CN206457557U - Magnesium vapor reduces the device of lithium tantalate wafer - Google Patents
Magnesium vapor reduces the device of lithium tantalate wafer Download PDFInfo
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- CN206457557U CN206457557U CN201720135248.8U CN201720135248U CN206457557U CN 206457557 U CN206457557 U CN 206457557U CN 201720135248 U CN201720135248 U CN 201720135248U CN 206457557 U CN206457557 U CN 206457557U
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- boiler tube
- lithium tantalate
- tantalate wafer
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Abstract
A kind of magnesium vapor reduces the device of lithium tantalate wafer, including body of heater, runing rest and vacuum plant, magnesium powder is loaded with the body of heater, the vacuum plant is connected with the body of heater, device of the present utility model is provided with body of heater, interior boiler tube, runing rest and vacuum plant, clamping is carried out to lithium tantalate wafer by runing rest, lithium tantalate wafer is rotated in reduction process, ensure that the magnesium steam steamed uniformly contacts lithium tantalate wafer, further ensure the uniformity of lithium tantalate wafer reduction, vacuumizing to the device of magnesium vapor reduction lithium tantalate wafer is realized by vacuum plant, realize and magnesium powder is gasified, lithium tantalate wafer is reduced as reducing agent using the magnesium steam of generation, greatly improve the uniformity of lithium tantalate wafer reduction, the surface of the interior boiler tube of graphite material is difficult to form oxidation film, the material and reducing agent gas for avoiding interior boiler tube react.
Description
Technical field
The utility model is related to a kind of lithium tantalate wafer reduction apparatus, more particularly to a kind of magnesium vapor reduction lithium tantalate wafer
Device.
Background technology
It is typically to produce lithium tantalate using vertical pulling method in the prior art（LT）Crystal, i.e.,：So that LT crystal in atmosphere or
Grown under anaerobic condition, crystal is generally into colourless or faint yellow, and its resistivity is generally 1 × 1014Ω·cm~1×1015
Ω cm, due to needing to heat lithium tantalate wafer during wave filter is made, because of the stronger heat of lithium tantalate wafer
Electrically, so as to cause electric charge to produce spark in the aggregation of wafer surface, cause the change of surfacial pattern, can further cause
The micro-crack on surface, causes the reduction of yield rate.Further, since the high light transmission rate of this LT crystal, in a photolithographic process, by
In light in the reflection of substrate backside, produce and cause the problem of graphics resolution is reduced.
These problems occurred in being made for wave filter, device proposes new requirement to LT crystal, reduces pyroelectricity
Effect, reduces light transmission rate.For it is such the problem of, typically using reducing agent, the reducing agent such as aluminium, magnesium, carbon is to LT crystal
Reduced, make LiTaO3In lose part oxygen, Ta+5Partially change into Ta+4Or Ta+3, LT crystal resistivity is from 1 × 1014Ω·cm
~1015Ω cm are changed into 1 × 109Ω·cm~1012Ω cm, 1mm chip wavelength 532nm green lights rate decline from 60% ~ 80%
To 10% ~ 20%, the thermoelectricity and the stronger shortcoming of light transmission rate of LT when making wave filter is substantially overcomed.
Prior art typically uses solid reductant, and the mode taken has slurry cladding process, powder burial method etc..Cladding process
Special slurry is used, cost is higher, be by processes such as coating, drying, technological operation requires also higher；Powder is buried
Method, is difficult to accomplish there is Partial wafer after no space, reduction due to burying, uniformity is bad, often needs processing of doing over again.
The content of the invention
In view of this, it is necessary to provide one kind using gas as reducing agent, the preferable magnesium vapor reduction tantalum of reduction uniformity
The device of sour lithium chip.
A kind of magnesium vapor reduces the device of lithium tantalate wafer, including body of heater, interior boiler tube, runing rest and vacuum plant, institute
State provided with the cavity for accommodating the interior boiler tube in body of heater, the interior boiler tube is arranged in the internal cavities of the body of heater, it is described interior
The cavity for being used for containing magnesium powder is provided with boiler tube, length direction of the runing rest along the body of heater, the interior boiler tube is passed through
The body of heater, the inside of the interior boiler tube are through at, the runing rest includes the stake body of clamping lithium tantalate wafer, and rotation branch
Frame can rotate relative to body of heater and interior boiler tube, so that magnesium vapor is uniformly in contact with lithium tantalate wafer every described, and then ensure magnesium
Steam equably reduces all lithium tantalate wafers, and the vacuum plant is connected with the cavity in the interior boiler tube, to pass through
The inner chamber of the interior boiler tube, which is vacuumized, enables the magnesium powder in body of heater to gasify under relatively low heating-up temperature, generates magnesium vapor.
It is preferred that, the body of heater include shell, the shell include cylinder, left end cap, right end cap, the cylinder be one compared with
The hollow cylinder of major diameter, the left end cap, right end cap are fixedly connected with the left end and right-hand member of the cylinder respectively, with it is described
Cylinder collectively forms the shell of a closing, and the interior boiler tube is arranged in the cylinder, and the interior boiler tube includes body, resistance wire
With two boiler tube blind flanges, the body is the hollow cylinder of a small diameter, and the body is coaxially disposed with the cylinder, institute
Stating resistance wire is used to be electrically connected with electric supply installation, so that as heating thermal source, the resistance wire spiral winding is located at the body
Outer wall, with by the temperature in boiler tube in described in the heater riser of the resistance wire, the left and right two ends of the body are respectively with two
The individual boiler tube blind flange is tightly connected, magnesium powder is sprinkled into the interior boiler tube so that the magnesium powder by it is thermal evaporation when generate
Magnesium vapor is distributed in the interior boiler tube.
It is preferred that, the body of heater also includes heat-insulation layer, the heat-insulation layer be clamped in the inwall of the cylinder with it is described interior
Hollow thick cylinder between the outer wall of boiler tube, the shape of the side outer wall of the heat-insulation layer is mutually fitted with the inwall of the cylinder
Match somebody with somebody, so that the cylinder is set in the outside of the heat-insulation layer, the heat-insulation layer offers the interior boiler tube pilot hole of left and right insertion,
The interior boiler tube is penetrated in the interior boiler tube pilot hole, and the inwall of the outer wall of the interior boiler tube and the interior boiler tube pilot hole is fixed
Connection, to prevent heat to be scattered and disappeared from the outside of the resistance wire of coiling.
It is preferred that, the body and the boiler tube blind flange are made by graphite, to ensure the body and the stove
Pipe flange lid avoids that the body and the boiler tube method is made on the premise of preferable heat resistance and heat conductivility in a vacuum
The oxide-film that the surface of the material of orchid lid is formed in atmosphere reacts with reducing agent gas.
It is preferred that, the left and right ends of the inwall of the body are equipped with seal pipe internal thread, the company of the boiler tube blind flange
Socket part is correspondingly arranged on seal pipe external screw thread, seal pipe external screw thread and the pipe that the boiler tube blind flange passes through the connecting portion
Body is tightly connected.
It is preferred that, the vacuum plant includes outer evacuation tube, some outer evacuation branch pipes, some gas distributionbranch pipes, gas distribution pipe, institute
The top that outer evacuation tube is set in parallel in the cylinder is stated, one end of the outer evacuation tube is used to vacuumize driving company with outside
Connect, the other end of the outer evacuation tube is connected respectively with some outer evacuation branch pipes, some outer upper ends for evacuating branch pipe
Tube wall lower vertical with the other end of the outer evacuation tube is connected, and some pipe connection methods are provided with the side wall of the cylinder
Orchid, each pipe connecting flange is all located at one of them described outer underface for evacuating branch pipe, and each pipe connecting flange
It is tightly connected with the outer lower end for evacuating branch pipe one of them described, each gas distributionbranch pipe extends perpendicularly through the pipe successively
Body, the heat-insulation layer, the cylinder, and each gas distributionbranch pipe is all located at the underface of one of them pipe connecting flange,
The upper end outer wall tapping corresponding with the cylinder of each gas distributionbranch pipe is tightly connected, each gas distributionbranch pipe
Upper end all connected with the pipe connecting flange, the lower end outer wall perforate corresponding with the body of each gas distributionbranch pipe
Place is tightly connected, and some gas distributionbranch pipes are vertical with the tube wall upper end of the gas distribution pipe to be connected and connect, the gas distribution pipe
The inside of the body is arranged on along the length direction of the interior boiler tube, the tube wall lower end of the gas distribution pipe offers some suctions
Distance between stomata, and some suction holes is equal, to ensure that magnesium vapor flows evenly through some tantalic acids from bottom to top
The surface of lithium chip.
It is preferred that, the runing rest includes stake body, and the stake body includes two support plates, three clamping posts, institute
It is cylinder to state support plate, and two support plates are oppositely arranged, the two ends of the every clamping post respectively with described in two
Support plate is vertically connected, and equably ring-type is arranged in the card of each support plate for the end of three clamping posts,
The distance being provided with the every clamping post between some clamping slots, some clamping slots is equal, the width of the clamping slot
Equal with the thickness of lithium tantalate wafer to be restored, the edge of each lithium tantalate wafer is caught in three clamping posts simultaneously
In three clamping slots facing each other of upper position, with lithium tantalate wafer described in stable holding.
It is preferred that, the runing rest also includes reducing motor, two support shafts, wherein one end of a support shaft
It is vertical with the center of circle of the card of a support plate to be connected, to support the stake body, and avoid the stake body bias rotation
Turn, and then ensure the lithium tantalate wafer thermally equivalent, wherein the other end and the boiler tube of left end of support shaft
Blind flange is vertically tightly connected, and the boiler tube blind flange rotation of the wherein one support shaft energy opposing left, another
One end of support shaft described in root is vertical with the center of circle of the card of support plate another described to be connected, another support shaft it is another
One end passes perpendicularly through the boiler tube blind flange, the right end cap of right-hand member successively, and coaxial with the motor shaft of the reducing motor
It is fixedly connected, the other end of another support shaft is also sealed with the corresponding tapping of the boiler tube blind flange of right-hand member to be connected
Connect, the reducing motor is fixedly connected with the right end cap, it is described to be driven by the rotation of the motor shaft of the reducing motor
Some lithium tantalate wafer rotating Vortexes of clamping on support shaft, the stake body and stake body, and then ensure each tantalic acid
Lithium chip is equably contacted with the magnesium vapor steamed on the downside of the inside of the interior boiler tube, improves the uniformity of reduction.
Device of the present utility model is provided with body of heater, interior boiler tube, runing rest and vacuum plant, by runing rest to tantalum
Sour lithium chip carries out clamping, and lithium tantalate wafer is rotated in reduction process, it is ensured that it is brilliant that the magnesium vapor steamed uniformly contacts lithium tantalate
Piece, further ensures the uniformity of lithium tantalate wafer reduction, is realized by vacuum plant and lithium tantalate crystalline substance is reduced to magnesium vapor
Vacuumizing for the device of piece, realizes and magnesium powder is gasified, by the use of generation magnesium vapor as reducing agent to lithium tantalate wafer
Reduced, greatly improve the uniformity of lithium tantalate wafer reduction, the surface of the interior boiler tube of graphite material is difficult to form oxidation
Thing film, it is to avoid the material of interior boiler tube reacts with reducing agent gas.
Brief description of the drawings
Fig. 1 is the structural representation of the device of the magnesium vapor reduction lithium tantalate wafer.
Fig. 2 is the structural representation of the stake body.
In figure：Body of heater 10, shell 11, cylinder 110, left end cap 111, right end cap 112, pipe connecting flange 113, heat-insulation layer 12,
Interior boiler tube 20, body 21, resistance wire 22, boiler tube blind flange 23, magnesium powder 24, runing rest 30, stake body 31, support plate 311, dress
Press from both sides post 312, clamping slot 3120, reducing motor 32, support shaft 33, vacuum plant 40, outer evacuation tube 41, outer evacuation branch pipe 42, cloth
Gas branch pipe 43, gas distribution pipe 44, lithium tantalate wafer 50.
Embodiment
In order to illustrate more clearly of the technical scheme of the utility model embodiment, it will use below required in embodiment
Accompanying drawing be briefly described, it should be apparent that, drawings in the following description are some embodiments of the present utility model, for this
For the those of ordinary skill of field, on the premise of not paying creative work, it can also obtain other according to these accompanying drawings
Accompanying drawing.
Fig. 1 is refer to, a kind of device of magnesium vapor reduction lithium tantalate wafer includes body of heater 10, interior boiler tube 20, runing rest
30 and vacuum plant 40, the cavity provided with boiler tube 20 in accommodating in body of heater 10, interior boiler tube 20 is arranged on the internal cavities of body of heater 10
It is interior, it is provided with the cavity for being used for containing magnesium powder 24 in interior boiler tube 20, runing rest 30 is along body of heater 10, the length direction of interior boiler tube 20
Through the inside of body of heater 10, interior boiler tube 20, runing rest 30 includes the stake body 31 of clamping lithium tantalate wafer 50, and rotation branch
Frame 30 can rotate relative to body of heater 10 and interior boiler tube 20, so that magnesium vapor is uniformly in contact with every lithium tantalate wafer 50, Jin Erbao
Card magnesium vapor equably reduces all lithium tantalate wafers 50, and vacuum plant 40 is connected with the cavity in interior boiler tube 20, with by right
The inner chamber of interior boiler tube 20, which is vacuumized, enables the magnesium powder in body of heater to gasify under relatively low heating-up temperature, generates magnesium vapor, and avoid
Air in body of heater 10 disturbs the progress of reduction reaction, it is thus also avoided that the temperature rising of the inner chamber of body of heater 10 is too fast to make lithium tantalate brilliant
Piece 50 is damaged by thermal shock.
Further, body of heater 10 includes shell 11, and the shell includes cylinder 110, left end cap 111, right end cap 112, cylinder
110 be a larger-diameter hollow cylinder, and left end cap 111, right end cap 112 are fixed with the left end and right-hand member of cylinder 110 respectively to be connected
Connect, to collectively form the shell of a closing with cylinder 110, interior boiler tube 20 is arranged in cylinder 110, interior boiler tube 20 includes body
21st, resistance wire 22 and two boiler tube blind flanges 23, body 21 are the hollow cylinder of a small diameter, and body 21 and cylinder 110 are same
Axle is set, and resistance wire 22 is used to be electrically connected with electric supply installation, so that as heating thermal source, the spiral winding of resistance wire 22 is located at body 21
Outer wall, with by the temperature in boiler tube 20 in the heater riser of resistance wire 22, the left and right two ends of body 21 respectively with two stoves
Pipe flange lid 23 is tightly connected, and magnesium powder 24 is sprinkled into interior boiler tube 20 so that magnesium powder 24 by it is thermal evaporation when the magnesium vapor that generates point
Cloth is in interior boiler tube 20.
Further, body of heater 10 also includes heat-insulation layer 12, and heat-insulation layer 12 is the inwall and interior boiler tube 20 for being clamped in cylinder 110
Hollow thick cylinder between outer wall, the shape of the side outer wall of heat-insulation layer 12 is adapted with the inwall of cylinder 110, so that cylinder
110 are set in the outside of heat-insulation layer 12, and heat-insulation layer 12 offers the interior boiler tube pilot hole of left and right insertion, and interior boiler tube 20 penetrates described
In interior boiler tube pilot hole, the outer wall of interior boiler tube 20 is fixedly connected with the inwall of the interior boiler tube pilot hole, to prevent heat from disk
Around resistance wire 22 outside scatter and disappear.
Further, body 21 and boiler tube blind flange 23 are made by graphite, to ensure body 21 and boiler tube blind flange 23
Avoid being made the material of body 21 and boiler tube blind flange 23 on the premise of preferable heat resistance and heat conductivility in a vacuum
The oxide-film that surface is formed in atmosphere reacts with reducing agent gas.
Further, the left and right ends of the inwall of body 21 are equipped with seal pipe internal thread, the connecting portion of boiler tube blind flange 23
Seal pipe external screw thread is correspondingly arranged on, boiler tube blind flange 23 is sealed by the seal pipe external screw thread of the connecting portion with body 21 to be connected
Connect, the removable mode of being tightly connected facilitates the magnesium powder 24 in interior boiler tube 20 and the handling of lithium tantalate wafer 50.
Further, vacuum plant 40 includes outer evacuation tube 41, some outer evacuation branch pipes 42, some gas distributionbranch pipes 43, gas distribution
Pipe 44, outer evacuation tube 41 is set in parallel in the top of cylinder 110, and one end of outer evacuation tube 41 is used to vacuumize driving company with outside
Connect, the other end of outer evacuation tube 41 with it is some it is outer evacuation branch pipes 42 be connected respectively, it is some it is outer evacuate branch pipes 42 upper ends with outside
Some pipe connecting flanges 113 are provided with the tube wall lower vertical connection of the other end of evacuation tube 41, the side wall of cylinder 110, each
Pipe connecting flange 113 is all located at one of them outer underface for evacuating branch pipe 42, and each pipe connecting flange 113 with outside one of them
The lower end for evacuating branch pipe 42 is tightly connected, and each gas distributionbranch pipe 43 extends perpendicularly through body 21, heat-insulation layer 12, cylinder 110 successively,
And each gas distributionbranch pipe 43 is all located at the underface of one of pipe connecting flange 113, the upper end outer wall of each gas distributionbranch pipe 43
Tapping corresponding with cylinder 110 is tightly connected, and the upper end of each gas distributionbranch pipe 43 is connected with pipe connecting flange 113, each
The lower end outer wall of gas distributionbranch pipe 43 tapping all corresponding with body 21 is tightly connected, and some gas distributionbranch pipes 43 are and gas distribution pipe
44 tube wall upper end vertically connects and connected, and length direction of the gas distribution pipe 44 along interior boiler tube 20 is arranged on the inside of body 21,
The distance that the tube wall lower end of the gas distribution pipe 44 is offered between some suction holes, and some suction holes is equal, to ensure magnesium
Steam flows evenly through the surface of some lithium tantalate wafers 50 from bottom to top.
Further, Fig. 2 is refer to, the runing rest 30 includes stake body 31, and stake body 31 includes two support plates
311st, three clamping posts 312, support plate 311 is cylinder, and two support plates 311 are oppositely arranged, the two ends of every clamping post 312
It is respectively vertical with two support plates 311 to be connected, and equably ring-type is arranged on each support plate for the end of three clamping posts 312
In 311 card, the distance being provided with every clamping post 312 between some clamping slots 3120, some clamping slots 3120 is equal, dress
The width of clip slot 3120 is equal with the thickness of lithium tantalate wafer 50 to be restored, and the edge of each lithium tantalate wafer 50 is caught in simultaneously
On three clamping posts 312 in three clamping slots 3120 facing each other of position, with stable holding lithium tantalate wafer 50.
Further, runing rest 30 also includes reducing motor 32, two support shafts 33, wherein support shaft 33
One end is vertical with the center of circle of the card of a support plate 311 to be connected, and to support the stake body 31, and avoids stake body 31 eccentric
Rotation, and then ensure the thermally equivalent of lithium tantalate wafer 50, wherein the other end and the boiler tube blind flange of left end of support shaft 33
23 are vertically tightly connected, and the boiler tube blind flange 23 of the wherein one energy opposing left of support shaft 33 rotates, another support shaft
33 one end is vertical with the center of circle of the card of another support plate 311 to be connected, and the other end of another support shaft 33 is vertical successively
Boiler tube blind flange 23, right end cap 112 through right-hand member, and be fixedly and coaxially connected with the motor shaft of reducing motor 32, another branch
Support corresponding tapping of the other end of axle 33 also with the boiler tube blind flange 23 of right-hand member to be tightly connected, reducing motor 32 and right end cap
112 are fixedly connected, and are filled with being driven by the rotation of the motor shaft of reducing motor 32 on support shaft 33, stake body 31 and stake body 31
The rotating Vortex of some lithium tantalate wafers 50 of folder, as illustrated by the arrows in fig. 1, and then ensures each lithium tantalate wafer 50 equably
Contacted with the magnesium vapor steamed on the downside of the inside of interior boiler tube 20, improve the uniformity of reduction.
The course of work of the device of the magnesium vapor reduction lithium tantalate wafer is described below：Dismantle right end cap 112 and right-hand member
Boiler tube blind flange 23, the magnesium powder after drying is uniformly sprinkled into the bottom in interior boiler tube 21, will cleaning and dried lithium tantalate
The clamping of chip 50 enters in stake body 31, and wherein one clamping post 312 is first dismantled down during clamping, and all lithium tantalates to be restored are brilliant
Piece 50 one by one clamping enter the position of remaining two clamping post 312 just to some clamping slots 3120 in, then will be under dismounting described in
Clamping post 213 is installed between two support plates 311, and the runing rest 30 that clamping has lithium tantalate wafer is installed into interior boiler tube 20
It is interior, the boiler tube blind flange 23 and right end cap 112 of right-hand member are installed, start vacuum plant 40, when the vacuum in interior boiler tube 20 reaches
During predetermined value, resistance wire 22 is powered, the temperature in lifting in boiler tube 20 is warming up to 450 DEG C ~ 520 DEG C, the speed of heating is little
In 50 DEG C/h, 0.5 ~ 2h is incubated, so that some lithium tantalate wafers 50 are uniformly in contact with magnesium vapor, and then are equably reduced, is stopped
Only to the energization of resistance wire 22, so that the temperature in interior boiler tube 20 is gradually reduced, when the temperature in interior boiler tube 20 is less than 100 DEG C
When, vacuum plant 40 is closed, it is middle out of interior boiler tube after the air pressure in stove is equal with the external world to take out runing rest 30, from rotation branch
The lithium tantalate wafer 50 after all reduction is removed on frame 30.
Claims (8)
1. a kind of magnesium vapor reduces the device of lithium tantalate wafer, it is characterised in that：Including body of heater, interior boiler tube, runing rest and true
Provided with the cavity for accommodating the interior boiler tube in empty device, the body of heater, the interior boiler tube is arranged on the internal cavities of the body of heater
It is interior, the cavity for being used for containing magnesium powder, length of the runing rest along the body of heater, the interior boiler tube are provided with the interior boiler tube
Direction is spent through the inside of the body of heater, the interior boiler tube, and the runing rest includes the stake body of clamping lithium tantalate wafer,
And runing rest can rotate relative to body of heater and interior boiler tube, so that magnesium vapor enters uniformly in contact with lithium tantalate wafer every described
And ensureing that magnesium vapor equably reduces all lithium tantalate wafers, the vacuum plant connects with the cavity in the interior boiler tube
It is logical, the magnesium powder in body of heater is gasified under relatively low heating-up temperature to be vacuumized by the inner chamber to the interior boiler tube, generate
Magnesium vapor.
2. magnesium vapor as claimed in claim 1 reduces the device of lithium tantalate wafer, it is characterised in that：The body of heater includes outer
Shell, the shell include cylinder, left end cap, right end cap, the cylinder be a larger-diameter hollow cylinder, the left end cap,
Right end cap is fixedly connected with the left end and right-hand member of the cylinder respectively, to collectively form the shell of a closing, institute with the cylinder
State interior boiler tube to be arranged in the cylinder, the interior boiler tube includes body, resistance wire and two boiler tube blind flanges, the body is
The hollow cylinder of one small diameter, the body is coaxially disposed with the cylinder, and the resistance wire is used for electrical with electric supply installation
Connection, so that as heating thermal source, the resistance wire spiral winding is located at the outer wall of the body, to pass through the heating of the resistance wire
The temperature in the interior boiler tube is lifted, the left and right two ends of the body are tightly connected with two boiler tube blind flanges respectively,
Be sprinkled into magnesium powder in the interior boiler tube so that the magnesium powder by it is thermal evaporation when the magnesium vapor that generates be distributed in the interior boiler tube.
3. magnesium vapor as claimed in claim 2 reduces the device of lithium tantalate wafer, it is characterised in that：The body of heater also includes protecting
Warm layer, the heat-insulation layer is the hollow thick cylinder being clamped between the outer wall of the inwall of the cylinder and the interior boiler tube, institute
The shape for stating the side outer wall of heat-insulation layer is adapted with the inwall of the cylinder, so that the cylinder is set in the heat-insulation layer
Outside, the heat-insulation layer offers the interior boiler tube pilot hole of left and right insertion, and the interior boiler tube is penetrated in the interior boiler tube pilot hole,
The outer wall of the interior boiler tube is fixedly connected with the inwall of the interior boiler tube pilot hole, to prevent the resistance wire of the heat from coiling
Outside scatter and disappear.
4. magnesium vapor as claimed in claim 3 reduces the device of lithium tantalate wafer, it is characterised in that：The body and the stove
Pipe flange lid is made by graphite, with ensure the body and the boiler tube blind flange in a vacuum preferable heat resistance and
The oxygen for avoiding the surface that the material of the body and the boiler tube blind flange is made to be formed in atmosphere on the premise of heat conductivility
Change film to react with reducing agent gas.
5. magnesium vapor as claimed in claim 3 reduces the device of lithium tantalate wafer, it is characterised in that：The inwall of the body
Left and right ends are equipped with seal pipe internal thread, and the connecting portion of the boiler tube blind flange is correspondingly arranged on seal pipe external screw thread, described
Boiler tube blind flange is tightly connected by the seal pipe external screw thread of the connecting portion with the body.
6. magnesium vapor as claimed in claim 3 reduces the device of lithium tantalate wafer, it is characterised in that：The vacuum plant includes
Outer evacuation tube, some outer evacuation branch pipes, some gas distributionbranch pipes, gas distribution pipe, the outer evacuation tube are set in parallel in the cylinder
Top, one end of the outer evacuation tube is used to vacuumize drive connection, the other end of the outer evacuation tube and some institutes with outside
State it is outer evacuation branch pipe connect respectively, it is some it is described it is outer evacuate branch pipes upper ends with the tube wall of the other end of the outer evacuation tube
Side is vertically connected, and some pipe connecting flanges are provided with the side wall of the cylinder, and each pipe connecting flange is all located at one of them
The outer underface for evacuating branch pipe, and each pipe connecting flange and the outer lower end sealing for evacuating branch pipe one of them described
Connection, each gas distributionbranch pipe extends perpendicularly through the body, the heat-insulation layer, the cylinder, and each cloth successively
Gas branch pipe is all located at the underface of one of them pipe connecting flange, the upper end outer wall and the cylinder of each gas distributionbranch pipe
The corresponding tapping of body is tightly connected, and the upper end of each gas distributionbranch pipe is connected with the pipe connecting flange, each described
The lower end outer wall of gas distributionbranch pipe tapping all corresponding with the body is tightly connected, some gas distributionbranch pipes with it is described
The tube wall upper end of gas distribution pipe vertically connects and connected, and length direction of the gas distribution pipe along the interior boiler tube is arranged on the pipe
The inside of body, the distance that the tube wall lower end of the gas distribution pipe is offered between some suction holes, and some suction holes is equal, with
Ensure that magnesium vapor flows evenly through the surface of some lithium tantalate wafers from bottom to top.
7. magnesium vapor as claimed in claim 3 reduces the device of lithium tantalate wafer, it is characterised in that：The runing rest includes
Stake body, the stake body includes two support plates, three clamping posts, and the support plate is cylinder, two support plates
It is oppositely arranged, the two ends of the every clamping post are respectively vertical with two support plates to be connected, and three clamping posts
Equably ring-type is arranged in the card of each support plate for end, be provided with some clampings on the every clamping post
Distance between groove, some clamping slots is equal, and the width of the clamping slot is equal with the thickness of lithium tantalate wafer to be restored,
The edge of each lithium tantalate wafer is caught in position three clamping slots facing each other on three clamping posts simultaneously
It is interior, with lithium tantalate wafer described in stable holding.
8. magnesium vapor as claimed in claim 7 reduces the device of lithium tantalate wafer, it is characterised in that：The runing rest is also wrapped
Reducing motor, two support shafts are included, wherein one end of a support shaft and the center of circle of the card of a support plate are hung down
It is direct-connected to connect, to support the stake body, and avoid the stake body eccentric rotary, and then ensure the lithium tantalate wafer it is uniform by
Heat, wherein the other end of support shaft and the boiler tube blind flange of left end are vertically tightly connected, and wherein one
The boiler tube blind flange rotation of the support shaft energy opposing left, one end of another support shaft and another described branch
The center of circle of the card of support plate is vertically connected, and the other end of another support shaft passes perpendicularly through the boiler tube method of right-hand member successively
Orchid lid, the right end cap, and be fixedly and coaxially connected with the motor shaft of the reducing motor, the other end of another support shaft
Corresponding tapping also with the boiler tube blind flange of right-hand member is tightly connected, and the reducing motor is fixed with the right end cap to be connected
Connect, to pass through clamping on the rotation drive support shaft of the motor shaft of the reducing motor, the stake body and stake body
Some lithium tantalate wafer rotating Vortexes, so ensure each lithium tantalate wafer equably with from the inside of the interior boiler tube
The magnesium vapor contact that downside is steamed, improves the uniformity of reduction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720135248.8U CN206457557U (en) | 2017-02-15 | 2017-02-15 | Magnesium vapor reduces the device of lithium tantalate wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720135248.8U CN206457557U (en) | 2017-02-15 | 2017-02-15 | Magnesium vapor reduces the device of lithium tantalate wafer |
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| Publication Number | Publication Date |
|---|---|
| CN206457557U true CN206457557U (en) | 2017-09-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720135248.8U Withdrawn - After Issue CN206457557U (en) | 2017-02-15 | 2017-02-15 | Magnesium vapor reduces the device of lithium tantalate wafer |
Country Status (1)
| Country | Link |
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| CN (1) | CN206457557U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757350A (en) * | 2017-02-15 | 2017-05-31 | 宁夏钜晶源晶体科技有限公司 | Magnesium vapor reduces the device of lithium tantalate wafer |
-
2017
- 2017-02-15 CN CN201720135248.8U patent/CN206457557U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757350A (en) * | 2017-02-15 | 2017-05-31 | 宁夏钜晶源晶体科技有限公司 | Magnesium vapor reduces the device of lithium tantalate wafer |
| CN106757350B (en) * | 2017-02-15 | 2023-06-09 | 宁夏钜晶源晶体科技有限公司 | Device for reducing lithium tantalate wafer by magnesium vapor |
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