CN206459410U - A kind of cooling system of Vacuum coating device - Google Patents
A kind of cooling system of Vacuum coating device Download PDFInfo
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- CN206459410U CN206459410U CN201720134135.6U CN201720134135U CN206459410U CN 206459410 U CN206459410 U CN 206459410U CN 201720134135 U CN201720134135 U CN 201720134135U CN 206459410 U CN206459410 U CN 206459410U
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- exchangers
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- coating device
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Abstract
The utility model discloses a kind of cooling system of Vacuum coating device, including heat-exchangers of the plate type, threeway automatic transfer valve and water heater, heat-exchangers of the plate type connects cooling water inlet pipe and CWR, the first interface of threeway automatic transfer valve and the left end of heat-exchangers of the plate type are connected, the second interface of threeway automatic transfer valve and the right-hand member of heat-exchangers of the plate type are connected, 3rd interface of threeway automatic transfer valve is connected with water heater, thermometer and water pressure gauge are connected with the cooling water pipeline that the water side of water heater is connected again, cooling water pipeline after water pressure gauge connects the negative pole part of Vacuum coating device, ion chamber and chamber.The cooling water pipeline and the right-hand member of heat-exchangers of the plate type being connected with cooling water pipeline after ion chamber and chamber after booster water pump, booster water pump are connected.The utility model can optimize cooling system, so as to save the process time, improve production efficiency, control the generation of condensed water, prevent electric hidden danger, it is ensured that equipment safety.
Description
Technical field
The utility model is related to coating technology field, more particularly to a kind of cooling system of Vacuum coating device.
Background technology
At present, general coating process can be divided into standby SBR-vacuumizing-and heat-etched clean-coating, i.e.,
In whole process, Vacuum coating device carries out cooling work using single cooling system.The cavity cooling water of Vacuum coating device
The height of temperature can directly affect the speed that chamber is vacuumized, and the cavity cooling water of low temperature is easily caused the air in cavity
In hydrone be solidified and attach to housing surface, be solidified and the hydrone that sticks will have a strong impact on the speed that vacuumizes from
And the extension of whole process time is caused, serious waste is formd in time, and due to the rise of environment temperature, low temperature
The cooling water of degree easily produces condensation water condensation to endanger the safety of equipment and produce serious electric hidden danger.
The content of the invention
In order to solve the above technical problems, the purpose of this utility model is to provide a kind of cooling system of Vacuum coating device
System, can optimize cooling system, so as to save the process time, improve production efficiency, control the generation of condensed water, prevent electrically hidden
Suffer from, it is ensured that equipment safety.
To realize above-mentioned technical purpose and the technique effect, the utility model is achieved through the following technical solutions：One
Plant the cooling system of Vacuum coating device, including heat-exchangers of the plate type, threeway automatic transfer valve and water heater, the board-like heat
Exchanger connects cooling water inlet pipe and CWR, and the threeway automatic transfer valve has first interface, second interface
With the 3rd interface, the first interface of the threeway automatic transfer valve and the left end of heat-exchangers of the plate type are connected, and threeway is automatically switched
The second interface of valve and the right-hand member of heat-exchangers of the plate type are connected, and the 3rd interface of threeway automatic transfer valve is connected with water heater,
The cooling water after thermometer and water pressure gauge, water pressure gauge is connected with the cooling water pipeline that the water side of water heater is connected again
It is cold after negative pole part, ion chamber and the chamber of pipeline connection Vacuum coating device, the ion chamber of Vacuum coating device and chamber
But right-hand member of the cooling water pipeline after booster water pump, booster water pump finally with heat-exchangers of the plate type is connected with water lines to connect
Connect.
Further, it is connected with cooling water water intaking valve on the cooling water pipeline after water pressure gauge.
Further, it is connected with cooling water drainage water valve and cold on the cooling water pipeline after the negative pole part of Vacuum coating device
But water back-water valve (BWV).
The beneficial effects of the utility model are：The utility model is by threeway automatic transfer valve by its first interface or second
Interface is opened or closed, so that the conversion between cold cooling water and hot cooling water is controlled, so as to avoid the cavity of low temperature from cooling down
In cavity caused by water atmosphere moisture solidification and wall is sticked, not only increase the speed vacuumized, save
Process time, and ensure that equipment safety, prevent electric hidden danger.Water heater in the utility model can be to cooling
System is heated.In addition, the thermometer in the utility model can be monitored and control to the water temperature of cooling water.
Brief description of the drawings
Fig. 1 is the schematic diagram of the cooling system of the utility model Vacuum coating device.
Embodiment
Preferred embodiment of the present utility model is described in detail below in conjunction with the accompanying drawings, so that advantage of the present utility model
It can be easier to be readily appreciated by one skilled in the art with feature, so as to make protection domain of the present utility model apparent clear and definite
Define.
As shown in figure 1, a kind of cooling system of Vacuum coating device, including heat-exchangers of the plate type 1, threeway automatic transfer valve
2 and water heater 3, the connection cooling water inlet pipe 4 of heat-exchangers of the plate type 1 and CWR 5, the threeway are cut automatically
Valve 2 is changed with first interface 21, the interface 23 of second interface 22 and the 3rd, the first interface 21 of the threeway automatic transfer valve 2 with
The left end connection of heat-exchangers of the plate type 1, the second interface 22 of threeway automatic transfer valve 2 is connected with the right-hand member of heat-exchangers of the plate type 1,
3rd interface 23 of threeway automatic transfer valve 2 is connected with water heater 3, the cooling water pipe that the water side of water heater 3 is connected
The negative pole part that the cooling water pipeline after thermometer 6 and water pressure gauge 7, water pressure gauge 7 connects Vacuum coating device is connected with road again
8th, ion chamber 9 and chamber 10.In the utility model, Vacuum coating device has four negative pole parts.Vacuum coating device from
Be connected with cooling water pipeline after seed cell and chamber cooling water pipeline after booster water pump 11, booster water pump 11 finally with
The right-hand member connection of heat-exchangers of the plate type 1.
Furtherly, it is connected with cooling water water intaking valve 12 on the cooling water pipeline after water pressure gauge 7.
Furtherly, it is connected with cooling water drainage water valve 13 on the cooling water pipeline after the negative pole part 8 of Vacuum coating device
With cooling water back-water valve (BWV) 14.
During work, outside cooling water enters heat-exchangers of the plate type 1,1 pair of heat-exchangers of the plate type by cooling water inlet pipe 4
Cooling water carries out heat exchange process, obtains cold cooling water.The first interface 21 of threeway automatic transfer valve 2 connects with the 3rd interface 23
Logical, cold cooling water is after the heating of water heater 3, and final is negative pole part 8, ion chamber 9 and the chamber 10 of Vacuum coating device
Cooling water is provided, afterwards, cooling water passes through heat-exchangers of the plate type 1 again, and so circulation provides cold cooling water for Vacuum coating device.
When threeway automatic transfer valve 2 the interface 23 of second interface 22 and the 3rd connect when, cooling water without heat-exchangers of the plate type 1, and
It is to be directly entered water heater 3 by threeway automatic transfer valve 2 to be heated, so as to provide heat cooling for Vacuum coating device
Water.
In the course of the work, in standby SBR, by switching three-way automatic transfer valve 2,40 DEG C or so are used
Hot cooling water is cooled down, avoided with this when standby due to temperature reason cause in cavity the solidification of atmosphere moisture and
Wall is sticked.When vacuumizing state, it can also be cooled down by switching three-way automatic transfer valve 2 using 40 DEG C or so of heat
Water is cooled down with this to improve the speed vacuumized.Specifically, 0-200 DEG C of cavity temperature is cooled down using hot cooling water mode,
200-500 DEG C of cavity temperature is cooled down using cold cooling water mode, and the speed vacuumized is improved with this.In etched clean step
In, chamber temp is typically between 400-500 DEG C, so as to be cooled down using cold cooling water.In coating step, chamber temp
Typically also between 400-500 DEG C, therefore also cooled down using cold cooling water.
The utility model controls the conversion between cold cooling water and hot cooling water by threeway automatic transfer valve 2, so as to keep away
Exempt from the solidification of of atmosphere moisture in the cavity caused by the cavity cooling water of low temperature and wall is sticked, not only increase
The speed vacuumized, has been saved the process time, and ensure that equipment safety, has prevented electric hidden danger.In whole system, water adds
Hot device 3 can be heated to cooling system, and thermometer 6 can be monitored and control to the water temperature of cooling water, and water pressure gauge 7 can
So that the hydraulic pressure of cooling water is monitored and controlled.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalent structure or equivalent flow conversion made using the utility model specification and accompanying drawing content, or be directly or indirectly used in
Other related technical fields, are similarly included in scope of patent protection of the present utility model.
Claims (3)
1. a kind of cooling system of Vacuum coating device, it is characterised in that：Including heat-exchangers of the plate type, threeway automatic transfer valve and
Water heater, the heat-exchangers of the plate type connection cooling water inlet pipe and CWR, the threeway automatic transfer valve tool
There are first interface, second interface and the 3rd interface, the first interface of the threeway automatic transfer valve and a left side for heat-exchangers of the plate type
End connection, the second interface of threeway automatic transfer valve and the right-hand member of heat-exchangers of the plate type are connected, and the 3rd of threeway automatic transfer valve the
Interface is connected with water heater, on the cooling water pipeline that the water side of water heater is connected and is connected with thermometer and hydraulic pressure
Cooling water pipeline after table, water pressure gauge connects negative pole part, ion chamber and the chamber of Vacuum coating device, Vacuum coating device
Cooling water pipeline after booster water pump, booster water pump is connected with cooling water pipeline after ion chamber and chamber finally and plate
The right-hand member connection of formula heat exchanger.
2. the cooling system of Vacuum coating device according to claim 1, it is characterised in that：Cooling water after water pressure gauge
Cooling water water intaking valve is connected with pipeline.
3. the cooling system of Vacuum coating device according to claim 1, it is characterised in that：The negative electrode of Vacuum coating device
Cooling water drainage water valve and cooling water back-water valve (BWV) are connected with cooling water pipeline after portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720134135.6U CN206459410U (en) | 2017-02-15 | 2017-02-15 | A kind of cooling system of Vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720134135.6U CN206459410U (en) | 2017-02-15 | 2017-02-15 | A kind of cooling system of Vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206459410U true CN206459410U (en) | 2017-09-01 |
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ID=59694683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720134135.6U Active CN206459410U (en) | 2017-02-15 | 2017-02-15 | A kind of cooling system of Vacuum coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206459410U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468610A (en) * | 2018-11-02 | 2019-03-15 | 上海华力微电子有限公司 | A kind of heat-exchange system of anti-alarm |
-
2017
- 2017-02-15 CN CN201720134135.6U patent/CN206459410U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468610A (en) * | 2018-11-02 | 2019-03-15 | 上海华力微电子有限公司 | A kind of heat-exchange system of anti-alarm |
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