CN206441191U - A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module - Google Patents
A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module Download PDFInfo
- Publication number
- CN206441191U CN206441191U CN201720118566.3U CN201720118566U CN206441191U CN 206441191 U CN206441191 U CN 206441191U CN 201720118566 U CN201720118566 U CN 201720118566U CN 206441191 U CN206441191 U CN 206441191U
- Authority
- CN
- China
- Prior art keywords
- sensing
- conducting element
- conductive plate
- module
- capacitive fingerprint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Image Input (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module, are related to fingerprint recognition field.Wherein, sensing module (100) includes sensing array (1) and the dielectric (2) being covered on sensing array (1);By setting multiple the first conducting elements (112) with preset thickness on the conductive plate of sensing unit (11) (110), due to two the first conducting element (112) interval pre-determined distances of arbitrary neighborhood, therefore, the area of the side of the first conducting element (112) can effectively be utilized, so that increasing effective sensing area of conductive plate (110) in the case of the size constancy of conductive plate (110), the penetration capacity of fingerprint sensor is not only increased, and allows it to support higher dielectric thickness.
Description
Technical field
The utility model belongs to fingerprint recognition field, more particularly to a kind of intelligent terminal, capacitive fingerprint sensing device and its
Sensing module.
Background technology
With continuing to develop for fingerprint identification technology, the fingerprint sensor based on fingerprint identification technology is widely used in respectively
Plant in intelligent terminal (such as mobile phone, tablet personal computer).Capacitive fingerprint sensing device is because with low thickness of detector, inexpensive and low work(
The advantages such as consumption become the main flow of fingerprint recognition application.
Existing capacitive fingerprint sensing device includes sensing module, read module and control module etc..As shown in Figure 1a, feel
Surveying module includes the sensing array 1 arranged by multiple sensing units 11 and the dielectric being covered on sensing array 1
2.In measurement period, control module controls multiple sensing units 11 respectively to the multiple of the finger that is contacted with dielectric 2
The finger print information of point is sensed.Specifically, as shown in Figure 1 b, sensing unit 11 includes conductive plate 110 and measuring circuit
111;When finger is contacted with dielectric 2, electric capacity CS is respectively formed between finger and multiple conductive plates 110, due to fingerprint
Crest and trough and the distance between conductive plate 110 are unequal, therefore, crest and trough and the shape of conductive plate 110 of fingerprint
Into electric capacity CS capacitance Cs it is different, the capacitance for the electric capacity that measuring circuit 111 is formed conductive plate 110 and finger is converted to
Voltage signal, and export the measured value Vo for representing fingerprint crest or trough.The survey that read module is exported to multiple sensing units 11
Value is read out and handled, you can obtain complete finger print information.
The measured value Vo=Cs/Cf*Vb that measuring circuit 111 shown in Fig. 1 is exported.Wherein, Vb is measurement period interior power
The preset voltage value of voltage institute lifting, Cf is feedback capacity CF capacitance.In order to ensure the measurement accuracy of fingerprint sensor, it is desirable to
Vo can not be too small.And considering the influence of the factors such as noise, internal signal interference and dead resistance electric capacity, Cf can not be too small;And it is pre-
If magnitude of voltage Vb is limited to reliability and cost can not be too big.Therefore, under equal conditions, improving Cs turns into a kind of preferred scheme.
But in view of the resolution requirement of the tiny size characteristic of fingerprint lines and sensor, the size of single sense unit 11 can not be done
Obtain very big, i.e., the area of conductive plate 110 can not be too big.And the capacitance of electric capacity is directly proportional to the polar plate area of electric capacity, with pole plate
The distance between and dielectric constant be inversely proportional, in industry commonly use medium for safety glass, i.e. dielectric constant it is substantially stationary, because
This, can only reduce the thickness of medium to reach increase Cs mesh by shortening the distance between conductive plate 110 and finger
, so as to cause fingerprint sensor not support higher dielectric thickness.
In summary, there is the problem of not supporting higher dielectric thickness in existing capacitive fingerprint sensing device.
Utility model content
The purpose of this utility model is to provide a kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module, purport
Solve present in existing capacitive fingerprint sensing device the problem of not supporting higher dielectric thickness.
The utility model is achieved in that a kind of sensing module of capacitive fingerprint sensing device, including by multiple sensings
Sensing array and be covered in the dielectric sensed on array that unit is arranged in two dimensions;The sensing is single
Member includes conductive plate and the measuring circuit electrically connected with the conductive plate;In sense period, the measuring circuit is by institute
The capacitance for stating the electric capacity formed between conductive plate and the finger being contacted with the dielectric is converted to voltage signal, and defeated
Go out measured value corresponding with the crest or trough of the fingerprint of the finger;The upper surface of the conductive plate, which is provided with, multiple to be had
First conducting element of preset thickness, and the first conducting element interval pre-determined distance of arbitrary neighborhood two;The conductive electrode
Plate sensing area by the area of the upper surface of first conducting element, the area of the side of first conducting element and
The pre-determined distance is determined jointly;Wherein, the upper surface of the conductive plate is the conductive plate and the dielectric phase
To one side.
The utility model additionally provides a kind of capacitive fingerprint sensing device, including read module and control module, the electricity
Appearance formula fingerprint sensor also includes above-mentioned sensing module;
The sensing module is connected with the read module and the control module simultaneously;
The control module controls the sensing module to be sensed in sense period to the finger print information of the finger;
The measured value that the read module is exported to the sensing module is read out, to obtain the finger print information of the finger.
The utility model additionally provides a kind of intelligent terminal, and the intelligent terminal includes above-mentioned capacitance type fingerprint and sensed
Device.
The utility model is multiple with pre- by being set on the conductive plate of the sensing unit of capacitive fingerprint sensing device
If the first conducting element of thickness, due to two the first conducting element interval pre-determined distances of arbitrary neighborhood, it therefore, it can effective profit
With the area of the side of the first conducting element so that increase having for conductive plate in the case of the size constancy of conductive plate
Effect sensing area, not only increases the penetration capacity of fingerprint sensor, and allow it to support higher dielectric thickness.
Brief description of the drawings
Fig. 1 a are the top views for the capacitive fingerprint sensing device that prior art and the utility model embodiment are provided;Fig. 1 b are
The sectional view of the sensing module for the capacitive fingerprint sensing device that prior art is provided;
Fig. 2 is a kind of sectional view of the sensing module for capacitive fingerprint sensing device that the utility model embodiment is provided;
Fig. 3 is a kind of section of the sensing module for capacitive fingerprint sensing device that another embodiment of the utility model is provided
Figure;
Fig. 4 is the conductive plate in a kind of sensing module for capacitive fingerprint sensing device that the utility model embodiment is provided
Top view;
Fig. 5 is the conduction in a kind of sensing module for capacitive fingerprint sensing device that another embodiment of the utility model is provided
The top view of pole plate;
Fig. 6 is a kind of sectional view for capacitive fingerprint sensing device that the utility model embodiment is provided.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain
The utility model, is not used to limit the utility model.
Fig. 1 a are the top views for the capacitive fingerprint sensing device that the utility model embodiment is provided;Fig. 2 is the utility model
A kind of electrical block diagram of the sensing module for capacitive fingerprint sensing device that embodiment is provided.For convenience of description, only show
The part related to the utility model embodiment is gone out, details are as follows:
As shown in Figure 1a, the sensing module 100 of a kind of capacitive fingerprint sensing device, including by multiple sensing units 11 with two
The sensing array 1 that dimension mode is arranged and the dielectric 2 being covered on whole sensing units 11 of sensing array 1.
In actual applications, sensing array 1 can be arranged by multiple sensing units 11 in the way of two-dimensional matrix forms.
In actual applications, dielectric 2 can be the dielectrics such as safety glass, plastics, can also be other insulation
Medium.It is determined, is not limited herein with specific reference to actual demand.
As shown in Fig. 2 sensing unit 11 includes conductive plate 110 and the measuring circuit electrically connected with conductive plate 110
111.In sense period, measuring circuit 111 will be formed between conductive plate 110 and the finger being contacted with dielectric 2
Electric capacity CS capacitance Cs is converted to voltage signal, and exports measured value Vo corresponding with the crest or trough of the fingerprint of finger.
The upper surface of conductive plate 110 is provided with multiple the first conducting elements 112 with preset thickness, and arbitrary neighborhood
Two the first conducting elements 112 are spaced pre-determined distance;Conductive plate 110 sensing area by the first conducting element 112 upper table
The area in face, the area of the side of the first conducting element 112 and pre-determined distance are determined jointly.
Specifically, the sensing area S=S1+S2+S3 of conductive plate 110.Wherein, S1 is the upper of the first conducting element 112
The area on surface;S2 is the area of the side of the first conducting element 112;S3 is not led for the upper surface of conductive plate 110 by first
The gross area for the part that electric device 110 is blocked.
In the utility model embodiment, the upper surface of conductive plate 110 is relative with dielectric 2 for conductive plate 110
One side.
In the utility model embodiment, the pre-determined distance at two the first conducting element 112 intervals of arbitrary neighborhood can phase
Deng, can also be unequal, it is configured, is not limited herein with specific reference to actual demand.
Certainly, preset thickness can also be configured according to the actual requirements, be not particularly limited herein.
As the embodiment of the utility model one, as shown in Fig. 2 the first conducting element 112 can be with the one of conductive plate 110
Shaping.In actual applications, identical mesh can also be reached by setting the groove with predetermined depth on conductive plate 110
, it is configured, is not limited herein with specific reference to actual demand.
Fig. 3 is a kind of section of the sensing module for capacitive fingerprint sensing device that another embodiment of the utility model is provided
Figure.For convenience of description, the part related to the utility model embodiment is illustrate only, details are as follows:
As shown in figure 3, as another embodiment of the utility model, the first conducting element 112 can pass through the second conductive element
Part 113 is electrically connected with conductive plate 110.
In actual applications, conductive plate 110, the first conducting element 112 and the second conducting element 113 can be using gold
Belong to material.Certain conductive plate 110, the first conducting element 112 and the second conducting element 113 can also use other conduction materials
Matter, is not limited herein.
In actual applications, the second conducting element 113 can be conductive through hole.
It is used as the embodiment of the utility model one, as shown in Figures 2 and 3, the input and conductive plate of sensing circuit 111
110 electrical connections, the output end outputting measurement value Vo of sensing circuit 111.Wherein, sensing circuit 111 can using it is existing including
Switch SW, feedback capacity CF and amplifier AMP sensing circuit.Specifically, switch SW first end, the first of feedback capacity CF
End and amplifier AMP inverting input connect the input as sensing circuit 111 altogether, switch SW the second end, feedback capacity
CF the second end and amplifier AMP output end connect the output end as sensing circuit 111, amplifier AMP homophase input altogether
Terminate into reference voltage Vref.
Fig. 4 is the conductive plate in a kind of sensing module for capacitive fingerprint sensing device that the utility model embodiment is provided
Top view;Fig. 5 is leading in a kind of sensing module for capacitive fingerprint sensing device that another embodiment of the utility model is provided
The top view of battery lead plate.For convenience of description, the part related to the utility model embodiment is illustrate only, details are as follows:
As shown in figure 4, as the embodiment of the utility model one, the first conducting element 112 can be cuboid.Further
, the first conducting element 112 can be cube.
As shown in figure 5, as another embodiment of the utility model, the first conducting element 112 can also be cylinder.Specifically
, it can be cylinder or prism etc., not be limited herein.
In actual applications, the first conducting element 112 can also be stage body (not shown), such as terrace with edge or round platform
Deng being configured, be not limited with specific reference to actual demand herein.
In actual applications, the second conducting element 113 can be cuboid or cylinder etc., be carried out with specific reference to actual demand
Set, be not limited herein.
As shown in Figure 4 and Figure 5, multiple first conducting elements 112 are arranged with the matrix-style of m rows × n row;Often row first is led
Two the first conducting elements 112 of arbitrary neighborhood are spaced the first pre-determined distance d1, the first conducting element of each column 112 in electric device 112
Middle two the first conducting elements 112 of arbitrary neighborhood are spaced the second pre-determined distance d2.
In the utility model embodiment, the first pre-determined distance d1 and the second pre-determined distance d2 can be with equal, can also not
It is equal.It is determined, is not limited herein with specific reference to actual demand.For example, it is assumed that the length of conductive plate 110 and it is wide be 50
μm (micron), the first conducting element 112 is cuboid, then can set the first conducting element 112 length and it is wide be 0.5 μm,
Thickness is 1 μm;First pre-determined distance d1 and the second pre-determined distance d2 is 0.5 μm.
The utility model embodiment additionally provides a kind of capacitive fingerprint sensing device, and Fig. 6 is that the utility model embodiment is carried
A kind of sectional view of the capacitive fingerprint sensing device supplied.For convenience of description, it illustrate only related to the utility model embodiment
Part, details are as follows:
A kind of capacitive fingerprint sensing device 1000, including read module 200 and control module 300, capacitance type fingerprint sensing
Device 1000 also includes above-mentioned sensing module 100.
Wherein, sensing module 100 is connected with read module 200 and control module 300 simultaneously.
The control of control module 300 sensing module 100 is sensed in sense period to the finger print information of finger;Read mould
The measured value that block 200 is exported to sensing module 100 is read out, to obtain the finger print information of finger.
In the utility model embodiment, control module 300 and its control logic can be passed with existing capacitance type fingerprint
Control module in sensor is identical with control logic.Specifically, control module 300 can be by the power supply of lifting fingerprint sensor
The mode of voltage and ground voltage controls sensing module 100 to sense the finger print information of finger, can also be by finger
, can also be by amplifier AMP plus the mode of pumping signal controls sensing module 100 to sense the finger print information of finger
In-phase input end add the mode of pumping signal to control sensing module 100 to sense the finger print information of finger.Specifically can be with
It is configured, is not limited herein according to the actual requirements.
In actual applications, read module 300 can use existing including sampling hold circuit (S/H circuits) and modulus
The reading circuit of converter (ADC).It is configured, is not limited herein with specific reference to actual demand.
The utility model embodiment additionally provides a kind of intelligent terminal, and the intelligent terminal includes above-mentioned capacitance type fingerprint and passed
Sensor 1000.
In the utility model embodiment, intelligent terminal can be the terminals such as mobile phone, tablet personal computer, can also be other ends
End, is not limited herein.
The capacitive fingerprint sensing device provided below in conjunction with operation principle the utility model is described further:
As shown in fig. 6, in sense period, control module 300 controls multiple sensing units 11 (for the ease of observation, figure
In illustrate only a sensing unit) finger print information of the multiple points for the finger being contacted with dielectric 2 is felt respectively
Survey.Below in the way of control module 300 is sensed by way of lifting supply voltage and ground voltage to fingerprint exemplified by it is right
Whole sensing process is illustrated:
In sense period, the first controlling switch SW conductings of control module 300, now, the sensing value that sensing module 100 is exported
Vo=Vref (predetermined reference voltage);After stable output signal, the controlling switch SW of control module 300 disconnects, and will pass simultaneously
Supply voltage and the ground voltage lift of sensor are risen after default preset voltage value Vb, signal stabilization, the sensing that sensing module 100 is exported
Value Vo=Vref+Cs*Vb+Vb, and the sensing value Vo that previous moment sensing module 100 is exported is changed into Vref+Vb, two moment senses
The difference Vo1=Cs/Cf*Vb (formula 1) for the sensing value that module 100 is exported is surveyed, difference Vo1 is the institute of single sense unit 11
The finger print information of the single fingerprint detection point sensed.
The utility model embodiment improves the accuracy of detection of fingerprint sensor by improving electric capacity CS capacitance Cs.Due to
(wherein, ε is the dielectric constant of dielectric 2 to Cs=ε S/ (4 π kd);S is the area of conductive plate 110;π and k are constant;d
For the distance between sensing distance, the i.e. upper surface of conductive plate 110 and finger, generally, conductive plate 110 and insulation
The distance between medium 2 is very small, can ignore, that is to say, that d can approximately be interpreted as the thickness of dielectric 2), therefore,
In not sacrificial dielectric thickness, and conductive plate 110 overall dimensions it is constant in the case of, set in the upper surface of conductive plate 110
Multiple the first conducting elements 112 with preset thickness are put, and ensure that two the first conducting element 112 intervals of arbitrary neighborhood are default
Distance.Specifically, assume conductive plate 110 length and it is wide be 50 μm, then the sensing face of conductive plate 110 of the prior art
S=2500 μm of product2(square micron).In the utility model embodiment, if the first conducting element 112 is cuboid, and first
The length of conducting element 112 and it is wide be 0.5 μm, thickness be 1 μm, the first pre-determined distance d1 and the second pre-determined distance d2 are 0.5 μ
M, then have 2500 the first conducting elements 112 in the μ m of 50 μ m 50, then, it is conductive in the μ m of 50 μ m 50
The sensing area S=(0.5 0.5 μm+1 of μ m μ m 0.5 μ m 4) of pole plate 110 × 2500+1875 μm2=7500 μm2, it is existing
3 times of technology.
It should be noted that the sensing area S of conductive plate 110 computational methods are to be based on sensing distance in above-mentioned principle
D is much larger than the premise of the thickness of the first conducting element 112, and under the premise of this, the thickness of the first conducting element 112 can be neglected
Slightly.
It follows that the capacitive fingerprint sensing device that the utility model embodiment is provided is by improving Cs and then improving finger
Line accuracy of detection, and in the case where the overall dimensions for ensureing conductive plate 110 are constant so that fingerprint sensor can be supported higher
Dielectric thickness.
The utility model embodiment on the conductive plate of the sensing unit of capacitive fingerprint sensing device by setting multiple
The first conducting element with preset thickness, due to two the first conducting element interval pre-determined distances of arbitrary neighborhood, therefore, it can
Effectively utilize the area of the side of the first conducting element so that increase conductive electrode in the case of the size constancy of conductive plate
Effective sensing area of plate, not only increases the penetration capacity of fingerprint sensor, and allow it to support higher medium
Thickness.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
Any modifications, equivalent substitutions and improvements made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (10)
1. a kind of sensing module of capacitive fingerprint sensing device, including the sense arranged in two dimensions by multiple sensing units
Survey array and the dielectric being covered on the sensing array;The sensing unit include conductive plate and with the conduction
The measuring circuit of pole plate electrical connection;In sense period, the measuring circuit is by the conductive plate and is contacted with the insulation
The capacitance of the electric capacity formed between finger on medium is converted to voltage signal, and export with the crest of the fingerprint of the finger or
The corresponding measured value of trough;Characterized in that, the upper surface of the conductive plate be provided with it is multiple with preset thickness first
Conducting element, and the first conducting element interval pre-determined distance of arbitrary neighborhood two;The sensing area of the conductive plate by
The area of the upper surface of first conducting element, the area of the side of first conducting element and the pre-determined distance are common
With determination;Wherein, the upper surface of the conductive plate is the conductive plate one side relative with the dielectric.
2. the sensing module of capacitive fingerprint sensing device as claimed in claim 1, it is characterised in that first conducting element
It is integrally formed with the conductive plate.
3. the sensing module of capacitive fingerprint sensing device as claimed in claim 1, it is characterised in that first conducting element
Electrically connected by the second conducting element with the conductive plate.
4. the sensing module of capacitive fingerprint sensing device as claimed in claim 1, it is characterised in that the multiple first is conductive
Element is arranged with the matrix-style of m rows × n row;Often in capable first conducting element between two the first conducting elements of arbitrary neighborhood
Every two the first conducting element intervals second of arbitrary neighborhood in the first pre-determined distance, the first conducting element described in each column it is default away from
From.
5. the sensing module of capacitive fingerprint sensing device as claimed in claim 4, it is characterised in that first pre-determined distance
It is equal with second pre-determined distance.
6. the sensing module of capacitive fingerprint sensing device as claimed in claim 4, it is characterised in that first pre-determined distance
It is unequal with second pre-determined distance.
7. the sensing module of capacitive fingerprint sensing device as claimed in claim 1, it is characterised in that first conducting element
For cuboid.
8. the sensing module of capacitive fingerprint sensing device as claimed in claim 1, it is characterised in that first conducting element
For cylinder.
9. a kind of capacitive fingerprint sensing device, including read module and control module, it is characterised in that the capacitance type fingerprint is passed
Sensor also includes the sensing module as described in any one of claim 1 to 8;
The sensing module is connected with the read module and the control module simultaneously;
The control module controls the sensing module to be sensed in sense period to the finger print information of the finger;It is described
The measured value that read module is exported to the sensing module is read out, to obtain the finger print information of the finger.
10. a kind of intelligent terminal, it is characterised in that the intelligent terminal is passed including capacitance type fingerprint as claimed in claim 9
Sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720118566.3U CN206441191U (en) | 2017-02-08 | 2017-02-08 | A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720118566.3U CN206441191U (en) | 2017-02-08 | 2017-02-08 | A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module |
Publications (1)
Publication Number | Publication Date |
---|---|
CN206441191U true CN206441191U (en) | 2017-08-25 |
Family
ID=59633823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201720118566.3U Active CN206441191U (en) | 2017-02-08 | 2017-02-08 | A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN206441191U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109118675A (en) * | 2018-07-27 | 2019-01-01 | 张宇涛 | A kind of antitheft brush device of bank finance equipment card-reading slot |
CN109684975A (en) * | 2018-12-18 | 2019-04-26 | 深圳贝特莱电子科技股份有限公司 | A kind of fingerprint identification device and method without becket and touch detection chip |
-
2017
- 2017-02-08 CN CN201720118566.3U patent/CN206441191U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109118675A (en) * | 2018-07-27 | 2019-01-01 | 张宇涛 | A kind of antitheft brush device of bank finance equipment card-reading slot |
CN109684975A (en) * | 2018-12-18 | 2019-04-26 | 深圳贝特莱电子科技股份有限公司 | A kind of fingerprint identification device and method without becket and touch detection chip |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103235195B (en) | A kind of Non-contact static detection device | |
CN104266780B (en) | A kind of flexible force sensor measuring normal direction and tangential force | |
CN106092430B (en) | A kind of comb capacitance type pressure sensor | |
JP3139931U (en) | Container equipped with liquid metering detection device | |
CN206441191U (en) | A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module | |
CN105066863B (en) | Displacement sensor based on electroactive elastomer polymer | |
EP3748321A1 (en) | Contact sensor having multi-functional layer, electronic skin and smart robot | |
CN101266167A (en) | Capacitance type digital material-level sensor and its measurement method | |
CN106959169B (en) | A kind of novel and multifunctional sensor chip and preparation method thereof | |
EP3748320A1 (en) | Sensor having shielding function based on time and areas, electronic skin, and robot | |
CN104823139B (en) | Touch key-press | |
CN104407466A (en) | Display substrate, display panel and display device | |
CN107004127A (en) | A kind of intelligent terminal, capacitive fingerprint sensing device and its sensing module | |
CN103793114B (en) | There is capacitive sense array device and the electronic equipment of high sensing sensitivity | |
US11243633B2 (en) | Pressure sensing module, touch panel and method of detecting two-point touch pressure of touch panel | |
CN107655498A (en) | A kind of capacitance type touch sensor signal detection system | |
CN101071084B (en) | Capacitance type micro mechanical temperature sensor for multi-layer beam structure | |
CN102538906A (en) | Induction capacitance type liquid level sensor | |
CN103558266B (en) | A kind of Graphene capacitor biological sensor and preparation method thereof, detection method | |
CN107677198A (en) | The self-driven closely position detector of electret | |
CN201215516Y (en) | Differential capacitor load sensor | |
CN212779682U (en) | Capacitive pressure sensor | |
CN109959826A (en) | A kind of electric-field sensor of planar structure and preparation method thereof | |
CN109141692A (en) | Ball point type three-dimensional capacitance pressure sensor based on multifrequency identification | |
CN106886334B (en) | Pressure sensing module, electronic device and time sequence control method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |