipeline chemistry had been improved The atmosphere evenness of vapour deposition tube furnace reaction zone, turn avoid and limited by caliber and can not handle large dimension specimen or work Part;
Brief description of the drawings
Fig. 1 is overall structure diagram of the present utility model, and Fig. 2 is Fig. 1 left view, and Fig. 3 is front apron and rear baffle Front view, Fig. 4 is the left view of front apron and rear baffle, and Fig. 5 is the front view of front mold and rear mold, and Fig. 6 is front mold With the left view of rear mold.
Embodiment
Embodiment one:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined The adjustable tube furnace of flow of aerating air of mould, it includes furnace shell 1, layer of refractory insulating material 4, first electrode 5, second electrode 6, heat Galvanic couple 7 and multiple electrical bars 12, layer of refractory insulating material 4 are arranged in furnace shell 1, and multiple electrical bars 12 are along the circumferential direction uniform to be inserted Mounted in layer of refractory insulating material 4, first electrode 5, second electrode 6, thermocouple 7 are connected with electrical bar 12, it is characterised in that:Institute Stating a kind of adjustable tube furnace of the flow of aerating air with assembling die also includes front mold 8, rear mold 9, front apron 10 and rear gear Plate 11, front mold 8 and rear mold 9 are disposed side by side in layer of refractory insulating material 4 from front to back, and front apron 10 is arranged on front mold 8 outside, rear baffle 11 is arranged in the outside of rear mold 9, front mold 8 and rear mold 9 and is laid with multiple first through hole 13 With the second through hole 14.First through hole 13 is arranged to truncated cone-shaped, the radius in hole on mould is gradually dropped along gas flow direction It is low, the gas and reacted exhaust gas recirculation reacted can be effectively prevented, so as to influence chemical vapor deposition product Quality, is the very good mould of 100mm diameter tube furnace chemical vapor depositions.
Embodiment two:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined The front apron 10 and rear baffle 11 of the adjustable tube furnace of flow of aerating air of mould are loop configuration.Other compositions and annexation It is identical with embodiment one.
Embodiment three:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined It is equipped with the front apron 10 and rear baffle 11 of the adjustable tube furnace of flow of aerating air of mould and the through hole of first through hole 13 and second 14 third through-holes being engaged, rotate front apron 10 and rear baffle 11 can adjust air stream in the through hole 14 of first through hole 13 and second Amount.
In present embodiment, by rotate front apron 10 or rear baffle 11 can realize first through hole 13, the second through hole 14 with Misplaced between third through-hole, and then realize the spout flow velocity of the angle for changing air inlet and vortex, by first through hole 13 and the The closing and opening of two through holes 14, to adjust and control the pressure differential of reacting gas and carrier gas, mitigate laminar flow phenomenon, are conducive to shape Into turbulent condition.The distance of air flap and objective table can be adjusted simultaneously, the angle that transports of air inlet/carrier gas, realization can be achieved The inclination of appropriate angle.
Other compositions and annexation are identical with embodiment one.
Embodiment four:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined Between the lateral wall of layer of refractory insulating material 4 and the madial wall of furnace shell 1 of the adjustable tube furnace of flow of aerating air of mould by it is interior extremely It is sequentially provided with refractory masses 3 and adiabator layer outside.Other compositions and annexation are identical with embodiment one.
Embodiment five:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined The first through hole 13 of the adjustable tube furnace of flow of aerating air of mould is aperture tapered bellmouth successively from outside to inside, and first logical The outer aperture D1 in hole 13 is 16mm, and the internal orifice dimension D2 of first through hole 13 is 12mm.Other compositions and annexation and specific implementation Mode one is identical.
Embodiment six:Illustrate present embodiment with reference to Fig. 1 to Fig. 6, a kind of carry described in present embodiment is combined The aperture D3 of second through hole 14 of the adjustable tube furnace of flow of aerating air of mould is 12mm.Other compositions and annexation with it is specific Embodiment one is identical.
It is described above, only it is preferred embodiment of the present utility model, not makees any formal to the utility model Limitation, although the utility model is disclosed above with preferred embodiment, but is not limited to the utility model, any ripe Professional and technical personnel is known, is not being departed from the range of technical solutions of the utility model, when in the technology using the disclosure above Hold the equivalent embodiment made a little change or be modified to equivalent variations, as long as being without departing from technical solutions of the utility model Hold, according to technical spirit of the present utility model, within spirit of the present utility model and principle, what above example was made appoints What simple modification, equivalent substitution and improvement etc., still falls within the protection domain of technical solutions of the utility model.

Claims (6)

1. a kind of adjustable tube furnace of flow of aerating air with assembling die, it include furnace shell (1), layer of refractory insulating material (4), First electrode (5), second electrode (6), thermocouple (7) and multiple electrical bars (12), layer of refractory insulating material (4) are arranged on furnace shell (1) in, multiple electrical bars (12) are along the circumferential direction uniformly inserted into layer of refractory insulating material (4), first electrode (5), the second electricity Pole (6), thermocouple (7) are connected with electrical bar (12), it is characterised in that:A kind of flow of aerating air with assembling die can The tube furnace of tune also includes front mold (8), rear mold (9), front apron (10) and rear baffle (11), front mold (8) and rear mold (9) it is disposed side by side on from front to back in layer of refractory insulating material (4), front apron (10) is arranged on the outside of front mold (8), rear gear Plate (11) be arranged in the outside of rear mold (9), front mold (8) and rear mold (9) be laid with multiple first through hole (13) and Second through hole (14).
2. the adjustable tube furnace of a kind of flow of aerating air with assembling die according to claim 1, it is characterised in that:Front Plate (10) and rear baffle (11) are loop configuration.
3. the adjustable tube furnace of a kind of flow of aerating air with assembling die according to claim 1, it is characterised in that:Front The third through-hole being engaged with first through hole (13) and the second through hole (14) is equipped with plate (10) and rear baffle (11), before rotation Baffle plate (10) and rear baffle (11) can adjust first through hole (13) and the second through hole (14) interior air mass flow.
4. the adjustable tube furnace of a kind of flow of aerating air with assembling die according to claim 1, it is characterised in that:It is heat-resisting Refractory masses (3) and insulation are sequentially provided between the lateral wall of insulation material layer (4) and the madial wall of furnace shell (1) from the inside to the outside Material layer.
5. the adjustable tube furnace of a kind of flow of aerating air with assembling die according to claim 1, it is characterised in that:First Through hole (13) is aperture tapered bellmouth, and the outer aperture (D1) of first through hole (13) is 16mm, first successively from outside to inside The internal orifice dimension (D2) of through hole (13) is 12mm.
6. the adjustable tube furnace of a kind of flow of aerating air with assembling die according to claim 1, it is characterised in that:Second The aperture (D3) of through hole (14) is 12mm.
CN201621404270.XU 2016-12-20 2016-12-20 A kind of adjustable tube furnace of flow of aerating air with assembling die Expired - Fee Related CN206467288U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621404270.XU CN206467288U (en) 2016-12-20 2016-12-20 A kind of adjustable tube furnace of flow of aerating air with assembling die

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621404270.XU CN206467288U (en) 2016-12-20 2016-12-20 A kind of adjustable tube furnace of flow of aerating air with assembling die

Publications (1)

Publication Number Publication Date
CN206467288U true CN206467288U (en) 2017-09-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621404270.XU Expired - Fee Related CN206467288U (en) 2016-12-20 2016-12-20 A kind of adjustable tube furnace of flow of aerating air with assembling die

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108490114A (en) * 2018-01-19 2018-09-04 天津大学 Bionical gas chamber for hand-hold electric nasus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108490114A (en) * 2018-01-19 2018-09-04 天津大学 Bionical gas chamber for hand-hold electric nasus

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170905

Termination date: 20181220

CF01 Termination of patent right due to non-payment of annual fee