CN206440379U - MOEMS wireless vibration sensors based on pectination grid - Google Patents
MOEMS wireless vibration sensors based on pectination grid Download PDFInfo
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- CN206440379U CN206440379U CN201720057167.0U CN201720057167U CN206440379U CN 206440379 U CN206440379 U CN 206440379U CN 201720057167 U CN201720057167 U CN 201720057167U CN 206440379 U CN206440379 U CN 206440379U
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Abstract
The utility model discloses a kind of MOEMS wireless vibration sensors based on pectination grid, including：Sensor outer housing, miniature is connected by Transmission Fibers with vibration sensing source, collimater is respectively fixed with the both sides in the vibration sensing source, the output end in the vibration sensing source is connected by Transmission Fibers with photoelectric conversion module, and photoelectric conversion module is sequentially connected with data analysis module, wireless transport module.The utility model beneficial effect：Such a structure design makes it only need with testee effectively to be contacted sensor in monitoring, and detects that the wireless transmission function of signal effectively overcomes the heavy construction structure such as tunnel, bridge sensor in monitoring arrangement present situation difficult with lead.
Description
Technical field
The utility model belongs to technical field of optical fiber sensing, more particularly to a kind of to realize that extraneous vibration is believed by pectination grid
Number to sensor light intensity Signal coding, and possess the MOEMS wireless vibration sensors of transmission of wireless signals function.
Background technology
MOEMS (MOEMS) is the great vigor grown up in recent years in MEMS (MEMS)
New technology system, it is a kind of new micro optical structure system for being combined and being produced by micro-optics, microelectronics and micromechanics
System.MOEMS can be mass because of it, small volume, high precision the advantages of, and in terms of being widely used in optical communication and image procossing,
It is relatively fewer in the patent report of engineering detecting sensory field.
Chinese patent CN102483427A provides a kind of CMOS MOEMS sensors and can be used for detection such as vibration, transports
The physical parameters such as dynamic, rotation, acceleration.But the CMOS MOEMS sensors need to ensure quilt in the tested dynamic parameter of monitoring
The smoothness of body surface is surveyed to realize effective reflection of optical signal.This measurement request limits it in rings such as tunnel, bridges
Application in the complex large-sized engineering structure monitoring in border.
The light intensity signal that miniature is sent in the utility model, is modulated by collimating apparatus into vibration sensing source
After be input to photoelectric conversion device and be converted to electric signal.After electric signal of the DAF analysis from photoelectric conversion device
To the amplitude and frequency information of extraneous vibration signal, then vibration signal is encoded, and is realized by radio transmission apparatus
Vibration signal is wirelessly transferred.The sensor parts are encapsulated in a sensor outer housing, realize the miniature of sensor
Change with it is highly integrated.Such a structure design makes it only need with testee effectively to be contacted sensor in monitoring,
And detect that the wireless transmission function of signal effectively overcomes the heavy construction structure such as tunnel, bridge sensor in monitoring arrangement
And the difficult present situation of lead.
Utility model content
In order to solve the above problems, the utility model proposes a kind of MOEMS wireless vibrations sensing based on pectination grid
Device, the sensor realizes the measurement of extraneous vibration signal and is wirelessly transferred, and the sensor bulk is small, highly integrated, overcomes
Existing fiber vibrating sensor sensor arrangement and the difficult present situation of lead in the heavy construction monitoring project such as tunnel, bridge.
To achieve these goals, the utility model is adopted the following technical scheme that：
A kind of MOEMS wireless vibration sensors based on pectination grid, including：Miniature, Transmission Fibers, collimater,
Vibration sensing source, photoelectric conversion module, data analysis module and wireless transport module；
The miniature is connected by Transmission Fibers with vibration sensing source, and the both sides in the vibration sensing source are solid respectively
Surely there is collimater, the output end in the vibration sensing source is connected by Transmission Fibers with photoelectric conversion module, photoelectric conversion module
It is sequentially connected with data analysis module, wireless transport module.
Further, the vibration sensing source includes pectination grid, protect-ing frame structure and collimation screwed hole；The pectination grid
Fluctuated with extraneous vibration, the protect-ing frame structure is arranged on the outside of pectination grid, the collimation screwed hole is arranged on guarantor
It is used to be connected with collimating apparatus on shield framework.
Further, the photoelectric conversion device includes photo-electric conversion element, amplifying circuit and the filter being sequentially connected in series
Wave circuit.
A kind of method of work of the MOEMS wireless vibration sensors based on pectination grid, including：
1) light intensity signal enters vibration sensing source by collimating apparatus, and the optical signal after being modulated by vibration sensing source leads to
Cross collimater and enter photoelectric conversion device；Light intensity signal is converted to electric signal and is input to Data Management Analysis by photoelectric conversion module
Module is handled；
2) by analyzing the strong and weak alternate number of times of the A/D conversion signals amplitude in special time, the change of light intensity signal is determined
Change frequency f；
3) the frequency f of pectination raster width l, lattice away from numerical value d and light intensity signal in vibration sensing source is combined, calculates described
The distance L that special time internal vibration sensitivity source is passed through；
4) the amplitude a of vibration signal is calculated according to distance L；
Further, the step 3) the middle method for calculating the distance L that the sensitive source of the special time internal vibration is passed through
For：
L=f (l+d)
Wherein, l is pectination raster width, d be lattice away from numerical value, f is the frequency of light intensity signal.
The step 4) in calculate the amplitude a method of vibration signal and be：
L=2*a*t2
Wherein, the distance that L is passed through by the sensitive source of time t internal vibration.
The beneficial effects of the utility model are：
The light intensity signal that miniature is sent in the utility model, after collimater is modulated into vibration sensing source
It is input to photoelectric conversion module and is converted to electric signal.Data analysis module analysis is obtained after the electric signal from photoelectric conversion module
The amplitude and frequency information of external environment vibration signal, then encode vibration signal information and are realized by wireless transport module and shaken
Move being wirelessly transferred for signal.Such a structure design makes it only need with testee effectively to be connect sensor in monitoring
Touch, and detect that the wireless transmission function of signal effectively overcomes the heavy construction structure sensor in monitoring cloth such as tunnel, bridge
Put and the difficult present situation of lead.
Brief description of the drawings
Fig. 1 is the MMOEMS wireless vibration sensor construction schematic diagrames based on pectination grid；
Fig. 2 is the front view in vibration sensing source；
Fig. 3 is photoelectric conversion module circuit theory diagrams；
Fig. 4 (a) is the MMOEMS wireless vibrations transducer calibration experiment time domain waveform based on pectination grid；
Fig. 4 (b) is the MMOEMS wireless vibrations transducer calibration experiment frequency-domain waveform based on pectination grid；
Wherein, 1. miniature, 2. optical fiber pigtails, 3. collimaters, 4. vibration sensing sources, 5. photoelectric conversion modules, 6. numbers
According to analysis module, 7. wireless transport modules, 8. sensor outer housings, 9. collimation screwed holes, 10. protect-ing frame structure, 11. pectination grids.
Embodiment：
The utility model is described further with implementation below in conjunction with the accompanying drawings：
A kind of MOEMS wireless vibrations sensor main based on pectination grid 11 will include sensor outer housing 8, miniature 1,
Transmission Fibers, collimater 3, vibration sensing source 4, photoelectric conversion module 5, data analysis module 6 and wireless transport module 7.
MOEMS wireless vibration sensors are encapsulated in sensor outer housing 8, the highly integrated design of modularization so that sensor
Small volume, overcomes existing fiber vibrating sensor and sensor arrangement and draws in the heavy construction monitoring project such as tunnel, bridge
The difficult present situation of line.
Miniature 1 includes three parts such as power supply unit, luminescence unit and the output optical fibre tail optical fiber 2 being sequentially connected；
Vibration sensing source 4 mainly includes pectination grid 11, protect-ing frame structure 10 and the collimation fluctuated with extraneous vibration
Screwed hole 9；Pectination grid 11 fluctuates with extraneous vibration, and protect-ing frame structure 10 is arranged on the outside of pectination grid 11, collimation
Screwed hole 9, which is arranged in protect-ing frame structure 10, to be used to be connected with collimater 3.
Collimater 3 mainly includes two-dimensional collimator 3 and collimation screwed hole 9.Collimation screwed hole 9 is arranged on the leading portion of collimater 3.
Photoelectric conversion module 5 mainly includes photo-electric conversion element, amplifying circuit and the filter circuit being sequentially connected in series；
Data analysis module 6 mainly includes power supply unit, A/D converting units, clock circuit, the single-chip microcomputer being sequentially connected
MSP430 and communication unit；
Wireless transport module 7 mainly includes power supply unit, wireless module and transmitting antenna.Power supply unit is supplied to wireless module
Electricity, wireless module converts the signal into the reception signal of transmitting antenna, and transmitting antenna launches signal.
The signal analysis basic procedure of the sensor is that miniature 1 sends light intensity signal into optical fiber pigtail 2.Light intensity is believed
Number enter vibration sensing source 4 by collimater 3, the optical signal after vibration sensing source 4 is modulated is entered and photoelectricity by collimater 3
In the connected optical fiber pigtail 2 of modular converter 5.Light intensity signal is converted to electric signal and is input to data analysis by photoelectric conversion module 5
Module 6 is handled.Data analysis module 6 will analyze the amplitude and frequency information of gained vibration signal according to leading to that user requires
Being wirelessly transferred for vibration signal is realized by radio transmission apparatus after news coding protocol.
The collimation screwed hole 9 in two-dimensional collimator 3 and its collimation screwed hole 9 and vibration sensing source 4 be effectively guaranteed by
The transmission of light intensity signal in a fiber after the modulation of vibration sensing source 4.
Amplifying circuit effectively realizes electric signal after the faint optical signal opto-electronic conversion of miniature 1 in photoelectric conversion device
Amplification, it is to avoid A/D conversion elements are because of the weaker and ignored hidden danger of original optical signal in DAF.
Data analysis module 6 is as follows for the processing procedure by optical signal obtained by A/D conversion elements：
1) by analyzing the A/D conversion signals amplitude power alternate frequency within one second, and then the frequency of light intensity signal is determined
Rate information f.
2) optical signal frequency with reference to determined by the width l of pectination grid in vibration sensing source 4 11, lattice away from numerical value d and step 1
F, so that it is determined that the distance that vibration sensing source 4 is passed through within one second, its distance calculation formula is：
L=f (l+d) (1)
3) amplitude of vibration signal is solved by calculating, its calculation formula is：
L=2*a*t2 (2)
Wherein a is the amplitude of vibration signal, and its numerical value is f (l+d)/2.
Data analysis module 6 will be sent to after the frequency and amplitude information coding of analyzing gained vibration signal and be wirelessly transferred mould
Block 7.Wireless transport module 7 realizes that signal is transmitted at a distance by transmitting antenna.
The utility model realizes modulation of the extraneous vibration signal to light intensity signal by vibration sensing source 4, and by after modulation
Signal electric signal be converted to by photoelectric conversion module 5 be sent to data analysis module 6, data analysis module 6 will analyze gained
The long-distance transmissions of signal, effective gram are realized after frequency and the amplitude information coding of vibration signal by wireless transport module 7
Take sensor arrangement and the difficult present situation of lead in the heavy construction monitoring project such as tunnel, bridge.
Vibration characteristics calibration experiment has been carried out to the utility model, in 2Hz-150Hz frequency ranges, vibration detection performance
Well, during 40Hz shown in gained time-frequency curve such as Fig. 4 (a) and Fig. 4 (b).
It is not new to this practicality although above-mentioned embodiment of the present utility model is described with reference to accompanying drawing
The limitation of type protection domain, one of ordinary skill in the art should be understood that on the basis of the technical solution of the utility model, ability
Field technique personnel need not pay the various modifications that creative work can make or deform still in protection model of the present utility model
Within enclosing.
Claims (3)
1. a kind of MOEMS wireless vibration sensors based on pectination grid, it is characterized in that, including：Miniature, Transmission Fibers,
Collimater, vibration sensing source, photoelectric conversion module, data analysis module and wireless transport module；
The miniature is connected by Transmission Fibers with vibration sensing source, is respectively fixed with the both sides in the vibration sensing source
Collimater, the output end in the vibration sensing source is connected by Transmission Fibers with photoelectric conversion module, photoelectric conversion module and number
It is sequentially connected according to analysis module, wireless transport module.
2. a kind of MOEMS wireless vibration sensors based on pectination grid as claimed in claim 1, it is characterized in that, it is described to shake
Dynamic sensitivity source includes pectination grid, protect-ing frame structure and collimation screwed hole；The pectination grid fluctuates with extraneous vibration, institute
The outside that protect-ing frame structure is arranged on pectination grid is stated, the collimation screwed hole, which is arranged in protect-ing frame structure, to be used to connect with collimating apparatus
Connect.
3. a kind of MOEMS wireless vibration sensors based on pectination grid as claimed in claim 1, it is characterized in that, the light
Electric conversion equipment includes photo-electric conversion element, amplifying circuit and the filter circuit being sequentially connected in series.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720057167.0U CN206440379U (en) | 2017-01-18 | 2017-01-18 | MOEMS wireless vibration sensors based on pectination grid |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720057167.0U CN206440379U (en) | 2017-01-18 | 2017-01-18 | MOEMS wireless vibration sensors based on pectination grid |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
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2017
- 2017-01-18 CN CN201720057167.0U patent/CN206440379U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106644038A (en) * | 2017-01-18 | 2017-05-10 | 山东大学 | MOEMS wireless vibration sensor based on comb grid and operation method thereof |
| CN106644038B (en) * | 2017-01-18 | 2023-08-18 | 山东大学 | MOEMS wireless vibration sensor based on comb-shaped grids and working method thereof |
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