CN106637137A - High-efficiency and energy-saving zinc selenide vapor deposition furnace - Google Patents
High-efficiency and energy-saving zinc selenide vapor deposition furnace Download PDFInfo
- Publication number
- CN106637137A CN106637137A CN201710018736.5A CN201710018736A CN106637137A CN 106637137 A CN106637137 A CN 106637137A CN 201710018736 A CN201710018736 A CN 201710018736A CN 106637137 A CN106637137 A CN 106637137A
- Authority
- CN
- China
- Prior art keywords
- furnace body
- energy
- zinc selenide
- gaseous phase
- phase deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
- C23C16/306—AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te
Abstract
The invention discloses a high-efficiency and energy-saving zinc selenide vapor deposition furnace which comprises a furnace body. The furnace body is provided with a reaction gas inlet pipeline. The furnace body communicates with a tail gas processing system. A gas distribution device is arranged in the furnace body and comprises an inner barrel and an outer barrel. The inner barrel is sleeved with the outer barrel. A closed cavity is formed between the inner barrel and the outer barrel. A spiral guide plate which is spiral downwards is arranged in the cavity. The reaction gas inlet pipeline communicates with the upper portion of the cavity. The inner barrel is provided with a plurality of vent holes. Compared with the air nozzle direct-jet mode in the prior art, the airflow distribution of reaction gas is more uniform, the deposition quality is improved, meanwhile, waste of the reaction gas is reduced, and the utilization rate of resources is increased.
Description
Technical field
The present invention relates to a kind of zinc selenide synthesizer, more particularly to a kind of energy-efficient zinc selenide gaseous phase deposition stove.
Background technology
Zinc selenide (ZnSe) material is a kind of polycrystalline material of yellow transparent, and crystalline particle size is about 70 μm, printing opacity model
Enclose 0.5-15 μm.The zinc selenide synthesized by chemical vapor deposition (CVD) method is substantially not present Impurity Absorption, scattering loss pole
It is low.Due to the absorption very little to 10.6 mum wavelength light, therefore become making high power CO2The head of optics in Optical Maser System
Material selection.In addition it is also the material commonly used in different optical systems in its whole transmission region.
Chemical vapor deposition (CVD) is, using chemical vapor deposition principle, the material for participating in chemical reaction to be heated into one
Determine technological temperature, they are caused into reaction zone reactive deposition with the method for inert gas current-carrying, generate solid matter.In order to obtain
Technological requirement, this deposition process generally requires continuous work two days or so, in order to preferably prepare high-quality product, deposition ring
Border requires to be carried out under very clean environment.
Wherein zinc selenide preparation process is put into cylindrical shape high temperature positive evaporates the circular vessels crucible of housing bottom
Raw material zinc is heated into steam, is put into selenium in another circular vessels crucible and is heated into steam, is transported to temperature as carrier with Ar high
In 950 DEG C of reative cell, the selenium steam entered into reative cell and zinc fume start to realize gas phase reaction：Zn+Se=ZnSe.
Technical literature in prior art with regard to vapour deposition is also more, such as Application No. 201410040254.6 send out
Bright patent discloses a kind of chemical vapor depsotition equipment, it include housing, reaction system and positioned at housing and reaction system it
Between heating element heater, be provided with reaction system in the inside of housing, reaction system includes feedstock supply unit and reative cell, in raw material
The inner walls of feeding mechanism and reative cell are provided with heating element heater, and housing includes shell body and door, and shell body and door enclose jointly
Synthesize an inner chamber, the inner chamber is rectangular shape, and the door can open wide or close a face of the inner chamber.Application number
Utility model patent for 201521042165.1 discloses a kind of chemical vapor deposition unit, and it includes heating furnace, heating furnace
With closed burner hearth and the calandria for being arranged on burner hearth periphery, burner hearth middle part is provided with thermocouple, and burner hearth has gas access
And gas vent.
But, existing gaseous phase deposition stove is all that reacting gas is passed through by the way of air nozzle directly sprays, this side
Formula causes reacting gas air flow method uneven, so as to cause deposition quality poor, simultaneously because air-flow arches larger, causes part
Air-flow is directly discharged by outlet and wastes portion gas, and environmental pollution is serious.
The content of the invention
It is an object of the invention to：For the problem that prior art is present, there is provided a kind of energy-efficient zinc selenide gas phase is sunk
Product stove, can make reacting gas air flow method uniform, improve deposition quality, reduce reacting gas and waste.
To achieve these goals, the technical solution used in the present invention is：
A kind of energy-efficient zinc selenide gaseous phase deposition stove, including furnace body, the furnace body is provided with reacting gas air inlet
Pipeline, the furnace body is connected with exhaust treatment system, and distribution device in gas-fluid, the gas distribution dress are provided with the furnace body
Put including inner core and outer tube, the inner core is set in the inside of outer tube and the cavity of sealing is formed between inner core and outer tube, institute
The spiral deflector that downward spiral is provided with cavity is stated, the reacting gas admission line is connected with the top of cavity, described
Inner core is provided with some passages.
Used as the preferred version of the present invention, the spiral deflector is connected on outer tube, and the width of spiral deflector
It is gradually reduced from top to bottom.
Used as the preferred version of the present invention, the inner core inwall is provided with curved baffle, and the curved baffle is along passage
Lower edge is arranged and the opening of curved baffle tilts upward setting.
Used as the preferred version of the present invention, the width of the curved baffle is gradually reduced from top to bottom.
As the preferred version of the present invention, electrical heating wire is provided with the furnace body, the electrical heating wire includes first paragraph
Heater strip, second segment heater strip and the 3rd section of heater strip.
Used as the preferred version of the present invention, the furnace body is additionally provided with insulating.
Used as the preferred version of the present invention, the exhaust treatment system includes deduster, the water filtering device being sequentially communicated
And pumped vacuum systems.
The beneficial effects of the present invention is：
In use, reacting gas Zn and Se enters into gas distribution dress to the present invention by reacting gas admission line
In putting, passage is provided with along on cavity from top to bottom screw, and inner core in the presence of spiral deflector, is reacted
Gas Zn and Se are reacted by passage into inside inner core；Because the present invention is using air-guide type from top to bottom, gas
, more than the gas flow of distribution device in gas-fluid hypomere, reacting gas Zn and Se are in cavity for the gas flow of body distribution apparatus epimere
Uniform mixing, relative to the mode that air nozzle in prior art directly sprays, reacting gas air flow method is more uniform, improves
Deposition quality, while reducing the waste of reacting gas, improves the utilization rate of resource.
Description of the drawings
Fig. 1 is the structural representation of the energy-efficient zinc selenide gaseous phase deposition stove of the present invention；
Fig. 2 is the structural representation of distribution device in gas-fluid part in the present invention.
Mark in figure：1- furnace bodies, 2- reacting gas admission lines, 3- inner cores, 4- outer tube, 5- cavitys, 6- spiral stream guidances
Plate, 7- passages, 8- curved baffles, 9- dedusters, 10- water filtering devices, 11- pumped vacuum systems.
Specific embodiment
In order that the object, technical solutions and advantages of the present invention are clearer, below in conjunction with accompanying drawing to the excellent of the present invention
Embodiment is selected to be described in detail.
Embodiment 1
A kind of energy-efficient zinc selenide gaseous phase deposition stove, including furnace body 1, the furnace body 1 is provided with reacting gas and enters
Feed channel 2, the furnace body 1 is connected with exhaust treatment system, and in the furnace body 1 distribution device in gas-fluid, the gas are provided with
Distribution apparatus includes inner core 3 and outer tube 4, and the inner core 3 is set between the inside of outer tube 4 and inner core 3 and outer tube 4 and forms close
The spiral deflector 6 of downward spiral, the reacting gas admission line 2 and cavity 5 are provided with the cavity 5 of envelope, the cavity 5
Top connection, the inner core 3 is provided with some passages 7.
Zinc and selenium are heated separately into 700-750 DEG C, 300-350 DEG C and are heated into steam, cvd furnace is heated to 900 DEG C, so
After be passed through protectiveness current-carrying gas, reacting gas Zn and Se are entered into distribution device in gas-fluid by reacting gas admission line 2,
Along the screw from top to bottom of cavity 5 in the presence of spiral deflector 6, and reacting gas Zn and Se pass through passage 7
Reacted into inside inner core 3.
Embodiment 2
On the basis of embodiment 1, the spiral deflector 6 is connected on outer tube 4 the present embodiment, and spiral stream guidance
The width of plate 6 is gradually reduced from top to bottom；Because the gas flow of the epimere of cavity 5 is more than the gas flow of the hypomere of cavity 5, therefore
The appropriate width for reducing the hypomere spiral deflector 6 of cavity 5, is easy to improve efficiency.
Embodiment 3
On the basis of embodiment 1, the inwall of the inner core 3 is provided with curved baffle 8, the curved baffle to the present embodiment
8 are arranged and the opening of curved baffle 8 tilts upward setting along the lower edge of passage 7；The width of the curved baffle 8 from top to bottom by
It is decrescence little；Curved baffle 8 pairs has guiding function by passage 7 into the reacting gas of inner core 3, makes the reaction gas in inner core 3
Body distribution is more uniform.
Embodiment 4
The present embodiment is provided with electrical heating wire, the electrical heating wire bag on the basis of embodiment 1 in the furnace body 1
Include first paragraph heater strip, second segment heater strip and the 3rd section of heater strip；The furnace body 1 is additionally provided with insulating.
Embodiment 5
On the basis of embodiment 1, the exhaust treatment system includes the deduster 9, water being sequentially communicated to the present embodiment
Filter 10 and pumped vacuum systems 11.
Finally illustrate, above example is only unrestricted to illustrate technical scheme, although by ginseng
According to the preferred embodiments of the present invention, invention has been described, it should be appreciated by those of ordinary skill in the art that can
To it to make various changes in the form and details, without departing from the present invention that appended claims are limited
Spirit and scope.
Claims (7)
1. a kind of energy-efficient zinc selenide gaseous phase deposition stove, including furnace body, the furnace body is provided with reacting gas air inlet pipe
Road, the furnace body is connected with exhaust treatment system, it is characterised in that：Distribution device in gas-fluid is provided with the furnace body, it is described
Distribution device in gas-fluid includes inner core and outer tube, and the inner core is set in the inside of outer tube and sealing is formed between inner core and outer tube
Cavity, be provided with the spiral deflector of downward spiral in the cavity, the top of the reacting gas admission line and cavity
Connection, the inner core is provided with some passages.
2. energy-efficient zinc selenide gaseous phase deposition stove according to claim 1, it is characterised in that：The spiral deflector connects
It is connected on outer tube, and the width of spiral deflector is gradually reduced from top to bottom.
3. energy-efficient zinc selenide gaseous phase deposition stove according to claim 1, it is characterised in that：Set on the inner core inwall
There is curved baffle, the curved baffle is arranged along passage lower edge and the opening of curved baffle tilts upward setting.
4. energy-efficient zinc selenide gaseous phase deposition stove according to claim 3, it is characterised in that：The width of the curved baffle
Degree is gradually reduced from top to bottom.
5. energy-efficient zinc selenide gaseous phase deposition stove according to claim 1, it is characterised in that：It is provided with the furnace body
Electrical heating wire, the electrical heating wire includes first paragraph heater strip, second segment heater strip and the 3rd section of heater strip.
6. energy-efficient zinc selenide gaseous phase deposition stove according to claim 1, it is characterised in that：The furnace body is additionally provided with
Insulating.
7. the energy-efficient zinc selenide gaseous phase deposition stove according to claim 1 to 6 any one, it is characterised in that：It is described
Exhaust treatment system includes deduster, water filtering device and the pumped vacuum systems being sequentially communicated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710018736.5A CN106637137A (en) | 2017-01-10 | 2017-01-10 | High-efficiency and energy-saving zinc selenide vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710018736.5A CN106637137A (en) | 2017-01-10 | 2017-01-10 | High-efficiency and energy-saving zinc selenide vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106637137A true CN106637137A (en) | 2017-05-10 |
Family
ID=58843593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710018736.5A Pending CN106637137A (en) | 2017-01-10 | 2017-01-10 | High-efficiency and energy-saving zinc selenide vapor deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106637137A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107829078A (en) * | 2018-01-03 | 2018-03-23 | 烟台银河新材料有限公司 | A kind of improved gaseous phase deposition stove |
| CN108165951A (en) * | 2017-12-21 | 2018-06-15 | 清远先导材料有限公司 | The Preparation equipment of zinc sulphide or zinc selenide ball cover |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181845A (en) * | 2011-04-19 | 2011-09-14 | 西安电炉研究所有限公司 | Chemical vapor deposition furnace |
| CN202061405U (en) * | 2011-04-19 | 2011-12-07 | 西安电炉研究所有限公司 | Three-level filtering system for vapor phase deposition furnace |
| JP2012243861A (en) * | 2011-05-17 | 2012-12-10 | Philtech Inc | Film growth device and light-emitting diode |
| US20140106549A1 (en) * | 2009-05-22 | 2014-04-17 | Advanced Technology Materials, Inc. | Low temperature gst process |
| CN205856602U (en) * | 2016-08-16 | 2017-01-04 | 峨眉山市元素新材料科技有限公司 | A kind of energy-efficient formula zinc selenide gaseous phase deposition stove |
-
2017
- 2017-01-10 CN CN201710018736.5A patent/CN106637137A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140106549A1 (en) * | 2009-05-22 | 2014-04-17 | Advanced Technology Materials, Inc. | Low temperature gst process |
| CN102181845A (en) * | 2011-04-19 | 2011-09-14 | 西安电炉研究所有限公司 | Chemical vapor deposition furnace |
| CN202061405U (en) * | 2011-04-19 | 2011-12-07 | 西安电炉研究所有限公司 | Three-level filtering system for vapor phase deposition furnace |
| JP2012243861A (en) * | 2011-05-17 | 2012-12-10 | Philtech Inc | Film growth device and light-emitting diode |
| CN205856602U (en) * | 2016-08-16 | 2017-01-04 | 峨眉山市元素新材料科技有限公司 | A kind of energy-efficient formula zinc selenide gaseous phase deposition stove |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108165951A (en) * | 2017-12-21 | 2018-06-15 | 清远先导材料有限公司 | The Preparation equipment of zinc sulphide or zinc selenide ball cover |
| CN107829078A (en) * | 2018-01-03 | 2018-03-23 | 烟台银河新材料有限公司 | A kind of improved gaseous phase deposition stove |
| CN107829078B (en) * | 2018-01-03 | 2019-06-21 | 烟台银河新材料有限公司 | A kind of improved gaseous phase deposition stove |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
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Application publication date: 20170510 |