CN206444410U - Transformation reclaims hydrogen adsorption tower - Google Patents
Transformation reclaims hydrogen adsorption tower Download PDFInfo
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- CN206444410U CN206444410U CN201720050980.5U CN201720050980U CN206444410U CN 206444410 U CN206444410 U CN 206444410U CN 201720050980 U CN201720050980 U CN 201720050980U CN 206444410 U CN206444410 U CN 206444410U
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- adsorption tower
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Abstract
The utility model provides a kind of transformation and reclaims hydrogen adsorption tower.The transformation, which reclaims hydrogen adsorption tower, includes adsorption tower, adsorbent bed, adsorbent and potential device, the adsorbent is located at described adsorbent bed, it is described adsorbent bed located at the adsorption tower, the potential device is located at the adsorption tower, the pressure regulation process that the potential device is adsorbed in the adsorption tower, presses and connect suction.Transformation of the present utility model reclaims hydrogen adsorption tower and separates and recovers hydrogen from polysilicon or trichlorosilane tail gas in pressure-variable adsorption mode, pressure requirements reduction to raw material tail gas, the rate of recovery to hydrogen can reach more preferably level, it is applicable density of hydrogen and pressure is wider, economic benefit and environmental benefit is also even more ideal.
Description
Technical field
The utility model is related to field of chemical equipment, and more particularly to a kind of transformation reclaims hydrogen adsorption tower.
Background technology
Under the background that society now greatly develops new energy substitution traditional energy, polysilicon, trichlorosilane industry are gradually
By popular and social cognition, and rapidly become the focus of attention.But will be produced in its production process main hydrogen, hydrogen chloride,
The process tail gas of the components such as trichlorosilane.Due to wherein containing chlorosilane composition, belong to heavy contaminant, can not be straight without processing
Run in and put or hydrogen reuse.
Hydrogen chloride, the chlorosilane composition in tail gas, the method that the past is generally absorbed using water, but the method is removed to bring
Substantial amounts of sewage and it can not handle.It is now many that polysilicon or the hydrogen in trichlorosilane and chlorination are separated using pressure swing adsorption method
Hydrogen, chlorosilane composition.
Pressure-variable adsorption (Pressure Swing Adsorption) is a kind of molecule by between adsorbent and adsorbate
The physical adsorption process that power (including Van der Waals force and electromagnetic force) is adsorbed, is characterized in adsorption process anti-without chemistry
Should, adsorption process must be exceedingly fast, and the dynamic equilibrium participated between each phase material of absorption can instantaneously be completed, and absorption is
Reversible.Therefore, the absorption under condition of high voltage and the desorption under lower pressure etc. are all contained in the basic process of pressure-variable adsorption
Step.The application of current pressure-variable adsorption is quite varied, and Successful utilization is in H2, CH4, O2, N2, CO2 and other hydro carbons
Deng gas separation neck, reclaim and field of refinement.The technology has investment behaviour and make expense low, non-environmental-pollution and equipment corrosion,
Technique is simple, and sorbent life is long, and operating flexibility is big, and start stop operation is convenient, and automaticity is high, and applicable source of the gas is wide, and product is pure
Spend many distinguishing features such as high and energy-saving.
Reclaimed in polysilicon or trichlorosilane tail gas hydrogen be the physical characteristic having using adsorbent be hydrogen with
The adsorption capacity of impurity composition is different, and the adsorption capacity of impurity composition on the sorbent rises and increased with partial pressure, with absorption
Temperature rises and declined.The former can make the impurity Preferential adsorption in the unstripped gas of hydrogen, hydrogen is purified, and the latter is then
Adsorbent can be made to adsorb at low or elevated temperatures, and parse be regenerated at high or low temperatures.So as to realize the suction of adsorbent
Attached and regeneration, reaches the purpose of continuous purification ＆ isolation purification.
For example：Chinese patent literature 97105007.4 is disclosed one kind and inhaled using raw hydrogen (＞ 99.00%) through transformation
The method of attached method preparing high purity hydrogen (can ＞ 99.999%).88105937.4 one kind is disclosed from synthesizing methanol periodic off-gases
Reclaim the pressure swing adsorption method of hydrogen：200510060453.4 in disclose a kind of recovery of the hydrogen from careless glycosides phosphoric acid production waste gas
Method of purification；Disclose a kind of from synthesis ammonia relief gas in 97107640.5, hydrogen is extracted in the hydrogen-rich waste gas such as methanol purge gas
Pressure swing adsorption method is improved, 97107735.5 disclose a kind of multi-bed vacuum pressure swing adsorption process that hydrogen is extracted from hydrogeneous gaseous mixture.
It is above-mentioned several more traditional due to containing the impurity components such as hydrogen chloride and chlorosilane in polysilicon or trichlorosilane tail gas
The more difficult requirement for meeting imurity-removal of pressure swing adsorption method.Adsorbent is after fully absorbing, it is impossible to thoroughly parsing.Simultaneously because chlorine
Change the pure the service life of adsorbent can not be guaranteed of hydrogen and chlorosilane.
Utility model content
In order to which solve can not be thorough containing the impurity component such as hydrogen chloride and chlorosilane in above-mentioned polysilicon or trichlorosilane tail gas
Bottom is parsed, and the service life of adsorbent can not guaranteed technical problem, a kind of impurity component parsing of the utility model offer
Thoroughly, the guaranteed transformation of the service life of adsorbent reclaims hydrogen adsorption tower.
The transformation that the utility model is provided, which reclaims hydrogen adsorption tower, includes adsorption tower, adsorbent bed, adsorbent and transformation
Device, the adsorbent located at described adsorbent bed, it is described it is adsorbent bed be located at the adsorption tower, the potential device is set
The pressure regulation process for being adsorbed in the adsorption tower in the adsorption tower, the potential device, pressing and connecing suction.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the adsorbent is silicon
Glue, activated carbon and molecular sieve, it is described it is adsorbent bed be three layers, including silica gel bed, active carbon bed and mol sieve beds, silicon
Glue, activated carbon and molecular sieve are sequentially arranged in the adjacent silica gel bed, the active carbon bed and the mol sieve beds.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the adsorption tower quantity
For one, the silica gel bed is located at the opposing floor portion of the adsorption tower, and the active carbon bed is located at the phase of the adsorption tower
To middle part, the mol sieve beds are located at the opposite crests of the adsorption tower.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the adsorption tower quantity
For three, three adsorption towers are sequentially connected, the silica gel bed, the active carbon bed and mol sieve beds difference
Located at the adjacent adsorption tower.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the potential device bag
Include absorption adjuster, pressure adjuster and the desorption adjuster located at the potential device.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the absorption adjuster
Adsorptive pressure be 0.04-5MPa.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the desorption adjuster
Switch is switched and evacuated including flushing operation, and the flushing operation switch and the evacuation switch are located at the desorption regulation
Device.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, amount of silica gel is 50%
~70%, activated carbon content is 0~40% and molecular sieve content is 20%~40%.
In a kind of preferred embodiment that the transformation that the utility model is provided reclaims hydrogen adsorption tower, the adsorbent is oxygen
Change aluminium and molecular sieve, alumina content is 50%~70%；Molecular sieve content is 30%~50%, and aluminum oxide, molecular sieve etc. are inhaled
Attached dose is sequentially filled in same adsorption tower, or is loaded on successively in different adsorption towers by adsorption treatment order.
Relative to prior art, transformation of the present utility model, which reclaims hydrogen adsorption tower, has following beneficial effect：
Hydrogen is separated and recovered from polysilicon or trichlorosilane tail gas in pressure-variable adsorption mode, will to the pressure of raw material tail gas
Reduction is asked, the rate of recovery to hydrogen can reach more preferably level, be applicable density of hydrogen and pressure is wider, economic benefit and ring
Protect benefit also even more ideal.
Using pressure swing adsorption method, make each adsorption tower of the unstripped gas in the pressure swing adsorption system that at least two adsorption towers are constituted
Entered absorption, pressure and the pressure-swing absorption process of desorption process, the hydrogen purified in unit successively.Wherein in adsorption tower
The adsorbent of filling is at least activated carbon, silica gel, molecular sieve successively by processing gas order.Also it can be needed to divide according to absorption order
It is not loaded in different towers.Wherein silica gel 50%~70%；Activated carbon 0~40%；Molecular sieve 20%~40%.The dress of adsorbent
The amount of filling out increases and decreases according to the amount of unstripped gas.Most hydrogen chloride and chlorosilane in the adsorbable ending gas of silica gel, activated carbon depth
Adsorbing chlorinated hydrogen and chlorosilane, molecular sieve adsorption nitrogen.By being applied in combination for three kinds of adsorbents, make hydrogen and other gases point
From and purify, obtain pure or high-purity hydrogen.
When at the same time using silica gel, activated carbon and adsorbent of molecular sieve, its occupation mode can be in same adsorption tower
(silica gel is located at absorber bottoms, and activated carbon is located in the middle part of absorber, and molecular sieve is located at adsorption tower top) is loaded successively, can also
Needed it by described adsorption treatment order, be loaded on respectively in different adsorption towers according to actual conditions or processing.
The polysilicon containing hydrogen, hydrogen chloride and chlorosilane, trichlorosilane tail gas can effectively be handled.Chlorination in gaseous mixture
Hydrogen and chlorosilane impurity, are adsorbed in adsorbent bed, and the purified hydrogen of high-purity is obtained by the pressure swing adsorption system port of export, is made
The recycling for arriving satisfaction of hydrogen, and experiment display, resulting high concentration product hydrogen after being handled through hair method of the present invention
Purity can reach 99.999% (mol%), the concentration of the wherein impurity such as hydrogen chloride and chlorosilane can be respectively lower than 1 × 10-
6, the rate of recovery to hydrogen component is usually 85%~95%.It is polycrystalline to reclaim hydrogen and be delivered to gas process as product gas and sit
Silicon or trichlorosilane raw materials for production gas.
Can also be according to required product hydrogen purity requirement, the rate of recovery to hydrogen component, and polysilicon, trichlorine
How much is foreign gas constituent content in hydrogen silicon tail gas, flexibly can also select and/or adjust evacuation and/or rinsing step, maximum
Practical condition needs are met in limit.
Brief description of the drawings
, below will be to needed for embodiment description in order to illustrate more clearly of the technical scheme in the utility model embodiment
The accompanying drawing to be used is briefly described, it should be apparent that, drawings in the following description are only some realities of the present utility model
Example is applied, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to these accompanying drawings
Other accompanying drawings are obtained, wherein：
Fig. 1 is the structural representation that the transformation that the utility model is provided reclaims the preferred embodiment of hydrogen adsorption tower one；
Fig. 2 is the structural representation that the transformation that Fig. 1 the utility model is provided reclaims another preferred embodiment of hydrogen adsorption tower；
Fig. 3 is that the structure for the preferred embodiment of potential device one that the transformation that the utility model is provided reclaims hydrogen adsorption tower is shown
It is intended to.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the present utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The all other embodiment obtained, belongs to the scope of the utility model protection.
Referring to Fig. 1, being that the transformation that the utility model is provided reclaims the structural representation of the preferred embodiment of hydrogen adsorption tower one
Figure, Fig. 2 is the structural representation that the transformation that Fig. 1 the utility model is provided reclaims another preferred embodiment of hydrogen adsorption tower；Fig. 3 is
The transformation that the utility model is provided reclaims the structural representation of the preferred embodiment of potential device one of hydrogen adsorption tower.
The transformation, which reclaims hydrogen adsorption tower 1, includes adsorption tower 11, adsorbent bed 12, adsorbent 13 and potential device
14.The adsorbent 13 is located at the adsorption tower 11, the transformation located at described adsorbent bed 12, described adsorbent bed 12
Device 14 is located at the adsorption tower 11, and the potential device 14 adsorbed in the adsorption tower 11, press and connect the pressure of suction
Regulation process.
The adsorbent 13 is silica gel, activated carbon and molecular sieve, and amount of silica gel is that 50%~70%, activated carbon content is 0
~40% and molecular sieve content be 20%~40%.
Described adsorbent bed 12 be three layers, including silica gel bed 121, active carbon bed 122 and mol sieve beds 123.
Silica gel, activated carbon and molecular sieve are sequentially arranged in the adjacent silica gel bed 121, the active carbon bed 122 and the molecule
Sifting bed layer 123.
The quantity of adsorption tower 11 is one or three.
In the embodiment of an adsorption tower 11, the silica gel bed 121 is located at the relative bottom of the adsorption tower 11
Portion, the active carbon bed 122 is located at the relative middle part of the adsorption tower 11, and the mol sieve beds 123 are located at the absorption
The opposite crests of tower 11.
In the embodiment of three adsorption towers 11, three adsorption towers 11 are sequentially connected, the silica gel bed
121st, the active carbon bed 122 and the mol sieve beds 123 are respectively arranged on the adjacent adsorption tower 11.
The potential device 14 include located at the potential device 14 absorption adjuster 141, pressure adjuster 142 and
Desorb adjuster 143.
The adsorptive pressure of the absorption adjuster 141 is 0.04-5MPa.
The desorption adjuster 143 includes flushing operation switch 1431 and evacuates switch 1432.The flushing operation switch
1431 and it is described evacuate switch 1432 located at it is described desorption adjuster 143.
In another embodiment, the adsorbent 13 is aluminum oxide and molecular sieve, and alumina content is 50%~70%；Point
Son sieve content is 30%~50%, and the adsorbent such as aluminum oxide, molecular sieve is sequentially filled in same adsorption tower 11, or by absorption at
Sequence is made in order to be loaded on successively in different adsorption towers 11.
Transformation of the present utility model, which reclaims hydrogen adsorption tower 1, has following beneficial effect：
Hydrogen is separated and recovered from polysilicon or trichlorosilane tail gas in pressure-variable adsorption mode, will to the pressure of raw material tail gas
Reduction is asked, the rate of recovery to hydrogen can reach more preferably level, be applicable density of hydrogen and pressure is wider, economic benefit and ring
Protect benefit also even more ideal.
Using pressure swing adsorption method, make each adsorption tower of the unstripped gas in the pressure swing adsorption system that at least two adsorption towers are constituted
Entered absorption, pressure and the pressure-swing absorption process of desorption process, the hydrogen purified in unit successively.Wherein in adsorption tower 11
The adsorbent 13 of middle filling is at least activated carbon, silica gel, molecular sieve successively by processing gas order.Also can be according to absorption order need
To be loaded on respectively in different towers.Wherein silica gel 50%~70%；Activated carbon 0~40%；Molecular sieve 20%~40%.Adsorbent
13 loadings increase and decrease according to the amount of unstripped gas.Most hydrogen chloride and chlorosilane in the adsorbable ending gas of silica gel, activity
The adsorbing chlorinated hydrogen of charcoal depth and chlorosilane, molecular sieve adsorption nitrogen.By being applied in combination for three kinds of adsorbents, make hydrogen and other
Gas is separated and purified, and obtains pure or high-purity hydrogen.
When at the same time using silica gel, activated carbon and adsorbent of molecular sieve, its occupation mode can be in same adsorption tower 13
In successively filling (silica gel be located at absorber bottoms, activated carbon be located at absorber in the middle part of, molecular sieve be located at adsorption tower at the top of), also may be used
To be needed according to actual conditions or processing by it by described adsorption treatment order, it is loaded on respectively in different adsorption towers.
The polysilicon containing hydrogen, hydrogen chloride and chlorosilane, trichlorosilane tail gas can effectively be handled.Chlorination in gaseous mixture
Hydrogen and chlorosilane impurity, are adsorbed in adsorbent bed 12, and the purified hydrogen of high-purity is obtained by the pressure swing adsorption system port of export,
Make the satisfied recycling of arriving of hydrogen, and experiment display, resulting high concentration product hydrogen after being handled through hair method of the present invention
The purity of gas can reach 99.999% (mol%), the concentration of the wherein impurity such as hydrogen chloride and chlorosilane can be respectively lower than 1 ×
10-6, the rate of recovery to hydrogen component is usually 85%~95%.Reclaim hydrogen and be delivered to gas process as product gas and sit and be
Polysilicon or trichlorosilane raw materials for production gas.
Can also be according to required product hydrogen purity requirement, the rate of recovery to hydrogen component, and polysilicon, trichlorine
How much is foreign gas constituent content in hydrogen silicon tail gas, flexibly can also select and/or adjust evacuation and/or rinsing step, maximum
Practical condition needs are met in limit.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalent structure or equivalent flow conversion made using the utility model specification and accompanying drawing content, or be directly or indirectly used in
Other related technical fields, are similarly included in scope of patent protection of the present utility model.
Claims (9)
1. a kind of transformation reclaims hydrogen adsorption tower, it is characterised in that press-fit including adsorption tower, adsorbent bed, adsorbent and change
Put, the adsorbent located at described adsorbent bed, it is described it is adsorbent bed be located at the adsorption tower, the potential device is located at
The adsorption tower, the pressure regulation process that the potential device is adsorbed in the adsorption tower, presses and connect suction.
2. transformation according to claim 1 reclaims hydrogen adsorption tower, it is characterised in that the adsorbent is silica gel, activity
Charcoal and molecular sieve, it is described it is adsorbent bed be three layers, including silica gel bed, active carbon bed and mol sieve beds, silica gel, activity
Charcoal and molecular sieve are sequentially arranged in the adjacent silica gel bed, the active carbon bed and the mol sieve beds.
3. transformation according to claim 2 reclaims hydrogen adsorption tower, it is characterised in that the adsorption tower quantity is one,
The silica gel bed is located at the opposing floor portion of the adsorption tower, and the active carbon bed is located at the relative middle part of the adsorption tower,
The mol sieve beds are located at the opposite crests of the adsorption tower.
4. transformation according to claim 2 reclaims hydrogen adsorption tower, it is characterised in that the adsorption tower quantity is three,
Three adsorption towers are sequentially connected, and the silica gel bed, the active carbon bed and the mol sieve beds are respectively arranged on phase
The adjacent adsorption tower.
5. transformation according to claim 1 reclaims hydrogen adsorption tower, it is characterised in that the potential device includes being located at
The absorption adjuster of the potential device, pressure adjuster and desorption adjuster.
6. transformation according to claim 5 reclaims hydrogen adsorption tower, it is characterised in that the adsorption pressure of the absorption adjuster
Power is 0.04-5MPa.
7. transformation according to claim 5 reclaims hydrogen adsorption tower, it is characterised in that the desorption adjuster includes rinsing
Operation switch and evacuation switch, the flushing operation switch and described evacuate are switched located at the desorption adjuster.
8. transformation according to claim 2 reclaims hydrogen adsorption tower, it is characterised in that amount of silica gel is 50%~70%,
Activated carbon content is 0~40% and molecular sieve content is 20%~40%.
9. transformation according to claim 1 reclaims hydrogen adsorption tower, it is characterised in that the adsorbent is aluminum oxide and divided
Son sieve, alumina content is 50%~70%；Molecular sieve content is 30%~50%, and the adsorbent such as aluminum oxide, molecular sieve is successively
It is filled in same adsorption tower, or is loaded on successively in different adsorption towers by adsorption treatment order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720050980.5U CN206444410U (en) | 2017-01-16 | 2017-01-16 | Transformation reclaims hydrogen adsorption tower |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720050980.5U CN206444410U (en) | 2017-01-16 | 2017-01-16 | Transformation reclaims hydrogen adsorption tower |
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| CN206444410U true CN206444410U (en) | 2017-08-29 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108452635A (en) * | 2018-02-09 | 2018-08-28 | 北京东方计量测试研究所 | Optimize the method for VOCs sorbing material combination formulas |
| CN110550605A (en) * | 2018-06-04 | 2019-12-10 | 国家能源投资集团有限责任公司 | Device and method for preparing high-purity hydrogen from hydrogen-containing gas |
-
2017
- 2017-01-16 CN CN201720050980.5U patent/CN206444410U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108452635A (en) * | 2018-02-09 | 2018-08-28 | 北京东方计量测试研究所 | Optimize the method for VOCs sorbing material combination formulas |
| CN110550605A (en) * | 2018-06-04 | 2019-12-10 | 国家能源投资集团有限责任公司 | Device and method for preparing high-purity hydrogen from hydrogen-containing gas |
| CN110550605B (en) * | 2018-06-04 | 2021-06-11 | 国家能源投资集团有限责任公司 | Device and method for preparing high-purity hydrogen from hydrogen-containing gas |
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